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1.
窦雁巍  胡明  崔梦  宗杨 《功能材料》2006,37(3):395-398
以电化学方法制备了多孔硅材料并通过表面轮廓测试仪、原子力显微镜、显微拉曼光谱仪等设备对制备多孔硅的孔隙率、厚度、表面形貌、以及热导率进行了表征.结果发现,本实验制备的多孔硅属于介孔硅(15~20nm),其孔隙率随腐蚀时间和腐蚀电流的变化有先增大后减小的趋势.增加多孔硅的厚度和孔隙率,可以使得多孔硅的热导率显著降低(最低可低至0.62W/m·K).  相似文献   

2.
用电化学腐蚀法制备了具有不同导热系数的多孔硅样品(孔隙率为80%±2、厚度为110μm时,导热系数可降低至0.20 W/m·K),并在其表面沉积了氧化钒热敏薄膜,研究了多孔硅样品的热绝缘性能对氧化钒热敏薄膜阻温特性的影响.结果表明:多孔硅良好的热绝缘性使在其表面制备的氧化钒热敏薄膜电阻的灵敏度远高于在硅基底上制备的热敏电阻的(多孔硅和硅片上的氧化钒薄膜电阻随功率变化斜率分别为120 kΩ/μW和2.1 kΩ/μW),且热敏电阻的灵敏度随着多孔硅孔隙率和厚度的增大而升高.  相似文献   

3.
利用原电池法在硅片表面制备了纳米多孔硅层;用扫描电镜SEM和原子力显微镜AFM观察了多孔硅表面形貌:原电池法与电化学法得到的多孔硅孔径均在10~20nm范围.研究结果表明:铂膜电极厚度的增大以及铂膜电极与暴露硅片面积比的增大,会导致多孔硅层的厚度增大.热学模拟结果表明:以纳米多孔硅作为绝热层可获得与悬浮结构相同的效果.  相似文献   

4.
多孔硅层孔隙率对其热绝缘性能的影响   总被引:1,自引:1,他引:0  
研究了多孔硅层孔隙率对其热绝缘性能的影响机制.以P 型硅片为基底,通过双槽电化学腐蚀法制备多孔硅.采用微拉曼光谱法对多孔硅的热导系数进行了测量,结果表明,多孔硅的热导系数随其孔隙率的增大而明显下降,实验中热导系数最低可达到0.624W/(m·K),从而通过降低热导系数使多孔硅的绝热性能得到了增强.  相似文献   

5.
开发一种工艺简单、重复性好、孔形孔径易控制、制取成本低的铜基多孔材料制备工艺是当前的研究热点之一.本文以青铜粉为原料,K_2CO_3为造孔剂,采用烧结溶解法制备多孔青铜过滤片,研究了造孔剂、烧结温度对样品孔隙率的影响,分析了烧结温度、压制压力对样品最大孔径和透气系数的影响,以及孔隙率与抗压强度的关系.研究结果表明:当造孔剂体积分数为20%~40%时,所制备样品的孔隙率为22.8%~44.4%,开孔孔隙率为18.5%~37.2%;随着烧结温度的升高,样品孔隙率和透气系数下降;随着压制压力增加,最大孔径和透气系数均减小;随着样品孔隙率增大,抗压强度减小.当选择造孔剂体积分数30%、压制压力150 MPa、烧结温度800℃的工艺参数下,制备出孔隙率32.2%、最大孔径4.6μm、透气系数9.27 m~3/(h·k Pa·m~2)、压缩强度27.9 MPa的多孔青铜过滤片.  相似文献   

6.
多孔硅在高温退火过程中结构变化的研究   总被引:1,自引:0,他引:1  
采用电化学腐蚀的方法制备了不同孔径的多孔硅薄膜样品,并在1050℃高温下进行了退火。采用扫描电镜和拉曼光谱对多孔硅退火前后结构的变化进行了观察,根据晶体形核理论分析了孔径变化的机理,并从热力学角度对其微观机制进行了讨论。实验和理论分析的结果均表明,多孔硅的初始孔径存在一个临界值,初始孔径小于此临界值时,孔在高温退火中有收缩的趋势;反之,初始孔径大于此临界值时,孔有变大的趋势。  相似文献   

