半导体激光器自混合效应对连续光腔衰荡技术的影响

根据光腔衰荡(CRD)原理开展了高反镜反射率测量技术的研究.采用基于半导体激光器自混合效应的连续光腔衰荡技术(SM-CRD)测量高反射率腔镜,不但简化了CRD技术应用的结构装置,同时也大大提高了入射光与衰荡腔之间的耦合效率.给出了半导体激光器由于自混合效应引起的频谱变化,分析了反馈光强度对半导体激光器输出特性的影响.使用反射率为99.914%的腔镜建立了1 064 nm高反射率测量装置,测量精度达到10-5量级.实验结果表明,使用该装置测量腔镜的反射率,不但大大降低了系统的成本,而且有利于提高系统的测量精度和稳定性.     

基于量子级联激光器的中远红外高反射率测量

利用光腔衰荡技术开展了中远红外波段的高反镜反射率测量研究.以中心波长9.7μm附近的脉冲量子级联激光器为光源,构建了高反射率测量实验装置.利用该装置对不同腔长下腔镜的反射率进行了测量,最终测定其反射率为99.9464%,测量重复性误差优于0.0014%.实验表明该测量装置重复性精度高,可用于中远红外高反镜反射率的精确测量.     

基于光腔衰荡光谱法测量CO_2结果的不确定度分析

光腔衰荡光谱法作为极具潜力的基准分析方法已在气体成分量测量领域得到了广泛的应用。本研究建立了一套高精度光腔衰荡光谱分析系统,并利用重量法配置的空气中二氧化碳(CO_2)标准气体对其性能进行了评估。在此基础上,对影响CO_2浓度测量的各参数进行了不确定度分析,得出测量结果相对扩展不确定度为0. 48%(k=2,p=95%)。     

基于光腔衰荡光谱的气体成份量测量技术

光腔衰荡光谱技术依赖于气体分子常数测量气体成份量,有望成为新一代基于自然常数的气体成份量基准方法。本文详细介绍了国内外研究机构对于光腔衰荡光谱法在气体成份量测量领域的研究现状,并在此基础上设计出一套基于Pound-Drever-Hall(PDH)锁频技术的光腔衰荡光谱测量装置,旨在完善目前实物计量标准的局限性。     

连续波腔衰荡技术的激光去谐方法

针对连续波腔衰荡技术的激光关断问题,本文提出通过调制激光器的驱动电流,即激光去谐方法,使连续波激光与衰荡腔离开谐振状态,实现对入射光的快速关断.该方法根据电流调制特点实现以往系统中声光或电光开关的功能,不需用外部光开关来切断光源,系统更加简便,节省成本.设计了基于激光去谐的连续波腔衰荡技术系统,分析了各器件的性能和工作原理,分析了去谐过程的特性,比较了激光去谐与激光关断的区别.结果表明,调制电流的关断时间比传统的光开关更短,衰荡曲线的单指数线形更加明显.     

1.6微米附近氮气展宽的一氧化碳分子线形的研究

基于稳频的光腔衰荡光谱法是近年来发展的一种具有高灵敏度和准确性的测量痕量成分的方法,分子线形是影响光谱法测量成分的关键因素。利用基于稳频的光腔衰荡装置测量了一氧化碳R12(3←0)分子光谱,6种常用的分子线形被用来研究分子吸收光谱参数间的关系,包含压力相关的展宽、吸收峰面积和碰撞变窄效应,以及速度变化压窄和速度相依赖弛豫速率变窄效应的相关联等。研究结果表明pCqSDNGP线形能满足描述CO分子线形的需要。     

介质阻挡放电等离子体中HO2自由基的红外光腔衰荡光谱原位诊断

建立了一套以可调谐半导体激光器做光源的连续波光腔衰荡光谱装置，简单介绍了连续波光腔衰荡光谱技术与脉冲光腔衰荡光谱技术的区别。将连续波光腔衰荡光谱技术与介质阻挡放电等离子体技术相结合，对等离子体中的HO2自由基进行了原位定量测量，同时考察了HO2自由基数密度随放电电压和体系中氧气含量变化情况。实验结果表明：随着放电电压和体系中氧气含量的增加而增加的HO2自由基数密度分别出现极大值。     

输出片应力作用对环形激光器非共面控制的影响研究

本文建立了环形激光器输出光椭圆度的数学模型,计算分析了输出片的应力作用对顺时针和逆时针方向输出光椭圆度的非对称影响.搭建了环形激光器双光路稳频系统,测量了顺时针和逆时针方向的输出光椭圆度.从理论和实验上证明了在输出片应力作用的影响下,通过测量顺时针和逆时针方向的输出光椭圆度进行调腔的方法不能实现环形激光器的非共面控制.     

