Characterization of current-induced degradation in Be-doped HBTsbased in GaAs and InP

The changes in the device characteristics under high-bias conditions are investigated for InAlAs/InGaAs and AlGaAs/GaAs heterojunction bipolar transistors (HBTs) with heavily Be-doped base lasers, focusing on the base current and 1/f noise characteristics. It is shown that the ideality factor of the surface recombination base current provides information on the Be movement accompanying the degradation. For stress current densities up to 1.5×10⁵ A/cm², the Be movement in the InAlAs/InGaAs HBTs is estimated to be no more than a small fraction of the 5 nm setback layer. The 1/f noise measurement highlight the effect of current stressing on the surface recombination in the HBTs. A characteristic spectral shape is found in the noise spectra for the current-stressed AlGaAs/GaAs HBT, possibly originating from the degradation-induced carrier traps. Although both HBTs have similar electronic properties, these results illustrate the striking difference in their stress current behaviors     

Measurement and comparison of 1/f noise and g-r noise in siliconhomojunction and III-V heterojunction bipolar transistors

This paper experimentally determines and compares the 1/f noise and the g-r noise, as components of the base noise current spectral density, in Si homojunction and III-V heterojunction bipolar transistors (HBTs) in common-emitter configuration. The noise spectra for each of these devices are obtained as functions of the base bias current (I_B), and the 1/f noise has been found to depend on I_B as I_B^γ, where γ~1.8 for the silicon BJT's and InP/InGaAs HBT's with high current gains (β~50), and γ~1.1 for the AlGaAs/GaAs HBTs with low current gains (4<β<12). The nearly constant current gain and the near square-law and inverse-square emitter area dependence of 1/f noise in silicon devices are indicative of the dominant base bulk recombination nature of this noise. The 1/f noise in the InP based HBTs has been found to be lowest among all the devices we have tested, and its origin is suggested to be the base bulk recombination as in the Si devices. For the AlGaAs/GaAs HBTs, the low current gain and the near unity value of γ, arise most likely due to the combined effects of surface, bulk, and depletion region recombinations and the base-to-emitter injection. The dependence of the 1/f noise on the base current density in the devices tested in this work, and those tested by others are compared to find out which HBT's have achieved the lowest level of 1/f noise     

InGaAs/InP heterobipolar transistors for integration on semi-insulating InP substrates

InGaAs/InP npn heterojunction bipolar transistors (HBTs) have been fabricated from LPE layers grown on semi-insulating InP substrates for application to integrated circuits. The inverted emitter configuration is used, which allows the growth of the active layers without any additional steps. The HBTs show stable characteristics without any hysteresis and with current gains up to 25 for 0.7 ?m base width. To our knowledge this is the first report of InGaAs/InP HBTs on a semi-insulating substrate.     

Breakdown-speed considerations in InP/InGaAs single- anddouble-heterostructure bipolar transistors

The breakdown and speed characteristics of InP/InGaAs single and double HBTs are presented. Temperature-dependent two- and three-terminal measurements suggest that avalanche impact ionization is the dominant breakdown mechanism in InGaAs collector HBTs. Monte Carlo techniques and 1D drift-diffusion modeling are used for speed and breakdown simulation, respectively. Special doping profiles are evaluated for improving the breakdown-speed characteristics of single HBTs (SHBTs) with conventional uniformly doped InGaAs collectors. Double HBTs (DHBTs) outperform all SHBTs in terms of speed-breakdown tradeoffs as long as they use graded base-collector junctions or they operate under sufficiently high collector-emitter voltage conditions. A cutoff frequency of 200 GHz was found to be feasible with graded DHBTs, and breakdown voltages up to 4.6 V were evaluated with a 3000-Å-thick collector. Nongraded DHBTs can be optimized to perform better in terms of speed-breakdown tradeoffs provided that a high collector doping is used     

