2英寸GaAs快速热退火技术研究

为配合２０００门ＧａＡｓ超高速门阵列及ＧａＡｓ超高速分频器等２英寸ＧａＡｓ工艺技术研究，开展了２英寸ＧａＡｓ快速热退火技术研究。做出了阈值电压为０～０．２Ｖ，跨导大于１００ｍＳ／ｍｍ的Ｅ型ＧａＡｓＭＥＳＦＥＴ和夹断电压为－０．４～－０．６Ｖ，跨导大于１００ｍＳ／ｍｍ的低阈值Ｄ型ＧａＡｓＭＥＳＦＥＴ。     

2英寸GaAs快速热退火技术研究

为配合２０００门ＧａＡｓ超高速门列及ＧａＡｓ超高速分频器等２英寸ＧａＡｓ工艺技术研究，开展了２英寸ＧａＡｓ快速热退火技术研究，做出了阈值电压为０～０．２Ｖ，跨导大于１００ｍＳ／ｍｍ的Ｅ型ＧａＡｓＭＥＳＦＥＴ和夹断电压为－０．４～－０．６Ｖ，跨导大于１００ｍＳ／ｍｍ的低阈值Ｄ型ＧａＡｓＭＥＳＦＥＴ。     

新结构高性能In_（0．3）Ga_（0．7）As／In_（0．29）Al_（0．

新结构高性能Ｉｎ_（０．３）Ｇａ_（０．７）Ａｓ／Ｉｎ_（０．２９）Ａｌ_（０．７１）Ａｓ／ＧａＡｓＨＥＭＴ研究证明，ＩｎＧａＡｓＨＥＭＴ的结构优于ＧａＡｓＭＥＳＦＥＴ和习用的ＡｌＧａＡｓ／ＧａＡｓＨＥＭＴ。在ＧａＡｓ上制备的赝配结构ＨＥＭＴ（ＰＭ－ＨＥ...     

GaAs MESFET欧姆接触可靠性研究进展

报道了ｎ型ＧａＡｓ上欧姆接触的制备及其可靠性，以及基于欧姆接触退经的ＧａＡｓＭＥＳＰＥＴ的失效分析，结果表明，ｎ型ＧａＡｓ上欧姆接触的制备已日趋成熟，接触电阻有所减小，表面形貌及热稳定性方面都得到了很大程度的提高，接触材料也日趋丰富ＧａＡｓＭＥＳＦＥＴ的失效分析方法也有明显改进。     

GaAs和InP IC技术的新发展──1995 IEEE GaAs IC研讨会述评

ＧａＡｓ和ＩｎＰＩＣ技术的新发展──１９９５ＩＥＥＥＧａＡｓＩＣ研讨会述评高学邦（电子部第１３研究所，石家庄，０５００５１）１会议简介１９９５年１０月２９日至１１月１日在美国加利福尼亚州圣地亚哥市召开了’９５ＩＥＥＥＧａＡｓＩＣ研讨会，即ＩＥＥＥＧａ...     

1998年GaAs市场将达12亿美元

１９９８年ＧａＡｓ市场将达１２亿美元据ＩＣＥ报道，目前ＧａＡｓＩＣ厂家总的销售额为３５万门以上。１９９３～１９９８年ＧａＡｓＩＣ市场年平均增长率为２３％，１９９８年，ＧａＡｓ市场将达１２亿美元。ＧａＡｓＩＣ现以４英寸片子为主，而ＩＣＥ报道，从１９９４...     

双平面掺杂AlGaAs／InGaAs功率PHEMT

双平面掺杂ＡｌＧａＡｓ／ＩｎＧａＡｓ功率ＰＨＥＭＴ陈效建，刘军，李拂晓，郑雪帆，华培忠（南京电子器件研究所，２１００１６）Ｄｏｕｂｌｅ－ｐｌａｎａｒ－ｄｏｐｅｄＡｌＧａＡｓ／ＩｎＧａＡｓＰｏｗｅｒＰＨＥＭＴ￥ＣｈｅｎＸｉａｏｊｉａｎ；ＬｉｕＪｕｎ；Ｌ...     

