DBD等离子体枪聚合SiOx薄膜用于金属表面防腐性能研究

用高频介质阻挡放电(DBD)等离子体枪,以六甲基二硅氧烷为单体,在大气下于铸铁表面聚合S iOx薄膜。采用红外光谱(FTIR)分析了等离子体功率对聚合膜的结构和沉积速度等影响、SEM对试样表面进行观察。实验发现铸铁表面沉积S iOx薄膜呈现致密纳米棒状交联结构,并随着厚度的增加粒子间出现团聚现象。在0.5%NaC l溶液中的腐蚀实验表明,S iOx薄膜能显著的提高铸铁的防腐性能,而通过在5%NaC l溶液中进行的动电位极化特性曲线计算得到,铸铁的腐蚀速率为4.72E-3mm/a,约为纯铸铁的1/15。     

ZnS基底沉积类金刚石薄膜研究

针对不能直接在红外光学材料ZnS基底上沉积类金钢石薄膜(下述简称DLC膜)的问题,介绍了在红外光学材料ZnS基底上沉积DLC膜的方法,指出了采用在ZnS基底表面镀制DLC膜的方法,来解决在ZnS基底表面上镀制高效增透膜后,其膜层耐磨强度不足以抵抗恶劣环境的缺点;同时,通过膜系优化设计,利用镀制组合膜层的方法来降低其单面反射率,可改善光学系统的成像质量。     

类金刚石薄膜厚度的测量

采用真空等离子休沉积法沉积了类金刚石膜,采用椭圆偏振光测量法测定了薄膜的厚度,在测量薄膜厚度的同时也可知道所沉积膜的均匀性情况。     

沉积压强对类金刚石薄膜组织和性能的影响

使用等离子增强化学气相沉积的方法制备不同沉积压强下的类金刚石薄膜。反应气体为C2H2和CH4,辅助气体为Ar。通过控制气体流量来达到改变沉积压强的目的,沉积压强分别为2.5Pa、3.8Pa、5.0Pa和6.1Pa,为排除其它工艺参数对实验结果的影响,气体流量比C2H2∶CH4∶Ar=2∶2∶1保持不变。使用扫描电镜、拉曼光谱和纳米压痕等检测手段对薄膜的组织和性能进行分析。研究表明,薄膜均为非晶态结构;随着沉积压强的升高,薄膜沉积速率不断提高;随着沉积压强的升高,薄膜的ID/IG值不断下降,说明薄膜中的sp3键含量不断上升,与此同时,薄膜中的硬度和弹性模量不断提高;通过Rockwell压痕法测试膜基结合力,结果表明四组薄膜均有较高的结合力,其中沉积压强为5.0Pa的薄膜的结合力最好。     

类金刚石薄膜

DLC是英文DIAMOND-LIKE CARBON一次的缩写。DLC是一种由碳元素构成、在性质上和钻石类似,同时又具有石墨原子组成结构的物质。类金刚石薄膜(DLC)是一种非晶态薄膜,由于具有高硬度和高弹性模量,低摩擦因数,耐磨损以及良好的真空摩擦学特性,很适合于作为耐磨     

过滤式阴极电弧沉积类金刚石薄膜的碳弧稳定性研究

介绍自行研制的一套过滤式阴极电弧沉积设备,并以石墨作为靶材进行类金刚石薄膜的沉积研究,碳弧本身的惰性限制了电弧的稳定性。电弧电压,磁场等对弧的稳定性有很大的作用。试验得到表面光滑的类金刚石薄膜,并对其进行了形貌分析。     

类金刚石薄膜涂层铣刀的磨损和寿命

类金刚石薄膜涂层铣刀的磨损和寿命近年来类金刚石薄膜涂层刀具在国外的使用日益广泛。这种薄膜涂层是用石墨在真空中以阴极喷涂法制成的，其硬度接近天然金刚石与钢的摩擦系数至少比工具钢低一个数量级涂覆温度一般不超过１８０Ｃ，可防止涂覆时刀具退火。为了研究这种涂...     

