离子注入在医用钛及其合金表面改性中的应用

钛及其合金因具有较好的耐蚀抗磨性、生物活性、生物相容性以及在生理环境中的无毒性,成为医用领域中最常用的一种金属材料。但是,钛及其合金自身无抗菌性,表面摩擦因数大,抗塑性剪切能力低,且长期服役中易被环境污染和易于磨损失效,这些特性在一定程度上限制了其应用领域的扩展。因而,学者常采用离子注入技术对医用钛及其合金进行表面改性,以提升其表面性能,延长其制件服役寿命和扩展材料应用范围。研究表明,单一元素离子注入对提升钛及其合金的医用性能不够理想,因而学者采用金属+非金属、金属+金属离子进行复合注入,旨在提升改性层减摩抗磨、耐蚀性能的同时,增强改性层的生物活性及服役过程中的抗菌性。另外,对现有研究展开分析与综述后,提出了对医用钛及其合金的离子注入改性,将朝着进一步深入理论、模拟研究,多复合离子(特别是金属+金属+非金属复合离子)注入研究,高性能离子注入设备研发及其离子注入参数拟定与优化等方面发展。     

9Cr18轴承钢的金属离子加氮离子复合注入处理新工艺

简单地叙述了金属等离子体浸没离子注入与沉积（ＭｅＰⅢＤ）表面处理新工艺的发展,以及ＭｅＰⅢＤ工艺对于脉冲阴极弧金属等离子体源的要求。详细报导了９Ｃｒ１８轴承钢样品的氮离子注入表面处理工艺及金属离子加氮离子复合注入处理新工艺,对被处理和未被处理试样进行了显微硬度、磨痕、摩擦因数及腐蚀特性测试后表明：用金属离子加氮离子复合注入处理的９Ｃｒ１８钢试样的表面特性改善明显优于只有氮离子处理的试样,证明脉冲阴     

氮离子注入9Cr18Mo不锈钢的表面结构与力学性能

针对9Cr18Mo马氏体不锈钢,检测了氮离子注入前后表面纳米硬度和摩擦磨损性能,分析了注入后9Cr18Mo钢的表面组织结构和化学组成.结果显示,氮离子注入有效提高了材料的表面硬度,降低了摩擦系数和磨损的同时,没有改变材料表面形貌和粗糙度.表面氮注入层分为两层:表面20 nm深度内除金属氮化物及氮过饱和固溶体强化相外,还富集大量碳原子,其主要存在方式为CrxCy相;次表面层主要为金属氮化物.氮离子注入后9Cr18Mo不锈钢表面形成的新的组织结构是其具有良好力学性能的根本原因.     

高温低能高电流密度离子注入材料的摩擦学应用

高温低能高电流密度离子注入技术,已表明可以显著改善各种材料的摩擦学性能。本文综述了此领域中一些研究结果,并在奥氏体不锈钢和工具钢材料上对该技术与离子氮化和在相同条件下高能离子注入技术作了比较。显微结构分析及摩擦学性能评价表明,三种技术可以产生差不多相同的显微结构,但低能离子注入层由于具有较高的氮浓度和较深的扩散层而显示了较高的耐磨性。本文提出了一个物理模型来表示这种现象的机理。高电流密度是形成较深氮化层的主要原因,而离子能量具有次要作用,只要它能克服表面障碍,去除原有的氧化层,防止表面氧化,井在表面上建立起较高的氮浓度就可促进随后的快速扩散。对该技术的应用与限制也进行了论述。     

C_n团簇注入制备石墨烯的研究进展

石墨烯是碳原子构成的单层二维晶体,在高频电子学和光电子器件领域具有广泛应用前景,厚度可控的大面积石墨烯的制备是实现规模化应用的前提。文中在介绍现有石墨烯制备技术优缺点的基础上,重点介绍了近几年离子注入过渡金属镍制备石墨烯的研究成果。研究表明:在低能碳团簇C_n注入制备石墨烯的过程中,离子能量、注入剂量、团簇尺寸、基体材料特性和退火条件是影响石墨烯物理性质的重要因素。团簇离子注入在基体表层引起的辐照损伤具有非线性效应,精确控制剂量的C_n团簇注入到基体中主要起到提供可控掺杂碳源的作用,高质量石墨烯的合成需要进行多晶基体预热处理以减少晶界密度,同时需采取精细的后续热处理工艺,控制碳原子在基体表面横向扩散和偏析,以满足石墨烯形核生长的关键条件。     

