激光三角法扫描测头特性的研究

在分析了激光三角法位移测量原理的基础上,以ＩＢ－１２型激光三角法位移传感器为实例,研究了激光三角法位移传感器的使用特性,补偿非线性误差、倾斜角误差,提高了测量精度,使其能够作为非接触式扫描测头用在三坐标测量机上,完成空间自由曲面的非接触扫描测量。     

Intermittent Process Measurement of a Freeform Surface Profile with a Circular Triangulation Laser Probe on a Machining Centre

This paper describes the development of a non-contact type system for measuring a freeform surface on a machine tool. A laser probe, model OTM-3A20 made by Wolf & Back Co., was integrated into a CNC machining centre as a non-contact sensor. An adjustment device for the laser probe was designed to minimise the cosine error caused by assembly inaccuracy. An alignment test of the measuring laser beam was carried out using a calibrated specimen. The systematic accuracy of the circular triangulation laser probe and a standard triangulation laser probe, with respect to the surface roughness, surface slope, and coating colour of the workpiece, was investigated by using an HP5529A laser interferometer system. The measuring system, which consists of a personal computer, a CNC controller of a machining centre, a Renishaw MP10 touch-trigger probe system, and the controller of the laser probe system, was integrated information-technically. Automatic measuring software was developed for the purpose of measuring path simulation, generation of NC codes, and error analysis of the measured data. The profile error of the tested object, measured by the laser probe and the coordinate measuring machine respectively was found to be within 45 μm. In this case, the tolerance of the designed part is about 50 μm, so the developed system can be applied to the inspection of mould production in bakelite according to the experimental results. ID="A1"Correspondance and offprint requests to: Dr Fang-Jung Shiou, Department of Mechanical Engineering, National Taiwan University of Science and Technology, No. 43, Section 4, Keelung Rd. 106 Taipei, Taiwan. E-mail: shiou@mail.ntust.edu.tw     

Inverse determination of Johnson–Cook model constants of ultra-fine-grained titanium based on chip formation model and iterative gradient search

In this paper, a systematic approach on how to predict kinematic errors based on tolerance of machine tools’ guideways is introduced. Firstly, the truncated Fourier series function is applied to fit curve of guideways surface. Since geometric profile errors are regarded as a bridge between tolerance and kinematic errors of machine tools’ guideways, the mapping relationship between tolerance and geometric profile errors of machine tools’ guideways is formulated, and the mapping relationship between geometric profile errors and kinematic errors of guideways is established. Then, kinematic errors prediction model based on tolerance of guideways is subsequently proposed. Finally, simulation verification is conducted with this method. Simulation results show the range of the predicted kinematic errors (positioning error, y direction and z direction straightness error, roll error, pitch error, and yaw error) is 17.12 μm, 56.57 μm, 70.71 μm, 28.28 μrad, 141.42 μrad, and 113.14 μrad, respectively. In order to verify the feasibility and effectiveness of the presented method, a measuring experiment is carried out on guideways of a gantry-type five-axis milling machine tools by using a dual-frequency laser interferometer. The measured and identified discrete data can be fitted precisely by Fourier curve fitting method. The fitting results show the range of the measured kinematic errors is 16.96 μm, 59.43 μm, 68.63 μm, 28.65 μrad, 135.40 μrad, and 111.58 μrad, respectively. The maximum residual errors between the predicted and measured values of kinematic errors are 1.67 μm, 5.19 μm, 5.50 μm, 1.87 μrad, 9.81 μrad, and 7.07μrad, respectively. Comparing with the measured results of kinematic errors, residual errors are considerably small and can be neglected. Therefore, there is no doubt that this method is effective enough for predicting kinematic errors and can be used to replace the measurement of kinematic errors. In the design stage of machine tools, this approach is convenient for engineers to derive the distribution of kinematic errors. And its basic idea can be applied to other type of machine tools’ guideways.     

