Three-terminal dual-stage vertical-cavity surface-emitting laser

A three-terminal dual-stage VCSEL, operating continuous-wave at room temperature has been fabricated. Independent biasing of the two active stages leads to an extended singlemode regime compared to conventional VCSELs. The parallel configuration reveals singlemode operation with a differential series resistance <35 Ω     

Ultralow-threshold cryogenic vertical-cavity surface-emitting laser

Data are presented characterizing a low-threshold vertical-cavity surface-emitting laser designed for cryogenic operation. A threshold current of 12 μA and current density of 25 A/cm² are obtained at 77 K with the low-loss cavity design. From 77 K to 160 K, the threshold increases linearly with temperature, but only approximately tracks the detuning of the cavity resonance from the minimum energy transition of the quantum well. At 77 K, we estimate that the 25-A/cm² threshold current density is about twice that required for transparency     

Analysis of vertical-cavity surface-emitting laser multimodebehavior

This paper investigates problems associated with multimode oscillation in vertical-cavity surface-emitting lasers (VCSELs). The multimode rate equations for transverse mode were formulated. These equations take into account carrier diffusion and gain nonuniformity in the lateral direction. It was shown that multimode transverse mode excitation is due to carrier spatial hole burning, but many factors affect the number of lasing modes. The role of gain nonuniformity distribution, carrier diffusion, and modal loss compared with mirror loss in a cavity were demonstrated by numerical solution of the multimode rate equations     

Modulation of a vertical-cavity surface-emitting laser using anintracavity quantum-well absorber

We demonstrate a novel modulation technique with a vertical cavity surface-emitting laser (VCSEL) using an intracavity embedded voltage-biased quantum well absorber. We achieved a -3-dB small-signal bandwidth of 9 GHz and a response of 7 GHz/√(mA) by modulation of the absorber. Our calculations show that this technique introduces significantly less chirp at higher frequencies than direct current modulation     

Influence of mirror reflectivity on laser performance ofvery-low-threshold vertical-cavity surface-emitting lasers

The influeuce of mirror reflectivity on laser performance of InGaAs-GaAs vertical-cavity surface-emitting lasers fabricated by selective oxidation is investigated by the stepwise change of the number of pairs in top mirror stack after device fabrication. Devices with 18-pair stacks in the top mirror, which is the optimized number of pairs in this structure, show an output power over 1.9 mW and a slope efficiency of 55% while maintaining a low threshold current of 212 μA. The analysis of the threshold current and differential efficiency related to mirror reflectivity shows an internal quantum efficiency of 95%, an internal round-trip loss of 0.072, and a transparency current density of 71 A/cm²     

Cascadability of optically latching vertical-cavity surface-emitting laser

The cascadability of an optically latching vertical-cavity surface-emitting laser is investigated through the use of a wavelength-tunable optical probe. The bistable vertical cavity laser emits at a wavelength of 0.98 mu m, and shows a sensitivity peak to probe light generated from a grating-tunable edge-emitting laser in the 0.98 mu m wavelength range. The sensitivity peak occurs in a window of approximately 50 AA around the vertical-cavity lasing wavelength, and corresponds to the Fabry-Perot transmission window of the surface-emitter.<>     

垂直腔面发射激光器新型结构的特性比较

通过对一种微分量子效率可以大于1的新型多有源区隧道再生应变量子阱垂直腔面发射半导体激光器(VCSELs)结构,以及由此设计出的阈值电流更小、输出功率更大的器件与普通结构在反射率及注入电流都相同的条件下输出功率大小的比较及阈值电流密度大小的比较,从而在理论上证实了这种VCSELs新型结构的优势。     

