切点约束和探针针尖半径补偿的金刚石刀具刃口钝圆半径求解方法

本文对金刚石刀具刃口钝圆半径求解方法展开研究,以有效提升金刚石刀具刃口锋利度的测量精度。文中分析了原子力显微镜(AFM)扫描探针几何形貌对金刚石刀具刃口锋利度测量结果的影响,并提出了基于切点约束和AFM探针针尖半径补偿的刀具刃口钝圆半径求解方法;讨论了消噪滤波、测量角度误差以及切点分离方法对测量结果的影响;在高精度测量平台上完成了金刚石刀具刃口锋利度测量,并将被测量的刀具用于飞切加工KDP晶体。结果表明:提出的刃口钝圆半径求解方法能够准确求解金刚石刀具的刃口锋利度,测量结果能很好地描述金刚石刀具的刃口锋利程度,可以为金刚石超精密切削加工的选刀和用刀提供有效指导。     

AFM检测金刚石刀具锋利度误差分析研究

金刚石刀具是超精密切削的重要工具,其刃口锋利度的好坏对工件切削质量有着直接影响。基于AFM的金刚石刀具刃口锋利度检测是目前的主要方法,但是由于AFM仪器本身、扫描参数设置以及刀具状况、外界干扰等多种影响因素的作用,将导致金刚石刀具纳米级锋利度的检测产生多种误差。以圆弧刃金刚石刀具为测量对象,深入分析各个因素的影响过程,进行了理论分析和实验过程,提出了抑制和修正方法。研究表明,通过上述研究和措施的实施,可以提高锋利度的检测精度,为金刚石刀具高质量评价体系的建立提供理论和方法支持。     

天然金刚石刀具的研磨及其刃口半径检测技术

指出了天然金刚石刀具的刃口锋利度对现代超精密切削加工的重要影响,介绍了国内外天然金刚石刀具研磨技术的发展现状,以及我国金刚石刀具刃磨技术中普遍存在的问题。详细叙述了对刃磨后刀具刃口半径检测的几种可行方法,展望了刃口半径检测技术的前景。     

高精度金刚石刀具研磨关键技术研究

金刚石刀具刃口锋利度对所加工零件的表面质量有着重要影响。通过确定合理的研磨设备结构和合理的研磨工艺参数,获得的刀具刃口锋利度从300 nm提高到了50nm,刀面表面粗糙度从15nm提高到了0.5nm,刀具刃口质量得到了明显改善。     

利用散射光测量有椭圆形刃口的金刚石刀具锋利度的原理

本文提出了利用光学原理测量具有椭圆形刃口的金刚石刀具锋利度的方法，即通过测量刀刃表面的散射光的强度分布，从而获得刀刃几何形状的信息。文中首次提出了刀刃轮廊的椭圆模型，从理论上推导出了椭圆刀刃轮廊散射光的强度分布。     

基于原子力显微镜扫描的金刚石刀具纳米刃口轮廓测量方法研究

基于扫描探针理论,本文介绍了一种超精神加工金刚石刀具刃口锋锐轮廓的测量方法,给出了测量图象并分析了测量结果,首次对金刚石刀具刃口轮廓参数进行了ＡＦＭ扫描原理下的初步评定。这一方法可提高金刚石刀具刃口锋锐度的测量准确度,对进一步分析刃口参数如何影响超精密加工表面质量具有指导意义。     

烟丝切刀锋利度的影响因素分析

分析了9SiCr、W2、W6Mo5Cr4V2三种常用刀具材料及其相应的热处理工艺对烟丝切刀锋利度的影响.结果表明,烟丝切丝刀的刃口材料及组织是影响其锋利度的主要因素,刃口组织细密、硬度高,切刀的锋利度越高.     