A 40-Gb/s preamplifier using AlGaAs/InGaAs HBTs with regrown basecontacts

A preamplifier for 40-Gb/s optical transmission systems incorporating AlGaAs/InGaAs heterojunction bipolar transistors (HBTs) with p⁺ regrown extrinsic base layers is described. The HBTs have a heavily doped regrown p⁺-GaAs layer in the extrinsic base regions and a thin graded InGaAs strained layer for the intrinsic base. Their measured peak f_max is above 200 GHz. The developed preamplifier provides a bandwidth of 38.4 GHz and a transimpedance gain of 41.1 dB Ω. Moreover, the frequency response as an optical receiver has a bandwidth of 32 GHz. These characteristics make the preamplifier suitable for use in a 40-Gb/s optical receiver. These results show that AlGaAs/InGaAs HBTs with p⁺ regrown extrinsic base layers are very promising for use in 40-Gb/s optical transmission systems     

Stress current behavior of InAlAs/InGaAs and AlGaAs/GaAs HBT's withpolyimide passivation

InAlAs/InGaAs and AlGaAs/GaAs HBTs, with heavily Be-doped base layers, have been fabricated and their reliability under excessive forward current tested. To understand the HBT material difference, a common process based on a polyimide planarization method is applied to the fabrication. While short-term degradation induced by stress current is observed for AlGaAs/GaAs HBTs, InAlAs/InGaAs HBTs are stable up to a current density of 1.5×10⁵ A/cm², indicating the absence of substantial Be diffusion. An analysis of base current has shown a striking contrast between the HBTs in terms of the stressing effect on the surface recombination along emitter junction periphery     

Performance comparison of state-of-the-art heterojunction bipolar devices (HBT) based on AlGaAs/GaAs, Si/SiGe and InGaAs/InP

This paper presents a comprehensive comparison of three state-of-the-art heterojunction bipolar transistors (HBTs); the AlGaAs/GaAs HBT, the Si/SiGe HBT and the InGaAs/InP HBT. Our aim in this paper is to find the potentials and limitations of these devices and analyze them under common Figure of Merit (FOM) definitions as well as to make a meaningful comparison which is necessary for a technology choice especially in RF-circuit and system level applications such as power amplifier, low noise amplifier circuits and transceiver/receiver systems. Simulation of an HBT device with an HBT model instead of traditional BJT models is also presented for the AlGaAs/GaAs HBT. To the best of our knowledge, this work covers the most extensive FOM analysis for these devices such as I-V behavior, stability, power gain analysis, characteristic frequencies and minimum noise figure. DC and bias point simulations of the devices are performed using Agilent's ADS design tool and a comparison is given for a wide range of FOM specifications. Based on our literature survey and simulation results, we have concluded that GaAs based HBTs are suitable for high-power applications due to their high-breakdown voltages, SiGe based HBTs are promising for low noise applications due to their low noise figures and InP will be the choice if very high-data rates is of primary importance since InP based HBT transistors have superior material properties leading to Terahertz frequency operation.     

InP/InGaAs heterojunction bipolar transistors grown by gas-sourcemolecular beam epitaxy with carbon-doped base

The first N-p-n InP/InGaAs heterojunction bipolar transistors (HBTs) with p-type carbon doping in InGaAs are reported. P-type carbon doping in the InGaAs base has been achieved by gas-source molecular beam epitaxy (GSMBE) using carbon tetrachloride (CCl₄) as the dopant source. The resulting hole concentration in the base was 1×10¹⁹ cm^-3. HBTs fabricated using material from this growth method display good I-V characteristics with DC current gain above 500. This verifies the ability to use carbon doping to make a heavily p-type InGaAs base of an N-p-n HBT     

High-gain InGaAlAs/InGaAs heterojunction bipolar transistors andphototransistors

The characteristics of InGaAlAs/InGaAs heterojunction bipolar transistors (HBTs) grown by molecular beam epitaxy are described. A current gain of 15600 at a current density of ~10⁴ A/cm² and an emitter-base heterojunction ideality factor of 1.02 were measured. Appropriately designed InGaAlAs/InGaAs HBTs, when operated as phototransistors, also had high gains. A current gain of 1000 for a collector current of only 10 μA was obtained for phototransistors. Such high gains are due to low recombination currents as a consequence of the good crystalline quality of the InGaAlAs bulk and InGaAlAs/InGaAs interface     

Temperature dependence of DC characteristics of NpN InP/GaAsSb/InP double heterojunction bipolar transistors: an analytical study