NON-CONTACT MEASUREMENT OF SCULPTURED SURFACE OF ROTATION

A method for measuring the sculptured surface of rotation by using coordinate measuring machine (CMM) and rotary table is proposed. The measurement is realized during the continuous rotation of the workpiece mounted on the rotary table while the probe moves along the generatrix of the surface step by step. This method possesses lots of advantages such as simplicity of probe motion, high reliability and efficiency. Some key techniques including calibration of the effective radius of the probing system, determination of the position of axis of rotation, auto-centering of the workpiece, data processing algorithm, are discussed. Approaches for determining the coordinates on measured surface, establishing workpiece coordinate system and surface fitting are presented in detail. The method can be used with contact or non-contact probes. Some fragile ceramic and plaster parts are measured by using the system consisting of a CMM, rotary table, motorized head and non-contact laser triangulation probe. The measurin     

非接触测量中激光扫描探头的研究

本文基于光学三角测量原理设计了一种高精度、多功能的非接触激光扫描探头装置,对该装置的性能特点进行了系统地研究,并用所设计的探头装置对几种不同的漫射面进行了实际测量,给出了实验结果,实验表明该装置精度优于2μm。     

In-process out-of-roundness measurement probe for turned workpieces

A new in-process and non-contact probe is proposed to measure the diameter and the roundness of turned workpieces. The initial probe discussed in previous publications exhibited diameter measurements with good accuracy (uncertainty 5 μm over 100 mm). This paper discusses the implementation of roundness measurement into the initial probe and its performance. The principle of the roundness measurement is based on the relationship between the displacement and the light intensity. The probe delivers a maximum error of 0.5 μm with an uncertainty of 1 μm for roundness measurement over a range of 100 mm diameter.     

A prototyping and microfabrication CAD/CAM tool for the excimer laser micromachining process

A CAD/CAM tool for prototyping and small-scale production of micro-electro-mechanical systems (MEMS) devices based on the excimer laser ablation process has been developed. The system’s algorithms use the 3D geometry of a microstructure, defined as an STL file exported from a CAD model, and parameters that influence the process (laser fluence, pulse repetition frequency, number of shots per area, wall angle, stitching errors) to automatically generate a precise NC part program for the excimer laser machine. The performance of the system has been verified by NC part program generation for several 3D microstructures and subsequent machining trials. An initial stitching error of 23.4±2.2-μm wide and 3.4±1.5-μm high was observed when the overlap size between adjacent volumes was zero, when ablating 100×100-μm features in polycarbonate (PC) at a fluence of 0.5 J/cm² using a workpiece-dragging technique. When the size of the overlap was optimised by a system based on optimal process parameters determined by the Taguchi design of experiment method (DOE), and incorporated in the mask design, the maximum stitching error was reduced to 13.4±2.2-μm wide and 1.4±0.9-μm high under the same conditions. By employing a hexagonal-shaped mask with incorporated size of the image overlap, reduced horizontal-stitching errors of 2.4±0.2-μm wide and 1.4±0.2-μm high were observed. The system simplifies part program creation and is useful for excimer laser operators who currently use a tedious trial and error process to create programs and complex masks to generate microstructure parts.     

Optimum design of cam-roller follower mechanism using a new evolutionary algorithm

Selection of tooling to perform specific operations like drilling and milling on ceramic materials using rotary ultrasonic machining process is an important aspect to meet stringent dimensions on workpiece as well as intended performance of tool. This phenomenon is more critical for micro rotary ultrasonic machining. In the present study, an effort was made to do micro drilling operation of Ø0.3 mm tool with varying geometry, having different wall thicknesses and abrasive grain sizes using design of experiments. The effect of tool-based parameters like grain size and wall thickness has been studied on axial cutting force, radial cutting force, tool wear, edge chipping area and taper. After examining axial and radial cutting forces, it has been concluded that lower wall thickness (80 μm) tool is good for drilling operation; and higher wall thickness (100 μm) tool is good for milling operation under same material removal rate conditions. It has been also investigated that lower wall thickness (80 μm) tool has less edge chipping area and less taper and can impart high drilling depth as compared to higher wall thickness (100 and 150 μm) tool. It is also concluded that lesser grain size (15 μm) tools are advantageous in terms of edge chipping area and cutting force for drilling and milling operations as compared to higher grain size (30, 35 and 45 μm) tool at constant material removal rate. Higher grain size tools have been broken at 1.13 mm³/h material removal rate conditions due to bad profile accuracy. But higher grain size tools have worked fairly well at less material removal rate condition. Higher grain size tools produced less wear. Tool wear was found minimum in higher wall thickness (100 μm) tool having higher abrasive grain size (30 μm). Using inferred results, Ø0.3 mm drilling experiments have been carried out on six aerospace ceramic materials. Also, groove of 0.5 mm size using Ø0.3 mm optimised tool has been successfully carried out in sintered SiC.     

