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Interfacial surfaces with hierarchical structures have triggered intense research interest and been used in a broad range of applications ranging from anti-icing, anti-fogging, surface-enhanced Raman spectroscopy to catalytic reaction. However, the high-cost manufacturing processes and the limited durability remain as great challenges that need to be addressed, especially for superhydrophobicity. In this work, a novel hybrid approach for stretchable, transparent, and robust superhydrophobic surfaces is proposed, constructing micro-pyramid architectures with tunable hierarchical wrinkles efficiently and in an environmentally friendly manner. Due to the multiscale structures, excellent superhydrophobicity is obtained with contact angle of ≈172° and sliding angle ≈5° in a steady “Lotus” state. Further, the wear resistance and stability tests also suggest a superior performance under simulated severe real-world applications. Utilizing such multiscale synergistic co-operation effects can be an excellent manufacturing strategy and be extended to other surface engineering where hierarchical architectures are needed.  相似文献   

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A novel interfacial energy driven colloidal lithography technique to fabricate periodic patterns from solution‐phase is presented and the feasibility and versatility of the technique is demonstrated by fabricating periodically arranged ZnO nanowire ensembles on Si substrates. The pattern fabrication method exploits different interfaces formed by sol–gel derived ZnO seed solution on a hydrophobic Si surface covered by a monolayer of colloidal silica spheres. While the hydrophobic Si surface prevents wetting by the seed solution, the wedge shaped regions surrounding the contact point between the colloidal particles and the Si substrate trap the solution due to interfacial forces. This technique allows fabrication of uniform 2D micropatterns of ZnO seed particles on the Si substrate. A hydrothermal technique is then used to grow well‐defined periodic assemblies of ZnO nanowires. Tunability is demonstrated in the dimensions of the patterns by using silica spheres with different diameters. The experimental data show that the periodic ZnO nanowire assembly suppresses the total reflectivity of bare Si by more than a factor of 2 in the wavelength range 400–1300 nm. Finite‐difference time‐domain simulations of the wavelength‐dependent reflectivity show good qualitative agreement with the experiments. The demonstrated method is also applicable for other materials synthesized by solution chemistry.  相似文献   

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Vulnerable robustness of superhydrophobic materials have mightily hindered their practical applications. Herein, a controllable and effective strategy is demonstrated for constructing robust superhydrophobicity with aqueous hydrophobic interaction driving self-assembly (HIDS), using polydopamine (PDA) as the binder and SiO2 particles as the nano-sized structures to enable low-adhesive property. The proposed strategy realizes the rapid interfacial assembly of PDA by manipulating the wetting properties of SiO2@PDA core-shell particles with hydrophobic modifier. The polyurethane (PU) sponges are facilely rendered superhydrophobic with remarkable robustness, stemming from the excellent adherence of HIDS enhanced covalent interaction between PDA and PU. Coated sponge possesses ultralong-term stability during the oil-water separation, the separation efficiency can be maintained at 98.8% even after 1000 cycle separations and strikingly, superhydrophobicity is still retained after 100 cycle abrasion with ultrahigh loading pressure of 49 kPa. Versatilely, the coatings can be assembled on various substrates through scalable dip coating for attaining superhydrophobicity, regardless of size, roughness, chemistry, and rigidity. The complete water-repellent coatings on permanent magnet of Nd-Fe-B hold excellent anti-corrosion properties without deteriorating the magnetic properties, exhibiting a low corrosion current density of 2.03 × 10−8 A cm−2, which is three orders of magnitude lower than that of 1.30 × 10−5 A cm−2 for bare Nd-Fe-B magnet.  相似文献   

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纳米器件的一种新制造工艺——纳米压印术   总被引:5,自引:1,他引:5  
纳米压印术可以用于大批量重复性地制备纳米图形结构。此项技术具有操作简单、分辨率高、重复性好、费时少,成本费用极低等优点。本文介绍了较早出现的软刻印术的两种方法———微接触印刷法和毛细管微模制法。详细讲述了纳米压印术(主要指热压雕版压印法)的各步工序———压模制备、压印过程和图形转移,以及用于压印的设备、纳米图案所达到的精确度等,还简述了纳米压印术的另一方法———步进-闪光压印法。最后,通过范例介绍了纳米压印术在制作电子器件、CD存储器和磁存储器、光电器件和光学器件、生物芯片和微流体器件等方面的应用。  相似文献   