离子注渗复合表面改性技术研究进展

综合国内外研究现状,目前针对离子注渗复合表面改性技术已开展了大量的研究工作,然而还缺少对其进行系统介绍的研究报道。首先,对离子渗技术（离子渗氮、离子渗碳和离子渗硫）、离子注入技术（氮离子注入、碳离子注入和金属离子注入）和离子注渗复合技术的原理进行了介绍。其次,对上述表面改性技术的研究进展进行了综述和总结。最后,针对目前离子注渗复合技术的不足之处,从改善硬件设备、强化作用机理、系统研究复合处理工艺和促进其工业化应用等方面进行解决,提出要充分利用注渗和镀膜技术复合的优势来实现材料结构功能一体化,推动多相复合强化技术的研究与开发,为工业化应用奠定理论基础。     

Effects of ion implantation on surface structures and properties for bulk metallic glass

A plate-like Zr₅₅Cu₃₀Ni₅Al₁₀ bulk metallic glass (BMG) was prepared and Co ion implantation was carried out. The effects of ion implantation on surface structures and properties of the BMG have been studied. The results showed, after Co ion implantation, the BMG specimen still maintained an amorphous structure on the whole. Ion implantation changed the thermodynamic parameters and enhanced the thermal stability of the amorphous alloy. Along the depth direction, cobalt element implanted basically existed in a metal state. The maximum enhancement of surface micro-hardness was about 103 Hv or 18%. The average friction coefficients before and after ion implantation were 0.331 and 0.168, respectively, and the corresponding grinding trace widths were 80.23 and 60.17 μm, respectively, i.e., the Co ion implantation has reduced the average friction coefficient and corresponding grinding trace width by about 52.3% and 32.68%, respectively. The reasons of efficient improving the surface performances by ion implantation surface modification in BMG were analyzed and discussed.     

离子注入表面改性技术的应用

介绍离子注入表面改性技术的原理和设备,列举了在金属表面改性中的应用。经离子注入后,某些金属材料的耐蚀、耐磨和抗氧化性能可提高近1000倍。离子注入表面改性技术适用于高技术、高精度和高附价的零件     

W、Mo离子注入对离子镀TiN薄膜表面结构和性能的影响

目的进一步改善氮化钛薄膜的摩擦学性能。方法利用金属蒸汽真空弧源(MEVVA)在离子镀TiN薄膜表面进行等剂量W、Mo离子注入。采用扫描俄歇系统、光学三维形貌仪、X射线衍射仪和纳米压痕仪,分别分析了TiN薄膜的离子注入深度、表面形貌及粗糙度、相结构和不同压入深度的薄膜硬度。在球盘滑动摩擦磨损试验机上考察了TiN薄膜的摩擦学性能,并利用扫描电子显微镜和三维形貌仪对其磨损形貌进行分析。结果等剂量离子注入后,TiN表面注入层中W离子的含量明显大于Mo离子,两种离子注入对TiN薄膜的表面形貌和硬度的影响较小。XRD结果表明,W离子和Mo离子注入后均发现了Ti_2N硬质相。两种离子注入均可以不同程度地降低TiN薄膜的摩擦系数和磨损率。结论 W、Mo离子注入均可显著改善TiN薄膜的摩擦学性能,但Mo离子更有利于其摩擦系数的降低,而W离子注入更有利于TiN薄膜磨损率的降低。     

MEVVA源金属离子注入和金属等离子体浸没注入

ＭＥＶＶＡ源金属离子注入技术和金属等离子体浸没注入技术ＭｅＰＩＩＩ的共同特性是强流金属离子注入。它们各具长处,相互补充,共同发展。前者因无鞘层重叠问题和其方向强的特点,特别适用于小件、简单件的大批量金属离子注入处理,能保证处理的均匀性和高效率。后者因无视线加工限制并克服了保持剂量问题,特别适用于处理体积较大、形状复杂的工件,能保证工件所有暴露表面的加工均匀性,调整工作参数,还能进行金属膜沉积和各种     

镁合金表面离子注Ti耐蚀性能的研究

镁合金以其优越的性能在工业上的应用越来越广泛,但是其耐蚀性、耐磨性较差,硬度较低的缺点限制了它的大量使用.利用改进的金属蒸发弧放电离子源(MEVVA)在AZ31镁合金表面注入Ti离子,形成Ti离子注入改性层,以期提高镁合金表面的耐蚀性能.注入能量为45keV,注入剂量为3×1017 cm-2.注入后镁合金表面形成厚度约为450nm的注入层,用SEM、XRD分析了Ti离子注入层的表面形貌和相结构.用CS300P型电化学工作站测试了注入前后镁合金的耐蚀性,结果表明镁合金表面耐蚀性能显著提高.     

