一种新型玻璃基底可用于微陀螺的反磁悬浮结构的设计与制造

主要介绍了反磁悬浮系统的悬浮和稳定的原理以及用作惯性传感器的原理。研究了对反磁悬浮微器件理论。使用ANSOFT的MAXWELL3D有限元软件包分析了反磁转子悬浮微器件的悬浮问题,对于转子的悬浮、稳定和旋转进行了系统的仿真分析,包括受力分析与位移分析。对反磁悬浮微器件的制作工艺进行了研究。对反磁悬浮器件进行了相关实验。     

电磁悬浮转子微陀螺悬浮稳定性分析

电磁悬浮转子微陀螺(MGELR)是一种新型的角速率传感器,它和传统机械陀螺具有相同的工作机理.MGELR有望成为具有高精度的微陀螺.对于MGELR来说,转子的稳定悬浮是极为重要的.文中对微转子的稳定悬浮进行了全面的研究.详细分析并给出线圈、转子直径、电流幅值、悬浮高度等因素对微转子悬浮稳定性的影响.文中提出边界效应理论来解释微转子偏心所带来的侧向力.试验结果进一步论证了分析的正确性.文章最后得出稳定悬浮所应满足的条件.文章的研究内容为MGELR的结构设计提供理论基础.     

Small form factor actuator design for camera phone lens systems

This paper aims to suggest a concept design of a small form factor actuator for focusing or zooming systems of the camera phone lens. A traditional voice coil motor (VCM) type is used because it is very small, simple and reliable solution for the lens system. The topology optimization method is applied to suggest a structural design to maximize the actuating force without changing the input power and coils. The VCM system is generally composed of a permanent magnet (PM), a stator and voice coils; therefore, a simultaneous design of a PM and a stator is demanded. So far, many researches for the topology optimization of a ferromagnetic material have been achieved; however, very little has been done for the simultaneous design of a PM and a ferromagnetic material part. This study proposes a new methodology for the concurrent structural optimization for both parts. The optimization process must be formulated to support the sufficient force over whole stroke of the voice coil since the coil has a going and returning motion. The sensitivity calculation is accomplished by the adjoint variable method. Through the design process, a final concept design is suggested and its performance is verified using a commercial finite element analysis (FEA) package.     

Design of a novel 5-DOF hybrid serial-parallel manipulator and theoretical analysis of its parallel part

Parallel mechanisms (PMs) with two rotational degrees-of-freedom (DOF) and one translational DOF (2R1T) have gained much attention, in view of their good comprehensive performance in the field of machine tools. In this paper, a novel 2R1T 2UPU/SP PM is presented, and a 5-DOF hybrid serial-parallel manipulator is constructed on the basis of this novel PM. First, to better understand typical 2R1T PMs, a type synthesis method in virtue of the inner properties of PMs are investigated; in particular, the construction principles for the 2UPU/SP PM are introduced. Second, as the 2UPU/SP PM belongs to an over-constrained 2R1T PM, the constraint force and torque generated on the moving platform (MP) are analyzed in detail, and the rotational axes of the 2UPU/SP PM are obtained. Third, the kinematics of the 2UPU/SP PM are studied systematically, including position, velocity and acceleration analysis; based on the kinematic model, an inverse dynamic model is established using the virtual work principle method. The analysis of this PM shows that its kinematic and dynamic models are quite simple. To confirm the correctness of the kinematic and dynamic models, numerical simulations are performed. Next, the workspace is drawn using MATLAB and CAD softwares, which makes it possible to visualize it fully. Finally, the dimensional synthesis on the basis of the motion/force transmissibility is analyzed and relatively optimized physical dimensions are obtained. This study will enhance the research applications of PM and establish good theoretical foundations for the application of this novel manipulator.     