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软印刷技术     
软印刷技术是基于弹性体印章/模具来转移图形结构的微纳加工技术。详细介绍了软印刷技术中转移图形结构的多种方式,并探讨软印刷技术在微纳电子学、光学、传感器、生物等领域的广泛应用。对软印刷技术的弹性体印章/模具制备、聚二甲基硅氧烷的属性、理论研究等进行了探讨。  相似文献   

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A novel smart stimuli responsive surface can be fabricated by the subsequent self‐assembly of the graphene monolayer and the TiO2 nanofilm on various substrates, that is, fabrics, Si wafers, and polymer thin films. Multiscale application property can be achieved from the interfacial interaction between the hierarchical graphene/TiO2 surface structure and the underlying substrate. The smart surface possesses superhydrophobic property as a result of its hierarchical micro‐ to nanoscale structural roughness. Upon manipulating the UV induced hydrophilic conversion of TiO2 on graphene/TiO2 surface, smart surface features, such as tunable adhesiveness, wettability, and directional water transport, can be easily obtained. The existence of graphene indeed enhances the electron–hole pair separation efficiency of the photo‐active TiO2, as the time required for the TiO2 superhydrophilic conversion is largely reduced. Multifunctional characteristics, such as gas sensing, droplet manipulation, and self‐cleaning, are achieved on the smart surface as a result of its robust superhydrophobicity, tunable wettability, and high photo‐catalytic activity. It is also revealed that the superhydrophilic conversion of TiO2 is possibly caused by the atomic rearrangement of TiO2 under UV radiation, as a structural transformation from {101} to {001} is observed after the UV treatment.  相似文献   

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郭玉彬 《中国激光》1996,23(9):796-800
描述了用高功率脉冲激光打靶产生的等离子体作为软X射线源而进行的接近式软X射线光刻研究。采用正性光刻胶PMMA.得到了一些新的研究结果.  相似文献   

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In nano‐biotechnology, optoelectronics, and energy research areas, various fabrication methods have been developed for hybrid nanoparticles. A method is developed here for fabricating highly monodisperse three‐dimensional hybrid nanoparticles using a unique top‐down method based on secondary sputtering lithography. Nanostructures that have been formed on a PEDOT sacrificial layer are transferred from the substrate to an aqueous solution in a process that could be used to successfully disperse a variety of nanoparticle shapes and hybrid nanoparticles. By this method, a fluorescent dye could be encapsulated within the fabricated hybrid nanoparticles for use in bio‐sensing and drug‐delivery applications  相似文献   

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王智浩  刘文  王磊  左强  赵彦立 《半导体学报》2012,33(10):106002-4
纳米压印技术由于其分辨率高、工艺成本低以及适于大规模工业化生产的优点被广泛利用于纳米尺度的半导体器件的制作之中。然而,传统的硬模板压印技术存在着模板寿命短、大面积均匀性差以及易受颗粒影响的缺点。本文提出了一种高分子聚合物软模板(IPS)压印的方法来改进以上缺点,同时,本文提出在软模板制作和后续的紫外压印中采用变温变压阶梯升降压的方法来提高压印过程中胶的流动性,以提高压印图形的质量。最后,我们利用这种方法方法出了高质量的50纳米线宽的光栅图形。  相似文献   

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电子束光刻制造软刻蚀用母板的研究   总被引:1,自引:0,他引:1  
使用通用电子束曝光机,采用一种新的电子束微三维加工的重复增量扫描方式进行曝光实验,显影后得到轮廓清晰的微三维结构,以此为制作弹性印章的母模板,经硅烷化后可用来制作弹性印章,得到弹性印章后便可再利用软刻蚀相关技术进行微图形的复制.曝光实验的结论表明采用电子束重复增量扫描方式可用来制作微三维弹性印章的母版.  相似文献   

