基于MEMS技术的微流体混合器及相关技术

介绍了基于MEMS技术的微流体混合器及相关技术,给出了各种微流体混合器的结构、原理和特点,同时对微管道中流体混合的仿真、实验技术以及微管道中微量流体混合程度的评价方法等作了概述。     

一种非对称结构微流体混合器的设计与分析

微流体混合器可以用于不同流体之间的混合与反应,其与化学传感器结合构成的化学分析测试系统,具有灵敏度高、响应时间短和稳定性好的特点。在微电子机械加工技术的基础上,设计了一种新型的、具有非对称分离重组结构的微流体混合器,并应用有限元方法建立了仿真模型,讨论了在不同雷诺数(Re=10~80)下,通道几何结构参数对微混合器内的流体流动特性和混合效率的影响。研究结果表明,微流体在该混合器内形成了扩展涡、分离涡和迪恩(Dean)涡,实现了涡系的叠加和强化,加大了流体间的扰动,增加了流体的接触面积,从而大大增强了混合效率。     

基于PDMS的静态微流体混合器的制作与仿真

通过采用模塑法制成一种基于聚二甲基硅氧烷(PDMS)的静态微流体混合器.根据流体动力学理论对其进行了理论分析,并给出了两种流体混合的仿真分析结果.对以数值模拟为依据制作的微流体混合器进行了水与红墨水的混合实验,获得了相吻合的结果.     

一种挡板结构被动式微混合器的设计与仿真北大核心

基于在微通道内设置障碍物可以提高混合效率的方法,以T型方波通道微混合器为基础,设计了一种新型的、具有挡板结构的被动式微混合器,并采用有限元方法建立了仿真模型,分析比较了T型直通道微混合器、T型方波通道微混合器和具有挡板结构的T型方波通道微混合器在不同雷诺数（Re）下器件内流体的流动特性和混合效率。研究结果表明,具有挡板结构的T型方波通道微混合器在挡板阻塞比为1/4时具备最优的综合性能,也即在较宽Re值范围（5～60）内可实现流体的快速、高效混合,混合效率高于95%。     

压电基片上集成微通道数字微流体微混合器研究

微流体在压电基片上输运往往偏离声表面波传播方向,尤其是当压电基片表面疏水层不很均匀时,给微流体诸如混合等操作带来不便。在1280旋转Y切割X传播方向的LiNbO3基片上研制了集成有聚二甲基硅氧烷为材料T型微通道的微混合器,压电基片上采用光刻工艺制作相互垂直叉指换能器及反射栅。待混合的两微流体采用微量进样器分别进样到声路径微通道中,依次在两叉指换能器上加RF电信号,它激发的声表面波驱动其声路径上微通道中的微流体沿微通道输运、合并,并快速混合。对2μl水-2μl蓝色染料微流体和2μl甘油-2μl蓝色染料微流体进行混合实验,结果表明,声表面波的作用可以提高微通道中微流体的混合速度,且混合程度更高。     

基于声表面波技术数字微流体微混合器研究

报道了在128°旋转Y切割X传播方向LiNbO3基片上研制了数字微流体微混合器.它由压电基片上叉指换能器和反射栅组成,当由功率放大器放大后的射频电信号加到叉指换能器时,它激发的声表面波经微流体后转化为径向表面波驱动微流体,使其与同一路径上的另一微流体合并,在反射栅反射回的声表面波共同作用下,加速微流体内分子扩散运动,提高了微流体混合效率.采用1 μL的水和1 μL红墨水以及1 μL的红墨水和1 μL甘油各自进行混合实验,结果表明:在声表面波作用下,微混合器能快速混合微流体.为片上实验室提供了廉价、易集成的微混合单元,具有潜在的应用价值.     