Experimental study of electric suspension for microbearings

Electric suspension bearings with open-loop stability have been proposed as a solution to the problem of surface contact friction resulting from the instability of rotors in micromotors. The proposed electric suspension is an open-loop stable system, which does not require the use of feedback sensors and controllers. A proof of concept experiment of the electric suspension is reported in this work. The experiment consists of levitating and holding a small flat plate in a stable equilibrium under a stator using the electric suspension design. The open-loop stability of the electric suspension is confirmed by photographing the gap between the suspended plate and the stator seen through a microscope. In addition, a gap measurement scheme based on a reflective sensor technique is implemented as a second means to verify stable levitation. The electric suspension is greatly compatible with small scale devices and systems and can be utilized to develop frictionless microactuators     

Electromagnetic levitation micromotor with stator embedded (ELMSE): levitation and lateral stability characteristics analysis

The adhesion, friction, wear in micro system or MEMS is more significant than those in macro system. The levitation or suspension technique is one of the effective techniques to eliminate the adhesion, friction, wear caused by the surfaces contact. The electromagnetic levitation micromotor with stators embedded (ELMSE) is a kind electromagnetic eddy current levitation system, which has special structure including the double sided stator and the hollow annular rotor. Different from the electromagnetic eddy current levitation system with single sided stator, ELMSE has good stability in the vertical and lateral directions. Using the finite element method, the levitation characteristics and lateral stability characteristics are analyzed. The influence of structural parameters and electric parameters on the vertical stiffness and the lateral stiffness has been analyzed and optimized in the paper. The analysis result of the paper provides theoretical reference for the optimal design of ELMSE.     

Application of full-order and simplified EKFs to sensorless PM brushless AC machines

This paper employs an extended Kalman filter (EKF) to estimate the rotor position and speed of a vector controlled surface-mounted permanent magnet (PM) brushless AC (BLAC) motor from measured terminal voltages and currents only. Both full-order and simplified EKFs are employed and their simulated performance capabilities are compared. Excellent agreement is achieved between estimated and commanded results. The EKF is also employed to identify the stator flux-linkage due to the PMs, which is influenced by temperature variation and magnetic saturation.     

无轴承异步电机的非线性逆解耦控制

针对无轴承异步电机多变量、非线性和强耦合的特点,采用基于逆系统理论的控制方法对其进行解耦控制.首先简要介绍了无轴承异步电机的基本原理,推导出电机旋转部分和径向悬浮力的数学性型.然后对转矩绕组采用非线性逆解耦控制.而径向悬浮控制所需的转矩绕组气隙磁链值可以在逆解耦控制的基础上通过系统辨识获取,从而实现转子的稳定悬浮.最后...     

Modeling and experimentation of a passive low frequency nanoforce sensor based on diamagnetic levitation

This paper is focused on the study of a new low frequency micro and nanoforce sensor based on diamagnetic levitation. The force sensitive part is a 10-cm long macroscopic capillary tube used as a levitating seismic mass. This tube presents a naturally stable equilibrium state with six degrees of freedom thanks to the combination of diamagnetic repulsive and magnetic attractive forces. It is only used as a one-direction force sensing device along its longitudinal axis. This force sensor is passive. The force measurement is based on the displacement of the capillary tube and in steady-state this displacement is proportional to the force. This sensor is characterized by an under-damped second-order linear force-displacement dynamic which remains linear on several hundred micrometers and can thus measure a wide range of microforces. Because of the magnetic springs configuration used, the capillary tube presents a horizontal mechanical stiffness that can be adjusted between 0.01 and 0.03 N/m (similar to the stiffness of a thin AFM cantilever). The measurement range typically varies between ±50 μN. Bandwidth is 4 Hz. The resolution depends on the sensor used to measure the capillary tube displacement and on noises induced by environmental conditions (ground and air vibrations). The resolution typically reached with a STIL confocal chromatic sensor is 5 nN inside a test chamber located on a anti-vibration table. This study is illustrated by a pull-off force measurement.     

磁悬浮球旋转控制系统

磁悬浮球是磁悬浮列车，磁悬浮轴承，磁悬浮飞轮储能系统，磁悬浮发射等一切磁悬浮研究的基础。同时也是闭环和非线性控制研究很好的平台。本文在分析磁悬浮球控制原理的基础上得出其悬浮、旋转数学模型，给出了使其悬浮、旋转的控制方案和仿真、实验结果。     