偏振光腔衰荡技术测量单层SiO2薄膜特性

为了探究特定沉积工艺参数下,不同沉积角度对SiO2光学薄膜损耗及应力双折射的影响,本文采用一种高灵敏探测方法—偏振光腔衰荡技术表征单层SiO2光学薄膜.该技术基于测量光学谐振腔内偏振光来回反射累积后的衰荡时间特性及产生的相位差振荡频率,实现光学元件的光学损耗和残余应力的同点、同时绝对测量.实验对60°、70°和80°沉积角度条件下制备的单层SiO2薄膜样品进行了应力和光学损耗的测量分析.结果显示了不同沉积角度条件下制备的SiO2薄膜表面粗糙程度和致密性变化对薄膜损耗和应力双折射效应的影响,该结果对制备低光学损耗、低应力SiO2光学薄膜提供了技术指导.     

基于光腔衰荡光谱法的水汽线形强度测量

随着半导体芯片行业的迅速发展,对电子气体的要求也逐渐提高。半导体加工环境中的痕量水分会严重影响芯片的良率和可靠性。光腔衰荡光谱法是近年来发展的一种具有高灵敏度和准确性的痕量气体测量方法,线形强度是光谱法测量的重要参数。为测量痕量水分,建立了一套光腔衰荡光谱系统,测量了中心频率在 7171.10491cm-1和7177.6565cm-1的吸收光谱,通过HTP(Hartmann-Tran profile)线形拟合得到线形强度,测量结果的相对标准不确定度优于1.8%,与HITRAN、HITEMP和GEISA数据库比较,相对偏差小于6%。     

Generation of inhomogeneously polarized laser beams by use of a Sagnac interferometer

A principal scheme for an external cavity technique for changing the polarization of a laser beam based on a modified Sagnac interferometer is proposed. The modified Sagnac interferometer includes standard optical components: a displacement polarizing beam splitter, an angle reflector, and a Dove prism. The radially polarized beams, obtained with the help of the developed scheme, allow the generation of a longitudinally polarized electric field by sharp focusing. The phase correction of radially polarized modes of higher orders leads to increasing the longitudinal field in the focus of the beam.     

Ringing phenomenon of the fiber ring resonator

A resonator fiber-optic gyro (R-FOG) is a high-accuracy inertial rotation sensor based on the Sagnac effect. A fiber ring resonator is the core sensing element in the R-FOG. When the frequency of the fiber ring resonator input laser is swept linearly with time, ringing of the output resonance curve is observed. The output field of the fiber ring resonator is derived from the superposition of the light transmitted through the directional coupler directly and the multiple light components circulated in the fiber ring resonator when the frequency of the laser is swept. The amplitude and phase of the output field are analyzed, and it is found that the difference in time for different light components in the fiber ring resonator to reach a point of destructive interference causes the ringing phenomenon. Finally the ringing phenomenon is observed in experiments, and the experimental results agree with the theoretical analysis well.     

A laser probe based on a Sagnac interferometer with fast mechanical scan for RF surface and bulk acoustic wave devices

This paper describes the development of a phasesensitive laser probe with fast mechanical scan for RF surface and bulk acoustic wave (SAW/BAW) devices. The Sagnac interferometer composed of micro-optic elements was introduced for the selective detection of RF vertical motion associated with RF SAW/BAW propagation and vibration. A high-pass characteristic of the interferometer makes the measurement very insensitive to low-frequency vibration. This feature allows us to apply the fast mechanical scan to the interferometric measurement without badly sacrificing its SNR and spatial resolution. The system was applied to the visualization of a field pattern on the vibrating surface of an RF BAW resonator operating in the 2 GHz range. The field pattern was obtained in 17 min as a 2-D image (500 × 750 pixel with 0.4 μm resolution and SNR of 40 dB). The system was also applied to the characterization of an RF SAW resonator operating in the 1 GHz range, and the applicability of the system was demonstrated.     

Two-mirror Resonators as Rotation Sensors

A method for using a two-mirror resonator as a rotation sensor is described. The system is more sensitive than a ring gyro or a Sagnac interferometer enclosing the same effective area. This additional sensitivity over the Sagnac limit is shown to arise only in non-planar closed path systems in which the counter-propagating beams follow slightly different paths. The shear between the two beams is solely due to the rotation.     