被动微混合器的研究进展(英文)

综述了被动微混合器的混合原理、结构、微制作技术以及在数值仿真计算等方面的研究进展。着重讨论了几种主要被动微混合原理,如多层流、混沌对流、分裂-重合、流体弯曲和压缩以及循环流动。重点分析了近年来低雷诺数下高混合效率的复合式微混合器。复合式微混合器利用其他简单的外界作用来提高其混合效率,诸如施加离心力、采用几何压缩和三个入口结构,或利用多入口结构,使其中的流体产生周期性的流动。指出随着对低雷诺数和高黏度要求的不断提高,SAR型复合式微混合器成为更为广泛的一个研究方向,其内部的分裂-重合结构单元能够使流体产生旋转,同时通过采用几何压缩结构,缩短扩散长度.从而大大提高了流体的混合效率,但同时也提高了对微制作技术的要求。     

微气泡执行器强化微混合的实验研究

微尺度流动的雷诺数(Re)比较低,其混合主要通过扩散来完成,因此需要较长的距离与时间才能混合均匀。为实现微尺度低Re数流体的快速均匀混合,以甲醇及染色甲醇为工质,采用脉冲电压激励微铂膜产生可控气泡,并以气泡周期性胀缩产生的脉冲压力为动力源,研究脉冲压力横向扰动产生的混沌流对微通道内流动混合的影响。结果表明:脉冲压力横向作用使流体的交界面产生了强烈的卷曲拉伸,有效地强化了混合,该微混合器能够在毫米级混合长度及毫秒级混合时间内快速均匀混合,脉冲频率越高,混合效果越好。本研究结果为解决微尺度下低Re数流动混合难题提供了一种有效的崭新手段。     

微混合器研究进展

微混合器作为微全分析系统重要的组成部分,是目前微机电系统(MEMS)领域内的研究热点。文章介绍了微混合器的设计要求与目标、加工方法与材料的选择、微混合的特点与混合机理。微混合器一般可分为主动混合器与被动混合器,基于此分类方法,文章综述了微混合器的国内外研究现状,并讨论了目前研究中存在的一些问题,展望了微混合器的研究前景。     

基于狄恩流的微混合器的研究

所设计的微混合器是一种基于狄恩流的被动式混合器,该混合器的结构特点是由多个不同半径的弯曲管道双螺旋而成,中部通过"S"形管道将输入管道和输出管道相连。首先分析了狄恩流形成的机理及特点,再通过流体计算软件CFD-ACE+三维模拟并分析了不同流速对二次流强弱以及混合程度的影响,最后利用微细加工技术制作微混合器,罗丹明B溶液与去离子水用作待混合液体,利用Image J软件获取混合图像的灰度值来分析混合器的性能。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Teleportation of an arbitrary unknown N-qubit entangled state under the controlling of M controllers

A new quantum protocol to teleport an arbitrary unknown N-qubit entangled state from a sender to a fixed receiver under M controllers(M < N) is proposed. The quantum resources required are M non-maximally entangled Greenberger-Home-Zeilinger (GHZ) state and N-M non-maximally entangled Einstein-Podolsky-Rosen (EPR) pairs. The sender performs N generalized Bell-state measurements on the 2N particles. Controllers take M single-particle measurement along x-axis, and the receiver needs to introduce one auxiliary two-level particle to extract quantum information probabilistically with the fidelity unit if controllers cooperate with it.     

Diode-end-pumped Nd:YVO4/LBO lasers with 4.2W continuous-wave output at 457 nm

A continuous-wave (CW) 457 nm blue laser operating at the power of 4.2 W is demonstrated by using a fiber coupled laser diode module pumped Nd: YVO4 and using LBO as the intra-cavity SHG crystal With the optimization of laser cavity and crystal parameters, the laser operates at a very high efficiency. When the pumping power is about 31 W, the output at 457nm reaches 4.2 W, and the optical to optical conversion efficiency is about 13.5% accordingly. The stability of the out putpower is better than 1.2% for 8 h continuously working.     

A rigorous proof of MIMO channel capacity’s increase with antenna number

It is well known that adding more antennas at the transmitter or at the receiver may offer larger channel capacity in the multiple-input multiple-output（MIMO） communication systems. In this letter, a simple proof is presented for the fact that the channel capacity increases with an increase in the number of receiving antennas. The proof is based on the famous capacity formula of Foschini and Gans with matrix theory.     

Call for Papers

正Wireless Body-area Networks The last decade has witnessed the convergence of three giant worlds:electronics,computer science and telecommunications.The next decade should follow this convergence in most of our activities with the generalization of sensor networks.In particular with the progress in medicine,people live longer and the aging of population will push the development of wireless personal networks