高温超导磁体与普通磁体的实验研究

本文从黑箱建模的角度出发,分析高温超导磁悬浮系统和常导磁悬浮系统在稳态悬浮时的动态特性。此外,通过对比实验,还比较了磁悬浮系统稳态悬浮时高温超导磁体与普通磁体的电磁特性异同。研究结果表明,虽然高温超导磁悬浮系统和常导磁悬浮系统动态特性的传递函数模型不同,但从控制的角度看,它们的电磁特性并无明显区别。在系统的工作频段内,高温超导磁体线圈自感应给其电磁特性带来的影响可以忽略。     

基于双霍尔传感器的磁性小球悬浮控制系统研究

本文设计并实现了一种基于双线性霍尔传感器结构的磁性小球悬浮控制系统,在电磁驱动器底端及顶端中心位置各同向布置一个线性霍尔传感器,通过传感器信号调理电路,将两路传感器的输出信号作减法处理,消除了电磁驱动器磁场对传感器输出信号的影响。试验表明,磁性小球到电磁驱动器底端距离为16.46~42.46 mm时,调理电路输出电压值与磁性小球到电磁驱动器底端距离的负三次方成正比。基于PID控制策略,设计了一个磁性小球悬浮控制系统,选取合适的PID控制器参数,试验表明,系统的超调量和响应速度能够符合设计要求,磁性小球实现了在25 mm位置处的稳定磁悬浮,系统的位置控制精度达到±0.125 mm。     

Design and experiment of an electromagnetic levitation system for a micro mirror

In this paper, the design and characterization of a contactless electromagnetic levitation and electrostatic driven microsystem is presented, which has applications for example for large scale angle rotation micro mirrors. The proposed design can levitate a fabricated aluminum micro rotor which can incorporate a mirror and control it to rotate around the vertical axis within the range of ± 180°, which enlarges the scanning angle dramatically compared with conventional torsion micro mirrors. The rotation angle of the micro rotor is detected by the change of capacitance and controlled by the electrostatic force produced by variable capacitors. The levitation of the micro rotor is realized by utilizing electromagnetic inductions. The rotation is achieved through electrostatic forces generated by a digital controller. The hybrid system design for a micro rotor, combining magnetic and electrostatic forces is introduced. The digital control strategy is based on a PID controller with bias voltage. The detection interface circuit, which is based on frequency multiplexing, is also presented in this paper. It has been experimentally shown that the proposed design can levitate a 1.65 mm radius and 8 µm thickness aluminum micro rotor to 100 µm height with 20 MHz frequency and 0.5A p-p input current. Square and slope wave input experiments were carried out. The experimental results show that the control principal is in good agreement with the simulation models and this applies as well to the time-response performance and stability.

     

Power-efficient assignment of virtual machines to physical machines

Motivated by current trends in cloud computing, we study a version of the generalized assignment problem where a set of virtual processors has to be implemented by a set of identical processors. For literature consistency, we say that a set of virtual machines (VMs) is assigned to a set of physical machines (PMs). The optimization criterion is to minimize the power consumed by all the PMs. We term the problem Virtual Machine Assignment (VMA). Crucial differences with previous work include a variable number of PMs, that each VM must be assigned to exactly one PM (i.e., VMs cannot be implemented fractionally), and a minimum power consumption for each active PM. Such infrastructure may be strictly constrained in the number of PMs or in the PMs’ capacity, depending on how costly (in terms of power consumption) it is to add a new PM to the system or to heavily load some of the existing PMs. Low usage or ample budget yields models where PM capacity and/or the number of PMs may be assumed unbounded for all practical purposes. We study four VMA problems depending on whether the capacity or the number of PMs is bounded or not. Specifically, we study hardness and online competitiveness for a variety of cases. To the best of our knowledge, this is the first comprehensive study of the VMA problem for this cost function.     

Axial-flux permanent magnet machines for micropower generation

This paper reports on the design, fabrication, and testing of an axial-flux permanent magnet electromagnetic generator. The generator comprises a polymer rotor with embedded permanent magnets sandwiched between two silicon stators with electroplated planar coils. Finite element simulations have been carried out using ANSYS to determine the effects on performance of design parameters such as the number of layers in the stator coils, and the rotor-stator gap. The effect of including soft magnetic pole pieces on the stators has also been studied. A prototype device with a diameter of 7.5 mm has been tested, and shown to deliver an output power of 1.1 mW per stator at a rotation speed of 30 000 rpm. The generator has been integrated with a microfabricated axial-flow microturbine to produce a compact power conversion device for power generation and flow sensing applications.     

