散射型近场扫描光学显微镜的探针振动参数优化研究

基于原子力显微镜平台设计了可见-近红外波段的散射型近场扫描光学显微镜,通过理论模型计算和实验测量,分析了散射探针振动的调制振幅和扫描反馈幅值对近场信号的影响。研究表明:与探针针尖尺寸相近的调制振幅有利于抑制背景散射噪声及优化近场信号的信噪比;当探针扫描反馈幅值与自由空间调制振幅之比大于90%时,可基本消除探针扫描过程中非简谐振动对近场成像测量的影响。     

传统光学显微镜与近场光学显微镜

近场光学显微镜是对于常规光学显微镜的革命。它不用光学透镜成像 ,而用探针的针尖在样品表面上方扫描获得样品表面的信息。分析了传统光学显微镜与近场光学显微镜成像原理的物理本质和两种显微镜系统结构的异同点。介绍了光纤探针的制作方法。重点讨论了近场探测原理、光学隧道效应及非辐射场的性质     

运用碳纳米管原子力显微镜针尖减小长程力作用的研究

减小探针和样品表面之间的长程宏观力是原子力显微镜获得高分辨率成像的关键。首先通过理论分析得出影响长程力的主要因素是探针的几何形状和尺寸。然后分别运用几何形状和尺寸不同的原子力显微镜的传统Si针尖和碳纳米管针尖对样品进行扫描试验研究,结果显示碳纳米管针尖较传统针尖获得了高分辨率的图像。这一结果表明,碳纳米管针尖减小了成像中宏观长程作用力的影响,是理想的原子力显微镜针尖。     

散射式太赫兹扫描近场光学显微技术研究

基于散射式近场探测原理,设计并搭建了散射式太赫兹扫描近场光学显微系统(THz s-SNOM),实现了纳米量级空间分辨率的太赫兹近场显微成像测量。该系统以输出频率范围为0.1~0.3THz的太赫兹倍频模块为发射源,通过纳米探针的针尖产生纳米光源与样品相互作用,并将样品表面的倏逝波转化为可在远场测量的辐射波。通过探针逐点扫描样品表面,同时获得了样品表面的形貌图和太赫兹近场显微图。该系统的显微分辨率取决于探针针尖的曲率半径,而与太赫兹波的波长无关。使用该系统测量了金薄膜/硅衬底样品和石墨烯样品的近场显微图,结果表明,近场显微的空间分辨率优于60nm,波长与空间分辨率之比高达λ/26000。     

AFM探针-样品作用力模拟及动力学分析

针对原子力显微镜中探针-样品系统间力学特性的复杂性,本文建立了针尖-样品系统的分子动力学模型,采用混合势模拟了它们间的相互作用力并获得了力-距离曲线表达式。基于该表达式,建立了系统动力学方程,分别采用多尺度法和数值仿真研究了不同样品材料对原子力显微镜针尖-样品耦合系统动力学特性的影响。结果表明:不同样品材料对针尖的受力情况影响较大,力-距离曲线波动明显,分析中应区别对待;针尖样品系统中存在丰富的周期运动,且不同的样品材料对原子力显微镜耦合系统的非线性动力学行为有较大的影响。     

扫描探针针尖与试样间静电力的解析方法

针对主体为圆锥、尖端为球冠的扫描探针物理模型,基于针尖与导体平面间电场分布假设,提出计算扫描探针针尖与导体平面间的静电力解析模型。该模型模拟计算结果与采用等效电荷方法数值计算结果相一致。     

基于数学形态学方法的AFM探针建模研究

AFM扫描图像可被认为是探针针尖的形貌和扫描样品表面形貌的数学形态学卷积结果,需要用反卷积的方法排除扫描图像中探针形貌引起的失真影响。本文在已有基于数学形态学的探针盲建模算法基础上,提出了一种可快速实现特征点优化提取的方法,同时提出了一种可降低最优降噪阈值估计复杂性的基于临界阈值搜索新方法。最后给出了仿真与CNT扫描图像的重构实验结果。实验表明,本文介绍的方法提高了探针建模的计算速度和建模精度,可以对AFM成像质量进行有效的失真修正和改善。     

