Design and experimental validation of an ultra-precision Abbe-compliant linear encoder-based position measurement system

The design and development of an Abbe-compliant linear encoder-based measurement system for position measurement with a targeted 20 nm uncertainty (k = 2) in machine tools and CMMs is presented. It consists of a linear scale and a capacitive sensor, mounted in line on an interface which is guided in the scale's measurement direction and driven by a linear motor based on the output signal of the capacitive sensor. The capacitive sensor measures the displacement of a target surface on the workpiece table. The functional point, which is the center of a tool or touch probe, is always aligned with the scale and capacitive sensor such that this configuration is compliant with the Abbe principle. Thermal stability is achieved by the application of a thermal center between the scale and capacitive sensor at the tip of the latter, which prevents both components to drift apart. Based on this concept, a prototype of a one-DOF measurement system was developed for a measurement range of 120 mm, together with an experimental setup aimed at verifying the reproducibility of the system for changing ambient conditions of ±0.5 °C and ±5%rh and the repeatability during tracking of a target surface over a short period of time. These experiments have shown that the measurement uncertainty of the one-DOF system is below 29 nm with a 95% confidence level.     

Development and analysis of an automated dimension measuring microscope

A theoretical model is developed to describe the operation of a bright field, optical microscope intended to be used for making automated measurements of features as small as 0·3 μm. The measurement of gap lengths in magnetic recording heads and linewidths on integrated circuit photomasks is discussed in detail. Different measurement techniques are investigated theoretically and their perfomances in the presence of aberrations, focus errors and non-ideal transducer responses are assessed. An automated measurement technique based on image shearing is presented and compared with other measurement techniques based on bright field image scanning. It is demonstrated that the automated image shearing method is much less prone to measurement errors due to system parameters. The model was used to develop an optimized design for the measurement system and a complete instrument was built. The performance of the practical measurement system agreed well with theoretical predictions. A calibration standard and a simple but accurate calibration algorithm were also developed.     

A novel capacitive system for the concentration measurement of pneumatically conveyed pulverized fuel at power stations

A novel capacitive system for the concentration measurement of gas–solid flow in pneumatically conveyed pulverized fuel at power stations has been developed. The capacitance sensor for measuring the concentration uses source-grid sensing electrodes. An active sensor and a dummy sensor are used to form a differential configuration. In order to eliminate baseline drift, to be immune to stray capacitance, and to ensure accurate measurement under very low solids/air mass flux ratio conditions, a correlated double sample (CDS) technique and lock-in detector with closed loop are used in the interface circuit. A laboratory scale pneumatically conveyed pulverized fuel loop system incorporating facilities for calibration has been fabricated for this purpose. The test section is a vertical ceramic tube of diameter 100 mm with an upward flow direction and pulverized fuel has been used as the solid phase. Results demonstrate that the system is capable of achieving linearity within ±5% at different temperatures or moisture content.     

差动位移传感器的激光干涉法自动检定

介绍一种由双纵模双频激光干涉仪、微机、被检传感器及数据采集A／D卡、微机接口数据采集卡、机械及电动机构、步进电机驱动卡等组成的差动式位移传感器自动检定系统。实验证明，该检定系统具有良好的性能。     

基于非晶带GMI效应新型弱磁场传感器

利用退火处理后的Co66.3Fe3.7Si12B18非晶带作为敏感元件,研制出一种基于非晶带GMI效应的弱磁场传感器。分析了传感器的工作原理,设计了该传感器的信号处理电路,并对传感器的测量范围、线性度等性能进行了标定。传感器可应用于地球磁场、环境磁场等微弱磁场检测领域。     

基于CAN总线的船舶数据通信系统

针对船舶传统通信系统存在的问题,提出了基于控制器局域网络(CAN)总线的通信系统网络化方案,分析了磁罗经数据采集模块、无线数据CAN总线接入模块、PCI-CAN总线接口卡模块、步进式方位仪舷角测量模块的设计理念,给出了最基本的CAN总线接口电路原理图,采用了TTCAN协议和双冗余设计理念,最后设计了防雷抗干扰和脉冲群测试实验以测试数据通信系统的可靠性。研究结果表明,系统的可靠性在很大程度上得到了提高,该设计在船用高精度数字磁罗经的项目中得到了成功的应用。     

