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1.
利用离子氮化形成过渡层,通过改变溅射沉积工艺参数,制备了TiAlCrN和TiAlCrN/CrN多层复合膜。采用电子探针(EPMA)、扫描电子显微镜(SEM)、X射线衍射仪(XRD)、纳米压痕仪及微米划痕仪等技术表征两种复合膜的成分结构和力学性能。结果表明:两种膜都是面心立方结构,TiAlCrN膜和TiAlCrN/CrN多层膜分别在(111)和(200)面具有一定的择优取向;TiAlCrN膜的结构和成分都比较均匀,而TiAlCrN/CrN多层膜的结构和成分则呈周期性变化。由于离子渗氮层的支撑作用及氮化物外延生长,TiAlCrN/CrN多层膜的显微硬度(3 450 HV)高于TiAlCrN膜的(2 500 HV);两种膜都具有较高的膜基结合力,但TiAlCrN/CrN多层膜的综合力学性能比TiAlCrN膜的更好 相似文献
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Multilayers of alternate Cr/CrN coatings deposited on AISI 301 steel by a pulsed Nd:YAG laser have been tested by microindentation to measure both hardness and Young's modulus. Critical load LC has been determined by scratch test. The total thickness of multilayers was 1 µm, and the bilayer period Λ varied from between 60 nm and 1000 nm. TEM and EDS techniques were used for investigating and analyzing the microstructure of the multilayers. The results of these measurements show that the mechanical properties of Cr/CrN multilayers depend on the bilayer period. The maximum improvement in performance over a single layer of CrN has been found to be Λ at 250 nm, particularly in terms of critical load and Young's modulus. 相似文献
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采用多弧离子镀技术在TC11钛合金表面制备了厚度为18.7 μm的Ti/TiN/Zr/ZrN多层膜,用45 μm白刚玉通过微喷砂试验机评价TC11钛合金及Ti/TiN/Zr/ZrN多层膜在30°和90°攻角下的抗冲蚀性能,并分析其冲蚀机理.结果表明:30°攻角下,冲蚀砂量为70 g时,Ti/TiN/Zr/ZrN多层膜被冲破,此时该多层膜的冲蚀坑深度为21.88 μm,TC11钛合金基材为269.9 μm.90°攻角下,冲蚀砂量为20 g时,Ti/TiN/Zr/ZrN多层膜被冲破,此时该多层膜的冲蚀坑深度为8.95 μm,TC11钛合金基材为46.96 μm.30°攻角下,钛合金的冲蚀以微切削为主,多层膜以微切削和微断裂为主.在90°攻角下,钛合金的冲蚀以点坑冲蚀为主,多层膜以裂纹萌生扩展和点坑冲蚀的混合冲蚀为主. 相似文献
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采用真空阴极电弧沉积技术在1Cr17Ni2马氏体型不锈钢表面沉积Ti/TiN/Zr/ZrN多层膜。研究对比了在室温下膜层试样与基体试样的旋转弯曲疲劳强度、疲劳寿命和疲劳断裂机理。结果表明:在不锈钢基体上沉积厚度为11.7μm,硬度为3 220HV0.025,膜/基结合力为56N的Ti/TiN/Zr/ZrN多层膜后,其疲劳性能显著提高,膜层试样较基体试样的疲劳极限提高了约11.2%,当应力水平在540~650 MPa变化时,疲劳寿命增量变化范围为108%~246%;裂纹均起源于表面,在低应力水平下只有一个裂纹源,而高应力水平下有多个裂纹源;疲劳性能的提高主要是由于膜层能够弥补基体表面一定的缺陷,同时软硬交替的膜层结构有较强的抗裂纹扩展能力。 相似文献
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Jong-Kook LEE Gwon-Seung YANG 《中国有色金属学会会刊》2009,19(4):795-799
Titanium-based nitride coatings on cutting tools, press molds and dies can be used to prolong their life cycle because of their superior corrosion and oxidation resistance. TiAlN/ZrN and TiCrN/ZrN multilayer coatings were prepared by RF magnetron sputtering, and their microstructural evolution and corrosion resistance during heat treatment were investigated. The TiAlN/ZrN and TiCrN/ZrN multilayer coatings are degraded by heating up to 600 °C with the formation of oxides particles on the surface. During the heat treatment, the TiCrN/ZrN and TiAlN/ZrN multilayer coatings show the lowest corrosion current density and the highest polarization resistance at temperature range of 400–500 °C. Consequently, the TiAlN/ZrN and TiCrN/ZrN multilayer coatings show good corrosion resistance at temperature range of 400–500 °C during heating. 相似文献
