A 60-ns 16-Mbit CMOS DRAM with a transposed data-line structure

Low-noise, high-speed circuit techniques for high-density DRAMs (dynamic random-access memories), as well as their application to a single 5-V 16-Mb CMOS DRAM with a 3.3-V internal operating voltage for a memory array, are described. It was found that data-line interference noise becomes unacceptably high (more than 25% of the signal) and causes a serious problem in 16-Mb DRAM memory arrays. A transposed data-line structure is proposed to eliminate the noise. Noise suppression below 5% is confirmed using this transposed data-line structure. A current sense amplifier is also proposed to maintain the data-transmission speed in common I/O lines, in spite of a reduced operating voltage and increased parasitic capacitance loading in the memory array. A speed improvement of 10 ns is achieved. Using these circuit techniques, a 16-Mb CMOS DRAM with a typical RAS access time of 60 ns was realized     

A 16-Mbit DRAM with a relaxed sense-amplifier-pitch open-bit-linearchitecture

A 16-Mb dynamic RAM has been designed and fabricated using 0.5-μm CMOS technology with double-level metallization. It uses a novel trench-type surrounding high-capacitance cell (SCC) that measures only 3.3-μm² in cell size with a 63-fF storage capacitance. A novel relaxed sense-amplifier-pitch (RSAP) open-bit-line architecture used on the DRAM achieves a high-density memory cell array, while maintaining a large enough layout pitch for the sense amplifier. These concepts allow the small chip that measures 5.4×17.38 (93.85) mm² to be mounted in a 300-mil dual-in-line package with 65-ns RAS access time and 35-ns column address access time     

A 30-ns 256-Mb DRAM with a multidivided array structure

A 256-Mb DRAM with a multidivided array structure has been developed and fabricated with 0.25-μm CMOS technology. It features 30-ns access time, 16-b I/Os, and a 35-mA operating current at a 60-ns cycle time. Three key circuit technologies were used in its design: a partial cell array activation scheme for reducing power-line voltage bounce and operating current, a selective pull-up data-line architecture to increase I/O width and reduce power dissipation, and a time-sharing refresh scheme to maintain the conventional refresh period without reducing operational margin. Memory cell size was 0.72 μm². Use of the trench isolated cell transistor and the HSG cylindrical stacked capacitor cells helped reduce chip size to 333 mm²     

A 1.8-V 700-mb/s/pin 512-mb DDR-II SDRAM with on-die termination and off-chip driver calibration

A 512-Mb DDR-II SDRAM has achieved 700-Mb/s/pin operation at 1.8-V supply voltage with 0.12-/spl mu/m DRAM process. The low supply voltage presents challenges in high data rate and signal integrity. Circuit techniques such as hierarchical I/O lines, local sense amplifier, and fully shielded data lines without area penalty have provided improved data access time and, thus, high data rate can be achieved. Off-chip driver with calibrated strength and on-die termination are utilized to give sufficient signal integrity for over 533-Mb/s/pin operation.     

A 6-ns 4-Mb CMOS SRAM with offset-voltage-insensitive current senseamplifiers

A 4-Mb CMOS SRAM with 3.84 μm² TFT load cells is fabricated using 0.25-μm CMOS technology and achieves an address access time of 6 ns at a supply voltage of 2.7 V. The use of a current sense amplifier that is insensitive to its offset voltage enables the fast access time. A boosted cell array architecture allows low voltage operation of fast SRAM's using TFT load cells     

A 16-ns 1-Mb CMOS EPROM

A 16-ns 1-Mb CMOS EPROM has been developed utilizing high-speed circuit technology and a double-metal process. In order to achieve the fast access time, a differential sensing scheme with address transition detection (ATD) is used. A double-word-line structure is used to reduce word-line delay. High noise immunity is obtained by a bit-line bias circuit and data-latch circuit. Sufficient threshold voltage shift (indispensable for fast access time) is guaranteed by a threshold monitoring program (TMP) scheme. The array is organized as 64 K×16 b, which is suitable for 32-b high-performance microprocessors. The active power is 425 mW, the programming time is 100 μs, and the chip size is 4.94×15.64 mm²     

