电子封装中激光封焊工艺及性能研究

研究了激光封焊中光子激发电子发生跃迁的能量转变及传递过程与工艺参数之间的关系,并分析了外壳吸收能量与熔深、工艺参数之间的联系。结果表明,随着熔深的增加,能量呈指数形式衰减,到达封焊临界点后,封焊终止。通过改变激光波形、功率、脉宽、速度、频率和离焦量等工艺参数,可以控制焊材的电子跃迁和能量传递过程。合理控制熔融时的金属蒸气、熔池宽度和深度,从而对封焊裂纹、气孔和烧蚀等缺陷进行有效控制,以达到气密性和机械可靠性试验要求。     

金属─玻璃封接管壳漏气的失效分析

金属管壳是集成电路封装中的一种重要形式，其气密性是一项重要的考核指标。国内复杂结构金属外壳的气密性问题没有解决。本文结合一种产品进行了失效分析，结果表明玻璃熔封和玻璃—金属结合区的质量是影响气密性的关键因素。要解决气密性问题应提高玻璃粉的质量，改进熔封工艺，增加金属的预氧化工序。     

气密性平行缝焊技术与工艺

气密性封焊的产品因其杰出的可靠性被广泛应用于军事应用。与储能焊、激光焊相比,平行缝焊具有可靠性高、密封性能优越、运行成本低及生产率高等特点,是微电子器件最常用的气密性封装方法之一。主要阐述了气密性平行缝焊技术与工艺,并对焊接工艺参数进行了详细分析,同时给出了气密性检测要求及针对性措施。     

YAG投影管屏锥封接应力的产生原因及消除措施

YAG投影管屏锥封接应力主要是由于玻璃和 YAG单晶的膨胀系统数不匹配造成的。玻璃和 YAG具有不一致的非线性 ,低熔点玻璃等效固化点温度改变将造成封接应力的变化。低熔点玻璃的化学组成 ,熔制条件 ,屏锥封接工艺和其它高温处理工序决定了低熔点玻璃的等效固化点温度。要得到小应力的屏锥封接 ,需控制低熔点玻璃和玻璃的化学组成和熔制参数以及屏锥封接工艺规范。对出现的封接应力在一定程度上可通过改变封接工艺规范和高温处理来消除。     

基于平行缝焊工艺的AuSn合金焊料封盖技术研究

为了解决聚合物粘结电路的质量与长期可靠性问题,提出了一种采用平行缝焊工艺对AuSn合金焊料熔封器件进行封盖的新方法。通过对平行缝焊工艺的深入研究,解决了该类器件封盖的气密性与外观质量问题,从而找到了一种有效解决熔封外壳组装的低温聚合物粘结电路水汽含量、抗剪强度、键合强度控制的新方法。     

HTCC产品气密性封装的平行缝焊工艺研究

平行缝焊作为气密性封装的一种重要封装形式,以其适用范围广、可靠性高等优势被广泛应用。在高温共烧陶瓷(High Temperature Co-fired Ceramics, HTCC)产品气密性封装应用时,有诸多因素可能会引起产品密封不合格,导致电路失效。从产品盖板和底座的清洁度、预焊过程控制、封装夹具制作及封装参数的设置4个方面研究了平行缝焊工艺对HTCC产品气密性封装效果的影响。研究结果显示,为减少平行缝焊时陶瓷管壳所受到的热冲击,在脉冲周期内脉冲宽度要短,焊封能量应尽可能小,同时平行缝焊工艺中非封装参数影响的焊道质量也会影响HTCC产品气密性封装的效果。     

金属壳晶体冷压焊技术

系统地介绍了焊前工件表面处理、压焊的工艺参数、封焊模具设计。冷压焊金属壳的气密性好，漏气率进入１０＾－８Ｐａ．Ｌ／ｓ数量级，合格率达９５％以上。     

添加玻璃粉对Ba2Ti9O20系瓷料低温烧结的影响

采用H3BO3、ZnO、SiO2、Al2O3、Li2CO3和CaCO3等原料,通过高温熔融、淬火等工艺,获得了低熔点玻璃粉,研究了玻璃粉的熔融、力学性能、介电性能及其含量对MLCC瓷料烧结的影响。结果表明:在Ba2Ti9O20主晶相材料中加入质量分数为4%～7%的低熔点玻璃粉,有利于瓷料在910～950℃低温烧结致密,其绝缘电阻率ρ大于1013Ω·cm,tanδ为(1.2～2.0)×10–4,εr为32～38。     

可伐预氧化工艺因素对金属-玻璃封接气密性的影响

本文在不同氧化工艺、相同熔封工艺条件下制作金属-玻璃外壳，并模拟外壳实际应用情况对其气密性进行了考核，分析了工艺因素对可伐预氧化及其对金属外壳气密性的影响。实验结果表明，可伐合金在N2＋H2O混合气氛下氧化随时间遵循抛物线的增重规律，在850℃、N2＋H2O混合气、氧化10-30分钟，外壳均可获得较高的气密可靠性。     

倒装焊器件封装结构设计

倒装焊是今后高集成度半导体的主要发展方向之一。倒装焊器件封装结构主要由外壳、芯片、引脚(焊球、焊柱、针)、盖板(气密性封装)或散热片(非气密性封装)等组成。文章分别介绍外壳材料、倒装焊区、频率、气密性、功率等方面对倒装焊封装结构的影响。低温共烧陶瓷(LTCC)适合于高频、大面积的倒装焊芯片。大功率倒装焊散热结构主要跟功率、导热界面材料、散热材料及气密性等有关系。倒装焊器件气密性封装主要有平行缝焊或低温合金熔封工艺。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Teleportation of an arbitrary unknown N-qubit entangled state under the controlling of M controllers

A new quantum protocol to teleport an arbitrary unknown N-qubit entangled state from a sender to a fixed receiver under M controllers(M < N) is proposed. The quantum resources required are M non-maximally entangled Greenberger-Home-Zeilinger (GHZ) state and N-M non-maximally entangled Einstein-Podolsky-Rosen (EPR) pairs. The sender performs N generalized Bell-state measurements on the 2N particles. Controllers take M single-particle measurement along x-axis, and the receiver needs to introduce one auxiliary two-level particle to extract quantum information probabilistically with the fidelity unit if controllers cooperate with it.     

Diode-end-pumped Nd:YVO4/LBO lasers with 4.2W continuous-wave output at 457 nm

A continuous-wave (CW) 457 nm blue laser operating at the power of 4.2 W is demonstrated by using a fiber coupled laser diode module pumped Nd: YVO4 and using LBO as the intra-cavity SHG crystal With the optimization of laser cavity and crystal parameters, the laser operates at a very high efficiency. When the pumping power is about 31 W, the output at 457nm reaches 4.2 W, and the optical to optical conversion efficiency is about 13.5% accordingly. The stability of the out putpower is better than 1.2% for 8 h continuously working.     

A rigorous proof of MIMO channel capacity’s increase with antenna number

It is well known that adding more antennas at the transmitter or at the receiver may offer larger channel capacity in the multiple-input multiple-output（MIMO） communication systems. In this letter, a simple proof is presented for the fact that the channel capacity increases with an increase in the number of receiving antennas. The proof is based on the famous capacity formula of Foschini and Gans with matrix theory.     

Call for Papers

正Wireless Body-area Networks The last decade has witnessed the convergence of three giant worlds:electronics,computer science and telecommunications.The next decade should follow this convergence in most of our activities with the generalization of sensor networks.In particular with the progress in medicine,people live longer and the aging of population will push the development of wireless personal networks