PIN二极管的研究进展

制备PIN二极管的几种方法：扩散法、离子注入法、外延法和键合法。用各种方法制备PIN二极管的工艺过程。分析了各种方法的优缺点,着重比较了键合与外延方法制备PIN二极管。结果表明键合工艺制备PIN二极管不仅制造成本低,工艺简单,而且界面缺陷少,反向击穿电压高。所以用键合工艺制备PIN二极管可能成为未来主流制造技术。     

自动楔焊键合第一键合点跟部损伤控制

在自动楔焊键合中,要提高键合引线的抗拉强度,最重要的一点就是要减小第一键合点跟部的损伤。文章简述了自动楔焊键合的工艺过程,分析了在自动楔焊过程中造成第一键合点跟部损伤的主要原因：劈刀本身结构会对键合引线造成一定的摩擦损伤,劈刀在键合第一点后垂直上升所产生的应力会对第一键合点根部造成损伤,键合引线在拉弧过程中也会造成键合引线摩擦受损,送线系统的张力也会对第一键合点根部造成一定的损伤。文中还讨论了如何尽量减小摩擦和应力对第一键合点跟部所造成的损伤。     

PIN二极管简述

PIN二极管是射频电路中的一类重要元件，它与一般的由PN结构成的二极管的不同之处在于：PIN二极管在PN结之间还有一个未掺杂的本征半导体层--l层。     

混合PiN/Schottky二极管的研究

对混合PiN/Schottky二极管（MPS）进行研究,首先对MPS二极管的工作原理进行了分析,通过对MPS二极管、肖特基二极管、PIN二极管的伏安特性进行模拟,结果表明MPS二极管正向压降小,电流密度大,反向漏电流小,是一种具有肖特基正向特性和PN结反向特性的新型整流器。可以通过改变肖特基和PN结的面积比来调整MPS二极管的性能,与肖特基二极管和PIN二极管相比具有明显的优势,是功率系统不可或缺的功率整流管。     

铝丝键合焊点颈部损伤研究

在铝丝键合中,要提高键合铝丝的拉力强度,最重要的一点就是减少第一焊点颈部的损伤。该文简述了铝丝键合的工艺过程,分析了在自动键合过程中造成第一键合点颈部损伤的主要原因:焊接参数设置不当会造成焊点过应力损伤;焊接顺序不合理会造成超声波作用后,焊点颈部损伤;键合劈刀沾污以及劈刀本身的设计结构也会对焊点造成一定的损伤;键合引线在拉弧度的过程中也会因摩擦受损;压爪或垫块未完全固定基岛,引起键合过程中焊点颈部损伤。     

微波PIN二极管复合介质膜钝化技术的研究

表面钝化是半导体器件制造过程中的重要工艺环节之一,对器件的电学特性和可靠性有重要影响。微波PIN二极管器件的可靠性与钝化技术密不可分,结合高温干氧和等离子体化学气相沉积（PECVD）工艺制备了微波PIN二极管的复合介质表面钝化膜。通过对膜厚、折射率、表面方块电阻、正向电阻和二极管结电容等参数的测试和分析,对工艺条件进行了优化,获得了致密性好和绝缘强度高的表面钝化膜,提升了微波PIN二极管器件的可靠性和环境适应性。     

长期湿热环境下塑封电路Au-Al键合退化研究

为评估塑封电路Au-Al键合点在长期湿热环境下的可靠性,对Au-Al键合界面抵抗长期湿热应力的能力进行了试验研究.选择2款Au-Al键合塑封电路,分别设置2组湿热应力试验条件加速Au-Al键合退化.采用扫描电子显微镜(SEM)和能谱仪(EDS)对键合界面形貌、成分进行观测,分析长期湿热应力作用下Au-Al键合界面微观结...     

一种改进结构的GaAs微波PIN二极管

设计并制作了高性能GaAs微波PIN二极管.分析了GaAsPIN二极管的结构对其性能的影响,并根据分析结果改进了GaAsPIN二极管的结构.制作了常见结构和改进结构的GaAsPIN二极管,比较了不同结构的GaAsPIN二极管的测试数据,从而验证了理论分析的结果.改进后的GaAsPIN二极管制作工艺更为简单,具有良好的高频特性,截止频率达到1520.5GHz.这种改进结构的GaAs微波PIN二极管在微波电路中具有良好的应用前景.     

