基于激光干涉法的谐振式高加速度振动传感器校准技术研究

校准是保证振动传感器测量结果准确和可靠的重要手段.针对传统中频校准装置无法提供高加速度振动激励以及高加速度振动量值无法溯源的问题,开展基于激光干涉法的谐振式高加速度振动传感器校准技术研究.基于谐振原理建立谐振式高加速度振动发生装置,实现高加速度振动发生;建立外差激光干涉法绝对振动校准系统,通过对外差激光干涉信号的直接采...     

用于周界安防的光纤光栅振动传感系统研究

基于光纤光栅传感理论设计了一种应用于周界安防的低频振动传感器.采用商用解调仪OPD4000对传感器的灵敏度进行了测试,在10～100 Hz频率范围内,传感器灵敏度高于1 000 pm/g.基于非平衡迈克尔逊干涉仪相位载波调制(PGC)解调技术搭建了一套光栅传感器解调系统,实现对传感器低频振动信号的高精度实时解调,使得该系统可广泛应用于机场、监狱、油库、核场所等重要区域的周界安防中.     

Interferometric fibre-optic sensor using a short-coherence-length source

A fibre-optic sensor system exploiting the principles of white-light interferometry is demonstrated. A digital feedback servo ensures that theMach-Zehnder interferometric system is maintained at near-zero optical path difference.     

MEMS三维静动态测试系统

采用集成频闪成像、计算机微视觉和显微干涉技术,研制了微机电系统(MEMS)三维静动态测试系统。系统可进行MEMS面内刚体运动、表面形貌、垂向变形和离面运动的测量。对于面内运动测量,提出了基于立方样条插值的亚像素步长相关模板匹配算法,从MEMS视觉图中提取面内位移,匹配精度为0．02pixels。对于离面运动测量,采用Hariharan 5步相移干涉(PSI)算法和去包裹算法,离面运动测量分辨率可达1nm。通过对Si微压力传感器膜和Si微陀螺仪的静动态测试,验证了系统的适用性和可靠性。     

Measuring Vibration of Body with Speckle Interferometry

Speckle interferometry is an efficient method to analyze a vibration.In cetrain conditions,this technique has some outsanding advantage,and need not strict shock-proof condition,compared with the holographic method for measuring vibration,Therefors,it is suitable to anayyze a vibration with a logar amplitude.Real-time interferometry is a rapid and simple method for measuring vibration of a body,gives speckle pattern containing amplitude distribution of body-surface.By means of time-averaged method.the speckle patternis recorded in Fourier transform plane.or vibra-tion lines are seen directly with eyes,so as to analyze efficiently ampitude.phase,and mod-el of a vibration.This paper deduces the intensity distribution function with real-time method,and gives expermental demonstration of vibration body-the vibration lines with different frequencies.     

Simultaneous Long- and Short-Gauge Strain Measurement in Spectral Domain by a Novel Optical Fiber Sensor Unit

A novel fiber-optic sensor unit by combining fiber-optic white-light interferometry and fiber Bragg gratings is proposed for simultaneous long- and short-gauge strain measurements. A new demodulation scheme based on spectral coherence theory for fiber-optic white-light interferometric sensors is proposed. This makes it possible that two quite different types of sensors in one unit can be simultaneously demodulated in the spectral domain. An experimental sensor unit has been built and tested. The results demonstrated that the spectral demodulation of the sensor unit is readily realized and that the sensor scheme is feasible.     

横向剪切干涉中非共光路误差的识别与补偿

由于相移式横向剪切干涉不需要标准参考波面,因此它可以缩小干涉腔长、甚至实现绝对的共光路干涉,从而最大程度上降低了空气扰动和振动的影响,但实验室设计的相移式横向剪切干涉测量装置中的分束棱镜、剪切平板和五棱镜的制造误差仍然造成了发生错位的两波面间产生非共光路误差。通过剪切干涉测量装置中调整误差和非共光路误差的对比分析,提出了非共光路误差的计算方法,并在测试结果中进行非共光路误差的补偿。实验结果发现补偿非共光路误差后的面形误差与ZYGO干涉仪的测量结果非常接近。     

Optical Feedback Height Control System Using Laser Diode Sensor for Near-Field Data Storage Applications

We demonstrated a laser diode position sensor for a near-field height control system. The feedback signal of the laser diode sensor that resulted from self-mixing interferometry was characterized and modeled by a simplified method. Due to the fine spatial resolution of the laser sensor, an active height control system with nanoscale position precision was designed and realized under a spinning disk for near-field applications.     

