MBE生长高功率半导体激光器

对影响分子束外延（ ＭＢＥ） 材料生长的一些主要因素进行了细致的分析。利用ＭＢＥ生长出ＧａＡｌＡｓ／ＧａＡｓ 梯度折射率分别限制单量子阱激光器（ＧＲＩＮ－ ＳＣＨ－ ＳＱＷ） 材料。利用该材料制作出的列阵半导体激光器的准连续输出功率达到了６０ Ｗ（ｔ＝ ２００ μｓ,ｆ＝ ５０ Ｈｚ） ,峰值波长为８０８ ．４ ｎｍ 。     

980nm高功率列阵半导体激光器

分析了影响列阵半导体激光器输出功率的因素。利用分子束外延生长方法生长出InGaAs/GaAs应变量子阱激光器材料。利用该材料制作出的应变量子阱列阵半导体激光器准连续（100Hz,100μs）输出功率达到80W（室温）,峰值波长为978－981nm。     

940nm列阵窗口半导体激光器

本文分析了影响列阵半导体激光器输出功率的因素。利用分子束外延生长方法生长出InGaAs/GaAs应变量子阱激光器材料。利用该材料制作出的应变量子阱列阵窗口半导体激光器,准连续（500μs,100Hz）输出功率达到80W（室温）,峰值波长为939－941nm。     

量子阱无序的窗口结构InGaAs/GaAs/AlGaAs量子阱激光器

对ＳｉＯ２薄膜在快速热退火条件下引起的空位诱导ＩｎＧａＡｓ／ＧａＡｓ应变量子阱无序和ＳｒＦ２薄膜抑制其量子阱无序的方法进行了实验研究。并将这两种技术的结合（称为选择区域量子阱无序技术）应用于脊形波导ＩｎＧａＡｓ／ＧａＡｓ／ＡｌＧａＡｓ应变量子阱激光器，研制出具有无吸收镜面的窗口结构脊形波导量子阱激光器。该结构３μｍ条宽激光器的最大输出功率为３４０ｍＷ，和没有窗口的同样结构的量子阱激光器相比，最大输出功率提高了３６％。在１００ｍＷ输出功率下，发射光谱中心波长为９７８ｎｍ，光谱半宽为１．２ｎｍ。平行和垂直方向远场发散角分别为７．２°和３０°     

MOCVD生长碳掺杂GaAs/AlGaAs大功率半导体激光器

利用低压金属有机金属化合物气相沉积方法,以液态ＣＣｌ,为掺杂源生长了高质量Ｃ掺杂ＧａＡｓ／ＡｌＧａＡｓ材料,并对生长机理、材料特性以及Ｃ掺杂对大功率半导体激光器的影响进行了分析。在材料研究的基础上生长了以Ｃ为Ｐ型掺杂剂的ＧａＡｓ／ＡｌＧａＡｓ／ＩｎＧａＡｓ应变量子阱半导体激光器结构,置备了高性能９８０ｎｍ大功率半导体激光器。     

MBE生长InGaAs／GaAs应变层单量子阱激光器结构材料的研究

采用ＶａｒｉａｎＧｅｎⅡＭＢＥ生长系统研究了ＩｎＧａＡｓ／ＧａＡｓ应变层单量子阶（ＳＳＱＷ）激光器结构材料。通过ＭＢＥ生长实验，探索了Ｉｎ＿ｘＧａ＿（１－ｘ）ｔＡｓ／ＧａＡｓＳＳＱＷ激光器发射波长（λ）与Ｉｎ组分（ｘ）和阱宽（Ｌ＿ｚ）的关系，并与理论计算作了比较，两者符合得很好。还研究了材料生长参数对器件性能的影响，主要包括：Ⅴ／Ⅲ束流比，量子阱结构的生长温度Ｔ＿ｇ（ＱＷ），生长速率和掺杂浓度对激光器波长、阈值电流密度、微分量子效率和器件串联电阻的影响。以此为基础，通过优化器件结构和ＭＢＥ生长条件，获得了性能优异的Ｉｎ＿（０．２）Ｇａ＿（０．８）Ａｓ／ＧａＡｓ应变层单量子阱激光器：其次长为９６３ｎｍ，阈值电流密度为１３５Ａ／ｃｍ￣２，微分量子效率为３５．１％。     