Analysis and simulation of a Lorentz-type slotless,self-bearing motor

A slotless self-bearing motor design is analyzed. The proposed design eliminates the trade-off between motoring torque and bearing force with respect to PM thickness found in many recent designs. Expressions for torque and radial force production are derived, including both control-type forces and destabilizing side-pull forces. The feedback control algorithm and simulated results are also presented. The analysis indicates that: (1) independent torque and bearing force is achieved for a large number of PM pole pairs; (2) the magnitude of both torque and bearing force increases with PM thickness; and (3) the motor is capable of stable operation as long as the winding current phase shift with respect to the PM flux is small.     

A new process to fabricate the electromagnetic stepping micromotor using LIGA process and surface sacrificial layer technology

 In this paper, a new process to fabricate an electromagnetic stepping micromotor using surface sacrificial layer technology (SSLT) is illustrated, and the SEM photo of the stepping micromotor is showed. The torque of the stepping micromotor with maximum torque of 60 μNm is directly calculated by using electromagnetics laws and the law of conservation of energy. The stator and the shaft and the rotor of the micromotor with the material of nickel are first all fabricated by normal LIGA process at the same time. The sacrificial layer structure with the material of AZ resist is made on the surface of the rotor by using SSLT. The stator and the shaft are fixed together with copper substrate instead of the old Ti substrate by electroplating. After removing the Ti substrate, PMMA resist and the sacrificial layer structure, the rotor is separated from the stator and new copper substrate, and can rotate on the new substrate driven by magnetic force. The four coils with 300 turns each are wound on iron bars by hand using microscope and stepping motor. The bars are assembled by hand into the stator holes from rear of new copper substrate to form a magnetic circuit with the stator and the rotor. A power supply with four consecutive pulses provides the current for the coils wound on the iron bars and produces the magnetic force to drive the rotor to run with the speed of 60 rpm.     

基于Markov过程的IaaS系统可用性建模与分析方法

针对现有基础设施即服务（IaaS）可用性模型难以计算存在多个可用物理机器（PM）概率的问题，提出一种基于Markov过程的IaaS可用性分析方法。首先，将计算资源划分为hot PM、warm PM和cold PM三类；然后，结合资源分配过程的相应阶段对可用性影响进行建模，分别生成对应的三种分配子模型，子模型之间通过不同种类计算资源的转换关系相互协作，构建系统整体模型；其次，基于Markov过程建立方程组以对可用性模型进行求解；最后，结合实例对分析模型进行验证，并对PM变迁速率等关键影响因素进行了分析。实验结果表明，增加PM尤其是cold PM的数量有助于提升IaaS的可用性。所提方法可以用于评估IaaS存在一个或多个可用PM的概率。     

基于Markov过程的IaaS系统可用性建模与分析方法

针对现有基础设施即服务（IaaS）可用性模型难以计算存在多个可用物理机器（PM）概率的问题，提出一种基于Markov过程的IaaS可用性分析方法。首先，将计算资源划分为hot PM、warm PM和cold PM三类；然后，结合资源分配过程的相应阶段对可用性影响进行建模，分别生成对应的三种分配子模型，子模型之间通过不同种类计算资源的转换关系相互协作，构建系统整体模型；其次，基于Markov过程建立方程组以对可用性模型进行求解；最后，结合实例对分析模型进行验证，并对PM变迁速率等关键影响因素进行了分析。实验结果表明，增加PM尤其是cold PM的数量有助于提升IaaS的可用性。所提方法可以用于评估IaaS存在一个或多个可用PM的概率。     

抑制电磁干扰的悬浮间隙传感器检测线圈结构设计

高速磁浮列车悬浮间隙中存在着牵引磁场、悬浮磁场等多种磁场,它们的高次谐波耦合到检测线圈中容易形成电磁干扰对悬浮间隙传感器造成影响。通过设计8字结构线圈,大幅度抑制了这种共模形式的电磁干扰。针对双检测线圈可能存在相互电磁干扰问题,通过调整双线圈之间相对位置,使两线圈间互感接近于零时,就可消除该种干扰,据此,确定两检测线圈间错位1/3线圈长度,通过试验验证了可行性。