GCr15钢的ELID磨削性能实验研究

为了探讨GCr15钢的ELID（Electrolytic In-process Dressing）磨削性能，在基于大量实验的基础上，对GCr15钢采用ELID磨削时磨削力的变化规律进行了详细分析，并将磨削力、磨削表面粗糙度与普通磨削进行了比较。结果表明，采用铸铁结合剂CBN砂轮进行ELID磨削时磨削力几乎不随时间的变化而变化，而采用白刚玉砂轮进行磨削时的磨削力随时间的变化不断增大，在线电解修整使CBN砂轮在磨削过程中始终保持良好的磨削性能，有利于节省砂轮修整时间，提高加工效率。在ELID磨削中，采用微细砂轮进行磨削可以获得很低的表面粗糙度，实现对GCr15钢的超精密镜面磨削。     

ELID grinding characteristics and surface modifying effects of aluminum nitride (AlN) ceramics

Aluminum nitride (AlN) ceramics have excellent electrical insulation and dielectric properties, a high thermal conductivity that is approximately 10 times that of alumina, as well as a thermal expansion coefficient that is close to that of Si, and so are anticipated to be used in semiconductor mounting boards, heat-dispersing substrates for power modules, and other heat-sink materials in a variety of high-added-value applications. In this research, ELID grinding was performed on AIN, and evaluated the processing characteristics and the resulting surface properties. The results indicate that final finishing using a #30,000 wheel produced an extremely smooth ground surface roughness of 0.008 μm Ra. In addition, the ELID series demonstrated a surface hardness and sliding characteristics superior to those of the polished series. This appears to be attributable to the diffusion phenomenon of the oxygen element produced by the ELID grinding.     

在线电解修整(ELID)超精密磨削中的金刚石磨具特性研究

ELID(Electrolytic In-process Dressing)磨削技术是在电化学加工、电解磨削原理基础上发展起来的一项磨削新技术,主要用于硬脆材料超精密磨削过程中金属基结合剂超硬微细磨粒砂轮的在线修整.本文以金刚石微粉砂轮在线电解修整(ELID)磨削氮化硅陶瓷为例,着重研究了磨具特性对硬脆材料超精密磨削过程的影响.研究表明,磨具组织沿砂轮圆周的不均匀性将会导致砂轮表面钝化膜状态的不一致,这将直接影响砂轮局部参与切削的磨粒数量,影响单个磨料的实际磨削厚度.这首先将对工件表面的磨削质量,特别是对表面粗糙度产生直接影响,同时也非常不利于实现材料的高效去除.     

应用ELID技术进行微晶玻璃超精密磨削

由于微晶玻璃具有优良的物理、机械性能，在光学等领域得到了越来越多的应用。ELID磨削利用在线．电解的方法修整超细粒度的金刚石砂轮，可以有效地实现硬脆材料的超精密加工。本文将ELID磨削技术应用于微晶玻璃的超精密加工，通过改进ELID磨削的关键技术，包括砂轮电火花整形、电解修整电源和ELID磨削液的改进，实现了微晶玻璃的超精密磨削加工，同时通过采用原子力显微镜对不同磨削参数下的工件表面进行分析，以保证在塑性状态下对微晶玻璃进行磨削。因此提高了ELID磨削的质量。获得了Ra2．308nm的较好表面质量。     

A comparative study: surface characteristics of CVD-SiC ground with cast iron bond diamond wheel

Efficient precision machining of CVD-SiC (chemical vapor deposited silicon carbide) reflection mirrors in extremely low surface roughness and high form accuracy is greatly demanded by advanced industrial fields. The existing lapping methods have a great difficulty in satisfying these demands. Some researchers proposed ductile mode grinding technology, but it inevitably required a very expensive grinding machine, and its grinding process with such fine abrasive wheel was usually unstable. Dr. H. Ohmori put forward a new idea of application of ELID-grinding to ultraprecision grinding of CVD-SiC mirrors. The method had a potential to solve the above problem. In this paper, the precision grinding of CVD-SiC was performed by two kinds of methods. One is the ELID grinding; the other is the ordinary grinding with the saw-like-abrasive-stone-dressed cast iron bond diamond wheel. A comparative study of surface characteristics of ground CVD-SiC has been carried out. The following conclusions have been drawn below. (1) The surface characteristics of wheels dressed by these two methods are different. (2) The surface roughness ground by ELID grinding was only slightly better than the one produced by the ordinary grinding method. (3) The microscopic characteristics of CVD-SiC ground by these two methods differed largely. (4) ELID grinding is greatly recommendable in precision grinding of hard-brittle materials on ordinary machines of low rigidity.     