纳米操作加工过程定位检测问题研究

微纳米操作、加工、检测和控制在各个领域获得广泛的研究和应用,在微纳米层次上进行原位、定位的操作、检测、加工是经常遇到的问题。扫描探针显微镜技术(Scanningprobemicroscope,SPM)提供强有力的工具,人们利用其不同类型的针尖与相应样品表面产生的化学或物理作用达到目的。但扫描探针显微镜针尖同时用于检测、加工和成像,会因为针尖磨损、状态的改变,影响检测信息的准确性、可靠性,直接影响结果的判定。本文提出一种在微操作加工过程的定位检测技术,即操作过程工具和探针承担不同任务,工具负责加工操作,探针用于检测并定位于操作加工位置,进行了实验并分析讨论定位过程相关问题。     

纳结构的连续激光复合微纳探针刻划加工

为了加工形貌稳定且尺寸尽可能小的纳结构,建立了一套连续激光复合微纳探针的加工系统,并研究了光纤探针导光的连续激光辐照微纳探针的近场增强效应以及该系统的加工性能。首先,根据表面等离子体激元理论仿真分析了激光辐照原子力显微镜(AFM)探针的近场增强因子,并研究了微纳探针的针尖温度场和针尖热膨胀。接着,搭建了基于光纤探针导光的连续激光复合微纳探针的纳结构加工系统。最后,对聚乙烯片状材料样品进行了纳结构加工。结果显示:加工得到的纳米点尺度为200nm左右;纳米线的尺度为30~40nm。结果表明:光纤探针导光连续激光复合微纳探针系统避免了复杂的空间光路结构,是一种成本低廉,结构简单的系统,能够实现纳结构的加工。     

基于分子动力学的原子力显微镜表面成像

基于非接触式原子力显微镜针尖扫描成像机理,应用分子动力学方法采用非刚性针尖-表面原子团簇相互作用模型,模拟超低温环境下,非接触式原子力显微镜单晶硅针尖扫描单晶硅(111)-(7×7)表面成像过程.仿真计算采用两种原子间经验势函数描述针尖-表面原子间相互作用,两种晶向针尖末端模型都实现了对单晶硅(111)-(7×7)表面原子级分辨率仿真成像,在某些超原子级分辨率仿真图像中在单晶硅(111)-(7×7)表面Adatom原子位置出现了的双月牙峰形结构,模拟计算与成像试验文献中得到的图像基本一致.同时对采用确定的势函数及确定的晶向针尖末端,实现稳定成像的扫描针尖-表面距离进行讨论.扫描过程中针尖和被测表面形貌轻微改变,对扫描成像结果影响不大.     

Spectroscopy of the shear force interaction in scanning near-field optical microscopy

Shear force detection is a common method of tip-sample distance control in scanning near-field optical microscopy. Shear force is the force acting on a laterally oscillating probe tip near a surface. Despite its frequent use, the nature of the interaction between tip and sample surface is a matter of debate. In order to investigate the problem, approach curves, i.e. amplitude and phase of the tip oscillation as a function of the tip-sample distance, are studied in terms of a harmonic oscillator model. The extracted force and damping constants are influenced by the substrate material. The character of the interaction ranges from elastic to dissipative. The interaction range is of atomic dimensions with a sharp onset. Between a metal-coated tip and a Cu sample, a power law for the force-distance curve is observed.     

The height regulation of a near-field scanning optical microscope probe tip

A nonoptical detection of the optical fibre tip has been developed. By detecting the output signal from a tiny piezoelectric detector attached to the vibrating fibre tip, the distance between the fibre tip and the sample has been successfully controlled. The frequency responses of the system composed of tip, the dither and the detector have been studied. The difference between the shear-force detection and the tapping-mode detection is discussed. It is found that the shear force exerted on the tip reduces the vibration amplitude with an unvaried resonance frequency. However, in the tapping mode, the resonance frequency varies with the tip–sample distance as the force is exerted on the fibre tip only within a half period. This requires better adjustments for the tapping-mode detection.     

Non-optical tip–sample distance control method for scanning near-field optical microscopy using a piezoresistive micro cantilever

A piezoresistive micro cantilever is applied to monitor the displacement of an optical fibre probe and to control tip–sample distance. The piezoresistive cantilever was originally made for a self-sensitive atomic force microscopy (AFM) probe and has dimensions of 400 µm length, 50 µm width and 5 µm thickness with a resistive strain sensor at the bottom of the cantilever. We attach the piezoresistive cantilever tip to the upper side of a vibrating bent optical fibre probe and monitor the resistance change amplitude of the strain sensor caused by the optical fibre displacement. By using this resistance change to control the tip–sample distance, the two-cantilever system successfully provides topographic and near-field optical images of standard samples in a scanning near-field optical microscopy (SNOM)/AFM system. A resonant characteristic of the two-cantilever system is also simulated using a mechanical model, and the results of simulation correspond to the experimental results of resonance characteristics.     