256-Mb DRAM circuit technologies for file applications

256-Mb DRAM circuit technologies characterized by low power and high fabrication yield for file applications are described. The newly proposed and developed circuits are a self-reverse-biasing circuit for word drivers and decoders to suppress the subthreshold current to 3% of the conventional scheme, and a subarray-replacement redundancy technique that doubles chip yield and consequently reduces manufacturing costs. An experimental 256-Mb DRAM has been designed and fabricated by combining the proposed circuit techniques and a 0.25-μm phase-shift optical lithography, and its basic operations are verified. A 0.72-μm² double-cylindrical recessed stacked-capacitor (RSTC) cell is used to ensure a storage capacitance of 25 fF/cell. A typical access time under a 2-V power supply voltage was 70 ns. With the proper device characteristics, the simulated performances of the 256-Mb DRAM operating with a 1.5-V power supply voltage are a data-retention current of 53 μA and an access time of 48 ns     

An 18-ns 1-Mbit CMOS SRAM

A 1-Mb (256 K×4 b) CMOS static random-access memory with a high-resistivity load cell was developed with 0.7-μm CMOS process technology. This SRAM achieved a high-speed access of 18 ns. The SRAM uses a three-phase back-bias generator, a bus level-equalizing circuit and a four-stage sense amplifier. A small 4.8×8.5-μm² cell was realized by the use of a triple-polysilicon structure. The grounded second-polysilicon layer increases cell capacitance and suppresses α-particle-induced soft errors. The chip size measures 7.5×12 mm²     

An experimental 1.5-V 64-Mb DRAM

Low-voltage circuit technologies for higher-density dynamic RAMs (DRAMs) and their application to an experimental 64-Mb DRAM with a 1.5-V internal operating voltage are presented. A complementary current sensing scheme is proposed to reduce data transmission delay. A speed improvement of 20 ns was achieved when utilizing a 1.5-V power supply. An accurate and speed-enhanced half-V_CC voltage generator with a current-mirror amplifier and tri-state buffer is proposed. With it, a response time reduction of about 1.5 decades was realized. A word-line driver with a charge-pump circuit was developed to achieve a high boost ratio. A ratio of about 1.8 was obtained from a power supply voltage as low as 1.0 V. A 1.28 μm² crown-shaped stacked-capacitor (CROWN) cell was also made to ensure a sufficient storage charge and to minimize data-line interference noise. An experimental 1.5 V 64 Mb DRAM was designed and fabricated with these technologies and 0.3 μm electron-beam lithography. A typical access time of 70 ns was obtained, and a further reduction of 50 ns is expected based on simulation results. Thus, a high-speed performance, comparable to that of 16-Mb DRAMs, can be achieved with a typical power dissipation of 44 mW, one tenth that of 16-Mb DRAMs. This indicates that a low-voltage battery operation is a promising target for future DRAMs     

Low voltage circuit design techniques for battery-operated and/orgiga-scale DRAMs

This paper describes a charge-transferred well (CTW) sensing method for high-speed array circuit operation and a level-controllable local power line (LCL) structure for high-speed/low-power operation of peripheral logic circuits, aimed at low voltage operating and/or giga-scale DRAMs. The CTW method achieves 19% faster sensing and the LCL structure realizes 42% faster peripheral logic operation than the conventional scheme, at 1.2 V in 15 Mb-level devices. The LCL structure realizes a subthreshold leakage current reduction of three or four orders of magnitude in sleep mode, compared with a conventional hierarchical power line structure. A negative-voltage word line technique that overcomes the refresh degradation resulting from reduced storage charge (Q_s) at low voltage operation for improved reliability is also discussed. An experimental 1.2 V 16 Mb DRAM with a RAS access time of 49 ns has been successfully developed using these technologies and a 0.4-μm CMOS process. The chip size is 7.9×16.7 mm² and cell size is 1.35×2.8 μm²     