A fundamental study on the mechanism of electrolytic in-process dressing (ELID) grinding

Demands for high quality surface finish, dimensional and form accuracy are required for optical surfaces and it is very difficult to achieve these using conventional grinding methods. Electrolytic in-process dressing (ELID) grinding is one new and efficient method that uses a metal-bonded diamond grinding wheel in order to achieve a mirror surface finish especially on hard and brittle materials. However, studies reported so for have not explained the fundamental mechanism of ELID grinding and so it has been studied here by conducting experiments to establish optimal grinding parameters to obtain better surface finish under various in-process dressing conditions. In this research the results show that the cutting forces are unstable throughout the grinding process due to the breakage of an insulating layer formed on the surface of the grinding wheel; however, a smoother surface can be obtained using a high dressing current duty ratio at the cost of high tool wear. ELID grinding is efficient for feed rates of less than 400 mm/min, and surface cracks are observed when it exceeds this limit.     

Experimental study of ELID grinding based on the active control of oxide layer

The oxide layer state directly relates to the grinding efficiency and machining quality in Electrolytic In-process Dressing (ELID) grinding. In order to monitor and control the state of the oxide layer, a new high-frequency pulse power source is proposed for ELID grinding. It uses the superposition of big and small pulses to achieve periodical electrolysis and to adjust oxide layer state. Based on an analysis of current change with duty cycle, a pulse-based fuzzy control program was designed to control the state of the oxide layer within a certain range and the oxide layer grinding efficiency in different oxide layer states was studied. The results show that the new power source could maintain a stable grinding process and that the dressing current should be controlled according to the grinding wheel grain size.     

ELID grinding characteristics of glass-ceramic materials

Zerodur glass-ceramic materials have been widely used in optical, opto-electronic and precision engineering industries; their efficient ultraprecision machining, with extremely low surface roughness and high form accuracy, is in great demand in those fields. The authors have been conducting studies on realizing high-quality surface and form accuracy of zerodur glass-ceramic materials efficiently by use of electrolytic in-process dressing (ELID) grinding process. This paper proposes a new grinding mode in which top surface and sides of zerodur block were ground by cylindrical surface and side surface of grinding wheel. Grinding experiments were carried out using #1200, #2000 and #4000 diamond cast-iron bond wheels, and grinding characteristics such as grinding performance, ground surface roughness, surface topographies and perpendicularity between ground surfaces were investigated. Experiments on grinding using #4000 wheel successfully produced smooth top surface and side surfaces that were about 10 nmRa in surface roughness, 1.5 μm/□400×400 mm² in flatness and 90°±6″ in perpendicularity. AFM observation of the ground surface also showed that material removal in the ductile mode occurs for fine abrasive wheels. The results showed that grinding was stable without severe clogging for wheels by choosing suitable ELID parameters and grinding conditions.     

电火花修形砂轮对ELID磨削效果影响的实验研究

本文对经电火花精修形、粗修形后形成硬质层和去除修形形成硬化层的金属结合剂超硬磨料砂轮进行对比实验,研究了三种砂轮的ELID电解曲线和电解后的砂轮表面形貌,分析了不同砂轮被电解后对加工工件的表面粗糙度的影响。实验结果表明：电火花修形后砂轮,表面硬质层阻值较大,不宜直接用于ELID精密镜面磨削加工;电火花修形能够提高砂轮表面的强度和硬度,能够提高砂轮的耐磨性;为保证砂轮基体受电火花淬火影响最小,形成硬质层最薄,电火花精修形时需选用较小的占空比。     

Influence of Surface Roughness on Corrosion and Tribological Behavior of CP-Ti After Thermal Oxidation Treatment

In this study, tribological and corrosion behavior of commercially pure titanium (CP-Ti) with different surface roughness values after thermal oxidation was investigated. The CP-Ti specimens were prepared with three different roughness values from silicon carbide paper, Ra = 0.1, 0.3, and 0.6 μm, and the thermal oxidization process was conducted at a temperature of 850 °C for 8 h in an O₂ atmosphere. Structural, mechanical, corrosion, and tribological properties of untreated and thermally oxidized CP-Ti with different surface roughness values were investigated through x-ray diffraction, scanning electron microscopy, microhardness, potensiostat, and pin-on-disk techniques. The corrosion and tribological behavior of CP-Ti improved as an oxide layer was formed by thermal oxidation. It was observed that the surface roughness had an effect on these characteristics. It was established that the decreased roughness improves the tribological and corrosion properties.     

