大型离轴三反相机主镜组件结构设计与验证

大口径长条形反射镜是大型离轴三反相机的核心部件之一,针对“吉林一号”宽幅01C星中通光口径为1 250 mm×460 mm的主反射镜,系统论述了1.2 m量级大长宽比反射镜组件的结构设计方法,并对所研制的主镜开展了详细的验证。从材料属性和现有工艺出发,镜体材料选择反应烧结碳化硅,采用半封闭式轻量化形式,通过二目标全局优化确定了镜体结构参数的最佳组合,最终镜体设计质量为41.8 kg,面板厚5 mm、最薄加强筋仅厚3 mm。采用经典背部三点支撑方案,优化柔性支撑中的双轴柔性铰链结构参数以兼顾组件基频和热稳定性,并与镜体质心位置进行匹配。提出了主镜组件的装配流程和相应的消应力措施。测试结果表明：主镜在装调重力工况下全口径面形精度均方根值为0.016λ(λ=632.8 nm),翻转180°后主镜全口径面形精度均方根值为0.019λ;实测主镜组件一阶基频为127.8 Hz,经大量级随机振动和高低温循环后,主镜面形精度均方根值基本不变。主镜组件具有良好的动、静力学特性,且面形精度高、稳定性良好,能够满足高性能空间光学系统的使用要求。     

薄型折反系统布局及金属主镜安装影响分析

对于含口径80 mm 的高次非球面金属主镜、主镜顶点到像面距离仅为17.5 mm 的薄型折反式光学系统,设计了带3 安装耳的主镜,并利用组件合并及周向同环交错前向安装的方式,在保证所有光机件顺利布局的基础上,有效增加了主镜镜体厚度提高了结构刚度。为分析金属主镜在安装应力下的面形,利用ANSYS 预紧力单元模拟螺钉连接的预紧力,在模态校核的基础上分析了主镜柔性支撑环板在不同厚度以及安装面不平时的波面变形。提出的轴向受限的主镜组件结构方案、安装应力变形的集成分析方法及解决方案,为提高主镜的装配面形精度以保证光学系统的成像质量提供了光机设计参考。     

南极大型望远镜主镜运输的抗振缓冲系统

我国南极天文台规划有一台主镜口径2.5 m的光学红外望远镜。这台望远镜在国内制造,以大型装配体的形式运输到南极天文台，从南极边沿的中山站到南极内陆的昆仑站需要用雪橇车运输。雪橇车在一些路段振动剧烈。文中以这台望远镜主镜运输的抗振缓冲系统为研究目标，首先研究了隔振系统理论模型，用四端参数法分析了双层隔振系统的传输特性，然后研究了南极内陆科考队在雪橇运输中测得的振动数据，分析了考虑底支承力不均匀时主镜运输的许用动力学条件，提出了一种包含杠杆式缓冲结构和聚乙烯泡沫塑料结构的双层隔振系统，最后对这种隔振系统的性能进行了有限元分析与多体动力学研究。结果表明:所提出的抗振缓冲系统在南极实测得到的最极端冲击信号的作用下可以满足主镜模块最大加速度不大于5 g的要求，此时主镜模块的 Z 向运动范围约1.2 m，该缓冲系统具有实用价值，可以在南极2.5 m望远镜主镜的整体运输中使用。所提出的方法对其他脆弱结构的缓冲系统设计有参考价值。     

空间引力波望远镜主镜组件的结构设计

针对空间引力波望远镜皮米量级的极高光程稳定性需求,对系统中主镜组件进行了优化设计。采用微晶玻璃（Zerodur）作为反射镜材料,支撑结构材料为铟钢（4J36）。首先,通过对反射镜参数的优化,使其在保证面形精度的同时镜体轻量化率达到了72%。然后,设计了一种双轴联杆型Bipod柔性反射镜支撑结构,并采用了侧面三点支撑的形式。以保证有效的支撑刚度及卸载效果为目的,建立了柔性铰链的数学模型,并基于Matlab对其尺寸参数进行了优化。最后,对优化设计后主镜组件进行了模态分析及振动试验,并完成了在轨分析与波前质量计算。结果显示,主镜组件的一阶固有频率为373 Hz,与试验结果的相对误差为3.5%;在轨环境下主镜面形精度达到8.9 nm（RMS）;波前精度为/5（=1 064 nm）。表明该反射镜组件满足设计指标要求。     

GEO激光通信系统主镜组件优化设计

为保证GEO激光通信系统主镜的面形误差、主镜组件的结构刚度满足设计要求,需要进行主镜组件结构参数优化设计。由于组件的结构参数较多,为避免参数之间重复优化,提高优化设计效率,采用正交优化方法,用9种结构参数组合完成全部81种参数组合的主镜优化设计,保证了1 g重力、2℃径向温差分别作用时的面形误差RMS值满足RMS/50（=632.8 nm）的面形精度要求,并且改善了5℃均匀温升作用下的面形误差RMS值;在此基础上,进行了柔性支撑优化设计。仿真分析表明,主镜组件一阶频率为213 Hz,高于要求的200 Hz固有频率,主镜在1 g重力、2℃镜体径向温差和5℃均匀温升共同作用下的最大面形误差为10.78 nm,满足面形精度要求。经实验测试:5℃均匀温升的面形误差RMS值为7.27 nm,优于设计要求。优化设计为主镜组件的设计、加工、装校提供了技术支撑。     