Improving the properties of titanium alloys by ion implantation

Recent advances in the ion implantation process have shed light on the underlying mechanisms for improved surface properties of titanium alloys. Ion implantation of reactive species such as carbon or nitrogen creates hard-phase carbide or nitride precipitates which impart surface hardness to titanium alloys. Concurrently, the ion implantation process creates disorder in the surface of titanium and destroys the grain boundaries, and is responsible for lower friction of the surface. The ion implantation process duplicates shot peening on a microscopic scale and imparts compressive stress to the surface of the titanium, thereby improving high-cycle fatigue life of titanium components. Ion implantation also improves the resistance to corrosion and chemical etching of titanium surfaces.     

超声冲击强化焊接接头及金属表面强化研究进展

工程机械零件及焊接结构在服役过程中常常因为表面发生磨损、腐蚀和疲劳断裂而失效,而失效形式与其表面加工质量、应力分布状态和表面性能等因素密切相关。超声冲击是一种利用超声波振动驱动冲击针高速撞击工件表面,使工件表面产生塑性变形和残余压应力的表面强化技术,具有效率高、加工精度高以及加工范围广等优势。概述了超声冲击处理技术在焊接接头处理、金属材料表面强化、激光熔覆–超声冲击复合处理以及超声冲击–化学处理复合强化等方面的研究现状及进展。在此基础上,重点综述了超声冲击处理Al、Mg合金及合金钢焊接接头残余应力、力学性能及抗疲劳性能的变化,归纳了传统金属材料以及新兴高熵合金表面超声冲击处理后的组织、微观亚结构及性能变化,总结了超声冲击对激光改性层组织性能的影响规律以及超声冲击预处理对离子渗氮/渗硫层形成及其性能的影响等。超声冲击处理明显降低了焊接接头的残余拉应力,有效提高其疲劳强度,使金属和涂层表面产生纳米化组织,显著提升材料的表面硬度、耐磨性能、耐蚀性能以及耐高温性能,从而延长工程构件的服役寿命。显然,超声冲击处理技术与表面涂层技术相结合,为工程零部件表面强化提供了新的思路。对于表面涂层,超声冲击...     

Surface-engineered metal-on-metal bearings improve the friction and wear properties of local area contact in total joint arthroplasty

Metal-on-metal articulating total joint arthroplasty has the potential to eliminate polyethylene-wear-induced osteolysis and aseptic loosening around the prosthesis. Metal surface coatings, however, are subject to delamination in areas of local contact. Various studies have been conducted to reduce metal wear debris and corrosion by introducing surface treatments.In this study we applied carbon ion implantation (CII) and diamond-like carbon (DLC) films to a cobalt-chrome alloy substrate by plasma source ion implantation. Once the films were prepared, we put them through simple geometry wear tests under high contact pressure (an average load of 1030 MPa) to establish the tribological properties during the phase of local contact that leads to severely increased wear in total joint arthroplasty. The CII-coated bearings showed less wear, lower friction coefficients, and higher resistance to catastrophic damage compared to uncoated Co-Cr alloy and DLC couples, even under high contact pressure. The CII-coated surface offers potential advantages as a hard coating for articulating joints.     

Corrosion resistance properties of AZ31 magnesium alloy after Ti ion implantation

Magnesium alloys have a wide range of applications in industry; however, their corrosion resistance, wear resistance, and hardness are rather poor, which limit their applications. Ti ion was implanted into the AZ31 magnesium alloy surface by metal vapor vacuum arc (MEVVA) implanter. This metal arc ion source has a broad beam and high current capabilities. The implantation energy was fixed at 45 keV and the dose was at 9 × 1017 cm?2. Through ion implantation, Ti ion implantation layer with approximately 900 nm in thickness was directly formed on the surface of AZ31 magnesium alloy, by which its surface property greatly improved. The chemical states of some typical elements of the ion implantation layer were analyzed by means of X-ray photoelectron spectroscopy (XPS), while the cross sectional morphology of the ion im-plantation layer and the phase structure were observed by means of scanning electron microscopy (SEM) and X-ray diffraction (XRD). The property of corrosion resistance of the Ti ion implanted layer was studied by the CS300P electrochemistry corrosion workstation in 3.5% NaCl solution. The results showed that the property of corrosion resistance was enhanced remarkably, while the corrosion velocity was obviously slowed down.     

