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1.
The paper will present the state-of-art in the process, structure and properties of nanostructured multifunctional tribological coatings used in different industrial applications that require high hardness, toughness, wear resistance and thermal stability. The optimization of these coating systems by means of tailoring the structure (graded, superlattice and nanocomposite systems), composition optimization, and energetic ion bombardment from substrate bias voltage control to provide improved mechanical and tribological properties will be assessed for a range of coating systems, including nanocrystalline graded Cr1−xAlxN coatings, superlattice CrN/AlN coatings and nanocomposite Cr–B–N and TiC/a-C coatings. The results showed that the superlattice CrN/AlN coating exhibited a super hardness of 45 GPa when the bilayer period Λ was about 3.0 nm. Improved toughness and wear resistance have been achieved in the CrN/AlN multilayer and graded CrAlN coatings as compared to the homogeneous CrAlN coating. For the TiC/a-C coatings, increasing the substrate bias increased the hardness of TiC/a-C coatings up to 34 GPa (at −150 V) but also led to a decrease in the coating toughness and wear resistance. The TiC/a-C coating deposited at a −50 V bias voltage exhibited an optimized high hardness of 28 GPa, a low coefficient of friction of 0.19 and a wear rate of 2.37 × 10−7 mm3 N−1 m−1. The Cr–B–N coating system consists of nanocrystalline CrB2 embedded in an amorphous BN phase when the N content is low. With an increase in the N content, a decrease in the CrB2 phase and an increase in the amorphous BN phase were identified. The resulting structure changes led to both decreases in the hardness and wear resistance of Cr–B–N coatings.  相似文献   

2.
TiC(Ag)/a-C:H nanocomposite coatings with various Ag concentrations were fabricated on Si p(100) substrates. The composition and structure of as-deposited nanocomposite coatings were systemically investigated, and the friction and wear behaviors were also evaluated under the ambient, high temperature and high vacuum, respectively. Results show that the TiC nanocrystallites were formed in the amorphous hydrogenated carbon matrix near the substrate. The co-dopant Ag possessed nanocrystalline structure in the as-fabricated coatings whilst it formed Ag clusters (10–50 nm) on the surface. Furthermore, the introduction of Ag caused a significant reduction in the residual compressive stress without considerable decrease of the hardness and improved the adhesive strength of nanocomposite coatings. Tested as-deposited and after annealed at 500 °C coatings, the TiC(Ag)/a-C:H coatings showed a reduction of friction coefficients and wear rates with increment of Ag concentration. Under high vacuum condition, the TiC(Ag)/a-C:H coatings presented superlow friction behavior where the friction coefficient was reduced from 0.01 to 0.005 and lifetime increased from 0 to 1500 cycles. The significant improvement in tribological properties was mainly attributed to the low shear strength of Ag clusters on the surface as well as Ag diffusion to surface and wear track of coatings. The superior friction and wear behaviors of TiC(Ag)/a-C:H coatings make them good candidates as solid lubrication materials in space and aircraft applications.  相似文献   

3.
In this study, a-C:Ti x% coatings with various levels of Ti addition are deposited on cemented tungsten carbide (WC-Co) substrates using a medium-frequency twin magnetron sputtering and unbalanced magnetron sputtering system. This study investigates the tribological properties of the coatings by conducting wear tests against an AISI 1045 steel counterbody under a cylinder-on-disk line contact wear mode using an oscillating friction and wear tester. Additionally, turning tests and high-speed through-hole drilling tests are performed on AISI 1045 steel counterbodies and PCB workpieces, respectively, to investigate the machining performance of coated turning cutters and microdrills. The a-C:Ti x% coatings not only have improved tribological properties but also demonstrate enhanced machining performance. For sliding against the AISI 1045 steel counterbody under loads of 10 and 100 N, the results show that the optimal friction and wear resistance properties are provided by the a-C:Ti13% and a-C:Ti3% coatings, respectively. Meanwhile, the a-C:Ti20% and a-C:Ti51% coatings yield the optimal turning and drilling performance, respectively.  相似文献   

