用三维MEMS力学量传感器对涌浪微观形态测量的研究

涌浪的形态对舰船驾驶航行、渔业生产、海洋作业和堤坝设施等具有很大的影响.对海浪的形态研究在军事、水上交通、海洋工业、渔业和民生方面都具有特殊的意义.MEMS力学量传感器是一种环境适应能力极强的微机电器件,用三维MEMS力学量传感器可以测量动态质点的速度、加速度、摆角和倾角等参数.通过三维MEMS力学量传感器的三维参数测量和分解可以得到涌浪质点的实时运动速度和运动轨迹数据,从而为涌浪的微观形态研究提供了依据.MEMS力学量传感器具有体积小、重量轻和输出灵敏度高等特点,特别适合于对海浪实时形态的研究.     

新型MEMS三维振动传感器的有限元分析

针对目前多维振动传感器的需求,研制了一种基于MEMS技术的仿昆虫纤毛三维振动传感器。首先,介绍了振动传感器的仿生机理和工作原理;然后,推导了振动传感器的力学模型并建立了有限元模型;最后,对该传感器进行了静、动态特性分析,并通过实验验证最终得出该传感器的灵敏度为274.18μV/gn、维间耦合小于等于0.612 5%、测量范围为±25 gn、共振频率为2 342.6 Hz、抗冲击能力为100 gn。     

MEMS高精度双轴倾角传感器的设计

本文主要介绍了一种角度检测用MEMS双轴倾角传感器.采用MEMS加速度传感器测量倾角的原理进行应用开发,通过三维转台角度测试,其具有体积小、性能稳定、精度高等特点.     

基于MEMS技术的微电容式加速度传感器的设计

给出了一种基于MEMS技术制作的微电容式加速度传感器的结构及工艺。为了准确地把握这种微电容式加速度传感器的力学和电学特性,仔细地建立了它的力学模型。在此基础上,详细分析了它的动态特性———模态。并用有限元的方法分析和计算了微电容式加速度传感器的加速度与电容信号的非线性输入输出关系,并结合实测参数验证了模型的有效性。最后提出了一种详细的有效的基于MEMS技术的微电容式加速度传感器的结构以及加工工艺流程。基于MEMS技术制作的微电容式加速度传感器具有结构简单、工作可靠和工作范围大的特点。根据这套方法,可以比较方便地设计并加工不同测量要求的加速度计。     

基于三维感应线圈的新型MEMS电流传感器

基于三维感应线圈,研制了一种新型微机电系统(MEMS)电流传感器。传感器以玻璃为衬底,以聚酰亚胺为支撑和绝缘材料,通过溅射、光刻、电镀、抛光等微加工工艺在玻璃衬底上制作出三维感应线圈。传感器具有功耗低、线性度好、质量轻和结构简单等优点,通过U型装置固定在传输导线表面,安装方便。实验测试结果表明:电流传感器两端输出的电压信号与传输线路中的电流成线性关系,线性度为0. 58%。     

多轴微加速度传感器的进展

微加速度传感器是微型惯性组合测量系统的核心器件。随着MEMS技术的不断发展,单轴微加速度传感器的技术已日趋成熟,多轴微加速度传感器的研究正成为MEMS领域的热点。基于多轴微加速度传感器典型实例的介绍,评述了近年来该领域的进展,并就其未来的发展作了展望。     

日本基于MEMS传感器的研究进展

本文综述了近年来日本基于MEMS的传感器在企业和高校的研究进展,简述了各类MEMS传感器的结构特点与微机械加工技术,对我国MEMS传感器的研究与发展将有很大的借鉴作用.     