A 1.8-ns access, 550-MHz, 4.5-Mb CMOS SRAM

An ultrahigh-speed 4.5-Mb CMOS SRAM with 1.8-ns clock-access time, 1.8-ns cycle time, and 9.84-μm² memory cells has been developed using 0.25-μm CMOS technology. Three key circuit techniques for achieving this high speed are a decoder using source-coupled-logic (SCL) circuits combined with reset circuits, a sense amplifier with nMOS source followers, and a sense-amplifier activation-pulse generator that uses a duplicate memory-cell array. The proposed decoder can reduce the delay time between the address input and the word-line signal of the 4.5-Mb SRAM to 68% of that of an SRAM with conventional circuits. The sense amplifier with nMOS source followers can reduce not only the delay time of the sense amplifier but also the power dissipation. In the SRAM, the sense-amplifier activation pulse must be input into the sense amplifier after the signal from the memory cell is input into the sense amplifier. A large timing margin required between these signals results in a large access time in the conventional SRAM. The sense-amplifier activation pulse generator that uses a duplicate memory-cell array can reduce the required timing margin to less than half of the conventional margin. These three techniques are especially useful for realizing ultrahigh-speed SRAM's, which will be used as on-chip or off-chip cache memories in processor systems     

A 33-ns 64-Mb DRAM

A 64-Mb CMOS dynamic RAM (DRAM) measuring 176.4 mm² has been fabricated using a 0.4-μm N-substrate triple-well CMOS, double-poly, double-polycide, double-metal process technology. The asymmetrical stacked-trench capacitor (AST) cells, 0.9 μm×1.7 μm each, are laid out in a PMOS centered interdigitated twisted bit-line (PCITBL) scheme that achieves both low noise and high packing density. Three circuit techniques were developed to meet high-speed requirements. Using the preboosted word-line drive-line technique, a bypassed sense-amplifier drive-line scheme, and a quasi-static data transfer technique, a typical RAS access time of 33 ns and a typical column address access time of 15 ns have been achieved     

Memory array architecture and decoding scheme for 3 V only sectorerasable DINOR flash memory

A memory array architecture and row decoding scheme for a 3 V only DINOR (divided bit line NOR) flash memory has been designed. A new sector organization realizes one word line driver per two word lines, which is conformable to tight word line pitch. A hierarchical negative voltage switching row decoder and a compact source line driver have been developed for 1 K byte sector erase without increasing the chip size. A bit-by-bit programming control and a low threshold voltage detection circuit provide a high speed random access time at low V_cc and a narrow program threshold voltage distribution. A 4 Mb DINOR flash memory test device was fabricated from 0.5 μm, double-layer metal, triple polysilicon, triple well CMOS process. The cell measures 1.8×1.6 μm² and the chip measures 5.8×5.0 mm ². The divided bit line structure realizes a small NOR type memory cell     

A high-speed, small-area, threshold-voltage-mismatch compensationsense amplifier for gigabit-scale DRAM arrays

A high-speed small-area DRAM sense amplifier with a threshold-voltage (V_T) mismatch compensation function is proposed. This sense amplifier features a novel hierarchical data-line architecture with a direct sensing scheme that uses only NMOS transistors in the array, and simple V_T mismatch compensation circuitry using a pair of NMOS switching transistors. The layout area of the sense amplifier is reduced to 70% of that of a conventional CMOS common I/O sense amplifier due to the removal of PMOS transistors from the array. The readout time is improved to 35% of that of a conventional CMOS sense amplifier because of direct sensing and a 1/10 reduction in V_T mismatch. This sense amplifier eliminates the sensitivity degradation and the area overhead increase that are expected in gigabit-scale DRAM arrays     

A 1-Mbit BiCMOS DRAM using temperature-compensation circuittechniques

A temperature-compensation circuit technique for a dynamic random-access memory (DRAM) with an on-chip voltage limiter is evaluated using a 1-Mb BiCMOS DRAM. It was found that a BiCMOS bandgap reference generator scheme yields an internal voltage immune from temperature and V_cc variation. Also, bipolar-transistor-oriented memory circuits, such as a static BiCMOS word driver, improve delay time at high temperatures. Furthermore, the BiCMOS driver proves to have better temperature characteristics than the CMOS driver. Finally, a 1-Mb BiCMOS DRAM using the proposed technique was found to have better temperature characteristics than the 1-Mb CMOS DRAM which uses similar techniques, as was expected. Thus, BiCMOS DRAMs have improved access time at high temperatures compared with CMOS DRAMs     