4.
The aim of this work was a comparative investigation of the structure and properties of Al- and Cr-doped TiSiCN coatings deposited by magnetron sputtering of composite TiAlSiCN and TiCrSiCN targets produced by self-propagating high-temperature synthesis method. Based on X-ray diffraction, scanning and transmission electron microscopy, X-ray photoelectron spectroscopy, and Raman spectroscopy data, the Al- and Cr-doped TiSiCN coatings possessed nanocomposite structures (Ti,Al)(C,N)/a-(Si,C) and (Ti,Cr)(C,N)/a-SiCxNy/a-C with cubic crystallites embedded in an amorphous matrix. To evaluate the thermal stability and oxidation resistance, the coatings were annealed either in vacuum at 1000, 1100, 1200, and 1300 °C or in air at 1000 °C for 1 h. The results obtained show that the hardness of the Al-doped TiSiCN coatings increased from 41 to 46 GPa, reaching maximum at 1000 °C, and then slightly decreased to 38 GPa at 1300 °C. The Cr-doped TiSiCN coatings demonstrated high thermal stability up to 1100 °C with hardness above 34 GPa. Although both Al- and Cr-doped TiSiCN coatings possessed improved oxidation resistance up to 1000 °C, the TiAlSiCN coatings were more oxidation resistant than their TiCrSiCN counterparts. The TiCrSiCN coatings showed better tribological characteristics both at 25 and 700 °C and superior cutting performance compared with the TiAlSiCN coatings.  相似文献   

5.
The tribological behaviour of nanocomposite coatings made of nanocrystalline metal carbides and amorphous carbon (a-C) prepared by PVD/CVD techniques is found to be very dependant on the film deposition technique, synthesis conditions and testing parameters. Focusing in the TiC/amorphous carbon-based nanostructured system, this paper is devoted to an assessment of the factors governing the tribological performance of this family of nanocomposites using a series of TiC/a-C films prepared by magnetron sputtering technique varying the power applied to each target (titanium or graphite) as model system to establish correlations between film microstructure and chemical compositions and tribological properties measured by a pin-on-disk tribometer. The film microstructure goes from a quasi-polycrystalline TiC to a nanocomposite formed by nanocrystals of TiC embedded in an amorphous carbon matrix as observed by transmission electron microscopy (TEM). The nanocrystalline/amorphous ratio appears to be the key-parameter to control the tribological properties and its quantification has been done by electron energy-loss spectroscopy (EELS). A significant change in the tribological performance is observed for nanocomposites with amorphous carbon phase contents above 60–65%. The friction coefficient decreases from 0.3 to 0.1 and the film wear rates by a factor of 10. Examination of the wear scars on ball and film surfaces by laser micro-Raman spectroscopy has allowed to determine the presence of metallic oxides and carbonaceous compounds responsible of the observed friction behaviour. The revision of the literature results in view of the conclusions obtained enabled to explain their apparent dispersion in the tribological performance.  相似文献   

6.
A series of tungsten-gradually doped diamond-like carbon (DLC) films with functionally graded interlayer were prepared using a hybrid technique of vacuum cathodic arc/magnetron sputtering/ion beam deposition. With ‘compositionally graded coating’ concept, the deposition of wear-resistant carbon-based films with excellent adhesion to metallic substrate was realized. In the films, a functionally graded interlayer with layer sequence of Cr/CrN/CrNC/CrC/WC was first deposited onto the substrate, and then, a DLC layer doped with gradually decreasing content of W was coated on. The W concentration gradient along depth of the film was tailored by adjusting the W target current and deposition time. The characterized results indicate that the microstructural, mechanical and tribological properties of these films show a significant dependence on the W concentration gradient. A high fraction of W atom in carbon matrix can promote the formation of sp2 sites and WC1 − x nanoparticles. Applying this coating concept, strongly adherent carbon films with critical load exceeding 100 N in scratch test were obtained, and no fractures or delaminations were observed at the end of the scratched trace. The hardness was found to vary from 13.28 to 32.13 GPa with increasing W concentration. These films also presented excellent tribological properties, especially significantly low wear rate under dry sliding condition against Si3N4 ball. The optimum wear performance with friction coefficient of 0.19 and wear rate of 8.36 × 10−7 mm3/Nm was achieved for the tungsten-gradually doped DLC film with a graded W concentration ranging from 52.5% to 17.8%. This compositionally graded coating system might be a potentially promising candidate for wear-resistant carbon-based films in the demanding tribological applications.  相似文献   