HSMP—389V紧密收发开关设计

介绍 图1所示的采用并联一串联结构PIN二极管的发送/接收开关已经有好几年的应用历史了。与只使用串行二极管的开关结构相比,它具有如下几个优点:首先,偏置电路简单,只要一条控制线;其次,这种开关只在发送情况下需要偏置;第三,在功率放大器(PA)输出功率的同时,两个二极管都将被偏置。这三个优点在高频应用中尤其重要,因为处于“off”状态的PIN二极管通常会由于本身电容的调制效应或者由于对发送信号进行整流产生的自偏置而使它成为产生谐波的器件。频率提高时,这种情况将会恶化。另一方面,处于“on”状态的PIN二极管产生的谐波失真将随着频率的增大而减小。     

微波PIN二极管倍频器研究

用理想的开关模型对反向并联PIN二极管对的输出频谱和倍频损耗进行分析,与混频二极管倍频器和变容二极管倍频器进行了比较,分析了PIN二极管的倍频机理。对微波PIN二极管倍频器进行了实验研究,得出了有益的结论。研制的S波段和C波段五倍频器倍频损耗分别达到15.4 dB和10.6 dB,而S波段的倍频源相位噪声达到—136 dBc/Hz@10 kHz,具有低噪声性能。     

Bond reliability under humid environment for coated copper wire and bare copper wire

There is growing interest in Cu wire bonding for LSI interconnection due to cost savings and better electrical and mechanical properties. Conventional bare Cu bonding wires, in general, are severely limited in their use compared to Au wires. A coated Cu bonding wire (EX1) has been developed for LSI application. EX1 is a Pd-coated Cu wire to enhance the bondability.Bond reliability at a Cu wire bond under a humid environment is a major concern in replacing Au wires. The bond reliability of EX1 and bare Cu was compared in the reliability testing of PCT and UHAST (Unbiased HAST). The lifetimes for EX1 and the bare Cu in PCT testing were over 800 h and 250 h, respectively. Humidity reliability was significantly greater for EX1. Continuous cracking was formed at the bond interface for the bare Cu wire. Corrosion-induced deterioration would be the root cause of failure for bare Cu wires. The corrosion was a chemical reaction of Cu-Al IMC (InterMetallic Compound) and halogens (Cl, Br) from molding resins. EX1 improves the bond reliability by controlling diffusion and IMC formation at the bond interface. The excellent humidity reliability of the coated Cu wire, EX1 is suitable for LSI application.     

封装用抗腐蚀高可靠性银合金丝

介绍一种在封装工艺中可用于替代昂贵金丝的抗腐蚀高可靠性银合金丝。利用表面钝化和固溶合金、二次中频合金熔炼和定向连续拉铸工艺,分别从成分和工艺方面提高了银合金丝的机械性能、抗腐蚀性、可靠性等一系列键合性能,解决了普通银丝在使用过程中存在的电子迁移问题,推动了键合银合金丝的广泛使用。     

40 Gbit/s多路并行光收发模块的研制

基于VCSEL激光器阵列和PIN探测器阵列,设计和制作了40Gbit/s甚短距离的4通道发射4通道接收并行光收发模块.通过高速电路信号仿真设计,解决了信号完整性、串扰和电磁兼容等问题;通过键合金丝长度设计增加了通道带宽.光模块单通道传输速率可达到5 Gbit/s,8通道并行总传输速率达到40Gbit/s,实现了并行光收发模块高速率、高密度、高可靠性以及小体积设计,为甚短距离高速数据处理和传输提供了高可靠的多路数据链接.     

微波控制电路中PIN管的引线互连技术

说明了对微波器件"PIN管"在引线互连方面的特殊要求,即键合两根"交叉线"所获得的微波性能大大优于键合单根引线,达到了低插损、低驻波、高隔离度的指标要求,使微波控制电路的高频性能更加优良;简要介绍了"键合交叉线"工艺技术的改进与优化,并且详细叙述了"交叉线"键合工艺的具体操作方法.     