金刚石刀具刃口研抛辅助机构方案设计

随着精密和超精密切削加工技术的发展,对金刚石刀具质量提出了更高的要求,由此对高性能金刚石刀具刃口研抛辅助机构的需求也越来越迫切。为此,在简要分析金刚石刀具刃口圆弧轮廓精度指标对加工精度影响的基础上,结合研抛工艺给出了金刚石刀具刃口研抛辅助机构的要求,并对金刚石刀具刃口研抛辅助机构的总体方案及其微进给机构和微摆幅机构进行了设计。     

单晶金刚石微型刀具刃磨试验研究

采用金刚石砂轮对单晶金刚石微型刀具进行了刃口机械刃磨试验,利用莱卡光学显微镜观察了单晶金刚石刀具刃口和表面形貌,以研究不同参数对磨削过程的影响,通过优化相关参数来获得更好的单晶金刚石微型刀具并提高刃磨效率。试验选择砂轮粒度、磨削速度以及进给速率作为刃磨参数。通过正交试验设计,比较磨削力、刃口半径和表面形貌,从而筛选出最优参数。试验得出小粒度砂轮、较高磨削速度和中等进给速度可以得到较好的刃磨结果。     

金刚石刀具锋锐轮廓几何评定方法研究

金刚石刀具刃口的锋锐轮廓是影响超精密加工的一个重要参数。在对金刚石刀具刃口轮廓三维测量的基础上，提出了精密评定切削刃锋锐轮廓的几种新方法。其中对圆评定方法、椭圆评定方法和抛物线评定方法进行了研究，实验结果表明这些方法不仅具有较高的评定精度，而且还有利于对超精密微切削机理进行分析研究。     

An integrated method for measurement of diamond tools based on AFM

The measurement and evaluation technology of high precision diamond tools is critically important for supporting the ultra-precision machining. In practical cutting process, the edge profile quality of the diamond tool, including sharpness, micro defects, roughness and tip arc waviness, greatly affects the cutting quality. It is very difficult to measure and evaluate the diamond tool edge profile due to the high precision of tool edge profile and complexity of various measurement parameters. In this paper, an integrated method for measurement and characterization of diamond tools is proposed, which is based on an Atomic Force Microscope (AFM) module. Multiple technical indexes of diamond tools are obtained and validated based on the presented research and cutting experiments, and the evaluation model for each technical index is also proposed. The integrated measurement equipment, including an AFM, precision adjustment device and aerostatic bearings, has been established based on the accuracy requirement of measurement parameters. The edge sharpness, micro defects, surface roughness and tip arc waviness have been obtained based on the evaluation model and experimental data. The experimental results show that the measurement accuracy meets the requirements of the comprehensive evaluation of the diamond tool edge profile. The research work will also contribute to the development of ultra-precision machine.     

基于声发射的双谱分析在金刚笔状态特征提取中的应用

为了有效地识别砂轮修整过程中金刚笔的钝化状态，针对金刚笔修整砂轮过程中声发射信号的非平稳时变特点，研究了用于金刚笔状态特征提取的基于声发射的双谱分析方法。通过砂轮修整过程在线监测实验，分析了金刚笔在锐利、中等钝化和钝化状态下，修整过程中声发射信号的双谱特征，提出了归一化双谱模对角切片特征提取方法。研究表明，采用基于声发射的双谱分析方法可以有效监测砂轮修整过程中金刚笔的钝化状态。     

金刚石刀具刀尖圆弧波纹度的测量及评价

为实现金刚石刀具刀尖圆弧波纹度超精密测量,构建了基于原子力显微镜(AFM)和精密回转轴系的刀尖圆弧轮廓测量系统,研究了刀尖圆弧波纹度评价方法和控制测量系统引入误差的策略。提出了评价刀尖圆弧波纹度时截止波长的确定原则和方法,并介绍了刀尖圆弧波纹度测量原理及评价流程。讨论了精密回转轴系径向回转误差的测量和评定、刀具安装偏心和偏角误差的控制和原子力扫描系统Z向非线性误差的校准方法。最后,在构建的测量系统上测量了了金刚石刀具刀尖圆弧波纹度并对测量不确定度进行了分析。实验测量显示:所评价金刚石刀具的刀尖圆弧波纹度为0.106μm,测量不确定度为23.8nm,表明所构建的测量系统基本满足金刚石刀具刀尖圆弧波纹度纳米级测量及评价的需求,测量结果稳定可靠、精度高。     

全陶瓷球轴承套圈沟道精密磨削用砂轮修整试验

为提高金刚石圆弧砂轮外缘轮廓精度,减少全陶瓷球轴承套圈沟形误差,采用金刚石碟片对树脂基金刚石圆弧砂轮进行修整;对比修整前后砂轮的表面形貌及套圈沟形误差,验证砂轮的修整效果.修整后砂轮表面出现光泽,露出表面的金刚石磨粒明显增多,部分金刚石磨粒破碎,形成新切削刃或脱落,增大容屑空间;修整前沟形误差的平均值为5.823μm,...     