干涉系统在拼接主镜共相位检测上的应用

由拼接镜面实现的大口径望远镜主镜,需要对拼接子镜进行精确校正来实现子镜间的共面,使得望远镜取得接近其衍射极限的光学成像质量,子镜之间的垂向位移误差需要被校正到入射光波长的几分之一(＜100nm).为实现此目标,在基于大口径迈克逊干涉原理的基础上设计了一套子镜间相位误差检测系统.该检测系统的创新性在于激光光源与白光光源同时应用,以对拼接主镜子镜问位置误差进行检测,检测的不确定度为5～6 nm,检测范围为30～μm,最后对该干涉检测系统的光学系统的设计进行分析,仿真出基于该检测系统的理论干涉图形,并得出较好的测试结果.     

基于多视场波前传感的次镜位置误差检测方法

大口径分块式主镜空间对地遥感系统在轨工作时,次镜相对于主镜的位置失调会对系统像质产生影响,需对其进行在轨检测与校正。当分块式主镜无中心基准镜时,无法用传统的灵敏度矩阵反演法计算出次镜失调量。为此,提出了一种基于多视场波前传感信息计算次镜位置失调量的方法,采用ZEMAX软件建立了无中心基准的36分块式主镜空间对地遥感系统。针对该系统像差特点,利用不同视场的场依赖波前像差,建立了次镜失调量检测数学模型,开展了仿真研究,结果表明当波前传感误差为1/40（=632.8 nm）时,次镜位置失调量的检测精度X、Y方向平移约为30 nm,倾斜约为15;失调量检测动态范围X、Y方向平移为0~1.5 mm,倾斜为0~0.03。并通过多组实际仿真,验证了所提方法的可行性。     

主反射镜组件柔性环节随机振动响应分析与试验

大口径主反射镜是空间光学遥感器的关键部件,其动态结构刚度与强度直接关系到光学系统的成像质量。在结构设计初期,为保证Ф750 mm口径主反射镜组件在动力学载荷作用下不发生破坏,对其进行了随机振动下的峰值应力分析与试验。首先,论述了空间光学遥感器经历的动力学环境条件,并阐述了随机振动响应的峰值等效原则;之后建立了主镜组件的有限元模型,进行了基于上述准则的动力学仿真分析;最后,对主镜组件力学模拟件进行了动力学环境试验与应变的动态采集分析。分析与试验结果表明:柔性环节在X向、Y向、Z向随机振动激励下响应的峰值应力分别为102.3MPa、99.5 MPa、104.3 MPa,与仿真结果最大相对误差为10.8%。试验结果验证了上述分析的准确性,说明主镜组件柔性环节设计可靠,安全系数为2.07,满足使用要求。     

空间遥感器主反射镜在宽温度范围内的环境适应性设计

主反射镜的面形精度对空间相机的成像质量至关重要。为保证 空间相机在宽温度范围(20±10℃)内的成像质量,设计了一种柔性支撑结构。首先,选择碳化硅(SiC) 作为反射镜材料,并对主反射镜镜体进行了背部半封闭式轻量化处理。其次,针对这个孔径为550 mm的圆 形主镜组件在20±10℃温度范围内的使用环境,设计了一种柔性铰链结构。利用Matlab软件优化了支撑结构参 数,使得支撑柔性结构在受到温度载荷时沿着径向具有足够的柔性,并可吸收变形和降低反射镜应 力。通过有限元分析可以看出,该支撑结构的一阶频率达到267 Hz,远高于机身组件的固有频率,因此可保 证主镜组件不遭到破坏。而且在重力耦合10℃温度载荷时,反射镜的面形误差(RMS值)也满足光学 系统优于λ/40的要求。     

光学系统主镜组件的轻量化设计及结构-热分析

根据某型卡塞格林系统主反射镜组件的设计要求,在遵循主镜支撑结构材料的线膨胀系数与主镜材料相匹配原则的基础上,采用有限元分析和参数优化设计相结合的方法,设计和分析了3套主镜组件方案.结果表明,在结构参数相同情况下,SiC主镜的静态、动态性能优于熔石英和K9主镜.对SiC主镜进行轻量化参数优化后,得到了直径为256 mm、质量仅为1.22 kg的镜体.通过对3种方案主镜组件的结构-热分析表明,主镜及其支撑结构均采用SiC材料的第3种主镜组件方案,消除了材料间的热膨胀错配,主镜面的变形误差完全满足设计要求,综合性能优于其它两种方案.     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.