Precision control system of two-DOF stage with linear ultrasonic motor

Using an appropriate control method, linear ultrasonic motors can be used in applications requiring high position accuracy. In this paper, a closed loop PI control system is designed to achieve high position accuracy during the control of a two-DOF stage driven by linear ultrasonic motors. Two ultrasonic motors are mounted on the stage to generate motion in two orthogonal directions. The PI control algorithm is used to increase the stability and accuracy of position control. The x-axis mover covers 30 mm forward and backward in less than 0.3 s settling time and the y-axis mover in less than 0.4 s. Experimental results denote that the control strategy proposed in this paper appears to have high efficiency, quick response, and high accuracy.     

The long-range scanning stage: a novel platform for scanned-probe microscopy

This paper describes a magnetically suspended six degree-of-freedom precision motion control stage with a horizontal positioning noise of less than 0.6 nm three sigma. The vertical positioning noise is less than 2.2 nm three sigma. The stage utilizes four levitation linear motors to suspend and servo the moving element (platen) throughout its 25 mm × 25 mm × 0.1 mm range of travel. Position feedback is provided by three plane mirror interferometers and three capacitance probes. The suspended platen (12 kg mass) is floated in oil to enhance the stage’s disturbance rejection and to reduce power dissipation in the actuators. The stage has been designed to achieve a positioning accuracy of 10 nm and is used to position samples beneath a scanned probe microscope. The ultimate purpose of this measuring machine is to provide a means of measuring submicron-scale features with nanometer-scale accuracy. The technology can easily be scaled to larger travels, with accuracy limited primarily by the wavelength instability of the HeNe light source. This article gives an overview of the LORS project, emphasizing the system error terms, tolerancing, and experimental results.     

Influence of a high vacuum on the precise positioning using an ultrasonic linear motor

This paper presents an investigation of the ultrasonic linear motor stage for use in a high vacuum environment. The slider table is driven by the hybrid bolt-clamped Langevin-type ultrasonic linear motor, which is excited with its different modes of natural frequencies in both lateral and longitudinal directions. In general, the friction behavior in a vacuum environment becomes different from that in an environment of atmospheric pressure and this difference significantly affects the performance of the ultrasonic linear motor. In this paper, to consistently provide stable and high power of output in a high vacuum, frequency matching was conducted. Moreover, to achieve the fine control performance in the vacuum environment, a modified nominal characteristic trajectory following control method was adopted. Finally, the stage was operated under high vacuum condition, and the operating performances were investigated compared with that of a conventional PI compensator. As a result, robustness of positioning was accomplished in a high vacuum condition with nanometer-level accuracy.     

定子分段式永磁直线同步电机速度波动抑制方法研究

为了解决定子分段式永磁直线同步电机(PMLSM)存在的因磁阻效应、负载阻力、摩擦力、参数摄动以及动子进出定子时耦合面积变化所造成的控制性能下降的难题,根据动子和定子的耦合状态,提出一种在完全耦合阶段和动子退出定子阶段的分段式控制方法。首先,在动子与定子完全耦合阶段采用改进滑模控制器减小推力波动导致的速度波动,再通过加入扰动观测器降低滑模切换项所带来的抖振现象;在动子退出定子阶段,建立相关电磁参数与动子位置的函数关系,实时补偿由耦合面积变化引起的动子失速,使动子速度在退出时接近给定值。仿真及实验结果表明动定子完全耦合过程中的速度稳态误差为0.005 m/s,收敛时间为0.3 s,动子退出定子阶段的速度波动不超过0.04 m/s,满足定子分段式PMLSM用于长行程自动运输系统对平稳性及快速性的需求。     

基于SVD的直线电机动子位置的高精度测量方法

针对直线电机动子位置测量的高精度和实时性要求,提出了一种基于奇异值分解(SVD)相位相关算法的高精度图像测量方法。通过直线电机动子上的高速相机采集相邻栅栏图像,采用单行抽样栅栏条纹数据,再利用相位相关技术得到相邻栅栏图像的相位相关矩阵,进而利用SVD得到水平位移相位矢量。通过相位解缠算法和最小二乘法线性拟合得到二幅栅栏图像的亚像素位移量,将相邻栅栏条纹的像素位移值和动子实际位移进行标定,结果用于直线电机动子位置测量系统标定。并且进行傅里叶变换前采用Hanning窗抑制频谱泄露,提高匹配精度。实验结果表明,该直线电机动子位置的亚像素测量方法可以满足实时性和高精度测量要求。     