FBG传感器和电阻应变仪的振动监测特性

将光纤布拉格光栅（FBG）传感器和电阻应变片固定在等强度梁上,研究了两种传感器的振动监测性能,总结比较了其优缺点。通过固定在等强度梁末端的电机来产生振动,测试了FBG 传感器和电阻应变片监测到随时间变化的振动信号,并分析了振动信号经傅里叶变换（FFT）的频谱图。实验结果表明,FBG 传感器和电阻应变片监测到振动信号的时域图基本一致,但是FBG 传感器监测到振动信号经FFT 变换的频谱图出现较明显的二次谐波和三次谐波,电阻应变仪监测到的频谱图出现的谐波较弱。在实验中还观察到,在有电磁干扰情况下,电阻应变仪监测不到振动信号,而FBG 传感器正常工作,不受电磁干扰。     

Module packaging effects on MEMS airbag sensor performance for automobiles

In this paper, the effects of the packaging module housing of MEMS airbag sensor for signal generation is studied. Conventional airbag sensor packaging module for automobiles is composed of the accelerometer MEMS sensor mounted on a printed circuit board, which is assembled inside a plastic housing. And the entire module is mechanically installed by bolts on the automobile frame structure to capture the acceleration from the structure vibration. In this case, the signal path from the frame to the sensor is complex, and the frame vibration is interacted with the module vibration, which may delay and distort the original signal pattern. To remove housing vibration effects, a new sensor packaging on the flexible circuit board was introduced to attach directly on the frame structure surface using adhesive. For the signal characterization, impact tests were performed for the conventional sensor packaging and the directly attached sensor using an aluminum channel and automobile side frame. Numerical analyses were also carried out to understand the vibration effects of the packaging module and the structure. It was found that the vibration behaviors of the frame structure and the module housing, and the module installation location had significant influence on the impact signal generations. The results indicated that the design of the airbag sensor packaging system for proper airbag explosion requires comprehensive engineering considerations.     

A displacement measurement technique using millimeter-wave interferometry

A displacement measurement sensor, capable of sub-millimeter resolution, using millimeter-wave interferometry has been developed. The sensor operates at 37.6 GHz and is realized using both microwave integrated circuits and monolithic microwave integrated circuits. It has been used to accurately measure the displacement of metal plate location and water level. A resolution of only 0.05 mm is achieved. A maximum error of 0.3 mm is also attained without correction for the nonlinearity of the phase-detection processor and agrees well with the theoretical calculation.     

Measurements on a micromachined silicon gyroscope by feedbackinterferometry

Feedback interferometry is a useful tool to characterize micromachined devices. We consider a silicon vibrating gyroscope, in which the angular rotation is transduced into the vibration amplitude of a small suspended mass. Measurements of the mass displacement at submicrometer resolution are reported on a 400×400 μm sensor, using an 800-nm 20-mW laser diode. The resonance curves of the device have been determined for different values of pressure and other parameters, which allows us to tune the resonance frequency and maximize the Q factor. Hysteresis and other nonlinear phenomena on specific samples also have been detected. The proposed method provides a direct inspection tool and represents a practical alternative to the standard electrical measurements     

The lock-in CCD-two-dimensional synchronous detection of light

A new type of CCD image sensor for two-dimensional synchronous detection (“lock-in imager”) is presented. The measurement principle allows each pixel to measure the size of the amplitude modulation, the relative phase and the mean brightness level (background) of an oscillating optical wave field. Design, operation and measurement results are presented. A typical application for this sensor would be in 3-D imaging (range measurement) using heterodyne interferometry     

