投影光刻机的坐标系与套刻步进模型

本文介绍 0 .35μm(亚半微米 )投影光刻机的机器、硅片、掩模、硅片对准、掩模对准等的坐标系 ,并根据各坐标系讨论套刻时硅片工件台的步进模型。     

提高整机套刻精度的软件处理方法

套刻精度是衡量分步重复投影光刻机的一项重要指标。套刻精度不仅取决于对准系统的对准精度,还受环境、工艺等因素的影响。提出了提高光刻机整机套刻精度的几种软件修正处理方法,通过工艺实验和考核,取得了比较满意的结果,证明了这些方法的可行性。     

提高193nm ArF Stepper分辨率的几种技术

193nm ArF Stepper是量产90nm芯片的主流光刻机。在此基础上。综合采用浸入式光刻技术和增大数值孔径NA技术等。已制造出193nm ArF浸入式光刻机．它将是量产65／45nm芯片的主流光刻机。     

GCA8500SE光刻机套刻精度的误差分析一校正

本文就美国原ＧＣＡ公司生产的ＤＳＷ８５００ＳＥ光刻机套精度的误差分类，产生误差的原因以及校正方法进行了详细的讨论，通过这些叙述旨在对设备维修人员和工艺操作人员能够更好地使用设备，提高设备的性能起到抛砖引玉的作用。     

分步重复投影光刻机套刻误差模型的研究

本文讨论了套刻误差的组成及误差模型的建立，并介绍了套刻误差的表示方法。套刻误差教学模型对于光刻机整机套刻精度的估计、对于光刻机的多机（单机）套刻匹配等工作将会是一个非常重要的工具。     

投影光刻机调焦调平传感技术的研究进展

阐述了投影光刻机调焦调平传感器的重要作用及其技术进展,详细介绍了国际上典型的调焦调平传感器,并对多种传感技术的光学原理和关键技术进行了分析和比较。     

双振镜扫描几何畸变的校正

通过理论分析，导出位于Ｆθ透镜前的双振镜扫描系统的扫描几何畸变公式。利用所得到的畸变量对计算机软件进行修正，从而获得校正了畸变的完善图形。实际标记的结果完全证明了理论分析的正确性，并在激光标记系统中得到应用。     

Correcting Image Distortion for Adaptive Cruise Control

One of the main drivers for intelligent transportation systems is safety. Adaptive cruise control, as a common solution for traffic safety, has extended from radars to cameras. Due to high mobility of vehicles and unevenness of roads, the picture quality of cameras has been great challenges for camera-based adaptive cruise control. In this paper, an image distortion correction algorithm is addressed. Our method is based on optical flow technology which is normally applied in motion estimation and video compression research. We are the first to attempt to adapt it in image distortion correction. Two optical flow approaches, the Lucas-Kanade method and the Horn-Schunck method, are selected and compared. The procedure of image distortion correction using the optical flow method has been tested by both synthetic test images and camera images. The experimental results show that the Lucas-Kanade method is more suitable in the correction of image distortion.     

Correcting Image Distortion for Adaptive Cruise Control

One of the main drivers for intelligent transportation systems is safety.Adaptive cruise control,as a common solution for traffic safety,has extended from radars to cameras.Due to high mobility of vehicles and unevenness of roads,the picture quality of cameras has been great challenges for camera-based adaptive cruise control.In this paper,an image distortion correction algorithm is addressed.Our method is based on optical flow technology which is normally applied in motion estimation and video compression research.We are the first to attempt to adapt it in image distortion correction.Two optical flow approaches,the Lucas-Kanade method and the Horn-Schunck method,are selected and compared.The procedure of image distortion correction using the optical flow method has been tested by both synthetic test images and camera images.The experimental results show that the Lucas-Kanade method is more suitable in the correction of image distortion.     