75～110GHz InGaAs／GaAsHEMT高增益MMIC放大器

７５～１１０ＧＨｚＩｎＧａＡｓ／ＧａＡｓＨＥＭＴ高增益ＭＭＩＣ放大器毫米波ＩｎＧａＡｓ／ＧａＡｓＰＨＥＭＴ已在通信、雷达、灵巧武器、电子战和辐射测量系统等方面获得广泛应用。近来，以ＰＨＥＭＴ为基础的工艺技术已取得令人瞩目的进展，因而能在兼顾高性能的情...     

新型GaAsD－MESFETDCFL单元电路

本文基于自举反馈原理提出了一种新型的全部电耗尽型ＧａＡｓＭＥＳＦＥＴ构成的单电源ＧａＡｓＭＥＳＦＥＴ直接耦合逻辑ＦＥＴ单元电路．该单元电路比已有的各种ＧａＡｓ数字集成电路单元电路有明显优点，是ＧａＡｓ数字集成电路领域有前景的新型逻辑单元电路．     

X波段功率AlGaAs／InGaAs p－n－p异质结双极晶体管（HBT）

Ｘ波段功率ＡｌＧａＡｓ／ＩｎＧａＡｓｐ－ｎ－ｐ异质结双极晶体管（ＨＢＴ）＝Ｘ－ｂａｎｄｐｏｗｅｒＡｌＧａＡｓ／Ｉｎ－ＧａＡｓｐ－ｎ－ｐＨＢＴ’ｓ［刊，英］／Ｈｉｌｌ．Ｄ．Ｇ．…／／ＩＥＥＥＥｌｅｃｔｒｏｎＤｅｖｉｃｅＬｅｔｔｅｒｓ．１９９３．１４（４...     

硅化物与GaAs肖特基接触的快速退火特性

本文对WSi_x,TiSi_x和PtSi_x与GaAs的肖特基接触进行了研究,比较了不同组分下这三种硅化物在快速退火和常规退火后的电阻率、与GaAs接触界面的热稳定性、化学稳定性及所形成肖特基结的电特性.结果表明:TiSi_x的电阻率仅约为WSi_x的1/3;WSi_(0.8)/GaAS界面和TiSi_2/GaAs界面均具有好的热稳定性和化学稳定性;PtSi_x/GaAs界面经500℃以上的热处理表现出热不稳定性.运用快速退火工艺,WSi_(0.8)及TiSi_2均可满足作为自对准GaAs MESFET栅极材料的要求.     

Etching behavior of GaAs/AlGaAs multilayer structure during laser beam scanning

The thermochemical etching behavior of GaAs/AlGaAs multilayer structure during laser beam scanning has been studied. The etch rate changes between GaAs and AlGaAs epilayers as the etching process proceeds through the layered sample. The phenomenon can be explained by the difference of thermal parameters of the heterojunction interface. The local temperature rise from laser irradiation has been calculated to investigate etching characteristics for GaAs and AlGaAs. It is concluded that the good thermal confinement at GaAs/AlGaAs interface produces the wider etch width of GaAs layer than that of AlGaAs layer in GaAs/AlGaAs multilayer. The maximum etch rate of the GaAs/AlGaAs multilayer was 32.5 μm/sec and the maximum etched width ratio of GaAs to AlGaAs was 1.7.     

Electrical and Thermal Cosimulation of GaAs Interconnects

It is well known that the poor thermal conductivity of GaAs adversely affects the electrical performance of GaAs circuits. Although they interact, the electrical and thermal circuits are simulated using separate software simulation packages. If the circuits are cosimulated on the same package, then the electrical and thermal circuits can interactively determine accurate information for the temperature-dependent variables of the electrical circuit. This paper demonstrates a method of electrical and thermal cosimulation of GaAs interconnects. To illustrate, the method is implemented on a meander line deposited on a GaAs epitaxial substrate. Each horizontal and vertical section of the meander is viewed as an individual heat source cell. An iterative procedure solves for the temperature of each cell and predicts the dc resistance of the line. Using a first-order thermal circuit, simulation shows good agreement with experimental data.     

The performance of GaAs power MESFET’s using backside copper metallization

The performance of GaAs power MESFET’s using backside copper metallization has been evaluated. 10 nm Ta metal was used as the diffusion barrier between GaAs and Cu for copper film metallization in this study. Microstructural characterization shows that the Cu/Ta films with GaAs remained stable up to 400 °C, indicating that Ta is a good diffusion barrier for Cu in GaAs MESFET’s. A copper metallized 6 mm power MESFET was thermal stressed to test the device stability. After annealing at 200 °C for 3 h, the devices showed very little degradation in power performance, and the thermal resistance of the device was 65 °C mm/W with 1.4 W/mm DC input power. Results in this study demonstrate that the feasibility of using Cu/Ta films for the backside metallization of GaAs power devices with stable electrical and thermal characteristics.     