基于参数预标定的长行程PMLSM无传感器控制

为了解决长行程定子不连续永磁直线同步电机存在的因无法全程安装位置传感器和不同动子和定子之间的电磁参数不固定所造成的控制性能下降的难题,提出一种在每一段定子内先进行参数标定,再进行速度控制的控制系统设计。首先,在动子进入过程中,对电机进行电磁参数标定,根据标定参数对控制器参数进行调整,以达到更好的控制效果。然后,使用无位置传感器控制系统使动子快速达到设定速度值并稳定运行。实验结果表明:动子进入过程参数标定精度分别为0.002Wb和0.000 4H;无位置传感器控制中位置估计精度为0.63mm,速度收敛时间为0.45s,稳态误差为0.02m/s。基本满足永磁直线同步电机用于长行程运输的控制快速性、稳定性等要求。     

基于互补滑模的起重机械电机位置伺服控制

以提升起重机械电机位置控制响应精度为目标,提出基于互补滑模的起重机械电机位置伺服控制方法。通过构建起重机械电机数学模型,分析位置伺服控制器状态和机械运动状况,以固定结构控制位置响应的加、减速过程,以互补滑模变结构控制位置响应匀速过程,确定起重机械电机的速度曲线,利用阶梯型曲线逼近指数型曲线,实现起重机械电机速度控制,并设计三阶线性扩张状态观测器( ESO )预估位置伺服控制器的各状态量,消除伺服控制的噪声及抖振,提升起重机械电机的位置互补滑模伺服控制效果。实验结果表明,低速空载、负载下电流曲线光滑、无频率波动,该方法在不同给定脉冲下均可实现位置伺服控制的快速响应,定位准确度高且无超调,位置伺服控制效果突出。     

直线型超声电机的发展及应用

概述了直线型超声电机的运动机理，综述了国内外直线型超声电机的发展及其研究现状，列举了一些典型例子，总结了直线型超声电机的应用领域。针对现在直线型超声电机在理论、实验、材料等方面存在的问题，指出了在其研究开发中需要解决的关键技术。     

基于多峰拟合的直线电机动子位置精密测量方法

为满足直线电机动子位置的高精度测量要求,提出一种基于多峰拟合相位相关算法的直线电机动子位置精密测量方法。通过直线电机动子上的高速相机采集相邻栅栏图像;采用相位相关算法得到相邻栅栏图像的相位相关函数;根据相位相关频谱的峰值分布特性,采用多峰拟合获得相邻栅栏图像的亚像素位移值;根据测量系统标定系数,进而获得直线电机动子位置的精确位置。实验结果表明,该亚像素测量方法用于直线电机动子位置检测能达到精密定位,测量精度为1/100 pixel,且具有较强的鲁棒性和较高的实时性。     

直驱燃气调节阀的高精度高响应控制策略研究

针对固体姿轨控制系统燃气调节阀在精度和响应上日益提高的性能需求,提出了一种动圈式电磁直线执行器直驱燃气调节阀的方案。通过分析其原理及特点,提出了基于逆系统+PI分段控制的方法:对于整个运动过程采用逆系统控制方案,确保系统快速响应;趋近于目标位移时采用PI控制方法,实现对位置的精准控制。基于Simulink建立了直驱燃气调节阀的仿真模型,并搭建试验系统。通过仿真和试验验证了控制算法的有效性,结果表明:在任意目标行程下的响应时间小于10 ms, 阀芯位移控制精度达到±0.02 mm,控制算法不仅满足高响应和高精度的性能要求,同时还具有一定抗负载扰动能力和对参数变化的鲁棒性。     

Note: high precision angle generator using multiple ultrasonic motors and a self-calibratable encoder

We present an angle generator with high resolution and accuracy, which uses multiple ultrasonic motors and a self-calibratable encoder. A cylindrical air bearing guides a rotational motion, and the ultrasonic motors achieve high resolution over the full circle range with a simple configuration. The self-calibratable encoder can compensate the scale error of a divided circle (signal period: 20") effectively by applying the equal-division-averaged method. The angle generator configures a position feedback control loop using the readout of the encoder. By combining the ac and dc operation mode, the angle generator produced stepwise angular motion with 0.005" resolution. We also evaluated the performance of the angle generator using a precision angle encoder and an autocollimator. The expanded uncertainty (k = 2) in the angle generation was estimated less than 0.03", which included the calibrated scale error and the nonlinearity error.     