Low-voltage, high-speed circuit designs for gigabit DRAMs

This paper describes several new circuit design techniques for low V_CC regions: 1) a charge-amplifying boosted sensing (CABS) scheme which amplifies the sensing voltage difference (ΔV_BL ) as well as the V_GS margin by boosting the sensing node voltage with a voltage dependent boosting capacitor and 2) an I/O current sense amplifier with a high gain using a cross-coupled current mirror control scheme and reduced temperature sensitivity using a simple temperature-compensation scheme. An experimental 16 Mb DRAM chip with the 0.18-μm twin-well, triple-metal CMOS process has been fabricated, and an access time from the row address strobe (t_RAC) of 28 ns at V_cc=1.5 V and T=25°C has been obtained     

A 100-MHz 4-Mb cache DRAM with fast copy-back scheme

A 4-Mb cache dynamic random access memory (CDRAM), which integrates 16-kb SRAM as a cache memory and 4-Mb DRAM into a monolithic circuit, is described. This CDRAM has a 100-MHz operating cache, newly proposed fast copy-back (FCB) scheme that realizes a three times faster miss access time over with the conventional copy-back method, and maximized mapping flexibility. The process technology is a quad-polysilicon double-metal 0.7-μm CMOS process, which is the same as used in a conventional 4-Mb DRAM. The chip size of 82.9 mm² is only a 7% increase over the conventional 4-Mb DRAM. The simulated system performance indicated better performance than a conventional cache system with eight times the cache capacity     

A novel circuit technology with surrounding gate transistors(SGT's) for ultra high density DRAM's

This paper describes a novel circuit technology with Surrounding Gate Transistors (SGT's) For ultra high density DRAM's. In order to reduce the chip size drastically, an SGT is employed to all the transistors within a chip. SGT's connected in series and a common source SGT have been newly developed for the core circuit, such as a sense amplifier designed by a tight design rule. Furthermore, to reduce the inherent cell array noise caused by a relaxed open bit line (BL) architecture, a noise killer circuit placed in the word line (WL) shunt region and a twisted BL architecture within the sense amplifier region combined with a novel separation sensing scheme have been newly introduced. Using the novel circuit technology, a 32.9% smaller chip size can be successfully achieved for a 64-Mb DRAM and 34.4% for a 1-Gb DRAM compared with a DRAM composed of the planar transistor without sacrificing the access time, power dissipation, and V_cc margin. Furthermore,the effectiveness of this technology is verified by using the circuit simulation of the internal main nodes such as WL and BL     

A four-level storage 4-Gb DRAM

A 4-Gb DRAM with multilevel-storage memory cells has been developed. This large memory capacity is achieved by storing data at four levels, each corresponding to two-bit-data storage in a single memory cell. The four-level storage reduces the effective cell size by 50%. A sense amplifier using charge coupling and charge sharing was developed for the four-level sensing and restoring. The sense amplifier uses a hierarchical bit-line scheme and operates in a time-sharing mode, thus reducing the sense amplifier area. A 4-Gb DRAM fabricated using 0.15-μm CMOS technology measures 986 mm². The memory cell is 0.23 μm². Its capacitance of 60 fF is achieved by using a high-dielectric-constant material BST     

DRAM macros for ASIC chips

DRAM macros in 4-Mb (0.8-μm) and 16-Mb (0.5-μm) DRAM process technology generations have been developed for CMOS ASIC applications. The macros use the same area efficient one transistor trench cells as 4-Mb (SPT cell) and 16-R Mb (MINT cell) DRAM products. It is shown that the trench cells with capacitor plates by the grounded substrate are ideal structures as embedded DRAM's. The trench cells built entirely under the silicon surface allow cost effective DRAM and CMOS logic merged process technologies. In the 0.8-μm rule, the DRAM macro has a 32-K×9-b configuration in a silicon area of 1.7×5.0 mm² . It achieves a 27-ns access and a 50-ns cycle times. The other DRAM macro in the 0.5-μm technology is organized in 64 K×18 b. It has a macro area of 2.1×4.9 mm and demonstrated a 23-ns access and a 40-ns cycle times. Small densities and multiple bit data configurations provide a flexibility to ASIC designs and a wide variety of application capabilities. Multiple uses of the DRAM macros bring significant performance leverages to ASIC chips because of the wide data bus and the fast access and cycle times. A data rate more than 1.3 Gb/s is possible by a single chip. Some examples of actual DRAM macro embedded ASIC chips are shown