Polymer Surface Treatment by Atmospheric Pressure Low Temperature Surface Discharge Plasma： Its Characteristics and Comparison with Low Pressure Oxygen Plasma Treatment

The polymer treatment with a low-temperature plasma jet generated on the atmospheric pressure surface discharge （SD） plasma is performed. The change of the surface property over time, in comparison with low pressure oxygen （O2） plasma treatment, is examined. As one compares the treatment by atmospheric pressure plasma to that by the low pressure O2 plasma of PS （polystyrene） the treatment effects were almost in complete agreement. However, when the atmospheric pressure plasma was used for PP（polypropylene）, it produced remarkable hydrophilic effects.     

Surface Decontamination of Chemical Agent Surrogates Using an Atmospheric Pressure Air Flow Plasma Jet

An atmospheric pressure dielectric barrier discharge (DBD) plasma jet generator using air flow as the feedstock gas was applied to decontaminate the chemical agent surrogates on the surface of aluminum, stainless steel or iron plate painted with alkyd or PVC. The experimental results of material decontamination show that the residual chemical agent on the material is lower than the permissible value of the National Military Standard of China. In order to test the corrosion effect of the plasma jet on different material surfaces in the decontamination process, corrosion tests for the materials of polymethyl methacrylate, neoprene, polyvinyl chloride (PVC), polyethylene (PE), phenolic resin, iron plate painted with alkyd, stainless steel, aluminum, etc. were carried out, and relevant parameters were examined, including etiolation index, chromatism, loss of gloss, corrosion form, etc. The results show that the plasma jet is slightly corrosive for part of the materials, but their performances are not affected. A portable calculator, computer display, mainboard, circuit board of radiogram, and a hygrometer could work normally after being treated by the plasma jet.     

Sterilization of Staphylococcus Aureus by an Atmospheric Non-Thermal Plasma Jet

An atmospheric non-thermal plasma jet was developed for sterilizing the Staphylococcus aureus (S. aureus). The plasma jet was generated by dielectric barrier discharge (DBD), which was characterized by electrical and optical diagnostics. The survival curves of the bacteria showed that the plasma jet could effectively inactivate 10 6 cells of S. aureus within 120 seconds and the sterilizing efficiency depended critically on the discharge parameter of the applied voltage. It was further confirmed by scanning electron microscopy (SEM) that the cell morphology was seriously damaged by the plasma treatment. The plasma sterilization mechanism of S. aureus was attributed to the active species of OH, N 2 + and O, which were generated abundantly in the plasma jet and characterized by OES. Our findings suggest a convenient and low-cost way for sterilization and inactivation of bacteria.     

Comparison of Sterilizing Effect of Nonequilibrium Atmospheric-Pressure He/O2 and Ar/O2 Plasma Jets

The sterilizing effect of the non-equilibrium atmospheric pressure plasma jet by applying it to the Bacillus subtilis spores is invesigated. A stable glow discharge in argon or helium gas fed with active gas （oxygen）, was generated in the coaxial cylindrical reactor powered by the radio-frequency power supply at atmospheric pressure. The experimental results indicated that the efficiency of killing spores by making use of an Ar/O2 plasma jet was much better than with a He/O2 plasma jet. The decimal reduction value of Ar/O2 and He/O2 plasma jets under the same experimental conditions was 4.5 seconds and 125 seconds, respectively. It was found that there exists an optimum oxygen concentration for a certain input power, at which the sterilization efficiency reaches a maximum value. It is believed that the oxygen radicals are generated most efficiently under this optimum condition.     

Observation of the Emission Spectra of an Atmospheric Pressure Radio-frequency Plasma Jet

An atmospheric pressure plasma jet （APPJ） using radio-frequency （13.56 MHz） power has been developed to produce homogeneous glow discharge at low temperature. With optical emission spectroscopy, we observed the excited species （atomic helium, atomic oxygen and metastable oxygen） generated in this APPJ and their dependence on gas composition ratio and RF power. O and O2（b1∑g^＋） are found in the effluent outside the jet by measuring the emission spectra of effluent perpendicular to the jet. An interesting phenomenon is found that there is an abnormal increase of O emission intensity （777.4 nm） between 10 mm and 40 mm away from the nozzle. This observation result is very helpful in practical operation.     

