阴极电弧制备TiAlN薄膜工艺参数的正交分析研究

为深入理解不同工艺参数对阴极电弧制备TiAlN薄膜性质的影响重要性,文中设计了L9(34)正交试验表,研究了基体负偏压、N2流量、阴极弧流对TiAlN沉积速率、表面粗糙度的影响,给出了工艺参数优化组合。结果表明:负偏压对TiAlN薄膜的沉积速率影响最大,其次是N2流量、弧流;对表面粗糙度的影响次序则为N2流量、弧流、负偏压。薄膜沉积速率随N2流量的升高而增大,随负偏压增加先增加后降低,随弧流的增大变化不明显。薄膜表面粗糙度随N2流量的升高逐渐减小,随负偏压的增加而增加,随弧流的增大而增大。     

偏压梯度TiAlN涂层对TC4钛合金振动与拉伸疲劳性能的影响与机理

目的 探究偏压梯度TiAlN涂层对基体疲劳性能的影响规律和疲劳损伤机理。方法 利用磁过滤阴极真空弧技术和连续改变偏压的沉积工艺,在TC4钛合金表面沉积了偏压梯度TiAlN涂层,并采用扫描电镜、轮廓仪、纳米压痕和划痕仪表征测试了TiAlN涂层的微观结构和内应力、表面硬度、膜基结合力等基本力学性能。对TiAlN涂层试件的振动和拉伸疲劳性能分别进行了考核,通过观察试件疲劳断口形貌,探究了偏压梯度TiAlN涂层/基体的疲劳损伤机理。结果 TiAlN涂层中Al元素含量沿深度方向一直在降低,偏压工艺成功制备出梯度结构涂层。偏压梯度TiAlN涂层的内应力为压缩状态,数值为(2.66±0.23) GPa,显著低于对应恒压涂层(‒200 V)。偏压梯度TiAlN涂层试件平均振动强度和拉伸疲劳强度分别为370.90、377.90 MPa,前者相对于TC4基体提高了47.7%,后者几乎保持不变。结论 TiAlN涂层内部存在残余压应力,具有一定抗裂纹萌生能力,TC4钛合金表面制备偏压梯度TiAlN涂层后,两种受载类型下的疲劳裂纹源均位于涂层与基体界面处。振动受载时,涂层中梯度结构抑制了裂纹的扩展,疲劳强度提高;拉伸受载时,TiAlN涂层部分发生破碎,抑制裂纹萌生与促进裂纹扩展两种机制同时存在,疲劳强度几乎不变。     

40Cr钢表面离子镀TiAlN涂层的膜基结合力研究

采用多弧离子镀的方法在齿轮材料40Cr钢基体表面上制备TiAlN涂层,分析了工艺参数对涂层与基体结合力的影响。结果表明,随着基体负偏压的增加,膜基结合力增强,当超过某一最大值时膜基结合力会逐渐下降。随着N_2分压的增加,膜基结合力逐渐增强。     

负偏压对电弧离子镀复合TiAlN 薄膜的影响

采用电弧离子镀技术,以W18Cr4V高速钢为基体,调整基体负偏压,制得多个复合TiAlN薄膜试样,研究了基体负偏压对薄膜微观组织形貌、物相组成、晶格位向、硬度、厚度和沉积速率的影响。结果表明,过高或过低的负偏压会使得膜层表面不平整,显微硬度下降。当负偏压为200 V时,膜层的沉积速率最大;负偏压为150 V时,有利于薄膜(111)晶面的择优取向生长,且TiAlN膜的硬度最高。     

