Tactile sensor based on piezoelectric resonance

We discuss here the realization of tactile sensors based on the principle of change in piezoelectric resonance frequency with the applied pressure. An array of electrodes has been adopted on either side of the PZT material to have independent resonators. The common areas sandwiched between the electrodes and excitable at resonance frequency of the PZT material are used to form the sensitive area of the tactile sensor. The electrodes were deposited using sputtering technique. Tactile sensors with 3/spl times/3, 7/spl times/7, and 15/spl times/15 array of electrodes are developed with different electrode dimensions and separation between the electrodes. The tactile sensor has been interfaced to computer for the convenience of automatic scanning and making it more user interactive. The tactile sensors developed with different spatial resolution were tested for different shaped objects placed in contact with the sensor. The 3/spl times/3 matrix tactile sensor showed relatively poor spatial resolution, whereas the 15/spl times/15- matrix tactile sensor showed improved spatial resolution. The sensor with 7/spl times/7 matrix elements was tested for its sensitivity to different extents of applied force/pressure. The output response study carried out on the sensors indicated that these sensors can provide information not only about the extent of force/pressure applied on the object, but also the contour of the object which is in contact with the sensor.     

Analysis of active damping in composite laminate cylindrical shells of revolution with skewed PVDF sensors/actuators

Active damping in a FRP composite cylindrical shell with collocated piezoelectric sensors/actuators is studied. The electrode on the sensors/actuators are spatially shaped to reduce spillover between circumferential modes. A three noded, isoparametric, semianalytical finite element is developed and used to model the cylindrical shell. The element is based on a mixed piezoelectric shell theory which makes a single layer assumption for the displacements and a layerwise assumption for the electric potential. The effects of location of patch of collocated piezoelectric sensors/actuators, percentage length of the shell covered with these patches, fiber angle of the laminae in the composite laminate, stacking sequence of laminae in a laminate and skew angle of the sensor/actuator piezoelectric material, on the system damping for various modes is studied.     

The influence of electric-field bending on the nonlinearity ofcapacitive sensors

Three-layered electrode structures are often employed in multiple-electrode capacitive position sensors. Even when advanced algorithms and well-designed guarding electrodes are used, the electric-field-bending effect is still one of the major contributors to the nonlinearity of capacitive position sensors. In this paper, the effects of electric-field bending on linearities of five capacitive linear-position sensors have been studied based on a physical model of the capacitive sensor. It is shown that the effect of electric-field bending on linearities strongly depends on the sensor structures, and that it is significantly reduced when advanced sensor structures and algorithms are used. The results are very useful for optimizing the sensor structure according to its application     

Effects of electrode configuration on polymer carbon-black composite chemical vapor sensor performance

The performance of polymer carbon-black composite chemical vapor sensors as a function of underlying electrode size and geometry has been studied. The sensor performance parameters investigated were sensor response magnitude to a toluene analyte (100, 500, and 1000 ppm), fundamental sensor noise in the presence of air, and two concentrations of toluene (100 and 500 ppm), and signal-to-noise ratio (100 and 500 ppm). An array of sensors with 42 different circular electrode configurations were designed, fabricated, and tested where electrode gap was varied from 10 to 500 /spl mu/m and the diameter of the sensors was varied from 30 to 2000 /spl mu/m. Each array of electrodes was coated with an approximately 1 /spl mu/m-thick layer of conducting polymer carbon-black composite with an insulating poly(alkylacrylate) polymer. The response magnitude, fundamental noise, and signal-to-noise ratio of each sensor was measured and compared to electrode geometry, such as electrode gap, aspect ratio, and overall size. No significant dependence of sensor response magnitude and noise to electrode configuration has been observed to be larger than the variation from sensor to sensor. However, the signal-to-noise ratio tended to decrease for sensors with the smallest scales.     

