一种直角螺旋悬臂梁结构的压电能量收集器

提出了一种2π弧度的直角螺旋悬臂梁结构的压电能量收集器。该设计一方面可以降低谐振频率,另一方面可以提高单位体积的能量收集效率。悬臂梁整体结构厚度为2 mm,宽度为6 mm,整体尺寸大小为22 mm×26 mm。当施加的激励为0.1g加速度时,仿真输出电压为1.95 V,测量输出电压为1.8 V,相对电压误差为7.7%;仿真谐振频率为269 Hz,测量谐振频率为265 Hz,相对频率误差为1.5%;理论输出功率为7.04μW,测试输出功率最大为5.79μW,相对功率误差为17.8%。该压电能量收集器适用于便携式微电子系统。     

新型组合螺旋压电能量收集器的设计与研究

提出了一种新型组合螺旋压电能量收集器。该收集器的底部是直角螺旋结构,顶部是圆弧螺旋结构,圆弧螺旋结构固定在直角螺旋结构的质量块上。通过旋转圆弧螺旋结构90°,可以得到四种结构,角度分别为0°,90°,180°,270°。直角螺旋结构的设计可以降低谐振频率,而圆弧螺旋结构的设计不仅可以降低谐振频率,还可以使整体结构进行多方向能量收集,从而提高输出。文章所提到的单个悬臂梁结构的厚度为1 mm,宽度为6 mm。通过计算及仿真可得,当两种结构的组合角度为180°时,可以得到最大输出电压为13 V,最大输出功率为1.3 mW。     

梯形悬臂梁结构能量收集器的设计与研究

传统矩形悬臂梁上的应力呈非均匀分布,在梁固定端存在一个应力集中区,且沿轴向方向衰减,从而影响压电层的极化效果。同时,矩形悬臂梁结构能量收集器的谐振频率较高。为解决这一问题,文章提出了一种“倒”梯形结构的能量收集器结构。该梯形结构可以有效扩展极化区域,从而捕获到更低频的振动能量。实验发现,在1g振动加速度下,该能量收集器在124 Hz下输出电压为404 mV,输出功率达到41.3 μW。     

一种圆弧螺旋压电能量收集器

为了降低谐振频率,实现多方向收集和提高输出性能,提出了一种4π圆弧螺旋压电能量收集器。通过分析器件尺寸与输出性能之间的关系来提高器件性能,将优化后的模型进行COMSOL仿真,分析振动位移、应力以及谐振频率。相对于2π圆弧螺旋压电能量收集器,4π圆弧螺旋压电能量收集器具有更低的谐振频率和更高的输出电压。4π圆弧螺旋压电能量收集器的谐振频率为48 Hz,输出电压达到12.3 V,输出功率达到400μW。     

一种基于故障监测的MEMS压电能量收集器

为了实现对轮船发动机故障监测系统的可持续供电,针对轮船发动机振动特性以及故障监测系统应用需求,设计了一种基于d31工作模式的微机电系统(MEMS)压电振动能量收集器。该能量收集器采用了共质量块压电悬臂梁阵列结构,与传统单梁结构相比,其降低了MEMS压电振动能量收集器的机械阻尼。通过ANSYS软件对结构进行了优化设计,得到压电悬臂梁的优化尺寸为2.72mm×3.55mm×0.125mm,硅质量块的优化尺寸为14mm×8.45 mm×0.575 mm。设计了器件的加工工艺流程,并完成了芯片的制作。在加速度2g(g=9.8m/s2),谐振频率606Hz,最优化负载45kΩ下,输出电压为4.32V,输出功率为414.7μW,能够满足故障检测系统的可持续供电需求。     

基于压电材料的振动能量收集器的谐振频率调节

振动能量收集器的最大输出电压发生在共振状态,因此其谐振频率应与环境振动频率一致.针对振动能量收集器与环境频率不匹配的问题,采用单自由度模型分析了悬臂梁-质量块结构的振动能量收集器谐振频率等性能,加工并测试了压电式的微型振动能量收集器样机,结果谐振频率的误差最大为6％.通过质量调节方法进一步将样机的谐振频率调节了10.5 Hz的宽度.针对50 Hz的振动环境,将谐振频率为58.7 Hz的样机调节到了50.4 Hz,输出电压提高了4倍.     

悬臂梁压电式能量收集器频带扩展研究

为了扩宽悬臂梁压电式能量收集器的工作频带,提出了一种新型的电学连接方案.通过将悬臂梁表面电极分为两个对称区域,实现扭转模态下正负电荷的有效收集.对悬臂梁的结构尺寸进行优化,使弯曲模态接近扭转模态的谐振频率,以扩宽压电式能量收集器频带.根据Erturk的分布参数机电模型,研究了两种模态下的输出电压与固有频率.研究结构表明...     

挠曲电悬臂结构的功率频率响应及频移分析

挠曲电效应因其对尺度的敏感性,在微纳尺度的传感器和能量收集器方面具有广阔的应用前景.该文基于挠曲电悬臂梁构建振动能量收集器理论模型,应用Hamilton原理,建立挠曲电悬臂梁结构的控制方程,借助模态分析获得挠曲电悬臂结构的功率频率响应.讨论了结构尺寸、末端质量块、负载阻抗和挠曲电系数等对挠曲电梁谐振频率和频率移动的影响...     

多谐振频率固支梁压电能量收集器的设计

为了提高压电振动能量收集器的转换效率,设计了两种固支梁组合方案来实现多谐振频率压电能量收集器。建立固支梁结构的力学模型,得到影响固支梁谐振频率的因素。通过Comsol多物理场软件,仿真验证了两种方案的输出稳态电压频率响应。方案1实现的频带范围为9 Hz,方案2实现的频带范围可达41 Hz。总结了两种方案的优缺点,研究结果对多谐振频率固支梁压电能量收集器的设计及应用具有一定的参考价值。     

一种斑马型压电俘能器的有限元分析

提出了一种新型的俘能结构,其是利用压电效应并应用于微机电(MEMS)领域的设计。通常有效的能量捕获装置包括:悬臂梁类型的金属基层及与之粘结的较薄压电层,从而引起谐振响应。越短的悬臂梁其谐振频率越大,因此在微机电领域中,由于较小的结构使得悬臂梁难以形成共振。文中针对此问题提出了一种可以降低自身谐振频率的新型几何结构。对这种斑马型几何结构,利用Ansys仿真软件求解得出其在微机电领域内也可以接近发生共振。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.