基底偏压对磁控溅射TiAlSiN涂层微观结构、力学性能及摩擦学性能的影响

采用直流非平衡磁控溅射方法在M42高速钢表面沉积Ti/TiN/TiAlSiN多层薄膜,研究基底偏压对TiAlSiN的晶体结构、微观组织、力学及摩擦学性能的影响。结果表明:基体负偏压从40 V增加到80 V,TiAlSiN由致密的粗大柱状晶向致密纤维状细晶过渡、晶粒宽度由180 nm减小至60 nm;当负偏压大于60 V时,TiAlSiN层由fcc TiN+fcc AlN双相结构转变为fcc TiAlN单相结构;涂层硬度和弹性模量随偏压增大呈现上升趋势,当负偏压为80 V时,涂层的硬度和弹性模量分别为34.1 GPa和378 GPa;涂层的摩擦学性能随偏压的增大而先增强后降低,当负偏压为40 V时,涂层磨损率为5.0×10~(-6)mm~3/Nm,当负偏压为50 V时,涂层则降低至5.0×10~(-6)mm~3/Nm,为最低值,随着负偏压增加到80 V时,磨损率较高,约9.0×10~(-6)mm~3/Nm。     

梯度基体负偏压真空多弧离子镀沉积TiN涂层及其力学性能

目的通过梯度基体负偏压沉积工艺,获得综合性能优良的Ti N涂层。方法采用多弧离子镀工艺,在0~-180 V连续变化的梯度基体负偏压参数下沉积梯度Ti N涂层。通过X射线衍射仪和扫描电子显微镜对涂层的物相结构和形貌进行分析,通过纳米压痕和纳米划痕对涂层的力学性能进行系统研究。结果与无梯度沉积的涂层相比,梯度基体负偏压沉积Ti N涂层的(111)晶面衍射峰减小,厚度增加,表明涂层的沉积速率增大。经测试,梯度涂层的断裂临界载荷L_(c2)=215.21 m N,硬度值H=31.2GPa,弹性模量E=498 GPa,塑性变形临界载荷L_y=81.65 m N;无梯度沉积涂层的L_(c2)=248.63 m N,H=29.6 GPa,E=452 GPa,L_y=23.39 m N。二者相比之下,梯度涂层虽然断裂临界载荷有所减小,但硬度值和弹性模量均有所增大,并且塑性增大,塑性变形临界载荷大幅增加,综合力学性能提高。结论梯度基体负偏压沉积工艺改变了常规的单一参数设置,在沉积过程中,基体负偏压对涂层生长的影响不断改变,获得的涂层具有结构上的梯度变化,从而力学性能得到了改善。     

直流基体偏压对Al-Cr-Si-N涂层结构和力学性能的影响

采用电弧离子镀技术在不同直流偏压下沉积Al-Cr-Si-N涂层,研究基体偏压对涂层成分、微观结构和性能的影响。结果表明:Al-Cr-Si-N涂层以密排六方结构和面心立方结构的AlN相为主,随着基体负偏压增加,涂层的衍射峰整体向小角度方向偏移:涂层内残余压应力逐渐增加,最大值为-0.77 GPa;涂层硬度和摩擦系数变化不明显。当基体负偏压为-40V时,Al-Cr-Si-N涂层的特征参数H/E和H~3/E~(*2)均达最大值,分别为0.15和0.37GPa,此时涂层具有最佳的耐磨性能,摩擦系数亦最低。     

脉冲偏压占空比对电弧离子镀TiAlN涂层的影响

通过优化电弧离子镀工艺参数改善TiAlN涂层结构及性能对TiAlN涂层应用具有重要的实用价值。本文利用脉冲偏压电弧离子镀制备了TiAlN涂层,研究了偏压占空比对TiAlN涂层结构及性能的影响,结果发现：随着占空比增加,涂层表面缺陷密度和表面粗糙度先降低后增大,占空比为70%时,制备的涂层表面缺陷密度和表面粗糙度最低。随着占空比增加,涂层的硬度和耐磨性得到明显改善,但占空比超过50%后继续增加占空比反而降低了涂层的硬度和耐磨性。TiAlN涂层与Si3N4球对磨时的主要磨损机制为黏着磨损和氧化磨损。     