Fabry-Perot resonator with interferometric read-out for low noise applications

New readout configurations for a Fabry-Perot (FP) resonator (or frequency discriminator) that combine the reflected and transmitted waves are analyzed in detail. The waves may be combined in a Sagnac (S) or Mach-Zehnder (MZ) configuration and tuned to a dark port (DP) to suppress the carrier frequency. To achieve this in a standard FP resonator, the mirror reflectance must be extremely well matched, which is a difficult and expensive task. Suppressing the carrier minimizes the Shot noise floor of a Pound-Drever-Hall (PDH) frequency-stabilized laser. Moreover, depending on the amount of carrier suppression, a high amount of power may be injected into the resonator without saturating or destroying the photodetector at the discriminator output. Because the sensitivity of the frequency discriminator is also proportional to the injected power, a large improvement in frequency noise can be achieved for high power PDH-stabilized lasers utilizing only a small phase modulation index.     

Phase effects in broad-stripe curved-grating distributed feedback heterolasers

Phase effects in AlGaAs/GaAs quantum-well curved-grating distributed feedback (c-DFB) lasers with focused output radiation has been theoretically studied. The results of analysis are compared to experimental data available for the analogous curved-grating distributed Bragg reflector (c-DBR) lasers. It is shown that allowance for the indicated phase effects in the design of a c-DFB laser resonator is of key importance in ensuring the perfect spectral and spatial characteristics of the output radiation of such lasers.     

Rotation sensing based on a slow-light resonating structure with high group dispersion

The concept of the Sagnac effect in a slow-light medium and resonator structure with a high group dispersion is investigated. It is found that a slow-light medium can be utilized for relative motion sensing, and a slow-light resonator structure is suitable to detect absolute rotation for navigation purposes. It is noted that the high group dispersion leads to a huge enhancement of the rotation sensor's sensitivity in a resonating structure, and an approach to evaluate and design resonator devices with slow-light property is proposed. Moreover, a folded loop-lattice-based structure is numerically simulated to verify the concept.     

Compact, high-Q, zero temperature coefficient, TE011 sapphire-rutile microwave distributed Bragg reflector resonators

Some novel new resonator designs based on the distributed Bragg reflector are presented. The resonators implement a TE₀₁₁ resonance in a cylindrical sapphire dielectric, which is confined by the addition of rutile and sapphire dielectric reflectors at the end faces. Finite element calculations are utilized to optimize the dimensions to obtain the highest Q-factors and zero frequency-temperature coefficient for a resonator operating near 0°C. We show that a Q-factor of 70,000 and 65,000 can be achieved with and without the condition of zero frequency-temperature coefficients, respectively     

A finite plate technique for the determination of piezoelectricmaterial constants

An improved resonator method is presented for the determination of piezoelectric material constants. The improved method addresses a fundamental limitation of the measurement methods recommended in the current IEEE Standard on Piezoelectricity: the relations between vibrator response and material constants presented in this Standard are based upon the 1-D approximation of an essentially infinite flat plate with a uniform distribution of vibratory motion. The calculation or measurement of the effects due to the nonuniform vibrational amplitude distribution in a laterally bounded plate is a nontrivial task. The practical result is that the current IEEE 176-1987 resonator method recommendations are of limited usefulness in the determination of “intrinsic” piezoelectric material constants. This limitation can, however, readily be overcome using an improved measurement technique based on measurands unaffected by the vibrational amplitude distribution. In the improved technique, the measurands of choice are the zero-mass-loading, fundamental mode, thickness-field excitation (TE) antiresonance, or lateral-field excitation (LE) resonance frequencies. A recommended experimental procedure, using the preferred measurands, is presented     

Influence of surface roughness of Bragg reflectors on resonance characteristics of solidly-mounted resonators

The solidly mounted resonator (SMR) is fabricated using planar processes from a piezoelectric layer sandwiched between two electrodes upon Bragg reflectors, which then are attached to a substrate. To transform the effective acoustic impedance of the substrate to a near zero value, the Bragg reflectors are composed of alternating high and low acoustic impedance layers of quarter-wavelength thickness. This paper presents the influence of Bragg reflector surface roughness on the resonance characteristics of an SMR. Originally, an A1N/A1 multilayer is used as the Bragg reflector. The poor surface roughness of this Bragg reflector results in a poor SMR frequency response. To improve the surface roughness of Bragg reflectors, a molybdenum (Mo)/titanium (Ti) multilayer with a similar coefficient of thermal expansion is adopted. By controlling deposition parameters, the surface roughness of the Bragg reflector is improved, and better resonance characteristics of SMR are obtained.