Study on an Atmospheric Pressure Plasma Jet and its Application in Etching Photo-Resistant Materials

An atmospheric pressure radio-frequency plasma jet that can eject cold plasma has been developed. In this paper, the configuration of this type of plasma jet is illustrated and its discharge characteristics curves are studied with a current and a voltage probe. A thermal couple is used to measure the temperature distribution along the axis of the jet stream. The temperature distribution curve is generated for the He/O2 jet stream at the discharge power of 150 W. This jet can etch the photo-resistant material at an average rate of 100 nm/min on the surface of silicon wafers at a right angle.     

Characterization of Crystalline Nanoparticles/Nanorods Synthesized by Atmospheric Plasma Enhanced Chemical Vapor Deposition of Perfluorohexane

A mass of nanoparticles/nanorods were formed on a simultaneously deposited gran- ular film by plasma enhanced chemical vapor deposition （PECVD） of perfluorohexane at atmo- spheric pressure without any catalysts or templates. Scanning electron microscopy （SEM） and X-ray photoelectron spectroscopy （XPS） were used to characterize the morphology and the chem- ical compositions of nanoparticles. The average size of particles is about 100 nm and the length of synthesized nanorods is between 1 μm and 2.5/tm. The analyses of transmission electron microscopy （TEM）, high-resolution transmission electron microscopy （HRTEM）, selected area electron diffraction（SAED） and X-ray diffraction （XRD） reveals that the nanoparticles and nanorods are crystalline.     

On the green aurora emission of Ar atmospheric pressure plasma

The Ar atmospheric pressure plasma was found to be an excellent laboratorial source for green aurora emission. However, the characteristic and production mechanism of the green aurora emission of the Ar atmospheric pressure plasma are still not clear. In this work, an Ar plasma in a long glass tube which emits intense green aurora light is investigated. With the long glass tube, it can be concluded that the green aurora emission in the Ar plasma is not owing to the mixture of Ar plasma plume with the surrounding air. It is also found that the green aurora emission often appeared beyond the active electrode when the active electrode is placed at the downstream of the gas flow. The green emission disappears when the traces amount of O₂ or N₂ (about 0.05%–0.07%) is added to Ar. This is because the O₂ molecules deactivate the upper state O(1S), which results in the decrease of the green emission. On the other hand, when N₂ is added, Ar metastable atoms are quenched by N₂, which results in the decrease of O atoms and eventually leads to the decrease of the green emission intensity. The intensity of the green aurora emission increases when the driving voltage frequency increases from 1 to 10 kHz. More importantly, it is found that the green aurora emission is not affected when a grounded stainless steel needle is in contact with the plasma plume. Thus, the green emission is not driven electrically. All these findings are helpful for the understanding of the physics and its applications of atmospheric pressure plasma jet in space physics, laser physics and other application areas.     

Surface Activation of Plane and Curved Automotive Polymer Surfaces by Using a Fittable Multi-Pin DBD Plasma Source

In this work, surface activation of automotive polymers using atmospheric pressure plasmas was investigated. The aim was to increase the polar fraction of the surface energy of both plane and convex polymer devices with a radius in the range of 30 mm. For this purpose, a fittable low temperature atmospheric pressure plasma source based on capacitively coupled multi-pin electrodes was set up and applied. Each single electrode generates a treatment spot of approximately 2 cm2 with a tunable power density of up to 1.4 W/cm2. The surface energy was evaluated by contact angle measurements. After treatment at a low energy density of 1.01 J/cm2, the polar fraction of the surface energy of the investigated polymers was increased by a factor of 3.3 to 132, depending on the polymer materials. It was shown that by applying the presented fittable plasma source, this effect is independent of the surface radius of the polymer sample.     

Atmospheric Pressure Plasma Jet in Ar and O2/Ar Mixtures： Properties and High Performance for Surface Cleaning＊

An atmospheric pressure plasma jet generated in Ar and O2/Ar mixtures has been investigated by specially designed equipment with double power electrodes at 20~32 kHz, and their effects on the cleaning of surfaces have been studied. Properties of the jet discharge are studied by electrical diagnostics, including the waveform of discharge voltage, discharge current and the Q-V Lissajous figures. The optical emission spectroscopy is used to measure the plasma parameters, such as the excitation temperature and the gas temperature. It is found that the consumed power and the excitation temperature increase with increase of the discharge frequency. On the other hand, at the same discharge frequency, these parameters in O2/Ar mixture plasma are found to be much larger. The effect on surface cleaning is studied from the changes in the contact angle. For Ar plasma jet, the contact angle decreases with increase of the discharge frequency. For O2/Ar mixture plasma jet, the contact angle decreases with increase of discharge frequency up to 26 kHz, however, further increase of discharge frequency does not show further decrease in the contact angle. At the same discharge frequency, the contact angle after O2/Ar mixture plasma cleaning is found to be much lower compared to the case of pure Ar. From the results of quadrupole mass-spectrum analysis, we can identify more fragment molecules of CO and H2O in the emitted gases after O2/Ar plasma jet treatment compared with Ar plasma jet treatment, which are produced by the decomposition of surface organic contaminants during the cleaning process.     