旁路励磁的钢缆索索力传感器磁路分析

基于钢缆索逆磁致伸缩索力测量原理,讨论了一种旁路励磁的索力传感器。用磁导分析法对磁路做了详细的推导,结果表明可通过检测感应线圈的感应电压反映材料所受的外力,传感器输出与外力信号本身的变化、感应线圈的匝数、材料截面积、外激励磁化场及该磁场下的材料磁导率有关。在外力是缓慢变化情况下,可通过求感应积分电压得到外力;从激励磁化方式、参考工作点的选取,传感器的尺寸设计原则等三个方面做了讨论,确定传感器的参数。最后,利用万能拉力机对该种结构的传感器做了拉力模拟实验,实验结果表明旁路励磁的传感器磁路分析与参数设计比较合理,可用于钢缆索的索力测量。     

Instrumentation and control of a two-stage 4-bed silica gel + water adsorption cooling cum desalination system

This paper presents the instrumentation and control architecture for a laboratory based two-stage 4-bed silica gel + water adsorption system. The system consists of primarily two fluids: refrigerant (water vapour) and heat transfer fluid (water) flowing through various components. Heat input to the system is simulated using multiple heaters and ambient air is used as the heat sink. The laboratory setup incorporates a real time National Instruments (NI) controller to control several digital and analog valves, heaters, pumps and fans along with simultaneous data acquisition from various flow, pressure and temperature sensors. The paper also presents in detail the various automated and manual tasks required for successful operation of the system. Finally the system pressure and temperature dynamics are reported and its performance evaluated for various cycle times.     

Ultrahigh vacuum, variable temperature, dual scanning tunneling microscope system operating under high magnetic field

We present a dual scanning tunneling microscope (DSTM) system operating between 2.2 K and room temperature, in a split-coil superconducting magnetic field up to 12 T and in ultrahigh vacuum. The DSTM consists of two compact STMs, each having x, y, and z coarse positioning piezoelectric steppers with embedded capacitive positioning sensor for navigation. Each STM can be operated independently and can achieve atomic resolution. The DSTM and the sample is configured in a way that allows the magnetic field orientation to be varied continuously from normal to parallel to the sample surface. Together with the sample, the DSTM can form a nanometer scale three terminal setup for transport measurement.     

行波管磁场自动测量系统的设计与实现

介绍了一种行波管磁场自动测量系统,主要用来测量行波管磁聚束系统的轴向磁场强度和峰值场强。该系统由测试工作台、运动及控制装置、磁场测量装置和数据采集系统组成。软件结构采用模块化设计,使用Visual Basic语言编程,通过友好的界面实现行波管磁场的自动测量。     

A setup for measuring the magnetic characteristics of soft magnetic materials and articles

An automated setup for measuring the normal magnetization curve, the major and minor magnetic-hysteresis loops, and the main (initial permeability, maximum permeability, residual magnetic induction, induction coercive force, and saturation induction) and additional (the permeability at a field equal to the coercive force, the field strength at which the saturation induction is reached, and the induction at fields equal to the coercive force and the double coercive force) magnetic parameters of soft magnetic materials and articles produced from them is described. Measurements are performed in an open or closed magnetic circuit at a magnetization-reversal frequency of 0.05–0.5 Hz. The block diagram of the setup and its main parameters and characteristics are presented. The operation of the setup and the possibilities of its application are considered.     

Development of a voice coil motor based fast tool servo with a function of self-sensing of cutting forces

This paper presents a fast tool servo (FTS) driven by a voice coil motor (VCM) with a function of self-sensing of cutting forces. Conventionally, cutting force measurement associated with a FTS system is made by integrating an additional force sensor or a dynamometer, which would make the system complicated and influence the dynamic performance of the FTS. Differing from the conventional method, the force measurement in the proposed system is achieved by detecting the current of the VCM and then obtaining the cutting force based on the electromagnetic field distribution of the VCM. Since it is not necessary to integrate additional force sensors, the main body of the FTS could be compact and the dynamics of the FTS would not be influenced by the added function of force measurement. The FTS mainly consists of an air bearing guide driven by a VCM with a stroke of 2.5 mm, an optical encoders feedback system for precision positioning and a hall current sensor for current measurement. To obtain forces from the measured currents, the magnetic field distribution of the VCM is figured out and the nonlinear relationship between the position and the magnetic field distribution is corrected. The basic performances of the FTS for positioning and force measurement were experimentally investigated. It is shown that the system could have a positioning resolution of 20 nm and a force self-sensing resolution of 5 mN based on the proposed method. The proposed method provides a new way for in-process cutting force measurement associated with FTS systems.     