偏压对TiAlN涂层微观结构、力学和摩擦学性能的影响（英文）

采用磁过滤真空阴极弧在ZL109合金表面沉积由TiAl和TiAlN组成的TiAlN多层涂层,并系统研究偏压对涂层微观结构和性能的影响。结果表明,涂层具有以TiAlN相为主的多相结构。随着偏压的增大,由于原子迁移率和晶格畸变的增加,TiAlN择优取向由(200)晶面向(111)晶面转变。同时,涂层的硬度、弹性模量和附着力表现出相同的变化趋势,即先增大后减小。当偏压为75 V时,TiAlN涂层具有最高的硬度(～30.3 GPa)、弹性模量(～229.1 GPa)、附着力(HF 2)和最低的磨损率(～4.44×10^-5 mm³/(N·m))。与未涂覆ZL109合金相比,TiAlN涂层合金表面的力学和摩擦学性能得到有效提高。     

基体负偏压对TiAlN/TiN膜层组织成分及硬度的影响

采用多弧离子镀技术在40Cr基体上制备TiAlN/TiN复合膜层;利用金相显微镜、扫描电子显微镜和显微硬度仪研究基体负偏压对膜层硬度的影响.结果表明:基体负偏压对膜层性能有显著影响,过高或过低的基体偏压会使得膜层表面不平整,表面显微硬度降低.基体负偏压越高,膜层中Ti、Al原子的含量就越低.     

Microstructure and physical properties of arc ion plated TiAlN/Cu thin film

Multilayered TiAlN/Cu coatings were produced by using a cathodic vacuum arc (CVA) deposition system. Filter was incorporated to the system in order to get rid of oversized particles. The TiAlN layer gives a columnar structure. If the TiAlN deposit was interrupted periodically by adding copper to its composite, TiAlN/Cu nanomultilayer structure formed. Which can be clearly observed through high-resolution transmission electron microscopy (HRTEM), and the thickness of periodic nano-laminates of TiAlN in composite TiAlN/Cu coatings is approximately 7-8 nm. EDS analysis showed the copper content in TiAlN/Cu specimen is only about 4.5 at.%, yet it brings significant influence to the film composition, in which the titanium is suppressed while the aluminum is increased.By adding copper to TiAlN, the electron diffraction patterns were changed from spotty ring to continuous indicating the formation of nanocrystalline structure in TiAlN/Cu multilayered coating. The oxidation resistant temperature of TiAlN coating is examined at about 868.8 °C, and decreased to about 855.7 °C after adding copper in the coating. The nanoindentation measurement of TiAlN/Cu multilayered coated material shows a higher elastic modulus of about 361 GPa than that of TiAlN about 348 GPa, but a lower hardness of about 24 GPa than that of TiAlN about 30 GPa.     

Influence of bilayer period and thickness ratio on the mechanical and tribological properties of CrSiN/TiAlN multilayer coatings

Nanostructured CrSiN/TiAlN multilayer coatings were deposited by a bipolar asymmetric reactive pulsed DC magnetron sputtering system. The thickness ratio of CrSiN to TiAlN layers was fixed at 1:1. The bilayer periods of the coatings were controlled to be from 6 to 40 nm. Furthermore, two CrSiN/TiAlN multilayer coatings with the same bilayer period (20 nm) but different CrSiN/TiAlN thickness ratios (2:8 and 8:2) were also deposited to explore the influence of thickness ratio on the mechanical properties of the multilayer coatings. The crystalline structures of the coatings were determined by a glancing angle X-ray diffractometer. The microstructures of thin films were examined by a scanning electron microscopy and a transmission electron microscopy, respectively. A nanoindenter, a micro Vickers hardness tester, and a pin-on-disk wear tester were used to evaluate the hardness, the toughness and the tribological properties of the thin films, respectively. The maximum hardness of the multilayers was obtained when the bilayer period was at 10 nm for the coating with the same thickness ratio of CrSiN to TiAlN layers (1:1). Meanwhile, the thickness ratio of CrSiN to TiAlN layer had great influence on the hardness and the toughness properties of the multilayer coatings. The hardness and the toughness of the CrSiN/TiAlN multilayer coatings increased as the individual TiAlN layer thickness increased.     