氮化硅陶瓷ELID磨削预修锐与氧化膜成膜的影响因素

针对氮化硅陶瓷回转曲面零件高效低损伤的加工要求,设计适用于回转面加工的在线电解修整（ELID）磨削实验装置,在数控坐标磨床上进行预修锐实验。基于平行电极电解池模型,建立预修锐时间与氧化膜成膜厚度的关系模型,分析占空比和极间间隙对成膜效果的影响规律。结果表明:工艺参数对预修锐时间的影响程度依次为占空比>电解液流量>砂轮转速>脉冲频率。采用田口方法获得最优工艺参数组合为占空比0.75,脉冲频率50kHz,砂轮转速9 000r/min,电解液流量1.0 L/min。      

Precision internal grinding of bearing steel based on the state control of oxide layer with electrolytic in-process dressing

The oxide layer state directly relates to the grinding efficiency and machining quality in electrolytic in-process (ELID) grinding. However, no proper and detailed information has been found about internal grinding by controlling the state of the oxide layer. Therefore, in this investigation, some experiments have been conducted based on the active control of the oxide layer state to study internal grinding performance and ground surface qualities. The experimental comparison with the traditional ELID grinding has been carried out to prove the advantages of the proposed method in dynamic equilibrium. The influences of the grinding and electrical parameters on the workpiece surface quality, force characteristics and material removal rate of internal machining of bearing steel have been investigated in detail. The experimental results show that the new method can realize a stable internal grinding process even with finer abrasive wheels of W10 and W2.5.     

精密ELID镜面磨削用新磨削液的研制

本文以已有的HDMY-10型ELID磨削液的配方为参照，根据ELID磨削的特点和要求，通过减少或增加无机盐、添加剂等成分的比例，找出了ELID磨削中生成氧化膜性能与磨削液成分的关系，研制出新型的性能更好的ELID磨削液。     

ELID precision grinding of large special Schmidt plate for fibre multi-object spectrograph for 8.2 m Subaru telescope

To explore various scientific frontiers from nearby substellar objects to large scale structures of the high redshift universe, a Fibre Multi-Object Spectrograph (FMOS) is being developed as the second generation near-infrared measuring instrument for the prime focus of 8.2 m Subaru telescope in Hawaii, which employs a large special Schmidt plate element. The Schmidt plate consists of a large non-axisymmetric aspherical concave plate and a convex plate. This paper introduces its manufacturing process, focusing on its non-axisymmetric aspherical surface machining by utilizing synthetically ELID grinding and arc-enveloped grinding method. A new grinding system capable of fabricating large optical elements was developed with 10 nm resolution. In this ELID arc-enveloped grinding system, a Cast Iron Fibre Bonded (CIFB) diamond wheel was 3D controlled to scan the workpiece to generate required surface. Grinding characteristics such as attainable form accuracy, surface roughness were investigated. Furthermore, some measures to improve form accuracy were discussed and verified.     

氧化铝增韧陶瓷的高效ELID精密磨削实验研究

氧化物增韧陶瓷是一种高技术陶瓷材料,具有高强度、高韧性以及良好的耐磨、耐腐蚀性能。在一般的加工过程中,采用普通树脂砂轮对硬度较高的氧化铝增韧陶瓷材料进行磨削时,磨料的消耗比较快,磨削比较低,仅为8,10左右。通过ELID磨削对氧化铝陶瓷进行高效磨削实验,从砂轮速度、进给速度、砂轮粒度和砂轮电解活化钝化趋势等因素中,找到合适的加工工艺参数,使效率和精度达到最优。实验表明,砂轮速度和进给速度对磨削比影响较大;砂轮粒度和砂轮电解活化钝化趋势对表面质量影响较多。使用优化后的ELID磨削工艺使氧化铝陶瓷材料的加工效率提高了50％。磨削比增大到60～100。     

不同结合剂金刚石砂轮磨削氧化铝陶瓷工艺实验研究

本文利用树脂、青铜、铸铁三种结合剂金刚石砂轮,以氧化铝陶瓷为加工对象,通过研究各自的磨削比、磨削力、磨削表面粗糙度等指标,进行了三种结合剂砂轮的磨削性能比较,发现铸铁结合剂金刚石砂轮和ＥＬＩＤ（在线电解修整）磨削方法比较适合氧化铝陶瓷等硬脆材料的磨削（尤其是精密磨削）。     