850 nm垂直腔面发射激光器的辐射效应

为了探究850 nm高速垂直腔面发射激光器（Vertical-Cavity Surface-Emitting Laser,VCSEL）在空间辐射环境中的退化规律与机制,开展了10 MeV质子和γ-射线辐照实验,获得了光功率和阈值电流退化规律,分析了辐射导致VCSEL参数退化的物理机理,此外,还开展了236 h的电注入退火研究。研究结果表明:VCSEL对γ射线导致的总剂量效应不敏感,且在一定剂量范围内光电特性由于沉积能量促进了量子阱界面附近的晶体有序而产生了一定程度的恢复:但是在质子辐照下,VCSEL的阈值电流和外量子效率发生了不同程度的退化,计算获得阈值电流损伤因子为1.468×10?15 cm2/p。经过20 mA注入增强退火后,阈值电流恢复了20%,25 mA注入电流下,光输出功率恢复了10%。阈值电流和外量子效率的退化归因于质子辐照引入的非辐射复合中心。这些实验结果为VCSEL及包含VCSEL的数据通信与仪器的系统在恶劣空间辐射环境下的应用提供支持。     

Size-dependent output power saturation of vertical-cavity surface-emitting laser diodes

We demonstrate efficient vertical-cavity surface-emitting laser diodes with high output power levels. Improved output power in these pillar-etched devices is achieved through a 60% lower thermal resistance by using a 15-/spl mu/m-thick Au-plated heat spreading layer on the top surface with a size of 300/spl times/300 /spl mu/m/sup 2/. The maximum continous wave output power increases almost linearly with laser diameter, before it saturates at 42 mW for an unmounted Au-plated device of 64-/spl mu/m diameter. A simple analytical model describes the laser output characteristics and the size-dependent saturation behavior of the maximum output power.     

1.3 /spl mu/m quantum dot vertical-cavity surface-emitting laser with external light injection

A 1.3 /spl mu/m quantum dot vertical-cavity surface-emitting laser (QD VCSEL) with external light injection is presented, having been experimentally demonstrated. The QD VCSEL is fabricated on GaAs substrate. The 3 dB frequency response of the QD VCSEL based on the TO-Can package is enhanced from the free-running 1.75 to 7.44 GHz with the light injection technique.     

High-power vertical-cavity surface-emitting laser with an extra Au layer

We report the performance of a high-power vertical-cavity surface-emitting laser (VCSEL) with an extra Au layer. By using the extra Au layer, the far-field divergence angle from a 600-/spl mu/m diameter VCSEL device is suppressed from 30/spl deg/ to 15/spl deg/, and no strong sidelobe is observed in far-field pattern. There is a slight drop in optical output power due to the introduction of the extra Au layer. By improving the device packaging method, the VCSEL device produces the maximum continuous-wave optical output power of 1.95 W with lasing wavelength of 981.5 nm. The aging test is carried out under constant current mode at 60/spl deg/C, and the preliminary result shows that the total degradation of output power is less than 10% after 800 h.     

A single transverse-mode monolithically integrated long vertical-cavity surface-emitting laser

We present a fully monolithic long vertical-cavity surface-emitting laser operating in the fundamental TEM/sub 00/ transverse mode with output powers up to 7.8 mW. The lasing wavelength is 980 nm and the threshold is 9.1 mA. Pump currents from threshold to rollover produce an output beam with an M/sup 2/<1.08. The laser consists of an InGaAs-GaAs-AlGaAs gain region/semiconductor mirror bonded to a 0.5-mm-thick glass substrate with an integrated curved mirror.     

Nonlinear frequency conversion in a double vertical-cavity surface-emitting laser

Optical characteristics of a double vertical-cavity surface-emitting laser using the lattice nonlinearity of a GaAs/AlGaAs structure for emission in the mid-IR region are analyzed in detail. The conditions for continuous-wave lasing with a power of ∼0.1 mW at 13 μm at a pump current density of 5 kA/cm² are determined. __________ Translated from Fizika i Tekhnika Poluprovodnikov, Vol. 38, No. 11, 2004, pp. 1392–1398. Original Russian Text Copyright ? 2004 by Morozov, Nefedov, Aleshkin.     

910 nm高峰值功率垂直腔面发射激光光源

报道了910 nm高峰值功率垂直腔面发射半导体激光器列阵(Vertical Cavity Surface Emitting Laser,VCSEL)的设计方法及测试结果.所制备的910 nm VCSEL列阵在准连续工作时激光功率达到2 W;在重复频率10 kHz,脉冲宽度30 ns,工作电流60 A的电脉冲驱动条件下,VCSEL列阵峰值输出功率达到25.5 W.随着工作电流的增加,VCSEL列阵输出的激光光谱呈现明显办展宽现象,证实VCSEL列阵即使在窄脉冲工作时大的电流驱动仍然会产生严重的内部热效应;VCSEL列阵输出激光的光脉冲波形在驱动电流增大至60 A时脉宽仅展宽了6 ns左右,证实VCSEL阵列具有非常优越的脉冲响应特性.对VCSEL列阵进行光束准直处理后,在1 m距离处得到了近圆形的均匀光斑.我们相信这种高功率的910 nm面阵光源在未来汽车光探测测距(LiDAR)等智能驾驶领域具有很大的应用潜力.     