PZT压电薄膜在微传感器中的应用

锆钛酸铅压电材料(PZT)因具有优良的压电性能、热释电性能、铁电性能和介电性能而被广泛地应用在微电子机械系统(MEMS)中。基于微传感器,介绍了PZT薄膜,重点介绍了PZT薄膜在微传感器中的应用,并介绍了PZT薄膜微传感器的发展状况。     

业界动态

重庆大学"MEMS微型发电机系统"原理样机研制成功近日,由重庆大学承担的863计划MEMS专项课题“MEMS微型发电系统”原理样机通过了由自动化技术领域办公室组织的验收。该MEMS微型发电机的成功研制,将为微型能源与微传感器、微执行器、电路和微系统的一体化集成打下坚实的理论和技术基础。该样机具有微型化、高效能、长寿命、无需电池充电或燃料的更换、无废物输出、使用方便灵活、可批量生产等优点,在植入式装置、分布式传感器系统、无线通信、交通、玩具、航空航天、环境监测等领域具有广泛的应用前景与市场需求。读者服务卡编号021□…     

基于MEMS的生物微传感技术

微电子机械系统(MEMS)技术为生物微传感器和生物芯片的研制以及实现小型化、便携式、低成本,高灵敏度的生化片上系统提供了有力的技术支持。综述了基于MEMS的生物微传感技术,介绍了生物微传感器和生物芯片的原理、结构、分类及应用,并探讨了其发展和应用前景。     

Design and fabrication of a flexible three-axial tactile sensor array based on polyimide micromachining

This paper describes the design and fabrication of a flexible three-axial tactile sensor array using advanced polyimide micromachining technologies. The tactile sensor array is comprised of sixteen micro force sensors and it measures 13 mm × 18 mm. Each micro force sensor has a square membrane and four strain gauges, and its force capacity is 0.6 N in the three-axial directions. The optimal positions of the strain gauges are determined by the strain distribution obtained form finite element analysis (FEA). The normal and shear forces are detected by combining responses from four thin-film metal strain gauges embedded in a polyimide membrane. In order to acquire force signals from individual micro force sensors, we fabricated a PCB based on a multiplexer, operational amplifier and microprocessor with CAN network function. The sensor array is tested from the evaluation system with a three-component load cell. The developed sensor array can be applied in robots’ fingertips, as well as to other electronic applications with three-axial force measurement and flexibility keyword requirements.     

MEMS机油压力传感器设计

由于汽车应用环境相当恶劣,对机油压力传感器的可靠性要求很高。采用波纹膜片隔离技术设计了一种新型的MEMS机油压力传感器。分析了波纹膜片、充油腔体结构及硅油对压力传感器性能的影响。理论和实验结果指出,合理的设计波纹结构、充油腔体结构、减小腔体体积及净化好硅油是获得高性能机油压力传感器的关键.研制的传感器在温度为-40—125℃,量程为0．6MPa的工作条件下,测量精度优于1．5％。     

基于飞蛾触角的仿生MEMS导航传感器的设计与仿真

以飞蛾触角导航为仿生依据,通过建立其导航数学模型,利用MATLAB对该模型的导航原理进行仿真分析,结合仿生学,设计了一种新型MEMS三维角速度传感器模型,并对该传感器的加工工艺进行了设计,该传感器主要由折叠梁和坡莫合金棒组成,通过ANSYS分析,在9 V驱动电压的作用下,合金棒沿X、Y的振动幅度可达到80μm,通过理论计算,由偏航角速度产生的哥氏力为0.908×10-8N/(°·s-1),由翻滚和俯仰角速度产生的哥氏力为0.18×10-9N/(°·s-1)。     

Multi-dofs MEMS displacement sensors based on the Stewart platform theory

This work proposes a new detection strategy suitable for MEMS sensors with up to 6 degrees of freedom. Parallel structures based on the Stewart theory are commonly adopted as actuators in many fields such as high precision manipulators, aircraft and vibration simulators and machine tools; the same configuration was used here to define the kinematics of a displacement sensor in the microscale based on the optical detection. The algorithm for the estimation of absolute positions and orientations of the platform is presented. The described sensing approach considerably simplifies the platform architecture and design and introduces a promising solution for many MEMS sensors and devices.     