金刚石涂层机械密封环的制备与抛光特性研究

为延长机械密封环的工作寿命,采用热丝化学气相沉积法在碳化硅陶瓷机械密封环工作表面涂覆具有耐磨减摩特性的、厚度30~50 μm微米金刚石（MCD）、纳米金刚石（NCD）和微纳米金刚石（MNCD）薄膜。分析结果表明：MCD薄膜的拉曼光谱具有明显的多晶金刚石特征峰,NCD和MNCD薄膜的拉曼光谱中出现了代表石墨和不定型碳的G峰和D峰。利用平面抛光实验,对比MCD、NCD和MNCD涂层机械密封环后续处理的抛光特性。实验结果表明：MNCD涂层抛光效率高且耐磨损性能优异,其综合使用性能优于MCD和NCD涂层,更适合涂覆在机械密封环表面,以增强其耐磨损性能。     

低压电化学合成类金刚石薄膜研究

采用液相电化学沉积方法,以乙醇为碳源,并加入含有KCl的去离子水溶液,在较低电压下（60V以下）,在铜基底上沉积出类金刚石（DLC）薄膜.用SEM表征薄膜表面形貌,用Raman光谱表征薄膜成份结构.结盟表明,少量KCI的加入,能够大幅降低沉积电压并提高DLC的沉积速率;沉积出的类金刚石膜均为连续,有较低的表面粗糙度;SP3碳键含量较高（约为30％）.     

镶装式石墨密封环的压力变形研究

采用有限元方法分析镶装式石墨密封环和整体石墨密封环的压力变形情况.结果表明:密封压力使石墨环密封端面产生负锥度变形,随着密封压力的增大,端面压力变形呈线性增加;镶装式结构能显著增加石墨环的整体强度和刚度,减小密封端面的压力变形,提高机械密封的可靠性.     

脉冲多弧离子镀制备类金刚石薄膜的力学特性

利用脉冲多弧离子镀技术在硅基底上沉积类金刚石薄膜。分析了类金刚石薄膜的硬度和工艺参数的关系 ,讨论了薄膜的耐磨性和化学稳定性。     

磁过滤阴极弧法TiN薄膜的制备及其微观机械性能研究

采用“S”型磁过滤阴极弧等离子体沉积技术,室温下在（111）面单晶硅上沉积氮化钛薄膜。采用AFM和XRD技术分别对薄膜的表面形貌和晶体择优取向进行了表征,并用微刻划的方法分析薄膜的微观机械性能。结果表明,薄膜表面光滑致密,随偏压的增大,表面颗粒粒径先增大后减小,并且从（111）面的择优取向转变成（220）面。在刻划实验中,随载荷增加,薄膜先后经历了完全弹性变形,弹-塑性变形和脆性断裂阶段。利用直接和间接2种方法对得到的薄膜的临界载荷进行分析对比,发现在不同负偏压下,薄膜的内应力和临界载荷不同。随着负偏压的增大,薄膜的内应力逐渐增大,临界载荷逐渐减小。在-100V偏压下制备的氮化钛薄膜的微观机械性能最为理想。     

柴油机活塞环表面类金刚石薄膜在模拟工况下摩擦学性能

大缸径、长冲程的大功率柴油机的活塞环-缸套摩擦副易发生异常磨损,使柴油机动力性能丧失,甚至发生拉缸等重大事故,通过先进的表面处理技术可显著改善活塞环-缸套摩擦副的润滑条件,提高活塞环-缸套摩擦副的摩擦学性能。采用阴极电弧离子镀技术在铬-陶瓷复合镀(CKS)活塞环表面制备厚度为7 μm的DLC薄膜,研究CKS活塞环表面的DLC薄膜在柴油机模拟工况下的摩擦学性能。结果表明：在干摩擦、室温贫油和高温贫油的工况下,CKS活塞环表面的DLC薄膜可以显著减小活塞环-缸套摩擦副对摩的摩擦因数,降低缸套的磨损;摩擦过程中DLC薄膜与润滑油的协同润滑作用以及DLC薄膜的石墨化是改善活塞环-缸套摩擦副摩擦学性能的主要原因。     

Effect of Molecular Structure on Friction and Wear of Polymer Thin Films Deposited on Si Surface