7.
a-C:H:Nx% coatings with various levels of nitrogen addition ranging from 0 to 29 at.% are deposited on high-speed steel substrates and micro-drills utilizing a Closed Field Unbalanced Magnetron (CFUBM) sputtering technique. The tribological properties of the various coatings are evaluated by performing reciprocating sliding wear tests against an AISI 1045 steel cylinder under an applied load of 100 N. Additionally, the machining performance of the coated micro-drills is investigated by conducting high-speed through-hole drilling tests utilizing Printed Circuit Board (PCB) specimens. The experimental results reveal that the a-C:H:N8% coating possesses the best tribological properties, namely the lowest wear depth, the lowest friction coefficient and the longest lifetime. In addition, it is shown that the a-C:H:N8% coating increases the lifetime of the micro-drill by a factor of three compared to that of an uncoated micro-drill.  相似文献   

8.
Owing to increasing demands for reductions in emissions and improvements in fuel economy in the automotive industry, there is an urgent need to improve tribological performances of components. In the current paper, an nc-WC/a-C(Al) carbon-based nanocomposite coating was fabricated successfully via the magnetron sputtering process. The microstructure and mechanical properties of the as-fabricated nanocomposite coating were investigated. In particular, its friction and wear behaviors under poly-alpha-olefin oil lubricant added with anti-wear (AW), extreme-pressure (EP), or molybdenum dialkyldithiocarbamate (MoDTC) additive were systemically evaluated. Results show that the nc-WC/a-C(Al) nanocomposite coating has a typical nanocrystallite/amorphous microstructure and good mechanical properties. The significant improvement in the tribological performance of the boundary-lubricated nc-WC/a-C(Al) coating is mainly attributed to the WS2 or MoS2 + WS2-containing tribofilm when S-based EP or MoDTC additive was used. Superior tribological performance of nc-WC/a-C(Al) nanocomposite coating was achieved by lubricant/additive synergies, indicating its potential application as a protective coating for automotive tribo-components.  相似文献   

9.
Five different WC/C coatings deposited by physical vapour deposition (PVD) on high speed-steel (HSS) have been evaluated with respect to their mechanical and tribological properties. For all coatings a chromium layer was deposited first to enhance coating adhesion. The carbide phase (WC) and the carbon (C) phase were deposited simultaneously by direct-current magnetron sputtering of a WC target and plasma-assisted chemical vapour deposition using hydrocarbon gas, respectively. The influence of the chromium interface layer thickness, the amount of WC phase and the flow of hydrocarbon gas on the mechanical and tribological properties of the coatings have been investigated. The coatings have been characterised with respect to their chemical composition (glow discharge optical emission spectroscopy), hardness (Vickers microhardness), morphology (scanning electron microscopy, SEM), roughness (profilometry), residual stress (beam bending), critical load (scratch testing) and abrasive wear resistance (the “dimple grinder test”). Furthermore, a ball-on-plate test was employed to obtain information about the frictional properties and sliding wear resistance of the coatings. The wear mechanisms and wear debris were analysed by SEM, Auger electron spectroscopy and electron spectroscopy for chemical analysis. All WC/C coatings displayed a thickness between 2 and 4 μm and a surface roughness in the range of 10 to 70 nm. The hardness varied between 1500 and 1800 HV. The coating residual stress was found to range from −2.5 to −0.5 GPa. The scratch test revealed a relatively high critical normal load, i.e., a relatively good adhesion of the WC/C coatings to the HSS. The abrasive wear resistance was found to be very high, in fact equally as high as that of PVD TiN. In the sliding wear test it could be seen that the coating containing the lowest amount of carbide phase (WC), i.e., the highest amount of carbon phase (C), and which had the highest compressive residual stress yielded the lowest friction and wear rate against steel. In addition, this coating was also found to yield the lowest wear rate of the counter material. In summary, a WC/C coating with overall good mechanical and tribological properties was obtained provided a relatively thin chromium layer was deposited first and if a relatively high acetylene gas flow was utilised during deposition of the WC/C layer.  相似文献   

10.
In this study, WC (tungsten carbide) thin films were deposited on high-speed steel (AISI M2) and Si (100) substrates by direct current magnetron sputtering of a tungsten carbide target having 7% cobalt as binding material. The properties of the coatings have been modified by the change in the bias voltages from grounded to 200 V. All the coatings were deposited at 250°C constant temperature. The microstructure and the thickness of the films were determined from cross-sectional field-emission gun scanning electron microscope micrographs. The chemical composition of the film was determined by electron probe micro analyzer. The x-ray diffractometer has been used for the phase analyses. Nanoindentation and wear tests were used to determine the mechanical and tribological properties of the films, respectively. It is found that the increase in the bias voltages increased drastically the hardness and elastic modulus, decreased the friction coefficient values and increased the wear resistance of tungsten carbide thin films by a phase transformation from metallic W (tungsten) to a nonstoichiometric WC1?x (tungsten carbide) phase.  相似文献   