Influence of electrode material on properties of SnO2-based gas sensor

The influence of electrode material on the properties of oxide semiconductor gas sensor was studied. SnO₂ thick films were printed on top of Au and Pt electrodes on alumina substrate using screen-printing technique. The gap between the electrodes was made narrow (approx. 5 μm) to emphasize the effects, which the electrodes might have on the overall conductance and gas-sensing properties of the sensor, at different temperatures. Laser micromachining was used in the fabrication of the electrode structure with the narrow gap. Temperature-stimulated conductance measurements were carried out in different ambient atmosphere conditions in order to have information about the effects that the electrode materials have on the overall sensor conductance. Many different gases at different concentrations in synthetic air were used in the experiments. It is possible to conclude from the results that the interface between the electrode and sensing material has a very important role for the sensing mechanism of tin dioxide gas sensors.     

Design and analysis of a PZT-based micromachined acoustic sensor with increased sensitivity

The ever-growing applications of lead zirconate titanate (PZT) thin films to sensing devices have given birth to a variety of microsensors. This paper presents the design and theoretical analysis of a PZT-based micro acoustic sensor that uses interdigital electrodes (IDE) and in-plane polarization (IPP) instead of commonly used parallel plate-electrodes (PPE) and through-thickness polarization (TTP). The sensitivity of IDE-based sensors is increased due to the small capacitance of the interdigital capacitor and the large and adjustable electrode spacing. In addition, the sensitivity takes advantage of a large piezoelectric coefficient d33 rather than d31, which is used in PPE-based sensors, resulting in a further improvement in the sensitivity. Laminated beam theory is used to analyze the laminated piezoelectric sensors, and the capacitance of the IDE is deduced by using conformal mapping and partial capacitance techniques. Analytical formulations for predicting the sensitivity of both PPE- and IDE-based microsensors are presented, and factors that influence sensitivity are discussed in detail. Results show that the IDE and IPP can improve the sensitivity significantly.     

Miniaturized acceleration sensors with in-plane polarized piezoelectric thin films produced by micromachining

Miniaturized acceleration sensors employing piezoelectric thin films were fabricated through batch micromachining with silicon and silicon-on-insulator (SOI) wafers. The acceleration sensors comprised multiple suspension beams supporting a central seismic mass. Ferroelectric (Pb,La)(Zr,Ti) O(3) (PLZT) thin films were coated and in-plane polarized on the surfaces of the suspension beams for realizing electromechanical conversion through the piezoelectric effect. Interdigital electrodes were formed on the PLZT films and connected in parallel. Finite element analyses were conducted for the stress and strain distributions, providing guidance to the structural design, including optimizing electrode positioning for collecting the electrical output constructively. Uniformity of the beam thickness and sample consistency were significantly improved by using SOI wafers instead of silicon wafers. The measurement results showed that all the sensor samples had fundamental resonances of symmetric out-of-plane vibration mode at frequencies in the range of 8 to 35 kHz, depending on the sample dimensions. These sensors exhibited stable electrical outputs in response to acceleration input, achieving a high signal-to-noise ratio without any external amplifier or signal conditioning.     

Design and study on a 1–3 anisotropy piezocomposite sensor

A design method is presented for 1–3 anisotropy piezocomposite so as to differentiate each strain component when it is used as the sensor in smart materials and structures. The 1–3 piezocomposite has been tailored to anisotropy by matching the scales of the piezoelectric phase and the non-piezoelectric phase. The composite samples have been fabricated by an aligning–casting–slicing process and the piezoelectric properties of the composites in the x and y directions have been measured and analyzed physically. It is shown that the difference of the piezoelectric properties of the composite between the x and y directions is up to approximately 40%.     

