共查询到20条相似文献,搜索用时 93 毫秒
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《微纳电子技术》1986,(6)
研制和测试了K波段频率范围的微波高电子迁移率晶体管(HEMT)。这种HEMT具有选择低掺杂(AlGa)As/GaAs/(AlGa)As双异质结的独特结构,它可同时获得大电流密度和高的栅击穿电压。这种结构在室温下电子迁移率达6800cm~2/V.s,二维(2-D)电子密度高达1.2×10~(12)cm~(-2)。橱长为1μm,总栅宽为1.2mm的器件,在20GHz下输出功率达660mW(550mW/mm),相关增益为3.2dB,功率附加效率为19.3%。栅宽为2.4mm的同样器件得到1W的输出功率,3dB的增益以及15.5%的效率。这些结果表明了双异质结HEMT(DH-HEMT)的微波大功率的能力。 相似文献
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报道了研制的AlGaN/GaN微波功率HEMT,该器件采用以蓝宝石为衬底的非掺杂AlGaN/GaN异质结构,器件工艺采用了Ti/Al/Ni/Au欧姆接触和Ni/Au肖特基势垒接触以及SiN介质进行器件的钝化.研制的200μm栅宽T型布局AlGaN/GaN HEMT在1.8GHz,Vds=30V时输出功率为28.93dBm,输出功率密度达到3.9W/mm,功率增益为15.59dB,功率附加效率(PAE)为48.3%.在6.2GHz,Vds=25V时该器件输出功率为27.06dBm,输出功率密度为2.5W/mm,功率增益为10.24dB,PAE为35.2%. 相似文献
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X波段GaN单片电路低噪声放大器 总被引:1,自引:1,他引:0
采用0.25μm GaN HEMT制备工艺在AlGaN/GaN异质结材料上研制了高性能X波段GaN单片电路低噪声放大器.GaN低噪声单片电路采取两级微带线结构,10V偏压下芯片在X波段范围内获得了低于2.2 dB的噪声系数,增益达到18 dB以上,耐受功率达到了27 dBm.在耐受功率测试中发现GaN低噪声HEMT器件... 相似文献
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作为制备光电子器件例如紫外光子探测器、异质结场效应晶体管(HFET)、高电子迁移率晶体管(HEMT)异质结场效应管等的一种宽禁带半导体材料, III V 族氮化物AlGaN器件近年来颇受关注.AlGaN与金属之间的低阻欧姆接触的实现问题阻碍了AlGaN(基)器件的发展.通过对相关文献的归纳分析,介绍了近年来AlGaN器件在欧姆接触形成、金属化方案、合金化工艺及表面处理等方面的研究进展. 相似文献
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基于标准工艺自主研制了L波段0.5μm栅长的GaN HEMT器件。该器件采用了利用MOCVD技术在3英寸(1英寸=2.54 cm)SiC衬底上生长的AlGaN/GaN异质结外延材料,通过欧姆接触工艺的改进将欧姆接触电阻值控制在了0.4Ω·mm以内,采用场板技术提高了器件击穿电压,采用高选择比的刻蚀工艺得到了一定倾角的通孔,提高了器件的散热能力及增益。结果表明,采用该技术研制的两胞内匹配GaN HEMT器件在工作频率1.5~1.6 GHz下,实现了输出功率大于66 W、功率增益大于15.2 dB、功率附加效率大于62.2%。 相似文献
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An AlGaAs/InGaAs/GaAs quantum-well MISFET developed for power operation at millimeter-wave frequencies is described. The InGaAs channel is heavily doped to increase the sheet carrier density, resulting in a maximum current density of 700 mA/mm with a transconductance of 480 mS/mm. The 0.25-μm×50-μm device delivers a power density of 0.76 W/mm with 3.6-dB gain and 19% power-added efficiency at 60 GHz. At 5.2 dB gain, the power density is 0.55 W/mm. A similar device built on an undoped InGaAs channel had much poorer power performance and no speed advantage 相似文献
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GaAs单片集成电路具有体积小、质量轻和可靠性高等特性,已经成为微波领域重要的器件。采用MBE技术生长出双面掺杂AlGaAs/InGaAs PHEMT结构的外延材料,研制了高效率的GaAs PHEMT器件,S波段功率附加效率大于55%。建立了基于EEHEMT的大信号模型,利用ADS软件搭建了有耗匹配的二级放大电路拓扑结构,进行最佳效率匹配,得到优化电路。采用4英寸(1英寸=2.54cm)GaAs0.35μm标准工艺研制了AlGaAs/InGaAs/GaAsPHEMT MMIC电路,测试结果表明,在测试频率为2.2~3.4GHz,测试电压VDS为10V时,输出功率大于12W,功率增益大于22dB,功率附加效率大于40%。 相似文献
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The current-gain cutoff frequency performance of pseudomorphic InGaAs/AlGaAs (20% InAs composition) high-electron-mobility transistors (HEMTs) on GaAs is compared to that of lattice-matched InGaAs/InAlAs HEMTs on InP. The current-gain cutoff frequency (f t) characteristics as a function of gate length (L g) indicate that the f t-L g product of ~26 GHz-μm in InGaAs/InAlAs HEMTs is 23% higher than that of ~21 GHz-μm in InGaAs/AlGaAs HEMTs. The performance of InGaAs/AlGaAs HEMTs is also 46% higher than that of conventional GaAs/AlGaAs HEMTs (~18 GHz-μm). These data are very useful in improving the device performance of HEMTs for a given gate length 相似文献