A versatile multipurpose scanning probe microscope

A combined scanning probe microscope has been developed that allows simultaneous operation as a non‐contact/tapping mode atomic force microscope, a scattering near‐field optical microscope, and a scanning tunnelling microscope on conductive samples. The instrument is based on a commercial optical microscope. It operates with etched tungsten tips and exploits a tuning fork detection system for tip/sample distance control. The system has been tested on a p‐doped silicon substrate with aluminium depositions, being able to discriminate the two materials by the electrical and optical images with a lateral resolution of 130 nm.     

The height regulation of a near-field scanning optical microscope probe tip

A nonoptical detection of the optical fibre tip has been developed. By detecting the output signal from a tiny piezoelectric detector attached to the vibrating fibre tip, the distance between the fibre tip and the sample has been successfully controlled. The frequency responses of the system composed of tip, the dither and the detector have been studied. The difference between the shear-force detection and the tapping-mode detection is discussed. It is found that the shear force exerted on the tip reduces the vibration amplitude with an unvaried resonance frequency. However, in the tapping mode, the resonance frequency varies with the tip-sample distance as the force is exerted on the fibre tip only within a half period. This requires better adjustments for the tapping-mode detection.     

Inverse estimation of the tapered probe-sample shear force of scanning near-field optical microscope

In this paper, the conjugate gradient method of minimization with an adjoint equation is successfully applied to solve the inverse problem in estimating the shear force between the tapered probe and sample during the scanning process of scanning near-field optical microscope (SNOM). While knowing the available deflection at the tapered probe tip, the determination of the interaction shear force is regarded as an inverse vibration problem. In the estimating processes, no prior information on the functional form of the unknown quantity is required. The accuracy of the inverse analysis is examined by using the simulated exact and inexact measurements of deflection at the tapered probe tip. Numerical results show that good estimations on the interaction shear force can be obtained for all the test cases considered in this study.     

Ultra stable tuning fork sensor for low-temperature near-field spectroscopy

We report on a distance control system for low-temperature scanning near-field optical microscopy, based on quartz tuning fork as shear force sensor. By means of a particular tuning fork-optical fiber configuration, the sensor is electrically dithered by an applied alternate voltage, without any supplementary driving piezo, as done so far. The sensitivity in the approach direction is 0.2nm, and quality factors up to 2850 have been reached. No electronic components are needed close to the sensor, allowing to employ it in a liquid He environment. The system is extremely compact and allows for several hours of stability at 5 K.     

Shear force control for a terahertz near field microscope

We report on the advancement of apertureless terahertz microscopy by active shear force control of the scanning probe. Extreme subwavelength spatial resolution and a maximized image contrast are achieved by maintaining a tip-surface distance of about 20 nm. The constant distance between scanning tip and surface results in terahertz images that mirror the dielectric permittivity of the surface.     

Near-field optics on silicon–electrolyte junctions

A technique allowing near-field photocurrent (PC) mapping of silicon surfaces in contact with an electrolyte is presented. The illumination source is an optical fibre tip with a 100-nm aperture. A shear force detection system controls the tip–sample distance while scanning the tip across the silicon–electrolyte interface. Topographic and PC images on SiO₂/Si mesas both show 300 nm resolution. It is shown that this PC contrast is induced by the tip–topography interaction and hence the PC resolution is limited by the resolution of the topography. Indeed, PC mapping on topography-less patterned porous-silicon/silicon samples shows that the lateral resolution is only limited by the aperture size which is of the order of 100 nm.     

The tetrahedral tip as a probe for scanning near-field optical microscopy at 30 nm resolution

The tetrahedral tip is introduced as a new type of a probe for scanning near-field optical microscopy (SNOM). Probe fabrication, its integration into a scheme of an inverted photon scanning tunnelling microscope and imaging at 30 nm resolution are shown. A purely optical signal is used for feedback control of the distance of the scanning tip to the sample, thus avoiding a convolution of the SNOM image with other simultaneous imaging modes such as force microscopy. The advantages of this probe seem to be a very high efficiency and its potential for SNOM at high lateral resolution below 30 nm.