Influence of raw carbon nanotubes diameter for the optimization of the load composition ratio in epoxy amperometric composite sensors

In this work, it is reported the necessity to characterize the raw carbon materials before their application in composite electrodes based on multiwall carbon nanotubes (MWCNTs) dispersed in epoxy resin for the development of improved amperometric sensors. These sensors must contain an optimum MWCNT/epoxy ratio for their best electroanalytical response. The main drawback in MWCNTs composite materials resides in the lack of homogeneity of the different commercial nanotubes largely due to different impurities content, as well as dispersion in their diameter/length ratio and state of aggregation. The optimal composite electrode composition takes into account the high electrode sensitivity, low limit of detection, fast response, and electroanalytical reproducibility. These features depend on carbon nanotube physical properties as the diameter. Three different commercial carbon nanotubes with different diameters were characterized by transmission electron microscopy and the results were significantly different from the ones provided by the manufacturers. Then, the three MWCNTs were used for the MWCNT/epoxy sensors construction. After an accurate electrochemical characterization by cyclic voltammetry and electrochemical impedance spectroscopy, they were employed as working electrodes using ascorbic acid as a reference analyte. Percolation theory was applied in order to verify the electrochemical results. It is demonstrated that the optimum interval load of raw carbon material in the optimized-composite electrodes closely depends on the MWCNTs diameter, needing 5 % in carbon content for the narrowest MWCNTs containing composite electrodes versus 12 % for the widest MWCNTs.     

Transition Metal Exchanged Zeolite Layers for Selectivity Enhancement of Metal-Oxide Semiconductor Gas Sensors

A novel method of improving the selectivity of metal oxide gas sensors has been developed by using catalytically active molecular sieve materials. They have been successfully introduced into a proprietary sensor array. The cracking patterns of linear alkanes over transition metal exchanged zeolite Y have been measured using a zeolite bed/GC/MS experimental set-up within a temperature range of 300degC to 400degC. Studies have been carried out regarding the effects of metal loading, zeolite type, material fabrication techniques, and operating temperature in relation to catalytic activity and selectivity. The composite sensors utilising the novel zeolite materials have been used in a custom built sensor rig that houses three dual electrode sensors and can measure real-time responses of these sensors to an introduced headspace generated from organic liquids     

Preparation of CdS doped carbon nanotubes and their electrochemical properties

A CdS doped carbon nanotube sol was synthesised by the sol-gel technique and applied to a titanium plate to synthesise a composite electrode. Energy dispersion X-ray spectroscopy and X-ray diffraction analysis confirmed that the electrodes contain CdS. Scanning electron microscopy revealed that the carbon nanotubes were uniformly dispersed on the surface of the plate. A two-chamber microbial fuel cell was constructed using the electrode as the anode, flexible graphite as the cathode and glucose solution as the substrate in the anode chamber. The effects of CdS dose, glucose concentration and temperature on the cell efficiency and organic degradation have been analysed. At 313 K, the two-chambered fuel cell possessed the optimum output voltage of 906 mV, with a power of 19·6 mW m^?2 and a removal rate of 81% for chemical oxygen demand in treatment of wastewater. The composite electrode was found to be stable and to perform reproducibly.     

炭纸/石墨基体NiHCF膜的碱金属离子分离性能

采用毛细化学沉积法在炭纸/石墨颗粒复合导电基体的微孔通道内合成铁氰化镍(Nickel hexacyanoferrate,NiHCF)薄膜,并考察了膜电极在碱金属溶液中的电控离子交换性能.通过扫描电子显微镜、能量色散谱、X射线光电子能谱、红外分子吸收光谱等分析了复合薄膜电极的表面形貌及组成;利用离子色谱检测了再生液中碱金属离子浓度变化;应用循环伏安法在1 mol · L~(-1) KNO_3/C_sNO_3溶液中考察了膜电极的离子交换容量、循环寿命与再生能力.结果表明:炭纸/石墨复合基体具有三维多孔结构特征,复合基体NiHCF膜电极具有大的离子交换容量、低的扩散阻力、良好的循环稳定性与再生能力,可用于碱金属离子的选择性分离.     