7.
利用电化学方法制备了多孔硅,利用显微拉曼光谱法测量多孔硅样品的热导率和多孔硅中的残余应力,利用纳米压入测量仪测量多孔硅显微硬度与弹性模量.研究了多孔硅绝热性能和力学性能与微观结构的关系,认为通过控制制备条件可以得到绝热性能和力学性能满足MEMS热敏传感器结构性能要求的多孔硅.  相似文献   

8.
通过模压法成功制备轻质多孔陶瓷吸声材料, 采用JTZB吸声系数测试系统研究造孔剂粒径、含量以及样品厚度对多孔陶瓷材料吸声性能的影响。结果表明: 造孔剂含量为50vol%时, 大孔径多孔陶瓷吸声性能优于小孔径多孔陶瓷; 随着造孔剂含量的增加, 第一吸收峰从低频向高频移动, 峰值从0.41增加到0.82, 孔隙率过高和过低都不利于提高材料吸声性能; 样品厚度从10 mm增加到30 mm, 第一吸收峰逐渐向着低频方向移动; 造孔剂含量为60vol%, 样品厚度为20 mm时, 样品整体具有优异吸声性能, 并逐层在其背后加入空腔发现, 随着空腔层数的增加, 样品的第一吸收峰从高频向低频移动, 平均吸声系数逐渐增大。  相似文献   

9.
应用于微电子机械系统中多孔硅的研究   总被引:3,自引:0,他引:3  
崔梦  胡明  雷振坤  窦雁威  田斌 《功能材料》2004,35(Z1):1728-1730
针对多孔硅在MEMS中作为牺牲层和绝热层的应用,主要研究了电化学腐蚀法制备多孔硅的实验条件与多孔硅深度及其孔隙率间的关系,实验发现电化学腐蚀法制备多孔硅的腐蚀速率在腐蚀前期阶段基本是一定值(电流密度为80mA/cm2时为1.3μm/min,电流密度为40 mA/cm2时为0.4μm/min),但到腐蚀后期阶段随着孔深的增加有所下降.同时发现对于不同的腐蚀电流密度,多孔硅的孔隙率都有随腐蚀时间的延长先增加后降低的趋势,用Beale模型可以很好的解释这一现象.最后,针对多孔硅在制备后易发生龟裂的现象,用拉曼光谱分析了多孔硅的内部应力情况,结果表明随多孔硅孔隙率的上升其内部残余应力有增加的趋势.  相似文献   

10.
采用正交实验,直流电化学腐蚀法制备多孔硅。用原子力显微镜对表面进行观察,研究电化学腐蚀参数对其表面形貌的影响。氢氟酸浓度(CHF)升高,使临界电流密度(JPS)增大,有利于多孔硅的形成。电流密度(J)增大,多孔硅的孔隙率和孔径随之变大,而其纳米粒径将变小。腐蚀时间(t)越长,孔径越大,孔越深。  相似文献   

11.
In this paper, we present a new method for inserting several triangulated surfaces into an existing tetrahedral mesh generated by the meccano method. The result is a conformal mesh where each inserted surface is approximated by a set of faces of the final tetrahedral mesh. First, the tetrahedral mesh is refined around the inserted surfaces to capture their geometric features. Second, each immersed surface is approximated by a set of faces from the tetrahedral mesh. Third, following a novel approach, the nodes of the approximated surfaces are mapped to the corresponding immersed surface. Fourth, we untangle and smooth the mesh by optimizing a regularized shape distortion measure for tetrahedral elements in which we move all the nodes of the mesh, restricting the movement of the edge and surface nodes along the corresponding entity they belong to. The refining process allows approximating the immersed surface for any initial meccano tetrahedral mesh. Moreover, the proposed projection method avoids computational expensive geometric projections. Finally, the applied simultaneous untangling and smoothing process delivers a high‐quality mesh and ensures that the immersed surfaces are interpolated. Several examples are presented to assess the properties of the proposed method.  相似文献   

12.
Standards are the basis for production enterprises to organize production, ex-factory inspection, trade (delivery) and technical exchanges, product certification, quality arbitration and supervision.……  相似文献   