A parametrized three-dimensional model for MEMS thermal shear-stress sensors

This paper presents an accurate and efficient model of MEMS thermal shear-stress sensors featuring a thin-film hotwire on a vacuum-isolated dielectric diaphragm. We consider three-dimensional (3-D) heat transfer in sensors operating in constant-temperature mode, and describe sensor response with a functional relationship between dimensionless forms of hotwire power and shear stress. This relationship is parametrized by the diaphragm aspect ratio and two additional dimensionless parameters that represent heat conduction in the hotwire and diaphragm. Closed-form correlations are obtained to represent this relationship, yielding a MEMS sensor model that is highly efficient while retaining the accuracy of three-dimensional heat transfer analysis. The model is compared with experimental data, and the agreement in the total and net hotwire power, the latter being a small second-order quantity induced by the applied shear stress, is respectively within 0.5% and 11% when uncertainties in sensor geometry and material properties are taken into account. The model is then used to elucidate thermal boundary layer characteristics for MEMS sensors, and in particular, quantitatively show that the relatively thick thermal boundary layer renders classical shear-stress sensor theory invalid for MEMS sensors operating in air. The model is also used to systematically study the effects of geometry and material properties on MEMS sensor behavior, yielding insights useful as practical design guidelines.     

基于Si_3N_4薄膜的压力传感器

采用微机电系统(MEMS)技术制造的传感器具有体积小、重量轻、成本低等特点。基于S i3N4压力敏感膜,利用MEMS技术,设计了一种用于测量气压的传感器。采用应变电阻原理对压力进行测量,进行了理论分析计算,设计了工艺过程,制作出了器件样片。这种压力传感器的显著优点是结构简单、工艺过程容易。并且,在50~100 kPa的压力条件下,对传感器进行了测试,其精度达到了0.5%。     

台面结构硅基法珀型光纤MEMS压力传感器的研究

提出了一种新的光纤压力传感器的设计,该传感器敏感膜采用了台面结构而非传统的平面结构.用法布里-珀罗(Fabry-Perot)干涉理论阐述了传感器的工作原理,提出了敏感膜的力学模型.基于Fabry-Perot干涉理论推导出光纤MEMS压力传感器中台面敏感膜受到的压力与干涉光强的关系表达式,通过ANSYS有限元软件分析了台面膜型的力学性能,结果表明台面敏感膜在平行度上优于平面膜.通过数值模拟分析了传感器的关键参数对其性能的影响,为光纤MEMS压力传感器的加工和制作提供了理论依据.     

Fabrication and flow-sensor application of flexible thermal MEMS device based on Cu on polyimide substrate

A Cu on polyimide (COP) substrate was proposed as a MEMS material, and the fabrication process for a flexible thermal MEMS sensor was developed. The COP substrate application to MEMS devices has the advantage that typical MEMS structures fabricated in a SOI wafer in the past—such as a diaphragm, a beam, a heater formed on a diaphragm—can also be easily produced in the COP substrate in the flexible fashion. These structures can be used as the sensing element in various physical sensors, such as flow, acceleration, and shear stress sensors. A flexible thermal MEMS sensor was produced by using a lift-off process and sacrificial etching of a copper layer on the COP substrate. A metal film working as a flow sensing element was formed on a thin polyimide membrane produced by the sacrificial etching. The fabricated flexible thermal MEMS sensor was used as a flow sensor, and its characteristics were evaluated. The obtained sensor output versus the flow rate curve closely matched the approximate curve derived using King’s law. The rising and falling response times obtained were 0.50 and 0.67 s, respectively.

     

基于永磁薄膜的MEMS磁传感器设计与制作

提出了一种基于永磁薄膜的新型MEMS磁传感器,磁传感器由MEMS扭摆、CoNiMnP永磁薄膜和差分检测电容等部分组成。分析了磁传感器的磁敏感原理和电容检测原理,提出了器件的结构参数并对器件进行了模态仿真。利用MEMS加工技术成功制作了MEMS磁传感器样品,并进行了测试。测试结果表明:得到的MEMS磁传感器的电容灵敏度可达到27.7 fF/mT,且具有良好的线性度。根据现有的微小电容检测技术,传感器的磁场分辨率可达到36 nT。     

基于微位移定位系统MEMS梳齿位移传感器的研究

MEMS硫齿位移传感器是一种基于MEMS技术电容理论的传感器,具有体积小、重量轻、性能稳定、功耗低和易于集成等特点.首先探讨了梳齿传感器的工作原理,随后介绍了使用梳齿传感器有效检测微动工作台位移的方法,并进行了结构失效和梳齿电极不平行失效的可靠性分析.通过采用这种传感器可以达到提高微位移定位平台系统的集成度、精度、分辨...