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Fog formation decreases light transmission of optically clear materials. A promising approach to address this problem is to control the wetting properties of the material at extremes states, which requires imparting micro and nano morphology features on the surface. However, such features may affect the optical properties of the surface. In this work, superhydrophobic and superhydrophilic surfaces, with different morphology characteristics ranging from nanoscale to hierarchical micro-nanoscale are fabricated and evaluated in order to investigate which wetting extreme and surface morphology is more suitable to preserve the light-transmitting properties and exhibit antifogging functionalities. The performance of the aforementioned surfaces is compared for the first time in two different testing modes: under intense fog flow and no surface cooling, and under no-flow and surface cooling, which enhances dew condensation on the surfaces. It is demonstrated that superhydrophilic surfaces with nanoscale morphology maintain their optical transmittance under fog flow for more than 20 min. This duration is one of the longest reported in the literature revealing the long-term antifogging functionality of the proposed surfaces. Finally, by tailoring the morphology and the surface wetting properties, an optically switching surface (initially “milky” which becomes “clear”) when exposed to humidity is demonstrated.  相似文献   

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用于微流控芯片的PDMS微混合器工艺和数值分析   总被引:1,自引:0,他引:1  
介绍了一种用软光刻技术制作微流芯片上PDMS微混合器的工艺。首先用SU-8胶制作微模具,然后用复制压模法制作出PDMS微通道,最后用紫外光表面改性实现PDMS材料和玻璃基片的键合。阐述了微混合的机理,用数值分析方法对三种形状微混合器进行了液体混合效率的分析,结果表明,弯形管道特别是Z形管道,由于惯性力在横截面上产生的二次流动能有效增大液体间的微混合面积,因而大大提高了液体混合的效率。  相似文献   

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脉冲软X射线源及光刻的初步研究   总被引:2,自引:1,他引:1  
喷气式Z箍缩等离子体装置产生的软X射线,波长大约在0.2~0.6um之间,一次放电产生的软X射线能量约50J。本文利用此软X射线源,用金属丝网作为掩模,对CSM光刻胶进行了曝光的初步实验研究,得到了较为清晰的曝光图形。  相似文献   

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烘焙工艺条件对厚胶光刻面形的影响   总被引:5,自引:1,他引:5  
采用厚层正性光刻胶AZ P4620进行光刻实验,考察了在前烘和坚膜阶段不同的工艺参数条件下的光刻胶浮雕面形的变化.实验表明,完全显影后光刻胶的浮雕面形受前烘工艺参数的影响很小,但其显影速率有一定差别;当坚膜烘焙后,不同前烘条件下的浮雕面形差别较大;当前烘条件相同时,坚膜参数的变化对光刻胶的浮雕面形影响较大.由此得出,在前烘阶段应采取较高温度、较短时间的烘焙,而在坚膜阶段应采取较低温度、较长时间的烘焙,这样可提高厚胶光刻面形的质量.  相似文献   

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软X射线投影光刻能够制作出特征线宽小于0.1μm的线条。激光等离子作源的研究是软X射线投影光刻中几项关键技术之一。本文报道了13nm投影光刻用激光等离子体软X射线源。对Sn(Z=50)靶的激光打靶条件进行初步优化,测定了其在10~20nm波段范围内的辐射相对强度分布。  相似文献   

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Flexible smart surfaces with tunable wettability are promising for emerging wearable uses. However, currently, wearable superhydrophobic surfaces with dynamic wetting behaviors are rarely reported. Here, a skin‐like superhydrophobic elastomer surface with switchable lotus leaf and rose petal states is reported. Direct laser writing technique is employed for one‐step, programmable, large‐scale fabrication of monolithic and hierarchical micro‐nanostructures on elastomer, leading to strong water repellence. The surface topography can be finely regulated in a rapid and reversible manner by simple stretching, providing the feasibility of controlling the surface wettability by simple body motions. The ability to switch wetting states enables the surface to capture and release multiple droplets in parallel. Furthermore, the active surface can be applied to the joints of fingers and operate as a droplet manipulator under finger motions without requiring energy supply or external appliance. In this work, dynamic tuning of wetting properties is integrated into the design of skin‐like wearable surfaces, revealing great potential in versatile applications such as wearable droplet manipulator, portable actuator, adaptive adhesion control, liquid repellent skin, and smart clothing.  相似文献   

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