11.
In this study, a combination of nanocomposite and multilayer coating design was investigated in an effort to reduce the coefficient of friction (COF) while maintaining good mechanical properties of the TiBCN coatings. The TiBCN:CNx coatings consist of TiBCN and CNx nanolayers which were deposited alternately by reactive sputtering a TiBC composite target (80 mol% TiB2 + 20 mol% TiC) and a graphite target in an Ar:N2 mixture using a pulsed closed field unbalanced magnetron sputtering system. Low angle X-ray diffraction and transmission electron microscopy characterizations confirmed that the coatings consist of different bilayer periods in a range of 3.5 to 7.0 nm. The TiBCN layers exhibited a nanocomposite structure, whereas the CNx layers were in an amorphous state. The mechanical properties and wear resistance of the TiBCN:CNx multilayer coatings were investigated using nanoindentation and ball-on-disk wear test. The TiBCN:CNx coatings exhibited high hardness in a range of 20-30 GPa. The highest hardness of 30 GPa was achieved in the coating with a bilayer period of 4.5 nm. A low COF of 0.17 sliding against a WC-Co ball was obtained at a bilayer period of 4.5 nm, which is much lower than those of the single layer TiBCN and TiBC nanocomposite coatings (0.55-0.7).  相似文献   

12.
TiBCN nanocomposite coatings were deposited in a closed field unbalanced magnetron sputtering system using pulsed magnetron sputtering of a TiBC compound target with various Ar/N2 mixtures. TiBCN coatings were characterized using X-ray diffraction, X-ray photoelectron spectroscopy, transmission electron microscopy, nanoindentation, Rockwell C indentation and ball-on-disk wear tests. The coatings with a nitrogen content of less than 8 at.% exhibited superhardness values in the range of 44–49 GPa, but also showed poor adhesion and low wear resistance. Improvements in the coating adhesion, H/E ratio and wear resistance were achieved together with a decrease in the coating hardness to 35–45 GPa as the N content in the coatings was increased from 8 to 15 at.%. The microstructure of the coatings changed from a nano-columnar to a nanocomposite structure in which 5–8 nm nanocrystalline Ti(B,C) and Ti(N,C) compounds were embedded in an amorphous matrix consisting of BN, free carbon and CN phases. With a further increase in the N content in the coatings to levels greater than 20 at.%, the inter-particle spacing of the nanocrystalline compounds increased significantly due to the formation of a large amount of the amorphous BN phase, which also led to low hardness and poor wear resistance of the TiBCN coatings.  相似文献   

13.
Ti1 − xAlxN is a well established material for cutting tool applications exhibiting a high hardness and an excellent oxidation resistance. A main route for increasing the performance of Ti1 − xAlxN is the incorporation of further elements. Therefore the main objective of this work is to improve the properties and wear resistance of aluminum-rich CVD-TiAlN coatings by incorporating carbon. A new Low Pressure CVD process was employed for the deposition of a very aluminum-rich TiAlCN layers. The process works with a gas mixture of TiCl4, AlCl3, NH3, H2, N2, Ar and ethylene as carbon source. In this work microstructure, composition, properties and cutting performance of CVD-TiAlCN coatings were investigated.Hard aluminum-rich TiAlCN coatings were obtained at 800 °C and 850 °C consisting of a composite of fcc-Ti1 − xAlxN and minor phases of TiN, h-AlN and amorphous carbon. WDX analysis indicates only a low carbon content < 2 at.%. Lattice constant calculations suggest that carbon atoms should not be incorporated in the Ti1 − xAlxN lattice. From TEM analysis and Raman spectroscopy it is evident that carbon is mainly located at the grain boundaries as a-C phase. Therefore these fcc-Ti1 − xAlxN(C) coatings with low carbon content are rather a composite of fcc-Ti1 − xAlxN and an amorphous carbon phase (a-C). At 900 °C the metastable fcc-Ti1 − xAlxN nearly disappears and co-deposition of TiN and h-AlN occurs. The layers deposited at 800 °C and 850 °C possess a high hardness around 3000 HV and compressive stress. CVD-TiAlCN coatings prepared at 850 °C shows also an amazing thermal stability under high vacuum conditions up to 1200 °C. Aluminum-rich composites fcc-Ti1 − xAlxN/a-C with x > 0.8 exhibit a superior cutting performance in different milling tests.  相似文献   