Influence of laser substrate pretreatment on anti-adhesive wear properties of WC/Co-based TiAlN coatings against AISI 316 stainless steel

To improve the anti-adhesive wear properties of WC/Co-based TiAlN coatings, a laser substrate surface pretreatment was examined. The cemented carbide substrates were textured with a Nd:YAG laser, in three different scanning speeds, and then coated with a PVD TiAlN film. The anti-adhesive wear properties of each surface were evaluated via the ball-on-disk wear test and turning experiments. Additionally, characterization tests such as variable depth scratch test were also performed in order to verify the coating adhesiveness and to explain the results of the wear and machining tests. The results reveal that the anti-adhesive wear properties of the three TiAlN coated textured samples are significantly improved over that of the conventional one; the adhesion of TiAlN coatings is greatly improved by using Nd:YAG laser substrate pretreatment. Moreover, laser-scanning speed has a profound effect on the adhesion strength of the pretreated samples. In the experiments, the lowest scanning speed (5 mm/s) is most effective in providing a greater mechanical locking of the coatings upon the substrate and a more matching chemical property between substrate and coating materials, thus increasing the critical load of the coatings. Meanwhile, the adhered workpiece material layer is more stable on the pretreated sample irradiated at 5 mm/s. Hence, potential wear protecting properties of the in-situ formed layer can be conserved.     

脉冲偏压占空比对TiN/TiAlN多层薄膜微观结构和硬度的影响

目的研究脉冲偏压占空比对TiN/TiAlN多层薄膜微观结构和硬度的影响规律。方法利用脉冲偏压电弧离子镀的方法,改变脉冲偏压占空比,在M2高速钢表面制备5种TiN/TiAlN多层薄膜,对比研究了薄膜的微观结构、元素成分、相结构和硬度的变化规律。结果 TiN/TiAlN多层薄膜表面出现了电弧离子镀制备薄膜的典型生长形貌,随着脉冲偏压占空比的增加,薄膜表面的大颗粒数目明显减少。此外,脉冲偏压占空比的增加还引起多层薄膜中Al/Ti原子比的降低。结论 TiN/TiAlN多层薄膜主要以(111)晶面择优取向生长,此外还含有(311),(222)和(200)晶相结构。5种多层薄膜的纳米硬度均在33GPa以上,当脉冲偏压占空比为20%时,可实现超硬薄膜的制备。     

Interdependence between stress and texture in arc evaporated Ti-Al-N thin films

Ex-situ X-ray diffraction was used to characterize the stress state and texture of TiAlN monolayer and TiN/TiAlN multilayer hard coatings deposited on WC-Co and tool steel substrates using the cathode arc evaporation method. For all coatings the compressive residual stress was found to be higher in the film deposited on tool steel than that deposited on WC-Co; this is due to the difference in the linear thermal expansion coefficient of the two substrates. X-ray diffraction polar scan measurements showed that the preferred orientation of the crystallites exhibits cylindrical symmetry but it is inclined with respect to the sample surface. Moreover, the inclination angle of the (002) diffracting planes increases with the increase of the residual stress in the coating. Different mechanisms that could explain the interdependence between fiber texture and residual stress are discussed.     

The corrosion and wear behavior of TiN and TiAlN coated AISI 316 L stainless steel

In this study, TiN and TiAlN coatings were deposited on AISI 316 L stainless steel substrates by PVD techniques. The composition and crystalline structure of the as-deposited coatings were analyzed by energy dispersive X-ray analysis (EDX) and X-ray diffraction (XRD) methods, respectively. The corrosion resistance studies of TiN-coated and TiAlN-coated samples were carried out in 0.9 wt % NaCl and SBF solutions using the electrochemical potentiodynamic polarization method and the wear behavior was evaluated with the ball-on-disk wear method at a sliding speed rate of 0.3 m/s under 2.5 N load in a dry medium. It was found that both TiN and TiAlN coatings exhibited relatively good corrosion resistance, however, TiAlN coatings showed a better corrosion resistance than TiN coatings. The TiAlN coating contributes positively against corrosion and wear behavior by increasing the surface hardness and by decreasing the friction coefficient of AISI 316 L stainless steel, respectively.     

