Design of transmission blazed binary gratings for optical limiting with the form-birefringence theory

The structure of transmission blazed binary gratings for optical limiting is designed with the form-birefringence theory. This kind of grating has subwavelength features, can imitate the transmission blazed grating effectively, and has higher efficiencies than a transmission blazed grating with a subwavelength structure. The diffraction efficiencies are calculated and analyzed. For the normal incident light with 10.6 microm wavelength, the transmissivities for the designed grating at 0 degrees deviation angle for TE and TM polarizations are 0.05% and 5.09%, respectively, which are basically identical to the results of the finite-difference time-domain method. The diffraction efficiencies of the first transmitted order for TE and TM polarizations are 93.95% and 83.88%, respectively.     

Noninvasive characterization of continuous-profile blazed diffraction gratings

Smooth, continuous-profile diffractive optical elements and other regular microstructures demand advanced characterization methods. Here the problem of reconstructing the profiles with optical scatterometry is addressed for the first time to our knowledge. We represent the profile of a blazed grating with an analytic Chebyshev series. The coefficients of the series are inferred from the far-field diffraction pattern, when the grating profile is illuminated with coherent light. An advanced neural-network model is used as a nonlinear statistical estimator. The reconstruction error is found to be less than 4% as normalized to the depth of the profile, even with realistic measurement errors included in the simulations.     

Scanning methods for production of blazed relief gratings

Abstract

New methods for the production of blazed relief grating profiles using grating masks with either binary or harmonic transmittance have been developed. These methods are based on the recording of a scanning wave, properly modulated by a mask, through a grating period into photoresist. The applicability of the gratings produced by this method would be especially in the infrared or near-infrared wavelength regions in the reflection mode. These methods have been theoretically analysed and the principal ideas of the methods were experimentally verified.     

Analysis of the influence of the passive facet of blazed transmission gratings in the intermediate diffraction regime

Blazed diffraction gratings are of enormous practical importance for imaging and analyzing hybrid optical systems. The intermediate diffraction regime is characterized by the transition from the scalar to the rigorous electromagnetic theory. An effect known as shadowing occurs and reduces the diffraction efficiency. Based on rigorous calculations for optimized sawtooth-shaped and binary-multilevel blaze profiles, we deduce a semianalytical model describing the shadowing phenomenon for the general case of oblique incidence. We discuss illumination both from air and from the substrate. Though a multilevel blaze possesses a discrete substructure, our shadowing model remains valid, if substructural effects are neglected. We find that electromagnetic effects due to the passive blaze facet lead to the efficiency reduction, and the blazing efficiency shows a linear dependence on the ratio of blaze wavelength to grating period. Our shadowing model is applied to predict the performance of a Littrow-like blazing condition in transmission geometry as, e.g., for a diffractive solid immersion lens.     

改善MEMS闪耀光栅衍射效率的研究

研究了在硅材料上利用MEMS (Micro-Electro-Mechanical System)的各向异性腐蚀技术制备 闪耀光栅。采用氧化削尖工艺去除光栅制备过程中掩膜在闪耀面上留下的平台,得到一个连续的闪耀面;同时对闪耀面进行表面抛光,改善闪耀面的粗糙度,减小对入射光的散射。理论分析和实验测试证明,该工艺方法能够将MEMS闪耀光栅的衍射效率提高10%左右。     

Groove profile modification of blazed gratings by dip coating with hardenable liquids

We modify groove profile of various blazed gratings with groove densities as great as 3600 lines/mm by dip coating with hardenable liquids with the aim of reducing the blaze angle. The groove profiles resulting from coatings with different layer thickness are measured by atomic force microscopy. A highly reproducible blaze angle reduction to as high as a factor of 6 is achieved with mechanically ruled as well as ion-beam-etched holographic blazed gratings. Blaze angles, to as small as 0.7 deg, which are required for vacuum-UV and soft-x-ray applications but can hardly be formed with sufficient groove profile accuracy by direct ruling, are realized with this coating technique.     

Diffraction properties of transmission photorefractive volume gratings in a cerium-doped potassium sodium strontium barium niobate crystal

The diffraction efficiency of volume gratings written by two-wave mixing in a cerium-doped potassium sodium strontium barium niobate (Ce:KNSBN) photorefractive crystal is studied. It is found that the diffraction efficiency strongly depends on the polarization of writing beams and exhibits loop behavior with respect to the fringe modulation. The fringe modulations before and behind the crystal are compared. Modified coupled-wave theory is used to fit the experimental data. This research presents data that are relevant to the application of Ce:KNSBN crystals to holographic recording and optical information processing.     