13.
14.
A flow calorimeter for enthalpy increment measurements on condensed gases is presented. A better knowledge of the properties of the liquefied natural gas is needed, and therefore a liquid loop has been designed for our flow calorimeter. The fluid loop in the calorimeter is designed in order to avoid the two-phase region, since two phases would give compositional disturbances in the measurements. The avoidance of the two-phase region is made possible by increasing the pressure of the test fluid after the measurement section, then heating the fluid at super-critical pressure past the critical point. Finally, the fluid is throttled to the low-pressure gas state at the inlet condition of the compressor that circulates the fluid. To perform the pressure increase, a new cryogenic pump has been designed. To evaluate the new equipment, measurements were taken on liquid ethane over the temperature range 146–256 K at pressure between 0.9 and 5.1 MPa.  相似文献   

15.
On November 30, 2007, the China Association for Standardization (CAS) held a press conference at Beijing Diaoyutai State Guest House. Leaders from the China Household Electric Appliance Research Institute, the China Household Electric Appliance Association, and the China Consumers' Association attended and made speeches.……  相似文献   

16.
Zusammenfassung Bei der Gestaltung von Ernteprozessen — beispielsweise des Prozesses Mähdrusch, Körnertransport und -abnahme — als transportverbundene Fließarbeitsverfahren mit mindestens zwei verschiedenen Arbeitsmitteln gibt es einen großen Optimierungsspielraum. Solche Prozesse sind mehrstufige Bedienungsprozesse mit gemischter Anordnung der Bedienungseinrichtungen. Außerdem besitzen sie stark ausgeprägte räumliche Aspekte. Es wird vor allem gezeigt, welche Merkmale solcher Prozesse in Simulationsmodellen abgebildet sein müssen, welche Zielgrößen in Abhängigkeit von welchen Einflußgrößen unter Berücksichtigung welcher Prozeßbedingungen ermittelt werden sollten und wie der Bewertungsprozeß zur Ermittlung der gewünschten Informationen gestaltet werden muß.  相似文献   

17.
In the present study a high‐boron high speed steel (HSS) roll material was designed. Many expensive alloy elements have been substituted by cheap boron alloy, and high‐boron high speed steel roll has been manufactured by centrifugal casting method. The microstructures, mechanical properties and wear resistance of centrifugal casting high‐boron high speed steel roll have been investigated by optical microscopy (OM), scanning electron microscopy (SEM), and X‐ray diffraction (XRD) analysis, hardness test, impact test and wear test. The results indicated that the solidification microstructures of high‐boron high speed steel roll consisted of M2(B,C), (W,Mo)2(B,C), M3(B,C), M23(B,C)6 type borocarbides and martensite, a small amount of retained austenite. Borocarbides were continuously distributed over the grain boundary. After quenching from 1050 °C, local broken network appeared in partial borocarbides, and fine secondary borocarbide precipitated from the matrix. After tempering from 525 °C, the amount of precipitated borocarbide increased significantly. After heat treatment, the hardness of high‐boron high speed steel roll excelled 60 HRC, and its impact toughness excelled 8.0 J/cm2. The single groove steel rolling amount of high‐boron high speed steel rolls increases by 500% than that of bainite cast iron roll, when the rolls are used in K1 mill housing of bar mill.  相似文献   

18.
正Responding to ISO’s appeal for survey for the to-be-developed ISO Strategy Plan for 2016-2020,SAC hosted a special workshop over the needs and comments of various fi elds on June 8 in Beijing.The workshop was attended by ISO President-elect and Ansteel General Manager Zhang Xiaogang,SAC Vice-Administrator Yu Xinli,and 30 experts from  相似文献   

19.
正The review group of Asia Pacific Laboratory Accreditation Cooperation(APLAC)carried out a 4-day peer review of the proficiency testing provider(PTP)for China National Accreditation Service for Conformity Assessment(CNAS)from July 28 to 31,2014.CNAS passed the PTP review with excellent performance.Two senior peer reviewers of APLAC made a comprehensive,rigorous and detailed review of CNAS’s PTP accreditation activities,and made the on-spot inspection of the review groups in Shanghai and Shenzhen respectively.  相似文献   

20.
新闻(英文)     
正China and Greece Sign the Standardization Cooperation Agreement Witnessed by Chinese Premier Li Keqiang and Greek Prime Minister Antonis Samaras,AQSIQ Minister Zhi Shuping and ELOT Chairman and Executive Director Angelos Tolkas signed the SAC-ELOT Standardization Cooperation Agreement.The Agreement is one of the critical cooperation documents signed during Li Keqiang’s visit in Greece,encouraging China and Greece to  相似文献   

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