Resonant spectrum method to characterize piezoelectric films in composite resonators

In this paper, we present a direct method to characterize a piezoelectric film that is sandwiched with two electrodes and deposited on a substrate to form a four-layer thickness extension mode composite resonator (also known as over-moded resonator). Based on the parallel and series resonant frequency spectra of a composite resonator, the electromechanical coupling factor, the density and the elastic constant of the piezoelectric film can be evaluated directly. Experimental results on samples consisting of ZnO films on fused quartz substrates with different thickness are presented. They show good agreement with theoretical prediction. The mechanical effect of the electrode on the method is investigated, and numerical simulation shows that the effect of the electrodes can be properly corrected by the modified formulae presented in this paper. The effect of mechanical loss in piezoelectric film and in substrate on this method also has been investigated. It is proven that the method is insensitive to the losses.     

Impedimetric biosensor based on magnetic nanoparticles for electrochemical detection of dopamine

One of the difficulties which limit the use of electrochemical sensors for detection of dopamine is the interference from ascorbic acid. We have sought to address this problem through the synthesis and characterization of a suitable electrode material based on magnetic nanoparticles. The interference from the ascorbic acid was overcome by fabricating a negatively charged electrode surface using PEGylated arginine functionalized magnetic nanoparticles (PA-MNPs). The nanoparticles were characterized by various techniques viz., X-ray diffraction, FT-Infrared spectroscopy, transmission electron microscopy and vibrating sample magnetometer. The electrochemical behavior of the proposed sensor was investigated by cyclic voltammetry and the sensor showed high sensitivity and selectivity for dopamine. The response mechanism of the modified electrode is based on the interaction between the negatively charged electrode and the positively charged dopamine. Under optimized conditions, linear calibration plots were obtained for amperometric detection of dopamine (DA) over the concentration range of 1–9 mM dopamine, with a linear correlation coefficient of 0.9836, sensitivity of 121 μA/mM and a detection limit of 7.25 μM. Electrochemical impedance spectroscopy (EIS) has been used to study the interface properties of modified electrodes. The value of the polarization resistance (R_p) increases linearly with dopamine concentration in the range of 10 μM to 1 mM and the limit of detection (LOD) was calculated to be 14.1 μM. High sensitivity and selectivity, micromolar detection limit, high reproducibility, along with ease of preparation of the electrode surface make this system suitable for the determination of DA in pharmaceutical and clinical preparations.     

Synthesis, characterization, and gas-sensing property for HCHO of Ag-doped In2O3 nanocrystalline powders

Pure and Ag-doped In₂O₃ nanocrystalline powders with different doping concentrations have been prepared by a sol–gel method, and characterized by X-ray diffraction (XRD), high-resolution transmission electron microscopy (HRTEM), and X-ray photoelectron spectrum (XPS). The results indicated that these powders had a good crystalline structure with an average crystallite size of 12 nm. The indirect heating structure sensors were fabricated by loading these powders on ceramic tubes with Au electrodes. Gas-sensing measurements indicated that the sensor fabricated from 8 wt.% Ag-doped In₂O₃ could detect HCHO gas down to 2 ppm with a short response time (10–15 s) and an excellent selectivity at 100 °C.     

A novel non-enzymatic glucose sensor based on nickel (II) oxide electrospun nanofibers

A new enzymeless glucose sensor has been fabricated via electrospinning technology and subsequent calcination. The morphology and structure of the as-prepared nanofibers have been characterized by scanning electron microscopy (SEM), transmission electron microscopy (TEM), and X-ray diffraction (XRD). The electrocatalytic oxidation of glucose in alkaline medium at nickel oxide modified glassy carbon electrodes has been investigated. The modified electrodes offer excellent electrocatalytic activity toward the glucose oxidation at low positive potential (0.3 V). Glucose has been determined chronoamperometrically at the surface of NiO nanofibers modified electrode in 0.5 mM NaOH. Under the optimized condition, the calibration curve is linear in the concentration range of 2 x 10(-3) mM - 1 mM, and 1 mM - 9.5 mM. The detection limit (signal-to-noise 3) and response time are 3.394 x 10(-6) M and 2 s, respectively. The NiO electrospun nanofibers is easy to prepare and feasible in economy. The modified electrode is steady and can be used repeatedly, so it is reasonable to expect its broad use in non-enzymatic glucose sensor.     