14.
Nanocrystallized Cr1−xAlxN films with various Al contents (0 to 68 at.%) were deposited by pulsed closed field unbalanced magnetron sputtering (P-CFUBMS). The effects of aluminum content on the microstructure, mechanical and tribological properties of the Cr1−xAlxN films have been investigated. It was found that the hardness and elastic modulus of Cr1−xAlxN films increased with increasing Al contents in the films and reached the highest value of 36 GPa and 370 GPa, respectively, at an Al content of 58.5 at.%. Addition of Al beyond 64.0 at.% resulted in a change in crystal structure from B1 cubic to B4 hexagonal phase. The wear resistance improved gradually with the increase of Al in the Cr1−xAlxN films. A combination of the abrasive and adhesive wear mechanism was proposed based on the SEM and EDS analysis of the wear track. The steady state dry coefficient of friction measured against a WC ball for the Cr1−xAlxN films were in the range of 0.36-0.55, and the wear rate was in the 10− 6 mm3 N− 1 m− 1 range.  相似文献   

15.
This study demonstrates the successful synthesis of hard and wear resistant nanocomposite Ti-B-N coatings by high-rate reactive arc-evaporation from Ti/B compound targets in a commercial industrial-sized deposition chamber. Morphological investigations by profilometry and scanning electron microscopy indicate that the coatings exhibit a lower droplet density as compared to a TiN reference as well as a compositionally graded multilayer structure. These results will be related to the previously reported microstructural characterization, which revealed a highly stressed nanocrystalline TiBN solid solution formed at lower N2 fractions and a stable TiN/(amorphous) BN dual-phase structure obtained at higher N2 partial pressures. Emphasis is further laid on mechanical and tribological characterization. A maximum hardness of 34.5 GPa is detected for the TiBN solid solution decreasing to 24 GPa for the coatings containing approximately 30-40 vol.% amorphous BN. The maximum in hardness coincides with the minimum in wear, while the coefficient of friction is fairly constant at 0.7-0.8.  相似文献   

16.
高熵碳化物薄膜的脆性限制了其在高承载、长周期服役条件下的应用。精细设计的纳米复合结构可以在不损失薄膜强度前提下显著提高薄膜的韧性。采用高功率脉冲磁控溅射技术制备以非晶为基体连续相,以碳化物陶瓷相为分散相的非晶-晶体的高熵碳化物(CuNiTiNbCr)C_(x)薄膜,研究不同C_(2)H_(2)气体流量(F_(C))对薄膜成分、结构、力学性能和摩擦学性能的影响。采用能谱仪、扫描电子显微镜、X射线衍射仪、透射电子显微镜、X射线光电子能谱分析薄膜的成分、形貌、结构及各元素的化学状态,进一步采用纳米压痕以及球-盘式摩擦磨损试验机对薄膜的硬度、模量和摩擦磨损性能进行表征。结果表明,随着乙炔气体流量的增加,薄膜中碳含量逐渐增加,结构从非晶转变为非晶-晶体的纳米复合结构。纳米复合结构薄膜的硬度随着乙炔流量的增加逐渐增加,这是因为薄膜中生成大量碳化物陶瓷相,薄膜硬度最高为20 GPa。纳米复合薄膜呈现优异的摩擦学性能,在F_(C)=3 mL/min时,薄膜的摩擦性能达到最优,其磨损量为2.9×10^(-6)mm^(3)/Nm。综上,采用高功率脉冲磁控溅射技术可以精细调控薄膜结构,制备出强韧一体化、耐磨减摩的纳米复合结构(CuNiTiNbCr)C_(x)薄膜。  相似文献   