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《Electron Device Letters, IEEE》1987,8(10):489-491
AlGaAs/InGaAs/GaAs pseudomorphic high electron mobility transistors (HEMT's) with a gate length of 0.1 µm have been successfully fabricated. The HEMT's exhibit a maximum transconductance of 540 mS/mm with excellent pinch-off characteristics. A maximum stable gain (MSG) as high as 18.2 dB was measured at 18 GHz. At 60 GHz the device has demonstrated a minimum noise figure of 2.4 dB with an associated gain of ∼6 dB. These are the best gain and noise results reported to date for HEMT's. 相似文献
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Jin-Hee Lee Hyung-Sup Yoon Chul-Soon Park Hyung-Moo Park 《Electron Device Letters, IEEE》1995,16(6):271-273
The fully passivated low noise AlGaAs/InGaAs/GaAs pseudomorphic (PM) HEMT with 0.13 μm T-shaped gate was fabricated using dose split electron beam lithography method (DSM). This device exhibited low noise figures of 0.31 and 0.45 dB at 12 and 18 GHz, respectively. These noise figures are the lowest value ever reported for the GaAs based HEMT's. These results are attributed to the extremely low gate resistance which results from wide head T-shaped gate having the higher ratio more than 10 of gate head length to gate footprint 相似文献
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AlGaAs/InGaAs/GaAs P-n-p heterojunction bipolar transistors (HBTs) have been fabricated using a dual selective etch process. In this process, a thin AlGaAs surface passivation layer surrounding the emitter is defined by selective etching of the GaAs cap layer. The InGaAs base is then exposed by selective etching of the AlGaAs emitter. The resulting devices were very uniform, with current gain varying by less than ±10% for a given device size. Current gain at a given emitter current density was independent of device size, with gains of over 200 obtained at current densities above 5×104 A/cm 2 相似文献
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Tanaka S. Hayama H. Furukawa A. Baba T. Mizuta M. Honjo K. 《Electronics letters》1990,26(18):1439-1441
The first measurement of low-frequency noise performance for self-aligned InAlAs/InGaAs HBTs is reported. The 1/f noise obtained was around 20 dB lower than that for AlGaAs/GaAs HBTs at a fixed frequency, which is considered to be caused by the low surface recombination velocity of InGaAs.<> 相似文献
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The authors report on advanced ion implantation GaAs MESFET technology using a 0.25-μm `T ' gate for super-low-noise microwave and millimeter-wave IC applications. The 0.25×200-μm-gate GaAs MESFETs achieved 0.56-dB noise figure with 13.1-dB associated gain at 50% I DSS and 0.6 dB noise figure with 16.5-dB associated gain at 100% I DSS at a measured frequency of 10 GHz. The measured noise figure is comparable to the best noise performance of AlGaAs/GaAs HEMTs and AlGaAs/InGaAs/GaAs pseudomorphic HEMTs 相似文献
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用低压MOCVD(LP-MOCVD)生长三种不同的InGaAs/GaAs应变层量子阱材料,其中两种含AlGaAs限制层。结果表明,AlGaAs限制层对量子阱的发光强度影响很大,与没有AlGaAs限制层的结果相比,带AlGaAs限制层的结构的发光强度要强一个数量级以上。在低温(18K)PL光谱图中,我们看到,除了存在主峰以外,在主峰两侧还各有一个子峰,这些子峰可能与量子阱的质量有关。 相似文献