An analytic study of DC characteristics based on the drift-diffusion approach has been performed for the InP/GaAsSb DHBTs. The current transport of InP/GaAsSb/InP DHBTs has been investigated focusing the device temperature dependence. Our simulation results show that, at room temperature, the DC characteristics of the InP/GaAsSb/InP DHBTs similar to the conventional InP-based HBT using InGaAs as the base layer although a type-II energy band alignment is presented in the InP/GaAsSb HBT. However, due to different mechanisms for the electron injection from the emitter induced by the different conduction band alignments, the InP/GaAsSb HBTs may present a different temperature dependent behavior in term of device current gain as compared to the conventional InP/InGaAs HBTs. Higher current gain could be achieved by the InP/GaAsSb HBTs at elevated temperature.     

InP/InGaAs HBTs with n+-InP contacting layers grown byMOMBE using SiBr4

InP/InGaAs heterojunction bipolar transistors (HBTs) with low resistance, nonalloyed TiPtAu contacts on n⁺-InP emitter and collector contacting layers have been demonstrated with excellent DC characteristics. A specific contact resistance of 5.42×10^-8 Ω·cm², which, to the best of our knowledge, is the lowest reported for TiPtAu on n-InP, has been measured on InP doped n=6.0×10¹⁹ cm^-3 using SiBr₄. This low contact resistance makes TiPtAu contacts on n-InP viable for InP/InGaAs HBTs     

Millimetre-wave InP/InGaAs heterojunction bipolar transistors witha subpicosecond extrinsic delay time

We report the microwave characteristics of InP/InGaAs heterojunction bipolar transistors (HBTs) using a carbon-doped base grown by chemical beam epitaxy (CBE). An extrinsic delay time of 0.856 ps was achieved by nonequilibrium transport in a very thin base layer and extremely small emitter parasitic resistance through the use of silicon δ-doping in the emitter ohmic contact layer. To our knowledge, this is the shortest extrinsic delay time of any bipolar transistors reported. This result indicates the great potential of InP/InGaAs HBTs for applications requiring a very large bandwidth     

AlGaAs/InGaAs/GaAs strained-layer heterojunction bipolar transistors by molecular beam epitaxy

The growth and characteristics of the first AlGaAs/InGaAs/GaAs HBTs are reported. Layers with up to 10% indium content appeared to be free of misfit dislocations, and resulted in HBTs with good I/V characteristics which scaled with In content according to theory.     

Surface-recombination-free InGaAs/InP HBTs and the base contact recombination

Surface-recombination-free InGaAs/InP HBTs with graded base have been demonstrated. The HBTs were passivated by ammonium sulfide. The current gain of the nonself-aligned HBTs was independent of the emitter periphery, indicating that the surface recombination was removed by the passivation. For the self-aligned HBTs, the current gain was still dependent on the emitter periphery after the passivation due to the base contact recombination. A surface leakage channel has been identified to result in a significant increase in the base contact recombination. The passivation has two effects: one is the surface recombination velocity reduction and the other is the surface leakage channel elimination.     

New collector undercut technique using a SiN sidewall for low basecontact resistance in InP/InGaAs SHBTs

A new collector undercut process using SiN protection sidewall has been developed for high speed InP/InGaAs single heterojunction bipolar transistors (HBTs). The HBTs fabricated using the technique have a larger base contact area, resulting in a smaller DC current gain and smaller base contact resistance than HBTs fabricated using a conventional undercut process while maintaining low C_bc. Due to the reduced base contact resistance, the maximum oscillation frequency (f_max) has been enhanced from 162 GHz to 208 GHz. This result clearly shows the effectiveness of this technique for high-speed HBT process, especially for the HBTs with a thick collector layer, and narrow base metal width     

1/f noise characteristics of AlGaAs/GaAs heterojunction bipolartransistor with a noise corner frequency below 1 kHz

To reduce the low-frequency noise, HBTs with a large emitter size of 120×120 μm² are fabricated on abrupt emitter-base junction materials without undoped spacer. The HBTs exhibit an internal noise corner frequency of 100 Hz, which is much lower than about 100 kHz of conventional AlGaAs/GaAs HBTs. From the very low noise HBTs, the existence of resistance fluctuation 1/f noise is clearly verified by the simple comparison of collector current noise spectra with different base terminations. It is found that, at a high emitter-base forward bias, the resistance fluctuation 1/f noise becomes dominant for shorted base-emitter termination, but the internal 1/f noise dominant for open base. Device design rules for low noise small-feature size HBT, including resistance fluctuation, are discussed     