Microspectrometer with slab-waveguide transmission gratings

An integrated transmission diffraction grating in a planar optical waveguide is presented for broadband spectroscopic analysis of liquids and gases. Silicon oxynitride slab waveguides on silicon substrates with low optical loss in the visible range are combined with a phase transmission grating exhibiting a blaze effect at 500 nm to achieve high-efficiency diffraction and high spectral dispersion. Collimated white light propagates through the waveguide and couples into air at a stepped formed planar grating. The beams of each adjacent step interfere constructively at the focal line of a cylindrical lens, its focal line positioned perpendicular to the waveguide plane. We used a common silicon photodiode array to detect the spectral data. Our approach is to develop a compact and economic spectrometer without moving parts that can be applied for UV-visible analysis and near-infrared industrial process control as well.     

Nonparaxial scalar treatment of sinusoidal phase gratings

Scalar diffraction theory is frequently considered inadequate for predicting diffraction efficiencies for grating applications where lambda/d>0.1. It has also been stated that scalar theory imposes energy upon the evanescent diffracted orders. These notions, as well as several other common misconceptions, are driven more by an unnecessary paraxial approximation in the traditional Fourier treatment of scalar diffraction theory than by the scalar limitation. By scaling the spatial variables by the wavelength, we have previously shown that diffracted radiance is shift invariant in direction cosine space. Thus simple Fourier techniques can now be used to predict a variety of wide-angle (nonparaxial) diffraction grating effects. These include (1) the redistribution of energy from the evanescent orders to the propagating ones, (2) the angular broadening (and apparent shifting) of wide-angle diffracted orders, and (3) nonparaxial diffraction efficiencies predicted with an accuracy usually thought to require rigorous electromagnetic theory.     

Diffraction from relief gratings on a biomimetic elastomer cast

Biomimetic optical elements combine the optimized designs of nature with the versatility of materials engineering. We employ a beetle carapace as the template for fabricating relief gratings on an elastomer substrate. Biological surface features are successfully replicated by a direct casting procedure. Far-field diffraction effects are discussed in terms of the Fraunhofer approximation in Fourier space.     

Characteristics of short-period blazed fiber Bragg gratings for use as macro-bending sensors

The characteristics of short-period blazed fiber Bragg gratings for use as macro-bending sensors are discussed. This sensor is able to detect macro bending with the transmitted power variation of the first side mode in the blazed fiber Bragg grating. Since an incident ray experiences different variations of tilt angles with respect to bending direction, the blazed fiber Bragg grating has different coupling efficiencies of the first side mode, which can be reduced considerably in the case of twisted blazed fiber Bragg gratings.     

Diffraction characteristics with various polarizations of overlapping holographic gratings in a uniaxial crystal

By the Riemann method, a coupled wave model is derived for the ordinary-to-ordinary (OO) and extraordinary-to-extraordinary (EE) Bragg diffraction of a Gaussian beam by overlapping holographic gratings in a uniaxial crystal. The computer simulation is used to discuss the relations among the diffraction efficiency, the index modulation, the wavelength sensitivity, the angular sensitivity, and the the widths of the recording and reading beams. The characteristics of EE and OO diffraction in a uniaxial crystal are found to be remarkably different. The simulation shows that EE diffraction may exhibit far higher diffraction efficiency than does OO diffraction for very low index modulation with the same hologram size, for example, nearly 90% when the size is 8.2 x 10(-5).     

Polarimetry of transmission gratings

We have investigated the polarizing properties of gold wire gratings in the resonance domain. The partial polarizing properties of 1-μm period gratings in the near IR are then used to orient the wire structure of transmission grating facets parallel to each other by means of an alignment polarimeter technique. The absolute alignment accuracy for these gratings is limited by the influence of the support structure on the orientation of the polarization ellipse. If the polarizing properties of this perturbative component are known, the accuracy can be enhanced by treating the polarization by means of the Mueller calculus.     

Diffraction properties of double-layer rectangular phase gratings

Abstract

We theoretically present diffraction properties of double-layer rectangular phase gratings (DLRPGs). Computer simulations show that these DLRPGs can realize several functions such as optical filtering, optical switching, optical amplitude modulating, beam splitting with variable output beam numbers and wavelength division multiplexing, and so on. As a test of the above diffraction properties, we fabricate a set of DLRPGs in a double-layer light-sensitive material by the contact printing method. Based on the DLRPGs of the material, a single beam splitter with experimental results of splitting of an incident beam into 2, 3 or 5 output beams and of higher than 64% total diffraction efficiency are realized when the incident angle of the readout beam is tuned during the reading process.     