利用激光干涉技术研究压电换能器的谐振特性

介绍了压电超声换能器的基本结构及振动模态，利用先进的激光多普勒干涉仪对自制换能器的谐振特性以及振动速度和位移分布进行了测量和分析，并与有限元分析的结果进行了对比，实验表明，实验测量模态结果与有限元分析结果基本相符，激光多普干涉技术是一种直观研究压电超声换能器振动的有效手段。通过有限元分析和先进测量手段的结合与对比，对换能器的设计和制作具有指导意义。     

基于激光干涉法测水介质正弦压力的动态校准技术

针对动态压力传感器校准中,压力无法直接准确溯源的问题,一种利用激光干涉法测量水介质折射率的方法用于正弦压力校准。压力腔内充满水介质并产生动态压力,以周期型的正弦压力为例,通过激光干涉测量正弦压力下水介质折射率的改变,得到介质动态压力的大小。为了对正弦压力进行精确测量,建立数学模型并进行实验验证,研制专门的解调系统,通过硬件和软件的配合来实现正弦压力的精确测量。通过静态和动态试验验证了基于激光干涉测量压力的数学模型,激光干涉方法来测量动态压力切实可行,实现动态压力的量值溯源到时间、长度等基本量上。     

振管式结冰传感器设计

为了实现结冰的自动探测,文中给出了一种采用谐振管式结构,精确可靠探测结冰的传感器设计的方法。简要介绍了振动管式冰传感器的工作原理和性能特点。针对环境温度对传感器性能的影响,重点给出了传感器的软硬件设计方法及硬件进行温度补偿的方法。     

光纤Bragg光栅低频振动传感器的特性研究

设计了一种安装于双圆柱弹性环内并由多条弹性薄片条组装成的桶形骨架作为光纤Bragg光栅(FBG)振动传感器基底的传感结构,振动传感器的谐振频率为440Hz,加速度灵敏度约为76.4pm/g,采用相位载波调制式FBG振动传感器解调系统进行解调。实验结果表明,本文传感器经双圆柱弹性环对横向振动约束处理后,其幅频特性在20～300Hz频率范围内呈现出平坦的水平直线,对应于位相角φ=0处的相频特性曲线也呈现出平坦的水平直线,适合于工程技术中20～300Hz的振动信号实时检测。     

一种提高悬臂粱振动参数测量技术的研究

正弦相位调制干涉测量技术是一种高精度光学测量技术,可用于MEMS振动、振动分布、位移等物理量的测量。本文提出一种提高悬臂粱振动参数测量精度的方法,并分析了测量原理。该方法通过反馈控制回路消除了外界干扰和光强调制对测量精度的影响,并以纳米精度对悬臂粱的振动进行了检测,可得到悬臂粱在光激励下发生振动的相关振动特性参数。     

金属环封装低频光纤布拉格光栅振动传感系统研制

研制了一种金属环封装的单柱体芯轴式光纤布拉格光栅(FBG)振动传感器,搭建了基于非平衡迈克耳逊干涉仪相位载波调制(PGC)解调技术的FBG振动传感器解调系统,实现了低频振动信号的高精度实时解调,并分析了各参数对传感器谐振频率和灵敏度等特性的影响。实验结果表明,研制的FBG振动传感器谐振频率为388Hz,在10～200Hz频率范围内,传感器的加速度灵敏度约为81pm/g,且加速度响应平坦,起伏小于1dB,与理论分析结果基本一致。研制的振动传感器可实现200Hz以下低频振动信号的实时检测,解调系统的波长检测精度为1.07×10-3 pm,最小可检测加速度为1.3×10-5 g。     

Active high-frequency vibration rejection in hard disk drives

This paper presents an active vibration rejection (AVR) control technique to reject actuator arm resonance modes using a piezoelectric sensor attached to the actuator arm to detect high-frequency off-track actuator vibration. The voice coil motor (VCM) is used as an actuator, while the piezoelectric sensor is used as a sensor only. A multirate digital implementation is proposed for high-frequency AVR over the sector-induced sampling frequency. The vibration control signal can be synchronized with the slow-state feedback control input such that the two control signals are summed and applied to the VCM. Throughout an application example the proposed AVR scheme, using the VCM as an actuator while the piezoelectric sensor as a sensor, is shown to be very prospective for high-frequency vibration rejection, provided a good vibration sensing scheme is used.