金刚石表面的膜层沉积处理及其感应钎焊的研究

将热丝化学气相沉积(HFCVD)处理的金刚石作为磨料感应钎焊制作金刚石工具。HFCVD处理试验中,混合气为H2和CH4(体积流量比为100∶1.5),炉内压力为2.0kPa,700℃下处理45min后,在金刚石表面沉积了一层非晶碳膜。感应钎焊HFCVD处理的金刚石显示,出露部分的金刚石棱边能保持良好的锋利性;浸没在钎料层下面的金刚石表面形成了有均匀孔隙且形状不规则的铬碳化合物,液态钎料充填这些化合物孔隙之间,能够增强钎料对金刚石的把持强度。3种金刚石磨料感应钎焊制作的金刚石磨盘的高效重负荷石材磨削试验显示,HFCVD处理的金刚石的整体破碎率和脱落率最低。     

圆弧刃金刚石刀具刃磨中的关键技术

天然圆弧刃金刚石刀具是加工球曲面、非球曲面零件的重要工具 ,由于金刚石各向异性 ,使圆弧刃刃磨技术成为金刚石刀具制造中的难点和关键。本文针对圆弧金刚石刀具刃磨机理 ,设计了相应的刃磨机 ,并对刃磨结果进行了检测 ,表明这种刃磨机完全可以满足超精密球面和非球面曲面零件的加工要求     

On-machine precision preparation and dressing of ball-headed diamond wheel for the grinding of fused silica

In the grinding of high quality fused silica parts with complex surface or structure using ball-headed metal bonded diamond wheel with small diameter,the existing dressing methods are not suitable to dress the ball-headed diamond wheel precisely due to that they are either on-line in process dressing which may causes collision problem or without consideration for the effects of the tool setting error and electrode wear.An on-machine precision preparation and dressing method is proposed for ball-headed diamond wheel based on electrical discharge machining.By using this method the cylindrical diamond wheel with small diameter is manufactured to hemispherical-headed form.The obtained ball-headed diamond wheel is dressed after several grinding passes to recover geometrical accuracy and sharpness which is lost due to the wheel wear.A tool setting method based on high precision optical system is presented to reduce the wheel center setting error and dimension error.The effect of electrode tool wear is investigated by electrical dressing experiments,and the electrode tool wear compensation model is established based on the experimental results which show that the value of wear ratio coefficient K’ tends to be constant with the increasing of the feed length of electrode and the mean value of K’ is 0.156.Grinding experiments of fused silica are carried out on a test bench to evaluate the performance of the preparation and dressing method.The experimental results show that the surface roughness of the finished workpiece is 0.03 μm.The effect of the grinding parameter and dressing frequency on the surface roughness is investigated based on the measurement results of the surface roughness.This research provides an on-machine preparation and dressing method for ball-headed metal bonded diamond wheel used in the grinding of fused silica,which provides a solution to the tool setting method and the effect of electrode tool wear.     

对金刚石刀具刀尖圆弧波纹度评价的滤波分析

为准确评价超精密金刚石刀具刀尖圆弧波纹度,对金刚石刀具刀尖圆弧波纹度的评价进行了滤波分析。介绍了刀尖圆弧波纹度的评价方法,针对关键的滤波环节,分析了高斯滤波、高斯回归滤波、样条滤波和小波滤波的原理,根据实际采样数据设计模拟实验对比了上述4种滤波器的滤波特性。结果表明,对于不同轮廓中线但高频分量完全相同的轮廓,样条滤波器的滤波效果优于高斯滤波器,并通过实际应用对比了高斯滤波器和样条滤波器。实验结果表明:对具有不同轮廓中线但高频分量完全相同的模拟轮廓,分别采用高斯滤波器和样条滤波器,当截止波长分别取0.25mm和0.8mm时,高斯滤波器滤波结果的标准差分别为0.4366nm和9.6544nm,样条滤波器滤波结果的标准差分别为0.0271nm和1.1844nm,说明样条滤波器更适合于超精密金刚石刀具刀尖圆弧波纹度的评价。     

ACHIEVING THRESHOLD BARRIER OF 1 nm ROUGHNESS VALUE OF SILICON SURFACE BY DIAMOND TURNING

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