Effect of process parameters in nanosecond pulsed laser micromachining of PMMA-based microchannels at near-infrared and ultraviolet wavelengths

This paper presents investigations on the effects of nanosecond laser processing parameters on depth and width of microchannels fabricated from polymethylmethacrylate (PMMA) polymer. A neodymium-doped yttrium aluminium garnet pulsed laser with a fundamental wavelength of 1,064 nm and a third harmonic wavelength of 355 nm with pulse duration of 5 ns is utilized. Hence, experiments are conducted at near-infrared (NIR) and ultraviolet (UV) wavelengths. The laser processing parameters of pulse energy (402–415 mJ at NIR and 35–73 mJ at UV wavelengths), pulse frequency (8–11 Hz), focal spot size (140–190 μm at NIR and 75 μm at UV wavelengths) and scanning rate (400–800 pulse/mm at NIR and 101–263 pulse/mm at UV wavelengths) are varied to obtain a wide range of fluence and processing rate. Microchannel width and depth profile are measured, and main effects plots are obtained to identify the effects of process parameters on channel geometry (width and depth) and material removal rate. The relationship between process variables (width and depth of laser-ablated microchannels) and process parameters is investigated. It is observed that channel width (140–430 μm at NIR and 100–150 μm at UV wavelengths) and depth (30–120 μm at NIR and 35–75 μm at UV wavelengths) decreased linearly with increasing fluence and increased non-linearly with increasing scanning rate. It is also observed that laser processing at UV wavelength provided more consistent channel profiles at lower fluences due to higher laser absorption of PMMA at this wavelength. Mathematical modeling for predicting microchannel profile was developed and validated with experimental results obtained with pulsed laser micromachining at NIR and UV wavelengths.     

Software compensation of rapid prototyping machines

This paper addresses accuracy improvement of rapid prototyping (RP) machines by parametric error modeling and software error compensation. This approach is inspired by the techniques developed over the years for the parametric evaluation of coordinate measuring machines (CMM) and machine tool systems. The confounded effects of all errors in a RP machine are mapped into a “virtual” parametric machine error model. A generic artifact is built on the RP machine and measured by a master CMM. Measurement results are then used to develop a machine error function and error compensation is applied to the files which drive the build tool. The method is applied to three test parts and the results show a significant improvement in dimensional accuracy of built parts.     

Analysis of digitizing errors of a laser scanning system

The digitizing errors of a high-speed 3D laser scanning system are analyzed and characterized in this paper. As the laser scanner is an electro-optical device and based on the principle of optical triangulation, the measurement accuracy is affected by the measured part geometry and its position within the scanning window. Commercial laser scanners are often calibrated in the scanning plane to account for variation of the incident angle of the laser beam. The effects of the scan depth and the projected angle, characterizing the surface normal of the measured part external to the scanning plane, on the measurement accuracy are not considered in the standard calibration process and have been identified by experiments in the present work. Experimental results indicate that the random error of the scanned data is close to the nominal value provided by the manufacturer. The systematic error shows a bilinear relationship with the scan depth and the projected angle and has a maximum value of about 160 μm. The developed empirical model correctly predicts the systematic error with a maximum deviation of only 25 μm.     