In this study, the influence of the molecular structure (linear or with bulky side groups) of polymer films covalently attached to Si surface on tribological properties is investigated. Two polymers, PE (polyethylene) and PS (polystyrene), are selected where PE has simple linear molecular structure whereas PS has linear molecular structure but contains bulky benzene groups located at the sides of the linear chain. PE and PS molecules, both with reactive maleic anhydride groups, are chemisorbed onto Si via an intermediate APTMS SAM (3-aminopropyltrimethoxysilane self-assembled monolayer). Water contact angle measurements, AFM (atomic force microscopy), ellipsometry, and XPS (X-ray photoelectron spectroscopy) are used to identify and characterize the polymer films. Tribological properties are studied using a microtribometer where a 4 mm diameter Si₃N₄ ball is used as the counterface. Among the two polymer films investigated, Si/APTMS/PE has shown very low coefficient of friction (0.08) and high wear life (∼4,400 cycles) than those of Si/APTMS/PS. Surprisingly, Si/APTMS/PS did not show any improvement in tribological properties when compared to that of bare Si. The present study proves that the polymer with linear molecular structure without the bulky side groups show good tribological properties even when it is coated as a thin film and hence such polymers can be used as thin-films for reducing friction and wear of substrates such as Si or other materials.     

Pressure Dependence of Shear Strengths of Thin Films on Metal Surfaces Measured in Ultrahigh Vacuum

The friction coefficient is measured for systems consisting of a thin potassium chloride film deposited onto a variety of clean, flat metal substrates, namely Pb, Sn, Au, Ag, Cu, Pd, Fe, Ta, and two types of steel, which are rubbed by a tungsten carbide pin in an ultrahigh vacuum. The friction coefficients are plotted versus 1/H _S, the inverse of the substrate hardness, where two regimes are found. In the first regime, where deformation at the asperity tips is suggested to be plastic, the observed variation in friction coefficient with substrate hardness is rationalized by assuming that the shear strength S for sliding on a KCl film varies with contact pressure P as S = S ₀ + aP, yielding values for a of 0.14 ± 0.02 and S ₀ of ~60–70 MPa. In the second regime, it is proposed that the softer, film-covered Pb and Sn substrates are closer to being in conformal contact with the rough tribopin. These values of S ₀ and a, along with the measured surface asperity height distribution of the tribopin and the value of the friction coefficient for a KCl monolayer on the metal, are used to rationalize the observed increase in friction coefficient with increasing film thickness.     

Mechanical and Tribological Properties of Diamond-Like Carbon Films Deposited by Electron Cyclotron Resonance Microwave Plasma Chemical Vapor Deposition

Mechanical and tribological properties of diamond-like carbon (DLC) films deposited by electron cyclotron resonance microwave plasma chemical vapor deposition were analyzed by nanoindentation, nanoscratch and ball-on-disk sliding tests. As the results, hardness and residual stress which depended on the substrate bias voltage had combined effects on the scratch resistance of the films. In sliding friction tests, the transferred layer on the surface of the counterpart accounts for the decrease of friction coefficient with increasing sliding distance. Atomic force microscopic images of the DLC films and the counterpart Si₃N₄ ball surfaces indicate that the sliding friction process could be treated as a periodical scratching process with many indenters.     

空间飞轮轴承DLC涂层表面改性的工艺研究

使用类金刚石薄膜(Diamond Like Carbon,DLC)作为涂层,采用等离子体离子浸没注入技术Plasma Immersion Ion Implantation and Deposition,PIIID)对空间飞轮长寿命轴承沟道表面进行改性。结果表明,陪试件表面DLC改性后表面粗糙度、轴承内外沟道轮廓形状误差等特性未发生明显改变,改性层表面纳米硬度提高2倍左右;陪试件摩擦试验结果表明,改性后表面的摩擦学性能得到了明显改善;DLC涂层的稳定摩擦因数仅为基体的1/3～1/4,有利于延长空间飞轮轴承的工作寿命。     

H13钢离子氮化前后表面沉积CrAlN薄膜的耐氯离子腐蚀性能

在离子氮化前后的H13钢表面沉积了CrAlN薄膜,研究了其在质量分数为3.5%的NaCl溶液中的耐腐蚀性,并用场发射扫描电镜观察了薄膜腐蚀前后的表面形貌。结果表明:H13钢基体表面沉积CrAlN薄膜后的耐腐蚀性能显著提高;经离子氮化和表面沉积CrAlN薄膜复合处理后,耐腐蚀性进一步提高,试验后表面没有出现明显的腐蚀坑及膜层脱落。