一种RF MEM电感及其LC低通滤波器的模拟和设计

模拟并设计了一种基于表面微机械加工的平面MEM电感,提出了它的等效电路模型并给出模型中参数的提取方法。由模拟结果验证了该等效电路具有较高的精度,误差在8%以内。设计的一个3.6nH的平面MEM电感的品质因数超过20,自谐振频率超过15GHz。由平面MEM电感构成的5阶LC低通滤波器的-3dB带宽为3.7GHz,0~3GHz内的插入损耗低于1dB。     

基于双层平面螺旋电感的无线柔性压力传感器结构设计

新型柔性传感器在电子皮肤、智能纺织、柔性机器人等领域得到了广泛的研究。目前多数传感器需要连接刚性的采集电路,这限制了设备柔软性、舒适性和轻盈度的提升。提出了一种基于双层平面螺旋电感的柔性无线无源压力传感器。该传感包含三层柔性层:双层平面螺旋电感(天线层)、高磁导率铁氧体膜和弹性织物层。其中,双层平面螺旋电感层包括两个旋转方向相反的平面线圈,形成具有大电感量、大电容量的LC谐振器。外界压力载荷改变传感器的谐振频率,进而被外界接收线圈无线检测。通过研究四种双层螺旋电感天线层的结构设计,传感器的灵敏度最大可达到0.11 MHz/k Pa,检测距离达到18 mm。这种基于双层平面螺旋电感的柔性无线无源压力传感器打破了有线电气连接的限制,可在下一代医疗系统、智能机器人等领域中发挥巨大的应用潜能。     

微型ICP激发源微电路组件的参数设计

本文简要介绍了一种采用微结构平面螺旋线圈的新的ICP(电感耦合等离子体)光谱激发源.作者设计加工出的基于PCB(印刷电路板)镀金工艺的微型ICP激发源在13.56MHz下成功启燃,并给出了ICP火炬照片.详细介绍了作者研制的微型ICP激发源的平面螺旋电感和交指电容的参数设计方法,给出了设计版图和实物照片,微结构线条宽度和间隙在数百微米量级.展望了平面螺旋电感和交指电容在微型ICP激发源的中的应用前景.     

基于FPGA的平面螺旋电感式微位移传感器系统

基于平面螺旋电感和现场可编程门阵列（ FPGA）技术,系统设计了一种以频率为输出的电感式微位移传感器,实现了电感式传感器的数字化输出与检测。系统主要由位移/电感转换模块、电感检测电路、差频模块、FPGA四部分组成,并在FPGA系统中搭建NIOSⅡ软核,对采集所得数据进行处理。实验证明：系统具有灵敏度高,温度稳定性好等特点,其测量范围为0～15 mm,在0～6 mm 范围内,最大误差为0.03 mm,分辨率达到10μm。     

基于等效铁芯电感的磁通门HSPICE分析模型

提出了一种基于随电流变化的铁芯电感的磁通门HSPICE（High Simulation Program with IC Emphasis）模型,该磁通门模型铁芯的磁滞回线使用反正切函数来描述,其激励与测量线圈等效为一种随电流变化的电感电路模型。本文给出了全电路元件的磁通门模型的参数及提取方法,此模型可以在任意形状的电压激励波形下仿真,与已有的磁通门模型相比,具有仿真精度高、需要参数少且计算容易和可以方便进行输出信号处理的特点。实验和仿真结果对比表明,双铁芯磁通门HSPICE模型仿真的输入电流和输出电压的幅值分别为146 mA和1.03 V,与实际测试的146.6 mA和1.177 V相比,输入电流有0.6 mA的误差,输出电压有0.147 V的误差。     

微小电感平面线圈的信号检测技术研究

平面线圈是一种被广泛应用的非接触测量探头,但线圈的电感值微小,一般只有1 μH,给信号提取和检测带来了困难.本文应用微分弛张振荡电路,对微小电感线圈的信号检测技术开展了研究.理论分析和实验结果表明,在合适的阻抗参数条件下,可以有效地提取平面线圈的微小电感变化信号,并保持较高的灵敏度和良好的稳定性.     