夜视系统畸变与输入照度关系的研究

给出了夜视系统的放大率与畸变量和输入照度关系的实验结果,讨论了放大率与畸变随输入照度大小变化的原因,纠正了有关技术问题中一个被人们忽视的问题,即夜视系统和/或夜视器件的放大率与畸变量和输入照度相关,从而为人们制定有关技术文件时增加输入照度作为测试放大率与畸变的前提提供了依据。     

Investigation of Concrete Distortion with Real-time Holographic Method

In order to find the relationships between the distortion rule of the concrete and its surrounding stress field, a real-time optical holographic setup is used to record the distribution and the variation of the samples, the waveforms of ultrasonic emission stimulated by the micro-cracks are recorded by a transient automatic waveform recorder to determine the time, location and intensity of the actions of micro-cracks. The experiment results are worthy studying. This method provides a useful experimental approach to study the brittleness materials.     

Investigation of Concrete Distortion with Real—tim Holographic Medhod

In order to find the relationships between the distortion rule of the concrete and its surrounding stress field,a real-time optical holographic setup is used to record the distribution and the variation of the samples,the waveforms of ultrasonic emission stimulated by the micro-cracks are recorded by a transient automaic waveform recorder th determine the time,location and intensity of the actions of micro-cracks,The experiment results are worthy studying.This method provides a useful experimental approach to study the brittleness materials.     

Multi-Source Video Transmission with Minimized Total Distortion Over Wireless Ad Hoc Networks

Many optimization theoretic based rate allocation strategies have been developed for allocating some optimal rates to the competing users in wireless ad hoc networks. By considering different objective functions (such as congestion level, total packet loss and so on), the researchers propose some optimization framework by which the problem can be solved. Due to the rapid increase in the development of different video applications in such environments and the existence of difficulties in satisfying the pre-specified QoS limits, increasing the received video quality can be considered as an important and challenging issue. The quality of the received video stream is inversely proportional to the amount of distortion which is being imposed on the video stream by the network packet loss and the video encoder. The main objective of the current paper is to introduce an optimization framework in which by optimal rate allocation to some competing video sources, the aggregate distortion of the all of the sources be minimized. The simulation results verify the claims.

微型单色显像管图形畸变参量测试图像计算机分析

微型ＣＲＴ管“图形畸变”参量计算机测试需要解决系统分辨率难以满足精度要求的问题。本文对畸变扫描线特性进行了深入的分析，并对图像采集系统的误差引入进行了充分的讨论，提出了误差抑制的方法，突破了分辨率对获取高精度图形畸变参量的限制。     

一种适合摄像机非线性畸变校正的畸变模型

由于制造与装配误差难以完全消除,因此数码摄像机的光学系统存在不同程度的非线性畸变,严重影响利用其影像进行实时拼接的精度。通过比对分析一种经典的数码相机畸变模型与Brown模型的适应性,提出将简化的Brown模型作为数码摄像机的畸变模型。同时,基于单像空间后方交会,按照最小二乘平差方法求解摄像机光学系统的非线性畸变差参数。最后,通过三维控制场对三种型号的摄像机进行了检校试验。结果表明,所用的畸变模型明显优于经典畸变模型,使数码摄像机的整体检校精度小于0.5 pixel。而且检校结果稳定可靠,有效地补偿了光学系统的畸变差,有利于恢复图像内部的相对几何关系。     

一种12位高速低失真数字/模拟转换器的设计

介绍了一种12位高速、低失真数字/模拟转换器(DAC)的设计原理及其电路结构;着重阐述了去毛刺技术及其应用。采用2μm等平面隔离互补双极工艺模型参数进行了Cadence仿真。结果表明,该12位DAC在高达60MHz数据更新率下具有低于100pV·s的毛刺脉冲面积。     

X射线光刻掩模背面刻蚀过程中的形变仿真

开发了理论模型以验证有限元方法用于X射线光刻掩模刻蚀过程数值仿真的正确性。利用相同的有限元技术，对X射线光刻掩模的背面开窗、Si片刻蚀过程进行数值仿真。结果表明，图形区域的最大平面内形变(IPD)出现在上、下边缘处，最大非平面形变(OPD)出现在左、右边缘处。此外对Si片单载荷步刻蚀和多载荷步刻蚀的仿真进行比较，结果表明图形区域最终的形变量与Si片刻蚀的过程无关。