F&K 6400键合机在SMD封装中的应用

键合是SMD封装中的一道重要工序,F&K 6400键合机是德国F&K公司专门面向细铝丝键合的设备,采用超声作为键合能量。在键合工艺中不同材质的金属管座会形成不同的冶金系统,有些情况下会造成接触面腐蚀或者柯肯德尔空洞,并最终影响产品的可靠性。键合时采用的超声功率、键合时间、键合压力、键合方式等工艺参数直接影响到产品的产量和性能。在批量生产的基础上,作者分析了适合F&K 6400键合机在生产中采用的键合材料及工艺参数,并列出了生产过程中设备常见的故障及可能原因。     

铜丝球键合工艺及可靠性机理

文章针对铜丝键合工艺在高密度及大电流集成电路封装应用中出现的一系列可靠性问题,对该领域目前相关的理论和研究成果进行了综述,介绍了铜丝球键合工艺、键合点组织结构及力学性能、IMC生长情况、可靠性机理及失效模式。针对铜丝球键合工艺中易氧化、硬度高等难点,对特定工艺进行了阐述,同时也从金属间化合物形成机理的角度重点阐述了铜丝球键合点可靠性优于金丝球键合点的原因。并对铜丝球键合及铜丝楔键合工艺前景进行了展望。     

Reliability of thick Al wire: A study of the effects of wire bonding parameters on thermal cycling degradation rate using non-destructive methods

The effect of bonding parameters on the reliability of thick Al wire bond is investigated. Samples were prepared with 25 different designs with 5 different bonding parameters such as time, ultrasonic power, begin-force, end-force and touch-down steps (pre-compression) with 5 levels. The bond signals of ultrasonic generator were collected during bonding in order to obtain prior quality information of bonded wires. 3D X-ray tomography was then used to evaluate bond quality during passive thermal cycling between −55 °C and 125 °C. Tomography datasets were obtained from the as-bonded condition and during cycling. The results clearly show ultrasonic power, appropriate levels of begin-force and touch-down steps are all important for achieving a well attached and reliable bond. Analysis of the virtual cross-sections indicates a good correlation between the bond signal (i.e. the initial bond quality) and wire bond damage/degradation rate. An improved understanding of the wire bonding process was achieved by observing the effect of the complex interaction of bonding parameters on the ultrasonic generator signals and degradation rate under thermal cycling.     

银键合丝力学性能对键合质量的影响

通过调节微合金元素的含量获得3种具有不同力学性能的银键合丝.利用拉伸试验、键合试验、焊线挑断力、焊球推力测试等手段,研究了银键合丝力学性能对键合质量的影响.结果表明,在延伸率相同的条件下,随着微合金元素含量的降低,3种键合丝的断裂负荷降低,初始模量先减小后增大,键合后焊线挑断力和焊球推力均降低,电极金挤出率先减小后增大.银键合丝初始模量较低时在超声和压力的作用下易于变形,焊线内残余应力较低且第二焊点与引线框架结合较好,因此挑断测试时第二焊点与框架材料界面处不易发生脱离,有利于获得更高的键合成功率.     

Effect of the direct current on microstructure,tensile property and bonding strength of pure silver wires

In the microelectronics assembly and packaging industry, the wire bonding has become an important process to connect lead frames and pads. In the past, gold and copper were the main materials of wire bonding. However, the cost of gold wires is getting higher nowadays and yet wire bonding cannot be wholly replaced by copper wire; thus silver wires become a novel bonding material in recent years. The reliability test of wires was a static method; this study leads electrical current into the wires to estimate the structural changing and interface properties of Al pads (positive and negative pad). After leading 90% critical fusing current density (CFCD) into a 23 μm silver wire, some grains of silver wire had grown up and formed into equal-diameter grains (EDG). After the current test, the fracture position of bonded wires moved from heat affect zone (HAZ) of electric flame-off (EFO) to the neck of HAZ. Otherwise, the current test would reduce the tensile strength of wire. The bonding strength of the positive pad was lower than that of the negative pad. The intermetallic compound (IMC) of bonding interface was AgAl₂.     

Nickel-palladium bond pads for copper wire bonding

The semiconductor packaging industry is undergoing a step-change transition from gold to copper wire bonding brought on by a quadrupling of gold cost over the last 8 years. The transition has been exceptionally rapid over the last 3 years and virtually all companies in the industry now have significant copper wire bonding production. Among the challenges to copper wire bonding is the damage to bond pads that had been engineered for wire bonding with the softer gold wire. This paper presents an extensive evaluation of electroless NiPd and NiPdAu bond pads that offer a much more robust alternative to the standard Al pad finish. These NiPd(Au) bond are shown to outperform Al in virtually all respects: bond strength, bond parameter window, lack of pad damage and reliability.