The Solubility of Natural Cellulose After DBD Plasma Treatment

Natural cellulose was treated by an atmospheidc DBD plasma. The solubility of cellulose in a diluted alkaline solution after the plasma treatment was investigated. The properties were characterized by X-ray photoelectron spectroscopy （XPS）, Fourier-transform infrared spectroscopy （FTIR） and scanning electron microscopy （SEM）. The results indicated that the surface of cellulose treated by the argon DBD plasma was significantly etched, and the relevant force of hydrogen bonding was decreased. This might be the essential reason for the solubility improvement of natural cellulose in the diluted alkaline solution. Through a comparison of two discharge modes, the atmospheric DBD plasma gun and the parallel plate capacitively coupled DBD plasma, it was found that the atmospheric DBD plasma gun was more effective in fragmentizing the cellulose due to its production of a high energy plasma based on its special structure.     

Optical Spectroscopic Investigation of Ar/CH_3OH and Ar/N_2/CH_3OH Atmospheric Pressure Plasma Jets

Ar/CH3OH and Ar/N2/CH3OH plasma jets were generated at atmospheric pressure by dual-frequency excitations. Two different cases were studied with focus laid on the generation of CN radicals. In one case Ar gas passed through a bubbler with saturated methanol steam but without addition of N2 （Ar/CH3OH plasma）. In the other case N2 passed through the bubbler with saturated methanol steam （Ar/N2/CH3OH plasma）. The optical emission lines of CN radicals have been observed in these two cases of plasma discharges. The addition of N2 can significantly increase the optical emission intensity of CN bands.     

Plasma skincare device based on floating electrode dielectric barrier discharge

A portable skincare plasma-device with a rechargeable battery is presented here. The device comprises two pads made of thin polyimide film as the dielectric layer, namely, the dielectric barrier discharge pad(DBD-pad) for skin-touch and a capacitive ground-pad(G-pad) for hand holding. High AC voltage of approximately 1 kV with frequency of 40 kHz is induced in the DBD-pad that contacts the skin, which serves as the floating electrode, while low voltage is induced on the G-pad. Considering the requirement for impedance matching between the DBDpad capacitance and the inverter along with the need for low skin current less than approximately 5 mA for electrical safety, the electrode area of the DBD-pad is minimized to be smaller than that of the G-pad.     

Cleaning of nitrogen-containing carbon contamination by atmospheric pressure plasma jet

Atmospheric pressure plasma jet (APPJ) was used to clean nitrogen-containing carbon films (C–N) fabricated by plasma-assisted chemical vapor deposition method employing the plasma surface interaction linear device at Sichuan University (SCU-PSI). The properties of the contaminated films on the surface of pristine and He-plasma pre-irradiated tungsten matrix, such as morphology, crystalline structure, element composition and chemical structure were characterized by scanning electron microscopy, grazing incidence x-ray diffraction and x-ray photoelectron spectroscopy. The experimental results revealed that the removal of C–N film with a thickness of tens of microns can be realized through APPJ cleaning regardless of the morphology of the substrates. Similar removal rates of 16.82 and 13.78 μm min−1 were obtained for C–N films deposited on a smooth pristine W surface and rough fuzz-covered W surface, respectively. This is a remarkable improvement in comparison to the traditional cleaning method. However, slight surface oxidation was found after APPJ cleaning, but the degree of oxidation was acceptable with an oxidation depth increase of only 3.15 nm. Optical emission spectroscopy analysis and mass spectrometry analysis showed that C–N contamination was mainly removed through chemical reaction with reactive oxygen species during APPJ treatment using air as the working gas. These results make APPJ cleaning a potentially effective method for the rapid removal of C–N films from the wall surfaces of fusion devices.     

Effect of insulating oil covering electrodes on the characteristics of a dielectric barrier discharge

In this study, the effects of the fluid cooling and electric field line deformation were investigatedin a dielectric barrier discharge (DBD) plasma source. The DBD plasma jet is improved bycovering the ground electrode and a power electrode with insulating oil. We obtained positiveresults as insulating oil prevents arc formation, while it improved the supplied power and plasmajet length, and increased radical production. Radical production of this nonthermal plasma jet isstudied with polyvinyl alcohol–potassium iodide liquid.     