Physical changes in tungsten and thoriated tungsten electrodes after subsecond heating

Tungsten and thoriated tungsten rods are commonly used as cathodes for arcs operating in argon. Thoriated tungsten electrodes (2 wt% thorium oxide) have significantly longer lifetimes than pure tungsten electrodes, though the reason for this is not well understood. Samples of both types of electrode were heated to the melting point of tungsten using a Subsecond pulse heating technique. The samples were then examined using electron microscopy and X-ray analysis and the results compared with similar examinations of unheated electrodes. There were definite physical changes apparent in the shape of the thoria particles, but no evidence of any reduction of the thoria.Paper presented at the Fourth International Workshop on Subsecond Thermophysics, June 27–29, 1995, Köln, Germany.     

Piezoelectric ZnO films by r.f. sputtering

Piezoelectric zinc oxide films are used in microelectromechanical systems (MEMS) applications, where they can be used in sensors to detect, e.g., pressure or acceleration. Beside sensors, ZnO films are applied in activation devices, where force is needed. Conductive-doped zinc oxide (most often with aluminum) is also used in optoelectronics. Piezoelectric films including AlN and ZnO are more difficult to produce than the corresponding conductive materials. In order to achieve good piezoelectricity in ZnO films, they have to possess high purity, a (0 0 1) orientation (ZnO has hexagonal crystal structure), high resistivity, and fine columnar microstructure perpendicular to the substrate. We have used r.f. magnetron (13.56 MHz) sputtering from a ZnO target in an oxygen atmosphere to achieve the piezoelectric ZnO. The aim of this work has been to develop an r.f. sputtering process for ZnO to achieve highly piezoelectric thin films. As a test vehicle to measure the piezoelectricity of the ZnO films we have fabricated resonators and passband filters in the 1–2 GHz range using standard microelectronics photolithography, deposition, and etching techniques on 100-mm diameter Corning glass or silicon wafers. The influence of the sputtering-process parameters on the film properties has been studied by X-ray diffraction, scanning electron microscopy, atomic force microscopy, and electrical measurements. In this study, the effects of the process parameters on the final material properties of the ZnO film are discussed in detail.     

Composites with piezoelectric thin fibers – first evidence of piezoelectric behavior

 The integration of functional components into composite materials is still a challenge for materials science. The integrated components themselves acting as sensor and/or as actuator should not interfere with the excellent mechanical properties of fiber-reinforced composite materials. Using this approach the implementation of ”one-dimensional”geometries – like fibers with small diameters – is recommended. Thin fibers consisting of piezoelectric materials like PZT are among the promising candidates offering the sensor/actuator coupling. Sol-gel processing is useful for fabricating PZT fibers thin enough to behave flexibly. Therefore, they offer the opportunity to make composite materials adaptive while maintaining the structural conformity. Sol-gel derived high-quality PZT fibers with diameters smaller than 30 μm have been successfully integrated into planar fiber architectures. Within them the fibers are oriented uni-directionally. These architectures are embedded with interdigital electrodes. After embedding the fiber/electrode architectures within glass fiber-reinforced polymers the fibers can be poled and become piezoelectric. The resulting structures were suitable to be tested as adaptive components. It has been demonstrated that such structures can detect impacts and tensions. They can also be driven actively leading to a vibration of the structure. Received: 21 July 1998 / Reviewed and accepted: 22 October 1998     

The importance of spatter formed in shielded metal arc welding

Spatter results when droplets of liquid metal that have been ejected from the weld pool by the impact of small droplets from the covered electrode solidify and weld to the surface of the base material. The present paper studies spatter and reveals why these small droplets do not oxidise during their short trajectory and accounts for why they arrive with sufficient heat to weld to the adjacent base material. Welds were thus performed on mild steel using covered electrodes (rutile type) to obtain spatter on the adjacent base material. Scanning electron microscopy and X-ray mapping were used to study the above mentioned phenomena.