大功率IGBT器件的参数化建模及分析

在大功率IGBT模块换流回路中,由于回路杂散电感和di/dt的共同作用,IGBT在开通和关断过程中会承受较大的电压和电流应力,增大了系统损耗和电磁干扰,降低了系统可靠性,严重影响系统的安全稳定运行。传统的分析方法由于缺乏准确且通用的IGBT模型,针对不同的换流回路和方案,需通过不断地试验测试和分析来进行优化设计,不仅成本较高、耗时,而且效率低。文章结合换流回路中杂散电感对IGBT开关特性影响的分析,利用伏安法实现对杂散电感参数的提取;根据IGBT数据手册,采用数据导入和曲线拟合的方式,实现IGBT参数化建模,并通过所建立的参数化模型进行仿真对比,验证了杂散电感参数提取方法的有效性和所建立参数化模型的准确性。最后,对样机试验和仿真测试进行对比分析,结果显示,二者电压基本吻合,下管电压尖峰实验值与仿真值的误差仅4 V,具有很好的一致性,这对复杂电路的仿真分析和后续实验数据预测与方法指导具有很大的帮助,在大功率IGBT模块的故障复现、失效分析和优化设计等方面具有十分重要的意义。     

盾构机密封舱压力控制模型参数辨识

为了解决盾构机密封舱压力控制模型参数辨识问题,提出了基于神经网络的盾构机密封舱压力控制模型参数辨识方法。根据系统输出（密封舱压力）与系统输入（螺旋输送机转速）之间的关系,建立了串并联神经网络辨识器。数值仿真结果表明,该辨识方法对于观测噪声具有良好的鲁棒性。实验台实验结果验证了所提出的模型参数辨识方法的有效性,模型预测的密封舱压力能够较精确拟合密封舱压力观测值。     

基于隐马尔可夫模型的语音激活检测算法

针对现有基于隐马尔可夫模型（HMM）的语音激活检测（VAD）算法对噪声的跟踪性能不佳的问题,提出采用Baum-Welch算法对具有不同特性的噪声进行训练,并生成相应噪声模型,建立噪声库的方法。在语音激活检测时,根据待测语音背景噪声的不同,动态地匹配噪声库中的噪声模型;同时,为了适应语音信号的实时处理,降低了语音参数提取的复杂度,并对判决阈值提出改进,以保证语音信号帧间的相关性。在不同噪声环境下对改进算法进行性能测试并与自适应多速率编码（AMR）标准、国际电信联盟电信标准分局（ITU-T）的G.729B标准比较,测试结果表明,改进算法在实时语音信号处理中能够有效提高检测的准确率及噪声跟踪能力。     

基于平面约束的RGB-D SLAM系统

针对现有室内环境存在多个平面特征的特点,提出了一种使用平面特征优化相机位姿和建图的实时室内RGB-D 同时定位与地图构建（SLAM）系统。系统在前端采用迭代最近点（ICP）算法和直接法联合估计相机位姿,在后端提取相机关键帧平面特征并建立多种基于平面特征的约束关系,优化相机关键帧的位姿和平面特征参数,同时增量式地构建环境的平面结构模型。在多个公开数据序列上的实验结果表明,在平面信息丰富的环境中,平面特征约束能够减小位姿估计的累积误差,系统能够构建场景平面模型并只消耗少量的存储空间,在真实环境下的实验结果验证了系统在室内增强现实领域具有可行性和应用价值。     

Analysis of modeling approaches for on‐chip spiral inductors

The recent modeling approaches for on‐chip spiral inductors are extensively investigated and compared. The key features of the models are detailedly analyzed. By actual implementation of each model's parameter extraction procedure, the pros and cons of equivalent circuit topologies, parameter extraction techniques, and fitting capacity of models are provided, including 1‐π, 2‐π, and T‐models. 1‐π models and T‐models are proved to be adequate for modeling distributed effect. 2‐π models are more convenient in fitting asymmetric inductors. The transfer function of the spiral inductor is employed in the singularity analysis of the models. The proposals are verified by measured the S‐parameters of 10 fabricated CMOS spiral inductors up to 40 GHz. © 2012 Wiley Periodicals, Inc. Int J RF and Microwave CAE, 2012.     

Broadband scalable model for Si‐RF on‐chip spiral inductors with substrate eddy current effect

A new broadband scalable compact model for on‐chip spiral inductor is presented. It includes a substrate network and a high resistive component to accurately capture the substrate eddy current effect, skin and proximity effects at high frequencies. The proposed model shows a good match with the measurement results over a frequency range of up to 20 GHz. An automated parameter extraction and optimization procedure has been developed using equivalent circuit analysis and particle swarm optimization. We achieved good scalability for all model parameters with respect to spiral layout geometry. © 2007 Wiley Periodicals, Inc. Int J RF and Microwave CAE, 2007.     