直线电机驱动的H型气浮导轨运动平台

建立了双边直线电机驱动的H型气浮精密定位平台,对该精密定位系统的气浮导轨设计方法和双边直线电机同步运动控制等关键技术进行了研究。利用有限元法设计了气浮导轨,分析了气膜压力场的分布情况,采用预加载技术提高气浮导轨的承载能力和刚度等性能。静态特性实验表明,开发的定位平台气浮导轨具有较高的承载能力和刚度,X、Y导轨的竖直方向静刚度为276.9 N/μm和333.3 N/μm。设计了基于同步速度偏差的改进型并联结构同步控制器,采用模糊控制实现PID参数的自适应在线整定。运动实验表明,改进的控制器具有较高的同步控制精度,速度同步精度比一般同步控制提高了3倍多,适合于具有强机械耦合的多电机同步运动控制。H型直线电机气浮定位平台具有承载能力强、精度高的优点,可以用于光刻机和光学检测等精密工程领域。     

压电微动工作台动态迟滞模型研究

为实现压电微动工作台的快速准确运动定位,研究了其运动定位模型。压电工作台的运动定位精度主要受到工作台动态特性和迟滞特性的影响。在介绍这两类典型特性模型及其适用范围的基础上,提出了能够同时体现压电工作台动态特性和迟滞特性的动态迟滞模型,并给出了采用Prandtl-Ishlinskii (PI)迟滞算子的动态迟滞模型参数辨识方法。实验研究表明,动态迟滞模型的模型精度在压电工作台大行程、快速运动定位时较以往线性动态模型和迟滞模型有较大提高,其平均误差为0.16μm,最大误差为0.38μm,为下一步高性能运动定位工作台控制系统的设计提供了必要的模型基础。     

Precision motion control of permanent magnet linear motors

In the paper, a method of precision motion control for permanent magnet linear motors is proposed. Unlike rotational motors, permanent magnetic linear motors are more sensitive to various force disturbances because of the reduction of gears. So, as a feedback compensator, a disturbance observer is used to compensate the force disturbances based on the disturbance model. But the force disturbances of permanent magnetic linear motors cannot be fully compensated owing to the error of dynamic model, inaccurately detected velocity and acceleration, especially when a permanent magnetic linear motor runs in low speed. Further analysis shows that the force ripple is the main force disturbance when the velocity of a PMLM is close to zero, and the disturbance model denotes that the force ripple is position dependent. In order to further suppress the force disturbances of permanent magnetic linear motors a feedforward neural network using the BP algorithm is proposed to approximate and compensate the force ripple. The experimental results show that the force ripple is efficiently alleviated and the high positioning precision can be achieved by using the proposed precision motion control method.     

双重驱动2-DOF平面并联机器人系统的研究

研制了一种新颖的高速高精度柔性机器人机构。采用高速精密直线电机驱动2-DOF平面并联压电智能杆机构,针对柔性机器人机构的振动问题,以直线伺服电机作为机器人的主驱动源实现高速精密点位控制并采用脉冲整形技术减小末端残余振动,以压电陶瓷作为从驱动源采用闭环反馈控制策略抑制末端残余振动。实验研究和测试结果表明:机器人系统的最大加速度为2 g,稳定时间小于150 ms,重复定位精度小于±5 μm,实现了高速高精度的点位控制。     

Study on self-tuning pole assignment speed control of an ultrasonic motor

Ultrasonic motors have a heavy nonlinearity, which varies with driving conditions. The nonlinearity is a problem as an accurate motion actuator for industrial applications and it is important to eliminate the nonlinearity in order to improve the control performance. In general, complicated control strategies are used to deal with the nonlinearity of ultrasonic motors. This paper proposes a new speed control scheme for ultrasonic motors to overcome the nonlinearity employing a simplified self-tuning control. The speed control model which can reflect the main nonlinear characteristics is obtained using a system identification method based on the step response. Then, a pole assignment speed controller is designed. To avoid the influence of the motor’s nonlinearity on the speed control performance, a control parameters’ on-line self-tuning strategy utilizing the gain of the model is designed. The proposed control strategy is realized using a DSP circuit, and experiments prove the validity of the proposed speed control scheme.     