Technique for detecting flaws in metallic surfaces using an optical system with phase-type blazed gratings

In this paper, we evaluate a novel flaw-detection technique for metallic surfaces based on the use of phase-type blazed gratings. Transparent blazed gratings were prepared by the soft nanoimprint method involving the transfer of a template (a reflective grating structure used for spectroscopy) onto silicone rubber. The blazed gratings were then integrated into an imaging system to observe the reflective metal sample. Due to the low-pass-filtering properties of the gratings, the captured image was notably blurred. This characteristic aids in flaw detection on metallic surfaces because the captured image is adequate to distinguish flaws in the targeted area on the basis of the texture of the rough surface, including any other structures that were unintended. The use of double-sided gratings with crossing grating vectors was found to be efficient for homogenous low-pass filtering. Such flaw-detection techniques are expected to be useful for conducting quality inspections of rolled steel plates since the surface contains both a rough surface and undesirable flaws.     

Diffraction efficiency of 200-nm-period critical-angle transmission gratings in the soft x-ray and extreme ultraviolet wavelength bands

We report on measurements of the diffraction efficiency of 200-nm-period freestanding blazed transmission gratings for wavelengths in the 0.96 to 19.4 nm range. These critical-angle transmission (CAT) gratings achieve highly efficient blazing over a broad band via total external reflection off the sidewalls of smooth, tens of nanometer thin ultrahigh aspect-ratio silicon grating bars and thus combine the advantages of blazed x-ray reflection gratings with those of more conventional x-ray transmission gratings. Prototype gratings with maximum depths of 3.2 and 6 μm were investigated at two different blaze angles. In these initial CAT gratings the grating bars are monolithically connected to a cross support mesh that only leaves less than half of the grating area unobstructed. Because of our initial fabrication approach, the support mesh bars feature a strongly trapezoidal cross section that leads to varying CAT grating depths and partial absorption of diffracted orders. While theory predicts broadband absolute diffraction efficiencies as high as 60% for ideal CAT gratings without a support mesh, experimental results show efficiencies in the range of ～50-100% of theoretical predictions when taking the effects of the support mesh into account. Future minimization of the support mesh therefore promises broadband CAT grating absolute diffraction efficiencies of 50% or higher.     

Extreme-ultraviolet polarization and filtering with gold transmission gratings

The polarization and transmission characteristics of freestanding gold transmission gratings, with 200-nm periods, for extreme-ultraviolet (EUV) radiation (1 < 200 nm) have been measured. We find that EUV transmission through the gratings is dominated by the waveguide characteristics of the gratings and that polarization efficiencies of 90% for wavelengths of 121.6 nm are achievable. Both the EUV polarization and transmission properties are in good agreement with a complete vector, numerical solution of Maxwell's equations. The fraction of open area to total area of the grating has been measured using a 10-keV proton beam and was found to be in good agreement with the microscopic slit and wire dimensions that were obtained by scanning electron microscopy. The use of these gratings for particle measurements in the presence of intense EUV radiation is briefly discussed.     

Diffraction efficiency of volume gratings with finite size: Corrected analytical solution

Abstract

In order to correct errors in a previously published work on a treatment of two-dimensional coupled-wave theory, a complete derivation of the two-dimensional ‘overlap grating’ coupled wave equations is given. By using the Riemann method, a corrected solution to the equations in closed mathematical form is obtained. On the basis of this solution a brief investigation of the diffraction properties of finite-sized gratings, and in particular the dependence of diffraction efficiency on the geometric size of gratings, is given.     

Rigorous coupled-wave analysis for practical planar dielectric gratings: 2. Diffraction by a surface-eroded hologram layer

The diffraction efficiencies of practical dielectric holograms are evaluated with rigorous coupled-wave analysis. The cases of the hologram surfaces eroded in several shapes are treated and compared with those in which the surfaces are not eroded and with those in which there are only surface gratings. Eroding the surface will increase the higher-order reflection diffraction efficiencies and the transmissions, thus reducing the first reflection and the zeroth transmission. However, sealing the hologram with a cover plate, as is done in manufacturing many holograms, extinguishes the erosion effect.