Influence of Ionization Degrees on the Evolutions of Charged Particles in Atmospheric Plasma at Low Altitude

A zero-dimensional model which includes 56 species of reactants and 427 reactions is used to study the behavior of charged particles in atmospheric plasmas with different ionization degrees at low altitude （near 0 km）. The constant coefficient nonlinear equations are solved by using the Quasi-steady-state approximation method. The electron lifetimes are obtained for afterglow plasma with different initial values, and the temporal evolutions of the main charged species are presented, which are dominant in reaction processes. The results show that the electron number density decays quickly. The lifetimes of electrons are shortened by about two orders with increasing ionization degree. Electrons then attach to neutral particles and produce negative ions. When the initial electron densities are in the range of 10l~ ~ 1014 cm-3, the negative ions have sufficiently high densities and long lifetimes for air purification, disinfection and sterilization. Electrons, O（2,-）, O（4,-） CO（4,-） and CO（3,-） are the dominant negative species when the initial electron density neo ≤ 1013 cm^（-3）, and only electrons and CO3 are left when neo 〉 1015 cm^（-3）. N（＋,2）, N＋ and O（＋,2） are dominant in the positive charges for any ionization degree. Other positive species, such as 0（＋,4）, N（＋,3）, NO（＋,2）, NO（＋,2）, Ar（＋,2） and H3O＋. H2O, are dominant only for a certain ionization degree and in a certain period.     

Microwave Plasma Chemical Vapor Deposition of Diamond Films on Silicon From Ethanol and Hydrogen

Diamond films with very smooth surface and good optical quality have been deposited onto silicon substrate using microwave plasma chemical vapor deposition(MPCVD)from a gas mixture of ethanol and hydrogen at a low substrate temperature of 450℃.The effects of the substrate temperature on the diamond nucleation and the morphology of the diamond film have been investigated and observed with scanning electron microscopy(SEM).The microstructure and the phase of the film have been characterized using Raman spectroscopy and X-ray diffraction(XRD).The diamond nucleation density significantly decreases with the increasing of the substrate temperature.There are only sparse nuclei when the substrate temperature is higher than 800℃ although the ethanol concentration in hydrogen is very high.That the characteristic diamond peak in the Raman spectrum of a diamond film prepared at a low substrate temperature of 450℃ extends into broadban indicates that the film is of nanophase.No graphite peak appeared in the XRD pattern confirms that the film is mainly composed of SP^3 carbon.The diamond peak in the XRD pattern also broadens due to the nanocrystalline of the film.     

Experiment and Analysis on the Treatment of Gaseous Benzene Using Pulsed Corona Discharge Plasma

An experiment and analysis on removal of gaseous benzene by pulse corona inducedplasma is presented in this article. Important parameters effecting removal efficiency have been investigated, such as pulse peak voltage, pulse frequency, gas inlet concentration, gas flow rate and reactor temperature. The result shows that the removal efficiency increases with the increase in pulse peak voltage, pulse frequency and reactor temperature, but decreases in the rise of gas inlet concentration and gas flow rate. On the condition of Vp = 36 kV, f = 80 Hz, C = 1440 mg/m^3 and Q = 640 ml/min, the largest removal efficiency is 98%. Finally, the reacted products are qualitatively analysed and the reaction processes are deduced in combination with plasma-chemistry theory.     

Surface Treatment of Polyethylene Terephthalate Film Using Atmospheric Pressure Glow Discharge in Air

Non-thermal plasmas under atmospheric pressure are of great interest in polymer surface processing because of their convenience, effectiveness and low cost. In this paper, the treatment of Polyethylene terephthalate (PET) film surface for improving hydrophilicity using the non-thermal plasma generated by atmospheric pressure glow discharge (APGD) in air is conducted. The discharge characteristics of APGD are shown by measurement of their electrical discharge parameters and observation of light-emission phenomena, and the surface properties of PET before and after the APGD treatment are studied using contact angle measurement, x-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM). It is found that the APGD is homogeneous and stable in the whole gas gap, which differs from the commonly filamentary dielectric barrier discharge (DBD). A short time (several seconds) APGD treatment can modify the surface characteristics of PET film markedly and uniformly. After 10 s APGD treatment, the