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The multilayer gradient CrN/ZrN coatings were synthesized by a dual cathode DC magnetron sputtering.The influence of different species of reaction gases and partial pressures on structure and mechanical properties was investigated using XRD, AES, XPS, and nanoindentation. The results show that N2-NH3 mixture process gas is of benefit to the synthesis of superhard multilayered gradient CrN/ZrN coatings. The presence of the preferred orientations of CrN(111), (200) and ZrN (111), (220) in the structure is a main reason for superhardness of multilayered gradient coatings. 相似文献
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为了寻求发动机核心部件活塞环上电镀硬铬的替代技术,采用自行设计的离子源增强阴极电弧离子镀系统,在W18Cr4V高速钢试块上制备了不同厚度的CrN涂层,用XRD、SEM分析涂层的晶体结构、表面形貌和厚度;利用显微硬度计和球盘式摩擦仪分析了涂层厚度对力学性能的影响。结果表明:随着厚度的增加,CrN涂层结晶结构没有明显变化,2.5μm厚CrN涂层硬度达1 900 HV0.05,最低摩擦因数0.6,最低磨损速率2.664×10~(-6) mm~3/N·m。对CrN涂层和电镀硬铬ASL817钢质活塞环进行珩磨测试,在珩磨2 400次之后,CrN涂层钢质活塞环出现较大孔洞(50μm),但没有涂层脱落,具有良好的附着力,工作间隙变化不大;电镀硬铬活塞环涂层磨损较CrN涂层严重,工作间隙开始变大;珩磨12 000次后电镀硬铬活塞环工作间隙达到允许最大值,CrN涂层活塞环依保持正常工作间隙,耐磨性更好。 相似文献
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High temperature tribological characterisation of TiAlSiN coatings produced by cathodic arc evaporation 总被引:2,自引:0,他引:2
Gonzalo G. Fuentes Eluxka Almandoz Rosario Martínez Jaume Caro 《Surface & coatings technology》2010,205(5):1368-1373
This study reports on the wear properties at medium-high temperatures of TiAlSiN films deposited by cathodic arc evaporation on hot work steel substrates. The chemical composition and microstructure of the coatings were characterised by glow discharge optical emission spectroscopy, scanning electron microscopy and X-ray diffraction. The mechanical properties, i.e. hardness and elastic modulus were evaluated by nanoindentation, and the adhesion of the coatings was tested by scratch tests. Coatings with stoichiometries of Ti0.31Al0.1Si0.06N0.53 and Ti0.23Al0.12Si0.09N0.55 exhibit microstructures consisting of solid solutions of (Ti,Al,Si)N, where Al and Si replace Ti atoms. These films show high hardness and good adhesion strength to the hot work steels. Conversely, coatings with a stoichiometry of Ti0.09Al0.34Si0.02N0.55 show a wurtzite-like microstructure, low hardness and poor adhesion strength.The wear rates of the coatings were investigated by ball-on-disc experiments at room temperature, 200 °C, 400 °C and 600 °C, using alumina balls as counter surfaces. At room temperature, the films show wear rates of the same order of magnitude of TiN and TiAlN coatings. On the other hand, the wear rates of solid solution (Ti,Al,Si)N coatings measured at 200, and 400 °C are one order of magnitude smaller than those measured at room temperature due to the