Design and control of a nanoprecision XY Theta scanner

This paper describes the design and control of a nanoprecision XY Theta scanner consisting of voice coil motors and air bearing guides. The proposed scanner can be installed on a conventional XY stage with long strokes to improve the positioning accuracy and settling performance. Major design considerations in developing a high precision scanner are sensor accuracy, actuator properties, structural stability, guide friction, and thermal expansion. Considering these factors, the proposed scanner is made of invar, which has a small thermal expansion coefficient and good structural stiffness. Four voice coil motors drive the scanner, which is suspended by four air bearing pads, in the x, y, and theta directions. The scanner's position is measured by three laser interferometers which decouple the scanner from the conventional stage. The mirror blocks reflecting the laser beams are fixed using viscoelastic sheets, ensuring that the scanner has a well-damped structural mode. A time delay control algorithm is implemented on the real-time controller to control the scanner. The effectiveness of the proposed scanner is verified experimentally.     

基于叠片式柔性铰链和压电陶瓷电动机的大行程直线驱动导轨设计

提出了一种叠片式柔性铰链导轨工作台,可以在保持柔性铰链微位移工作台高直线度的前提下,大幅度提高行程,同时还保持了柔性铰链微位移工作台无机械爬行现象的优点。采用压电陶瓷电动机作为叠片式柔性铰链工作台的驱动器,压电陶瓷电动机应用超声波驻波或行波驱动,具有定位精度高、行程大、频响高等优点,驱动分辨率可达20nm以下。     

超声电机速度与位置的高精度控制

由于超声电机压电材料、摩擦材料、接触界面的非线性,速度平稳性和位置控制精度不高,这在一定程度上制约了它在高端精密装备中的应用。本文介绍了一种实现超声电机速度、位置高精度控制的方法。从连续运动与步进运动两个维度分析了超声电机的速度调控机理,阐明了速度波动的误差来源,建立了以幅值、频率为输入量,融合稳态环节与动态环节的速度模型。为了准确预测步进位移量,建立并辨识了启动-关断两段式二阶速度模型;接着采用双环复合控制算法实现了高平稳性速度控制,并通过驱动参数优化实现了电机的高分辨率位置控制。最后,运用分段逼近策略实现了高精度定位。实验结果表明,在速度控制方面,采用双环复合方法控制的速度平稳性为0.44%,相比单速度环的控制效果提升了一倍;在位置控制方面,超声电机的开环位置分辨率达到了0.375μrad,定位精度达到了1.7μrad。本文提出的控制方法综合了不同参数及不同环路的调控特点,有效提高了超声电机的速度与位置控制精度,为超声电机在精密装备中的拓展应用奠定了基础。     

光刻机工件台宏动三自由度建模及自适应神经网络控制

提出了一种工件台宏动三自由度建模方法以解决光刻机工件台宏动部分在X和Y方向的运动耦合问题并实现它的超精密长行程微米精度的跟踪定位。该建模方法将X方向电机的偏转角度作为被控对象并且在模型中包含了耦合效应对X方向运动的影响。基于此模型提出了一种自适应神经网络控制策略,该策略采用径向基函数(Radial Basis Function,RBF)神经网络对模型参数信息及外界非线性扰动进行实时在线估计,以减小未建模动态、电机齿槽力波动、端部效应、摩擦等扰动对控制系统性能的影响。通过对控制策略的理论推导和稳定性分析,保证了闭环控制系统的收敛性。最后在光刻机工件台上进行了S曲线跟踪定位试验,验证了宏动三自由度建模方法和控制策略的效果。试验结果显示:X和Y方向的位置跟踪误差均小于3μm,X方向电机偏转角度小于1μrad,满足工件台宏动部分跟踪定位精度的要求。