基区设计对InGaP/GaAs HBT热稳定性的影响

研究了不同基区设计对多发射极指结构功率InGaP/GaAs异质结双极型晶体管热稳定性的影响。以发生电流增益崩塌的临界功率密度为热稳定性判定标准,推导了热电反馈系数Φ、集电极电流理想因子η和热阻Rth与基区掺杂浓度NB、基区厚度dB的理论公式。基于TCAD虚拟实验,观测了不同基区掺杂浓度和不同基区厚度分别对InGaP/GaAs HBT热稳定性的影响。结合理论公式,对仿真实验曲线进行了分析。结果表明,基区设计参数对热稳定性有明显的影响,其影响规律不是单调变化的。通过基区外延层参数的优化设计,可以改进多指HBT器件的热稳定性,从而为多指InGaP/GaAs HBT热稳定性设计提供了一个新的途径。     

Thermal modeling of power gallium arsenide microwave integratedcircuits

Manufacturers are developing power devices for ever higher frequencies using GaAs MESFETs and heterojunction bipolar devices constructed with III-V compounds on GaAs substrates, as well as integrated power devices on monolithic microwave integrated circuits (MMICs). A problem with the technology is the low thermal conductivity of gallium arsenide, giving rise to thermal design problems that must be solved if good reliability is to be achieved. A three-dimensional numerical simulator is used to study this problem. In particular, the approximations which are possible in performing realistic assessments of the thermal resistance of typical GaAs power device structures under steady-state conditions are examined     

Special features of electrical activation of 28Si in single-crystal and epitaxial GaAs subjected to rapid thermal annealing

Concentration profiles of ²⁸Si implanted in single-crystal and epitaxial GaAs were determined by measuring the C-V characteristics after the postimplantation rapid thermal annealings for 12 s at T=825, 870, and 905°C. The temperature dependence of Hall mobility of electrons in the Si-implanted layers subjected to the same annealings was determined by the Van der Pauw method within the range of 70–400 K. As distinct from conventional thermal annealing (for 30 min at 800°C), the rapid thermal annealing brings about a diffusive redistribution of silicon to deeper layers of GaAs for the materials of both types, with the diffusivity of silicon being twice as high in single-crystal GaAs as that in GaAs epitaxial layers. Analysis of temperature dependence of electron mobility in ion-implanted layers following a rapid thermal annealing indicates a significantly lower concentration of the defects limiting the mobility as compared to the case of a conventional thermal annealing for 30 min.     

Effect of thermal annealing on the photoluminescence of structures with InGaAs/GaAs quantum wells and a low-temperature GaAs layer δ-doped with Mn

The effects of isochronal thermal annealing (at 325–725°C) on the radiative properties of InGaAs/GaAs nanoheterostructures containing a low-temperature GaAs layer δ-doped with Mn grown by laser deposition are studied. A decrease in the photoluminescence intensity and increase in the ground transition energy are observed upon thermal impact for quantum wells located near the low-temperature GaAs layer. The distribution of Mn atoms in the initial and annealed structures is obtained by secondary-ion mass spectrometry. A qualitative model of the observed effects of thermal annealing on the radiative properties of the structures is discussed; this model takes into account two main processes: diffusion of point defects (primarily gallium vacancies) from the GaAs coating layer deep into the structure and Mn diffusion in both directions by the dissociation mechanism. Magnetization studies show that, as a result of thermal annealing, an increase in the proportion of the ferromagnetic phase at room temperature (presumably, MnAs clusters) in the low-temperature GaAs coating layer takes place.     

Characterization of thermal and frequency-dispersion effects inGaAs MESFET devices

New simple and accurate measurement procedures that enable the dispersion and thermal effects in GaAs MESFETs to be observed independently are presented in this paper. The results indicate that the differences observed between the static and pulsed characteristics of the device are not solely due to thermal effects, as is sometimes thought. Electrical and thermal measurements also show the GaAs MESFET to take a relatively long time before the effect of self-heating manifests itself on the IV characteristics of the device