formation of oxide-containing tribofilms on the wear tracks. At 600 °C the wear rates increase but still keep smaller than those measured at room temperature, although this effect can be influenced by the softening of the steel substrates by over-tempering. EDS analyses revealed that, between 200 °C and 400 °C, the oxidation of the coating occurs only at the contact zone between the film and the counterpart body due to the sliding process. 相似文献
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Mamoun Fellah Linda Aissani Mohammed Abdul Samad Said Mechacheti Mohamed Zine Touhami Alex Montagne 《金属精饰学会汇刊》2017,95(5):261-268
Binary Cr-N, Zr-N and Cr-Zr-N films were synthesised using a R.F. reactive magnetron sputtering technique by co-sputtering Cr and Zr. The crystalline structure, morphology, mechanical and tribological properties of the films as a function of Zr content were characterised by X-ray diffraction, microanalysis X (WDS, EDS), X-ray photoelectron spectroscopy, scanning electron microscopy, atomic force microscopy, nanoindentation, scratch adhesion and pin-on-disc sliding wear tests. The residual stress was calculated with the Stoney formula. The Cr-Zr-N films exhibit a two-phase microstructure, containing a cubic (CrN, ZrN) with hexagonal (Cr2N, Zr2N) phases, as shown by X-ray diffraction. As the Zr content increased, a columnar and compact structure is developed with a low surface roughness. The results reveal that the mechanical and tribological properties of the films were found to depend on the Zr content and the hardness (maximum 26.3?GPa) is greatly improved in comparison with CrN and ZrN films, especially at 31?at.-% Zr. In the scratch test, the hardest film (Cr0.18Zr0.31N0.47) exhibited an adhesive failure at Lc2?=?34.3?N. 相似文献
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Meng-Ko Wu Jyh-Wei Lee Yu-Chen Chan Hsien-Wei Chen Jenq-Gong Duh 《Surface & coatings technology》2011,206(7):1886
Nanostructured CrSiN/TiAlN multilayer coatings were deposited by a bipolar asymmetric reactive pulsed DC magnetron sputtering system. The thickness ratio of CrSiN to TiAlN layers was fixed at 1:1. The bilayer periods of the coatings were controlled to be from 6 to 40 nm. Furthermore, two CrSiN/TiAlN multilayer coatings with the same bilayer period (20 nm) but different CrSiN/TiAlN thickness ratios (2:8 and 8:2) were also deposited to explore the influence of thickness ratio on the mechanical properties of the multilayer coatings. The crystalline structures of the coatings were determined by a glancing angle X-ray diffractometer. The microstructures of thin films were examined by a scanning electron microscopy and a transmission electron microscopy, respectively. A nanoindenter, a micro Vickers hardness tester, and a pin-on-disk wear tester were used to evaluate the hardness, the toughness and the tribological