Corrosion Behaviors of Nitride Coatings on Titanium Alloy in NaCl-Induced Hot Corrosion

TiN and TiAlN coatings were deposited by arc ion plating on titanium alloys to study their hot corrosion resistance when they were exposed to NaCl at 600 ℃.The microstructure and corrosion behaviors of nitride coatings were studied using scanning electron microscope,X-ray diffraction,electro-probe microanalyzer and X-ray photoelectron spectroscopy.The results showed that nitride coatings with the different compositions and the ones with the same composition but different thicknesses presented different hot corrosion resistance.TiN and thin TiAlN coatings showed poor corrosion resistance.Serious internal oxidation attacked the alloy substrate.Their corrosion products were mainly consisted of non-protective TiO2 and sodium salt.By contrast,the thick TiAlN coating presented outstanding corrosion resistance.Besides sodium salt,the corrosion products were composed of protective Al2O3.The increasing thickness of TiAlN significantly enhanced the hot corrosion resistance.The corrosion mechanisms of alloy,TiN and TiAlN coatings were discussed in detail.     

添加Y对电弧离子镀TiAlN薄膜结构和摩擦磨损性能的影响

目的 为进一步提高电弧离子镀TiAlN薄膜的摩擦磨损性能,研究添加元素Y对CrNi3MoVA钢表面电弧离子镀TiAlN薄膜微观组织结构、硬度、弹性模量及摩擦磨损性能的影响。方法 采用Ti-50Al和Ti-49Al-2Y合金靶,利用电弧离子镀技术在CrNi3MoVA钢表面制备两种氮化物薄膜,利用纳米压痕仪和摩擦磨损试验机分别测试了两种薄膜的硬度、弹性模量和摩擦系数,并用SEM、TEM、EDS、GIXRD分析了两种薄膜磨损前后的形貌、成分、相结构。结果 添加Y降低了TiAlN薄膜的晶粒尺寸,使其由柱状晶结构转变为近似等轴晶结构。TiAlYN薄膜的硬度较TiAlN薄膜提高了约25%,其弹性模量与TiAlN薄膜相近。与Si3N4对磨时,在加载载荷为20 N、往复行程为10 mm、往复速率为400 r/min的条件下,TiAlN薄膜的稳定摩擦系数为0.70~0.75,而TiAlYN薄膜的稳定摩擦系数为0.60~0.65,TiAlYN薄膜的磨损率较TiAlN薄膜的磨损率减小了约47%。TiAlN薄膜与TiAlYN薄膜的主要磨损机制均为刮擦磨损,TiAlN薄膜的失效机制主要是脆性裂纹导致的剥落。结论 添加Y对TiAlN薄膜具有明显的减摩耐磨作用,并提高了TiAlN薄膜在摩擦磨损过程中的抗开裂和抗剥落性能。     

Preparation of TiAlN/ZrN and TiCrN/ZrN multilayers by RF magnetron sputtering

Titanium-based nitride coatings on cutting tools, press molds and dies can be used to prolong their life cycle because of their superior corrosion and oxidation resistance. TiAlN/ZrN and TiCrN/ZrN multilayer coatings were prepared by RF magnetron sputtering, and their microstructural evolution and corrosion resistance during heat treatment were investigated. The TiAlN/ZrN and TiCrN/ZrN multilayer coatings are degraded by heating up to 600 °C with the formation of oxides particles on the surface. During the heat treatment, the TiCrN/ZrN and TiAlN/ZrN multilayer coatings show the lowest corrosion current density and the highest polarization resistance at temperature range of 400–500 °C. Consequently, the TiAlN/ZrN and TiCrN/ZrN multilayer coatings show good corrosion resistance at temperature range of 400–500 °C during heating.