Characteristics of Cu implantation into Si by PBII using UBMS cathode

1　ＩＮＴＲＯＤＵＣＴＩＯＮＴｈｅｍｅｔａｌ ｐｌａｓｍａｂａｓｅｄｉｏｎｉｍｐｌａｎｔａｔｉｏｎ(ＭｅＰＢＩＩ)ｉｓｉｎｔｒｉｎｓｉｃａｌｌｙｄｉｆｆｅｒｅｎｔｔｏｔｈｅｃｏｎｖｅｎｔｉｏｎａｌｇａｓｐｌａｓｍａｂａｓｅｄｉｏｎｉｍｐｌａｎｔａｔｉｏｎ (ＧａＰＢＩＩ)ｄｕｅｔｏｔｈｅｃｏｎｄｅｎｓａｂｌｅｆｅａｔｕｒｅ,ｌａｒｇｅｒｃｏｌｌｉｓｉｏｎｃｒｏｓｓｓｅｃｔｉｏｎａｎｄｍｕｌｔｉｖａｌｅｎｔｉｏｎｃｒｅａｔｉｏｎｏｆｔｈｅｍｅｔａｌｐｌａｓｍａ .Ｔｈｅｒｅａｒｅｓｅｖｅｒａｌｋｉｎｄｓｏｆ…     

Wear and corrosion properties of plasma-based low-energy nitrogen ion implanted titanium

Plasma-based low-energy nitrogen ion implantation, including plasma source ion nitriding/carburizing and plasma source low-energy ion enhanced deposition, has emerged as a low-temperature surface engineering technique for metal and alloy. In this paper, the pure metal Ti samples have been modified by the plasma source ion nitriding process at a process temperature of 700 °C for a processing time of 4 h. The nitrided Ti surfaces were constructed of a continuous and dense Ti₂N compound layer about 2 μm thick and a 7-8 μm diffused layer. During tribological test on a ball on disk tribometer against the Si₃N₄ ceramic counterface, a low friction coefficient of about 0.3 and the faint wear volume were obtained for the nitrided Ti samples. The cyclic polarization curves of the nitrided Ti samples in 3.5% and 6.0% NaCl solutions showed that the improved pitting corrosion resistance with an increase of corrosion potential and a decrease of passive current, compared with that of the unnitrided Ti sample. The plasma source ion nitriding of the Ti samples provided the engineering surfaces for the functional applications with the combined improvement in wear and corrosion resistance.     

贫铀表面碳氧离子注/渗及其抗蚀性能研究

利用离子注/渗方法,将CO2气体离解后,在不同能量、束流、温度下注入贫铀表面,利用SEM、XPS和X如等技术分析了改性层厚度、表面元素化学态以及表面改性层的相结构.用室温贮存实验和电化学方法对注入样品的腐蚀性能进行了考核.结果表明,在高能量、小束流下离子注入得到的改性层薄;在低能量、大束流下离子注入得到的改性层厚,注入样品表面是以大量UO2和少量石墨碳的形式存在.碳离子注入能量存在一极限值,当能量较小时,可导致碳无法注入样品内部.腐蚀实验考核表明,贫铀表面注入C、0离子后,在表面形成单一的UO2氧化膜,使其抗腐蚀性能增强.     

铍表面离子注入层硬度的研究

对金属铍进行了不同剂量的离子注入表面处理。测量了注入处理后的金属铍表面的显微硬度;将测量的硬度值,利用Jonsson硬度模型计算了注入表面层的硬度;分析了注入表面层的硬度值与注入剂量的关系及注入强化机理。结果表明,离子注入层硬度是铍本身硬度值的9倍。     

离子束表面工程技术的进展*

综述了离子束表面工程技术近期研究进展,重点讨论了等离子体浸没离子注入(PIII)、强流脉冲离子束技术(HIPIB)、等离子体喷涂物理气相沉积(PS-PVD)、电子回旋共振(ECR)等离子体和磁过滤阴极真空弧沉积等表面工程技术;介绍了离子束表面工程在替代传统电镀技术、航空航天材料表面改性、太阳能利用中材料的表面改性、生物医学材料的表面改性等领域的应用。指出了离子束表面工程技术的未来研究方向,即深入研究离子束与材料表面的作用机理,开发高性能结构涂层和功能涂层,发展新的离子束复合表面技术。