Low-frequency noise characteristics of p-n-p InAlAs/InGaAs HBTs

The low-frequency noise characteristics of p-n-p InAlAs/InGaAs heterojunction bipolar transistors (HBTs) were investigated. Devices with various geometries were measured under different bias conditions. The base noise current spectral density (3.11 /spl times/ 10/sup -16/ A/sup 2//Hz) was found to be higher than the collector noise current spectral density (1.48 /spl times/ 10/sup -16/ A/sup 2//Hz) at 10 Hz under low bias condition (I/sub C/=1 mA, V/sub EC/=1 V), while the base noise current spectral density (2.04 /spl times/ 10/sup -15/ A/sup 2//Hz) is lower than the collector noise current spectral density (7.87 /spl times/ 10/sup -15/ A/sup 2//Hz) under high bias condition (I/sub C/=10 mA, V/sub EC/=2 V). The low-frequency noise sources were identified using the emitter-feedback technique. The results suggest that the low-frequency noise is a surface-related process. In addition, the dominant noise sources varied with bias levels.     

The effects of base dopant diffusion on DC and RF characteristicsof InGaAs/InAlAs heterojunction bipolar transistors

The effects of base p-dopant diffusion at junction interfaces of InGaAs/InAlAs HBTs with thin base thicknesses and high base dopings are reported. It is shown that HBTs with compositionally graded emitter-based (E-B) junctions are very tolerant to base dopant outdiffusion into the E-B graded region. The RF performance is nearly unaffected by the diffusion, and the DC current gain and E-B junction breakdown voltages are improved with finite Be diffusion into the E-B graded region     

High frequency Pnp AlGaAs/InGaAs heterojunction bipolar transistor with an ultrathin strained base

High performance Pnp AlGaAs/InGaAs heterojunction bipolar transistors (HBTs) have been fabricated. The transistors have a 300 AA strained InGaAs base, with indium composition linearly graded from 0 to 15%. The cutoff frequency, and maximum oscillation frequency for a transistor with emitter area of 2*8 mu m/sup 2/ are measured to be 23.3 GHz and 40 GHz, respectively, at a collector current of -10 mA.<>     

A comparison of TMGa and TEGa for low-temperature metalorganic chemical vapor deposition growth of CCI4-doped inGaAs

Factors which influence the alloy composition and doping level of CCl₄-doped In_0.53Ga_04.7As grown at low temperatures (450°C < T_g < 560°C) by low-pressure metalorganic chemical vapor deposition (MOCVD) have been investigated. The composition is highly dependent on substrate temperature due to the preferential etching of In from the surface during growth and the temperature-dependent growth efficiency associated with the Ga source. The lower pyrolysis temperature of TEGa relative to TMGa allows the growth of CCl₄-doped InGaAs at lower growth temperatures than can be achieved using TMGa, and results in improved uniformity. High p-type doping (p ∼ 7 × 10¹⁹ cm^-8) has been achieved in C-doped InGaAs grown at T = 450°C. Secondary ion mass spectrometry analysis of a Cdoping spike in InGaAs before and after annealing at ∼670°C suggests that the diffusivity of C is significantly lower than for Zn in InGaAs. The hole mobilities and electron diffusion lengths in p⁺-InGaAs doped with C are also found to be comparable to those for Be and Zn-doped InGaAs, although it is also found that layers which are highly passivated by hydrogen suffer a degradation in hole mobility. InP/InGaAs heterojunction bipolar transistors (HBTs) with a C-doped base exhibit high-frequency performance (f_t = 62 GHz, f_max=42 GHz) comparable to the best reported results for MOCVD-grown InP-based HBTs. These results demonstrate that in spite of the drawbacks related to compositional nonuniformity and hydrogen passivation in CCl₄-doped InGaAs grown by MOCVD, the use of C as a stable p-type dopant and as an alternative to Be and Zn in InP/ InGaAs HBTs appears promising.