Evaluation on 3D micro-ground profile accuracy of micro-pyramid-structured Si surface using an adaptive-orientation WLI measurement

According to the aperture of the objectives, surfaces with steep topographies greater than approximate 25° are difficult or unable to measure with white light interferometry. Hence, an adaptive-orientation measurement is proposed by adjusting the incidence angle from 51° to 21°. In this study, a micro-grinding with #3000 diamond wheel V-tip was employed to fabricate the micro-pyramid-structured Si surface with 142 μm in depth and 38 nm in surface roughness. The objective is to evaluate the micro-profile accuracy of micro-ground Si surface. First, the four micro-ground surfaces of micro-pyramid-structured surface were measured along the adaptive orientation with an incidence angle, respectively; then iterative closest point (ICP) matching was used to reconstruct the whole micro-ground surface with four adaptive-orientation measured point clouds; finally, 3D reconstruction error and characterized profile error were investigated. It is shown that the ICP matching with denoising and finishing is valid to register four adaptive-orientation measured point clouds for reconstructing an integrated micro-ground surface. Moreover, a decrease in incidence angle to measured surfaces leads to a decrease in 3D reconstruction error, an increase in valid top-topographic point number and a decrease in characterized profile error. It is confirmed that the adaptive-orientation measurement with 21° incidence angle may enhance 3D reconstruction accuracy by about 35%, valid top-topographic point number by about 3 times and characterized profile accuracy by about 38% against the traditional measurement, respectively. The micro-ground form error of 5.5 μm and the characterized profile error of 6.0 μm may be achieved, respectively, thus the micro-grinding is valid for the precision micro-fabrication of micro-structured surface.     

A laser sensor with multiple detectors for freeform surface digitization

An integrated laser scanning sensor for freeform surface digitization is presented. The sensor consists of a diode laser light source and four position-sensitive device (PSD) detectors. The stand-off distance of the sensor is 180 mm and the measurable range is 90 mm. The Lambert model is applied to calculate the displacement between the sensor and the measured point on the object surface along the optical axis, under the assumption of a diffusive surface. The inclination angle of the measured point from the vertical plane of the laser beam is calculated by mathematical inference. Those data are used in error compensation to improve system precision. The new design of multiple detectors could increase the measurable angle and could solve the dead space problem in single point laser of triangulation measurement. The computer simulation and actual measurements show that the displacement resolution reaches 50 μm, and the system performs well in regards to stability and repeatability. The sensor system could be mounted on the NC machine orX-Y platform for freeform surface digitization.     

Verification of the positioning accuracy of industrial coordinate measuring machine using optical-comb pulsed interferometer with a rough metal ball target

An optical-comb pulsed interferometer was developed for the positioning measurements of the industrial coordinate measuring machine (CMM); a rough metal ball was used as the target of the single-mode optical fiber interferometer. The measurement system is connected through a single-mode fiber more than 100 m long. It is used to connect a laser source from the 10th floor of a building to the proposed measuring system inside a CMM room in the basement of the building. The repetition frequency of a general optical comb is transferred to 1 GHz by an optical fiber-type Fabry–Pérot etalon. Then, a compact absolute position-measuring system is realized for practical non-contact use with a high accuracy of measurement. The measurement uncertainty is approximately 0.6 μm with a confidence level of 95%.     

Experimental analysis of applicability of a picosecond laser for micro-polishing of micromilled Inconel 718 superalloy

An increasing number of recent technological advancement is linked to the widespread adoptions of ultra-short picosecond (ps) pulsed laser in various applications of material processing. The superior capability of this laser is associated with the precise control of laser–material interaction as an outcome of extremely short interaction times resulting in almost-negligible heat affected zones. In this context, the present study explores the applicability of a picosecond laser in laser micro-polishing (LμP) of Ni-based superalloy Inconel 718 (IN718). The specific research goals of the present study constitute determination of melting regime—a mandatory phase for LμP, establishing the concept of polishability of the spatial contents of the initial surface topography and experimental demonstration of the process capability of a ps laser for potential micro-polishing applications. The initial surface topography was prepared by micromilling operation with a step-over of 50 μm and scallop height of 2 μm. The LμP experiments were performed at five different levels of fluence associated with the melting regime by changing the focal offset, a parameter denoting the working distance between workpiece surface and focusing lens focal plane. The LμP performance was evaluated based on the line profiling average surface roughness (R _a) spectrum distributed at different spatial wavelength intervals along the laser path trajectory. Furthermore, additional statistical metrics such as material ratio and power spectral density functions were analyzed in order to establish the process parameters associated with best achievable surface finish. The applicability of ps LμP was demonstrated in two regimes—1D (line) and 2D (area) polishing. During 1D LμP, significant (～52 %) improvement of the surface quality was achieved by reducing an R _a value from 0.50 μm before polishing to an R _a value of 0.24 μm across the laser path trajectory on initially ground surface. In addition, an initially micromilled area of 4.5?×?4.5 mm was LμPed resulting in the reduction of an areal topography surface roughness (S _a) value from 0.435 to 0.127 μm (70.8 % surface quality improvement).     