深水水位和温度实时监控系统

本系统是通过压力传感器和精密温度传感器感知水位和水温的变化,利用A/D转换模块和单片机系统开发出一款精度高,体积小的深水水位检测系统。在充分保证对被测水位的进行实时在线测量的前提下,借助LabVIEW工控软件,以其友好的人机界面使整套开发系统具备现场数据采集、实时和历史数据处理、报警、过程监控和显示趋势曲线等功能。     

一种新的弱磁场检测方法研究

介绍一种新的弱磁场测量方法,利用巨磁阻传感器,测量较为微弱的磁场信号,采用恒流供电,优化了传感器的供电模式,改善了传感器在弱磁场范围内的线性特性。设计低噪声、低失真的放大电路对传感器输出的信号进行放大,采用调零电路改变放大电路的输出来抵消外界静磁场的干扰。     

用于闪电瞬态电场测量的高速采集系统设计

利用A/D转换芯片AD9057和基于Pockels效应的闪电电场传感器设计了一个闪电瞬态电场测量的高速采集系统,给出了高速采集系统的硬件电路和软件程序设计流程图。该系统主要包括:闪电电场传感、高速A/D转换、数据存储、数据处理。通过对闪电电场高速采集系统的硬件和软件设计,解决了数据采集过程中存在的高速A/D转换的速度与低速智能管理的速度不匹配问题,实现了带宽为0~10MHz的闪电瞬态电场信号采集。     

基于DSP控制的交变磁场装置的研究

本文研制一套以DSP为控制核心的变频电源装置,采用新型单相SVPWM调制技术,激励铁氧体线圈可产生频率、场强均可独立调节的交流磁场。主电路部分采用桥式拓扑电路结构,磁场输出部分采用带气隙的回形磁芯,在气隙中产生交变磁场,用于研究磁场对细胞的生物效应。实验效果比较理想,测量结果较精确,系统稳定可靠,数字化界面操作简洁方便。     

A temperature and pressure controlled calibration system for pressure sensors

A data acquisition and experiment control system has been developed to characterize and calibrate prototype pressure sensors capable of operation in a cryogenic environment. The system consists of: a personal computer for acquisition of sensor output voltage, sensor operating parameters, and data processing including numerically derived corrections for sensor thermal offset, sensitivity variations, and thermal errors; an environmental chamber capable of controlling temperature to within 1 °C over a −184 °C to 220 °C range; a pressure standard capable of generating pressures to within 1 part in 100,000 over a 0 to 344.74 kPa range; and a data logger for recording outputs from system multimeters, precision resistance temperature devices, thermocouples, and power supplies. The system utilizes a modified, commercially available interface board to allow the demultiplexing, digitation, and input of remotely multiplexed, pulse amplitude modulated pressure signals from pressure sensor arrays to the PC bus. System software is discussed and includes: sensor data acquisition, algorithms for numerically derived thermal offset and sensitivity correction, and operation of the environmental chamber and pressure standard.     

新型微位移电感传感器设计

研制了一种新型高精度电感传感器。该传感器由高业民感测头和信号处理电路组成,电路用峰值采样和直接数字式输出接口取代传统的相频检波和模拟输出接口,降低了非线性度;同时采用稳频稳幅技术,进一步提高了该传感器电路的精度的稳定性。     

Analysis and visualization of rotation searching efficiency in two-round rotation based magnetic tracking

A magnetic sensor attaching on the moving object will have a maximum intensity measurement when the rotating magnetic field is pointing at it. Before solving the position and orientation, the magnetic field could be rotated in two orthogonal planes to find the maximal pointing direction. In order to realize a real-time tracking, efficient searching strategies for this maximum-oriented magnetic field rotation must be provided. This paper sets up a novel rotation searching efficiency model to quantitatively evaluate the relationship between the rotation searching time and the rotation axis in the two-round rotation based magnetic field measurement. Based on this model, two searching strategies are proposed. Simulation results suggest that both searching strategies can realize full space tracking without any latency larger than 30 ms. Corresponding system platform is under development.     

高性能通用温度采集仪的研制

温度采集是现代测控系统的重要内容之一。针对工业现场这一问题,研制了一套多通道、高性能、通用温度采集仪。该系统以ARM Cortex系列的STM32芯片和24位AD芯片AD7793为核心,详细介绍了其温度采集电路、数字量输入输出电路、液晶显示电路、存储电路和通讯接口电路的设计。该采集仪在同一个模拟输入通道上实现了对热敏电阻、三线制热电阻、四线制热电阻、热电偶等信号的通用采集,通过RS232/485、USB、CAN等总线接口与上位机或数据采集网络进行了通讯或显示等,能够适用于多种场合。实验结果表明,其设计结构合理,精度较高,结果令人满意。