硅基螺旋电感模型及Q值优化

分析了硅基螺旋电感的集总π模型,讨论了高频下衬底对Q值的影响,并用Matlab仿真了Q值随几何尺寸改变而变化的情况。对于0.35μm CMOS工艺,铜制电感的Q值比同等条件下铝制电感高38.5%,另外增加连线金属的厚度可以有效提高Q值。     

Spiral inductors on silicon—status and trends (invited article)

The status of the integration, the modeling, and the layout of spiral inductors on silicon substrates for rf circuits are reviewed. A summary of the current research activity in this field is presented. The possible inductor implementations are categorized either as conservative, following the silicon main stream, or as innovative approaches. It is concluded that the spiral inductor on silicon is a feasible device and finds extensive use in the design of future silicon-based rf circuits. © 1998 John Wiley & Sons, Inc. Int J RF and Microwave CAE 8: 422–432, 1998.     

Design and fabrication of the suspended high-Q spiral inductors with X-beams

In this paper, deep sub-micron CMOS process compatible high Q on-chip spiral inductors with air gap structure were designed and fabricated. In the design the electromagnetic solver, SONNET, and the finite element program, ANSYS, were used for electrical-characteristics and maximum mechanical strength, respectively. The copper wires were capped with electroless Ni plating to prevent the copper from oxidizing. A Si₃N₄/SiO₂ X-beam was designed to increase the mechanical strength of the inductor in air gap. The enhancement of maximum mechanical strength of a spiral inductor with X-beams is more than 4,500 times. Among these structures, the measured maximum quality factor (Q) of the suspending inductor and frequency at maximum Q are improved from 5.2 and 1.6 GHz of conventional spiral inductor to 7.3 and 2.1 GHz, respectively.     

Modeling and optimization of a solenoidal integrated inductor for RF ICs

A solenoidal structure for implementation of on‐chip inductors is presented. An electromagnetic simulator is used to simulate several different‐size inductors for up to 20 GHz. Additionally, artificial neural network models are developed for different inductor topologies to speed up inductors optimization process. Finally, it is demonstrated that the solenoidal inductor exhibits a better overall performance in comparison to the conventional multilayer spiral inductors demonstrating its potential for RF ICs. © 2010 Wiley Periodicals, Inc. Int J RF and Microwave CAE, 2010.     

A wireless powered fully integrated SU-8-based implantable LC transponder

In this work, we report a SU-8-based fully integrated miniaturized inductively powered LC transponder for generic implantable wireless sensor applications. It consists of a 1 mm diameter octagonal spiral inductor and a micro fabricated MIM (metal insulator metal) capacitor. Polyvinylidene Fluoride–Trifluoroethylene (PVDF–TrFE) copolymer is applied as a dielectric material for the capacitor fabrication due to its high dielectric constant. The 1 mm diameter, 154 nH spiral inductor is built on top of the capacitor. The capacitor and the inductor are in parallel connection through SU-8 via holes. SU-8 is used as a packaging material due to its biocompatibility, and also it serves as an insulator between the capacitor and the spiral inductor. The operating frequencies of the LC tanks are decided by the sizes of the capacitors (45 × 45, 55 × 55, 95 × 95 and 100 × 100 μm), and measured operating frequency range is from 385 to 485 MHz. The fabricated LC tanks are held to the power transmitting coil coaxially at distances of 2, 5, 7 and 10 mm, and rectified induced voltage at the LC tank is 8.5 V with 29 dBm input power at a 5 mm distance.     

电磁谐振式微泵电感线圈组件的研究

提出了一种电磁谐振式微泵电感线圈组件的新制造方法,该方法在硅杯表面采用浓硼扩散区与镀金膜形成的欧姆接触电极作为内引线.我们设计了硅基电感的结构和相关的工艺流程,再利用Ansys有限元软件中的电磁分析模块模拟了电流与磁感应强度的关系、衬底涡流分布等,为平面电感的理论与实验的进一步比较分析提供了参考依据.我们在硅杯背面采用激光打孔得到了膜厚约为5 μm的硅膜,从而可以使衬底中的涡流大幅度减少、电感的Q值得到很大提高.本文提出的新制造方法采用了绝缘性能比SiO2好的Al2O3薄膜作为电感线圈与衬底之间的绝缘层.实验结果表明,本文设计的平面螺旋电感具有制造工艺简单、与IC工艺相兼容的优点,有广泛的应用前景.     

Design and analysis of a novel MEMS spiral inductor with high quality factor

Microsystem Technologies - In this paper a novel spiral inductor with high quality (Q)-factor is presented. Non-uniform current density distribution, especially in inner turn, increases the...     

新型ZCS-PWM Buck变换器的磁集成研究

研究新型ZCS-PWM Buck变换器,通过电感和电容的谐振使流过功率开关管的电流呈正弦波形,为开关管提供了零电流开关条件。提出将分立的谐振电感和滤波电感集成在同一个平面磁芯上。理论分析和仿真结果证明了该方案的正确性和可行性。