Independently addressable InGaAs/GaAs vertical-cavity surface-emitting laser arrays

The fabrication of an 8*8 independently addressable InGaAs/GaAs vertical-cavity surface-emitting laser array based on planar ion-implantation processes is described. The uniformity of laser characteristics across the array under both pulsed and CW operation is discussed. Simultaneous addressing of multiple lasers is demonstrated.<>     

A high-efficiency vertical-cavity surface-emitting switching laserfabricated with post-growth cavity mode positioning

The first room-temperature continuous-wave (CW) operation of the double heterostructure optoelectronic switching laser implemented as a vertical-cavity laser is described. A deposited dielectric top reflector of SiO₂/TiO₂ allowed the use of a cavity etch back technique after the sample was grown, to position the cavity mode at the desired wavelength. Room temperature CW threshold currents as low as 4.8 mA for a 14-μm-diameter device were obtained with slope efficiencies of 0.45 mW/mA. The maximum CW output power was 2.5 mW and the resistivity was 4×10^-4 Ωcm²     

Fabrication of high-packing-density vertical cavity surface-emitting laser arrays using selective oxidation

We describe the nearly-planar processing of two-dimensional vertical cavity laser arrays based on the selective conversion of AlAs to Al/sub x/O/sub y/. The individual lasers of 8/spl times/8 and 2/spl times/2 arrays are defined by native Al/sub x/O/sub y/ to achieve 4-/spl mu/m square active regions on 12-/spl mu/m center-to-center spacings. Interelement thermal coupling is characterized along with the optical mode structure.     

AlGaAs vertical-cavity surface-emitting laser responses to 4.5-MeV proton irradiation

We have irradiated single- and multimode AlGaAs vertical-cavity surface-emitting laser (VCSEL) arrays operating at a nominal wavelength of 780 nm with 4.5-MeV protons and doses ranging from 10 to 30 Mrad in the active region. We observed a peak power reduction of about 2% per Mrad in the 14-/spl mu/m aperture, multimode VCSELs. Single-mode VCSELs having an aperture of 6 /spl mu/m exhibited a smaller peak power reduction of 0.4%-1% per Mrad. A slight shift in the current threshold was observed only for the multimode VCSELs at dose levels above 10 Mrad. First results indicate a reduced VCSEL peak laser power output that is dominated by a temperature shift caused by the radiation induced increase in resistive heating. In contrast, the power reduction in edge-emitting lasers is dominated by the enhanced radiation induced nonradiative recombination rate. The VCSEL irradiation was performed with a focused ion micro beam that was rastered over the device surface, ensuring a very uniform exposure of a single device in the array.     

Laterally intermixed quantum structure for carrier confinement in vertical-cavity surface-emitting lasers

A quantum structure intermixing from the lateral direction of the mesa sidewall is proposed as an improvement method of the performance of vertical-cavity surface-emitting lasers (VCSELs). Threshold current reduction of 70%, a differential quantum efficiency increase of 75% and a two times increase in output power were achieved by suppression of the surface recombination current and by the carrier confinement in the post-type VCSEL.     

Tunnel injection active region in an oxide-confined vertical-cavity surface-emitting laser

Data are presented on oxide-confined AlGaAs-GaAs-InGaAs VCSEL's that use high-index half-wave GaAs spacer layers and electronic tunnel injection and confinement. To our knowledge, this is the first demonstration of tunnel injection in a vertical-cavity laser. Threshold currents range from 344 /spl mu/A for a 6.5-/spl mu/m diameter device to 151 /spl mu/A for a 1-/spl mu/m diameter device. The relatively high threshold currents are attributed to a detuned cavity and higher order transverse-mode operation.