基于PSD的转轴测量系统研究

研制了一种基于PSD的激光三角法非接触式光电转轴测量系统。阐述了系统的工作原理和结构设计,进行了转速和偏心度的测量实验。结果表明,该系统能够在测量转速的同时,准确地得到转子的偏心度,理论分辨力可达14μm,测量相对误差均不大于5%。该系统具有结构简单、精度高、可靠性好等优点,可实现在线实时测量。     

Evaluation of a multi-sensor horizontal dual arm Coordinate Measuring Machine for automotive dimensional inspection

Multi-sensor coordinate measuring machines (CMM) have a potential performance advantage over existing CMM systems by offering the accuracy of a touch trigger probe with the speed of a laser scanner. Before these systems can be used, it is important that both random and systematic errors are evaluated within the context of its intended application. At present, the performance of a multi-sensor CMM, particularly of the laser scanner, has not been evaluated within an automotive environment. This study used a full-scale CNC machined physical representation of a sheet metal vehicle body to evaluate the measurement agreement and repeatability of critical surface points using a multi-sensor horizontal dual arm CMM. It was found that there were errors between CMM arms and with regard to part coordinate frame construction when using the different probing systems. However, the most significant effect upon measurement error was the spatial location of the surface feature. Therefore, for each feature on an automotive assembly, measurement agreement and repeatability has to be individually determined to access its acceptability for measurement with a laser scanner to improve CMM utilisation, or whether the accuracy of a touch trigger probe is required.     

Evaluation of cutting quality of PMMA using CO2 lasers

Polymethyl methacrylate (PMMA) is a versatile thermoplastic that is well suited for engineering and many common applications. This article presents a study to evaluate the effect of the processing parameters (laser power and cutting velocity) under the quality of the cut of PMMA. A plan of experiments was established considering CO₂ laser cutting with prefixed processing parameters in plates of PMMA with 6 mm thickness. The objective was to evaluate the quality of the cut (surface roughness, dimensional precision and heat affected zone-HAZ) in linear and complex 2D cutting. The obtained results show that PMMA in complex 2D cutting presents dimension of HAZ between 0.12 to 0.37 mm, without burr and low surface roughness Ra?<?1 μm. The results present good repeatability.     

长跨度孔系直径与同轴度误差测量系统

针对飞机铰链件长跨度、小直径孔系的直径和同轴度误差高精度测量问题,研制了基于光电传感器的综合测量系统。多功能测头中的直流电机驱动自定心机构确定孔截面测量位置,光电编码器记录电机有效转动量,通过与标准环规进行比较间接测量各孔直径。以激光作为准直基准,安装在多功能测头前端的PSD检测激光光斑位置以确定各孔截面中心坐标,并进而评定出孔系的同轴度误差。使用该测量系统完成了孔系直径测量试验和PSD光斑检测线性及重复性试验。试验结果表明,与三坐标测量机测量结果相比,孔径测量相对误差小于10μm,PSD光斑位置检测重复性误差小于13μm,具备了较高的检测精度。     

实物三维数字化技术

本文分析了接触式三座标和非接触式光学实物三维数据采集技术。分析了非接触式光学采集的光三角法原理,比较了三种结构照明方式,包括点光源照明、线光源照明、面结构光照明,并对几种实体三维数据采集方法进行比较。探讨了实物三维数字化技术在逆向设计、实物复制、制造质量检验等方面的应用。