InGaAs/GaAs/AlGaAs应变量子阱激光器

优化设计了既能实现较小垂直方向远场发散角,又能降低腔面光功率密度的ＩｎＧａＡｓ／ＧａＡｓ／ＡｌＧａＡｓ应变层量子阱激光器,并计算了该结构激光器实现基横模工作的脊形波导结构参数。利用分子束外延生长了ＩｎＧａＡｓ／ＧａＡｓ／ＡｌＧａＡｓ应变量子阱激光器材料并研制出基横模输出功率大于１４０ｍＷ,激射波长为９８０ｎｍ的脊形波导应变量子阱激光器,其微分量子效率为０．８Ｗ／Ａ,垂直和平行结平面方向远场发散角分别为２８°和６．８°     

泵浦掺铒光纤放大器的大功率单元赝配InGaAs／GaAs／AlGaAs单量子阱激光器

已研制出９８０ｎｍ脊波导赝配ＩｎＧａＡｓ／ＧａＡｓ／ＡｌＧａＡｓ单量子阱激光器。该镜面镀膜激光器的最高输出功率为２４０ｍＷ／面。器件由分子束外延（ＭＢＥ）生长的渐变折射率分别限制异质结量子阱结构材料制成。激光器以基模工作，与１．５５μｍ单模光纤的耦合效率为２２％。在镜面无镀膜激光器输出功率为３０ｍＷ／面下进行的寿命试验表明，它比ＧａＡｓ／ＡｌＧａＡｓ量子阱激光器有更高的可靠性，但在泵浦掺铒光纤放大器所要求功率下长时间可靠工作需要镜面保护镀膜。     

GaInNAs/GaAs量子阱激光器的发展与未来

ＧａＩｎＮＡｓ是一种直接带隙半导体材料,在长彼长（１．３０和 １．５５μｍ）光通信系统 中具有广阔的应用前景．通过调节 Ｉｎ和 Ｎ的组分,既可获得应变 ＧａＩｎＮＡｓ外延材料,也可制 备ＧａＩｎＮＡｓ与ＧａＡｓ匹配的异质结构,其波长覆盖范围为０．９－Ｎ２．０μｍ．ＧａＩｎＮＡｓ／ＧａＡｓ 量子阱激光器的特征温度为 ２００ Ｋ,远大于现行 ＧａＩｎＮＡｓＰ／ＩｎＰ激光器的特征温度（Ｔ０＝５０ Ｋ）． ＧａＩｎＮＡｓ光电子器件的此优异特性,对于提高光纤通信系统的稳定性、可靠寿命具有特 别重要的意义．由于ＧａＩｎＮＡｓ和具有高反射率（高达９９％）ＡＩ（Ｇａ）Ａｓ／ＧａＡｓ的分布布拉格 反射镜（ＤＢＲ）可生长在同－ＧａＡｓ衬底上,因此它是长波长（１．３０和 １．５５ μｍ）垂直腔面 发射激光器（ＶＣＳＥＬ）的理想材料．垂直腔面发射激光器是光纤通信、互联网和光信号处理的 关键器件． ＧａＡｓ基的超高速集成电路（ＩＣ）已有相当成熟的工艺．如果 ＧａＩｎＮＡｓ－ＶＣＳＥＬ 与 ＧａＡｓ－ＩＣ相结合,将使光电集成电路（ＯＥＩＣ）开拓出崭新的局面．本文还报道我们课题 组研制高质量 ＧａＮＡｓ／ＧａＡｓ超晶格和大应变 ＩｎＧａＡｓ／ＧａＡｓ量子阱结构取     

MBE生长温度对InGaAs／GaAs应变单量子阱激光器性能的影响

采用分子束外延（ＭＢＥ）技术，研制生长了ＩｎＧａＡｓ／ＧａＡｓ应变单量子阱激光器材料，并研究了生长温度及界面停顿生长对激光器性能的影响。结果表明，较高的ＩｎＧａＡｓ生长温度和尽可能短的生长停顿时间，将有利于降低激光器的阈值电流。所外延的激光器材料在２５０μｍ×５００μｍ宽接触、脉冲工作方式下测量的阈电流密度的典型值为１６０ｍＡ／ｃｍ２。用湿法腐蚀制作的４μｍ条宽的脊型波导激光器，阈值电流为１６ｎＡ，外微分量子效率为０４ｍＷ／ｍＡ，激射波长为９７６±２ｎｍ，线性输出功率为１００ｍＷ。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.