17.
The high strength, wear resistance and high operational temperature of polyetheretherketone (PEEK) have attracted increasing interests of this material for tribological applications. The addition of solid lubricant is an effective way to further improve the tribological properties of polymeric materials. In the present work, inorganic fullerene-like tungsten disulfide (IF-WS2) nanoparticles were incorporated into PEEK coatings with the aim of reducing the coefficient of friction (COF) and improving the wear resistance of the coatings. The microstructures of IF-WS2/PEEK nanocomposite coatings were characterized using a combination of SEM, XRD and FTIR measurements. The thermal behaviours of the coatings were determined using differential thermal analysis (DTA). Tribological tests had also been carried out to evaluate the friction and wear behaviours of IF-WS2/PEEK nanocomposite coatings. The results showed that significant improvement can be achieved in the tribological properties of the nanocomposite coatings by incorporating IF-WS2 nanoparticles.  相似文献   

18.
MX2(M= Mo, W; X=S, Se) and DLC (a-C: H and WC/C) are the two kinds of typical low friction coatings widely used in industry. The friction and wear properties of these two kinds of coatings marked as MOVIC,MOST, MoSez/Ni, WSez, a-C: H and WC/C coatings were determined by fretting tests in ambient air of different humidity. The results show that the coefficient of friction of MXz coatings increases when the relative humidity of air increases whereas the coefficient of friction DLC coatings decreases with the increasing of relative humidity. MOVIC and WSe2 coatings have a poor friction and wear resistance because of non-basal planes (100) and ( 101 ) parallel to the surface in the MOVIC coating, or the rough and porous surface of WSe2 coatings. Among these six coatings, MoSe2/Ni and WC/C eoatinas have the highest wear resistance which seems to be unaffected by the relative humidity.  相似文献   

19.
Multi-element (AlCrTaTiZr)N coatings are deposited onto Si and cemented carbide substrates by reactive RF magnetron sputtering in an Ar + N2 mixture. The influence of substrate bias voltage, ranging from 0 to − 200 V, on the microstructural, mechanical and tribological properties of these nitride coatings is studied. A reduction in concentration of N and Al is observed with increasing substrate biases. The (AlCrTaTiZr)N coatings show the face-centered-cubic crystal structure (B1-NaCl type). The use of substrate bias changes the microstructure of the (AlCrTaTiZr)N coating from the columns with microvoids in boundaries to the dense and less identified columns. The compressive macrostress increases from − 0.9 GPa to − 3.6 GPa with an increase of substrate bias. The hardness and adhesion increase to peak values of 36.9 GPa and 60.7 N at the bias voltage of − 150 V, respectively. The tribological properties of the (AlCrTaTiZr)N coatings against 100Cr6 steel balls are evaluated by a ball-on-disc tribometer with a 10 N applied load. With an increase of substrate bias, the wear rate reduces while the friction coefficient almost keeps constant at 0.75. The lowest wear rate of 3.65 × 10− 6 mm3/Nm is obtained for the (AlCrTaTiZr)N coating deposited at the bias voltage of − 150 V.  相似文献   

20.
The use of hard and superhard nanocomposite (nc) coatings with tailored functional properties is limited when applied to low alloy steel substrates due to their low load carrying capacity. Specifically in this work, in order to enhance the performance of martensitic SS410 substrates, we applied a duplex process which consisted of surface nitriding by radio-frequency plasma followed by the deposition of single layer (TiN, nc-TiN/a-SiNx or nc-TiCN/a-SiCN) or multilayer (TiN/nc-TiN/a-SiNx, TiN/nc-TiCN/a-SiCN) coating systems prepared by plasma enhanced chemical vapor deposition (PECVD). We show that plasma nitriding gives rise to a diffusion layer at the surface due to diffusion of nitrogen and formation of the α-Fe and ε-Fe2N phases, respectively, leading to a surface hardness, H, of 11.7 GPa, compared to H = 5 GPa for the untreated steel. Among the TiN, nc-TiN/a-SiNx and nc-TiCN/a-SiCN coatings, the latter one possesses the highest H value of 42 GPa and the highest H3/Er2 ratio of 0.83 GPa. Particularly, the TiN/nc-TiCN/a-SiCN multilayer coating system exhibits superior tribological properties compared to single layer TiN and multilayer TiN/nc-TiN/a-SiNx coatings: this includes excellent adhesion, low friction (Cf = 0.17) and low wear rate (K = 1.6 × 10− 7 mm3/N m). The latter one represents an improvement by a factor of 600 compared to the bare SS410 substrate. The significance of the relationship between the H/E and H3/Er2 ratios and the tribological performance of the nano-composite coatings is discussed.  相似文献   

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