properties of the thin films, respectively. The maximum hardness of the multilayers was obtained when the bilayer period was at 10 nm for the coating with the same thickness ratio of CrSiN to TiAlN layers (1:1). Meanwhile, the thickness ratio of CrSiN to TiAlN layer had great influence on the hardness and the toughness properties of the multilayer coatings. The hardness and the toughness of the CrSiN/TiAlN multilayer coatings increased as the individual TiAlN layer thickness increased. 相似文献
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Microstructures and mechanical properties evaluation of TiAlN/CrSiN multilayered thin films with different bilayer periods 总被引:1,自引:0,他引:1
The Ti0.45Al0.55N/Cr0.75Si0.25N nanoscale multilayered coatings were deposited periodically by a bipolar asymmetric pulsed DC reactive magnetron sputtering technique. The structures and bilayer period of multilayer coatings were characterized by an X-ray diffractometer. The surface and cross-sectional morphologies of thin films were examined by scanning electron microscopy (SEM) and transmission electron microscopy (TEM), respectively. The surface roughness of thin films was explored by atomic force microscopy (AFM). A nanoindenter, a micro Vickers hardness tester and pin-on-disk wear tests were used to evaluate the hardness, fracture toughness and tribological properties of the thin films, respectively. Six coatings with bilayer period ranges from 6 nm to 40 nm were produced in this work. It was observed that the hardness increased with increasing bilayer period and reached the maximum at 12 nm and then leveled off at periods larger than 12 nm. An optimal hardness, and plastic deformation resistance, as well as adequate tribological behaviors were found on the coating with a critical bilayer period of 12 nm. 相似文献
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采用真空电弧离子镀技术在1Cr17Ni2不锈钢基体表面沉积Ti/TiN/Zr/ZrN多层膜,并对膜的形貌、相结构、结合力以及极化曲线和交流阻抗等电化学性能进行分析和测试。结果表明:制备的Ti/TiN/Zr/ZrN膜界面清晰、结构致密、晶粒细小,膜层厚度约为2~3μm,膜层的主要物相为TiN和ZrN两相,以及少量的金属Ti和Zr;膜层与基体结合良好,结合力大于70 N,显微硬度(HV_(0.025))高达29 000 MPa,Ti/TiN/Zr/ZrN多层膜与1Cr17Ni2基材相比,具有更高的极化电位和极化电阻,更低的腐蚀电流密度,更大容抗弧。 相似文献
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目的 探究Cr/CrN/Cr/CrAlN多层膜的最佳调制比.方法 利用电弧离子镀技术,在TC4钛合金上制备了不同调制比的Cr/CrN/Cr/CrAlN多层膜.利用扫描电子显微镜观察膜层表面和截面形貌;用Image-Pro分析软件对表面的大颗粒进行定量分析;利用X射线衍射法表征膜层的晶体结构;采用维氏硬度计测量膜层的显微硬度;采用划痕试验仪测量膜层与基体之间的结合力(临界载荷);通过基片弯曲法测量并计算得到膜层的残余应力;利用根据ASTM G76-05标准特制的AS600-喷砂试验机进行了抗冲蚀性能测试;采用三维表面轮廓仪测量冲蚀坑深度.结果 膜层表面质量和生长取向与LCr/CrN:LCr/CrAlN调制比密切相关,随着Cr/CrN比例的增加,膜层表面质量越来越好,择优取向由(111)晶面转为(200)晶面.多层膜的硬度随Cr/CrN比例的增加,呈下降趋势,结合力、残余应力和韧性则随之呈先升后降的趋势,并在LCr/CrN:LCr/CrAlN为1:2时,达到最佳.多层膜的抗砂粒冲蚀性能变化与力学性能变化一致,在LCr/CrN:LCr/CrAlN为1:2时达到最佳,其抗冲蚀能力是TC4基材的3倍以上,多层膜呈典型的脆性断裂失效形式.结论 在调制比LCr/CrN:LCr/CrAlN=1:2时,膜层获得最佳的抗冲蚀性能. 相似文献