A study on ELID ultra precision grinding of optical glass with acoustic emission

ELID grinding of BK7 glass and Zerodur was investigated using acoustic emission. Experiments showed that the contacting area between the wheel and workpiece in a grinding process was critical to influence wheel loading for a fine grit size resin-bonded cup wheel. ELID can be used for efficient material removal when the wheel/workpiece contacting area is large. Correlations were observed between the dressing intensity on the ELID wheel and the detected AE signals. Aggressive ELID dressing parameters for grinding with finer grit size wheels corresponded to a lower AE level. With an increase in the processing time of an ELID wheel, low and stable AE amplitudes became large with fluctuations due to the deterioration of the grinding wheel. Results indicate that the AE sensing technique has the potential to be adopted as an effective method for monitoring an ultra precision grinding process, identifying the condition of the grinding wheel and investigating the mechanism of ELID grinding.     

CFRP砂轮与钢基体砂轮高速磨削过程中的动力学特性

为探究CFRP砂轮与钢基体砂轮在高速磨削过程中的动力学特性,在数控凸轮轴磨床上搭建振动测试试验平台,开展磨削过程的动力学特性试验,研究2种砂轮在不同线速度和不同进给速度下的振动信号变化,并测量磨削后工件的表面粗糙度。结果表明:CFRP砂轮主轴系统的各阶固有频率高于钢基体砂轮主轴系统的各阶固有频率,且磨削过程中激发的优势频率处于高频区域。随着砂轮线速度的增大,GCr15工件表面粗糙度随之发生波动,CFRP基体砂轮磨削表面的粗糙度明显变小,较钢基体砂轮磨削表面的粗糙度减小30%～35%。颤振发生前后,CFRP基体砂轮磨削的表面粗糙度由0.089 μm变为0.091 μm,粗糙度增大2.2%;钢基体砂轮磨削的表面粗糙度由0.135 μm变为0.146 μm,粗糙度增大8.2%。在线速度一定的条件下,随着砂轮进给速度的增加,CFRP砂轮和钢基体砂轮磨削的工件表面粗糙度值都有增加,分别为2.4%和2.9%,但相较于砂轮线速度对工件表面粗糙度值的影响,进给速度对工件表面粗糙度值的影响更小。      

纳米微囊砂轮磨削工件表面自润滑层的形成

在磨削时磨削液难以有效渗入磨削区域起冷却润滑作用。提出利用润滑剂油酸（OA）填充碳纳米管（CNTs）制备 CNTs@OA 纳米微囊,并以其为填充剂制备树脂砂轮,磨削时随着纳米微囊的破裂,油酸可释放到磨削区形成自润滑层起润滑作用,从而提高砂轮的磨削性能。首先,制备纳米微囊并对其进行表征,分析微囊在砂轮中的存在形式,考察微囊的填充对其力学性能的影响;其次,研究砂轮磨削 GCr15 钢时纳米微囊的含量和磨削速度对磨削力、磨削温度、磨削比和表面粗糙度的影响,分析磨削过程中纳米微囊释放润滑剂油酸并产生自润滑作用的机制。结果表明,纳米微囊具有较好的热稳定性, 能够抵抗树脂砂轮的固化温度并保护其中的油酸,当微囊的填充量小于 16%时,砂轮的力学性能可以满足使用需求。与普通砂轮比,纳米微囊砂轮磨削时的磨削力可减小 40%,磨削温度降低 45%,工件表面粗糙度减少 15%,磨削比可提高 30%。磨削过程中,砂轮中的纳米微囊可将其空腔中的润滑剂油酸不断被释放到磨削界面上形成自润滑层,使砂轮具有了较好的自润滑作用,从而提高了其磨削性能。研究成果可为解决磨削过程的润滑问题提供一种可行的技术路线。     

氧化铝陶瓷ELID高效磨削技术的研究

陶瓷材料具有优异的机械性能，其应用越来越广泛。然而由于陶瓷的高硬度及其易碎性使其难于加工。在线电解修整磨削技术已经被应用于硬脆材料的超精密加工，由于可以实现砂轮的在线修整，尤其被广泛应用于细粒度砂轮的磨削中。本文在平面磨床上应用铸铁结合剂金刚石砂轮与ELID磨削技术进行高效磨削研究。实验结果表明，在同样的磨削条件下，采用ELID磨削时的磨削力约为使用树脂结合剂砂轮磨削力的2／5～3／5。实验结果说明采用ELID磨削技术加工效率可以得到极大提高。而且，在线电解修整作用可以保持砂轮的锋锐性，有利于保持硬脆材料高效磨削的连续性。