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特种装备车辆往往在高速、高冲击等复杂环境下运行,底盘选装密封件表面容易被磨损造成密封失效,在密封工作面制备硬质涂层是提高服役寿命、延长维修周期的重要方法。采用物理气相沉积法在 45#钢表面制备单层 CrN 涂层和不同过渡层厚度的多层 CrN / TiAlN 涂层,用 X 射线衍射仪、扫描电子显微镜、表面轮廓仪、纳米压痕仪和往复式摩擦磨损试验机, 研究涂层的微观结构、机械性能和摩擦磨损性能。结果表明单层 CrN 涂层厚度为 0.87 μm, 其硬度和模量最小为 19.49 GPa 和 160.53 GPa。CrN / TiAlN 多层涂层的硬度和模量明显提高,且随过渡层厚度增加而增大,4CrN / TiAlN 涂层的硬度和模量可达到 39.86 GPa 和 386.72 GPa。在空气环境下的摩擦磨损试验中,单层 CrN 涂层被快速破坏;CrN / TiAlN 多层涂层的平均摩擦因数随着过渡层厚度的增加先增大后减小,最大磨损深度和磨痕截面积不断下降。4CrN / TiAlN 涂层具有最优摩擦磨损性能,其平均摩擦因数为 0.792 5,磨痕截面积为 315.09 μm2 ,磨损机理为磨粒磨损和少量粘着磨损。提高过渡层厚度能够降低基体的塑性变形,降低涂层与基体的物理性能差异,减少涂层开裂并提高涂层摩擦磨损性能。通过调控过渡层厚度获得性能优异的 CrN / TiAlN 多层涂层,研究成果可应用于车辆旋转密封件上,显著提高密封工作面耐磨损性能。 相似文献
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Jrg Neidhardt Zsolt Czigny Bernhard Sartory Richard Tessadri Christian Mitterer 《International Journal of Refractory Metals and Hard Materials》2010,28(1):23-31
Wear-resistant Ti–B–N coatings have been synthesized by reactive arc evaporation of Ti–TiB2 compound cathodes in a commercial Oerlikon Balzers Rapid Coating System. Owing to the strong non-equilibrium conditions of the deposition method, a TiN–TiBx phase mixture is observed at low N2 partial pressures, as determined by elastic recoil detection analysis, X-ray diffraction, X-ray spectroscopy, transmission electron microscopy and selected area electron diffraction. The indicated formation of a metastable solid solution of B in face-centered cubic TiN gives rise to a maximum in hardness (>40 GPa) and wear resistance on the expense of increased compressive stresses. A further saturation of the nitrogen content results in the formation of a TiN–BN nanocomposite, where the BN phase fraction was tailored by the target composition (Ti/B ratio of 5/3 and 5/1). However, the amorphous nature of the BN phase does not support self-lubricious properties, showing friction coefficients of 0.7 ± 0.1 against alumina. The effect of an increased bias voltage on structure and morphology was investigated from −20 to −140 V and the thermal stability assessed in Ar and air by simultaneous thermal analysis up to 1400 °C. 相似文献
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过滤电弧沉积的TiN/TiCrN/CrN/CrTiN多层膜 总被引:7,自引:1,他引:6
用过滤电弧技术在高速钢表面沉积了TiN/TiCrN/CrN/CrTiN多层膜, 用扫描电镜(SEM)观察了截面和断口形貌及划痕后的形貌。 使用俄歇电子谱仪进行剥层成分分析,用纳米压痕仪测试了多层膜和单层膜的显微硬度和弹性模量。 结果表明, 在调制周期大于100nm时, 多层膜的显微硬度符合Hall-Petch关系, 在80nm时, 则脱离线性关系。 划痕法测试多层膜的结合力达到80N。 相似文献
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目的需要直接测量薄膜的极限形变这一关键参数,来评价某种薄膜在一定服役载荷下的某种基体表面是否能胜任。方法借助聚焦离子束显微镜/扫描电子显微镜(FIB/SEM)双束显微分析测试系统,提出了一种在微米尺度下、原位进行三点弯曲薄膜测试的方法,同时可以进行实时观测与分析记录。之后,使用磁控溅射技术制备了具有强择优晶体生长取向的CrN薄膜和Cr/CrN多层薄膜,并使用上述三点弯曲测试方法对这两种薄膜进行了弯曲测试。结果 CrN薄膜的极限形变量为(1.8±0.1)%,且其在原位三点弯曲试验中断裂前的变形类型为纯弹性形变,而不是塑性形变或者弹性/塑性混合形变。而Cr/CrN多层薄膜的极限形变达到了9.1%,是纯CrN薄膜的5倍,且对\"预裂纹\"等缺陷不敏感。结论将此测试方法与在微米尺度使用FIB测量薄膜残余应力的方法相结合,将可以有效地评估多种薄膜的形变能力及形变特性。所获得的薄膜相关性能数据,对于针对不同基体、不同使用工况(如不同的表面受力状态、变形状态等)的薄膜体系或结构的选择与设计,具有很好的指导意义。 相似文献