首页 | 本学科首页   官方微博 | 高级检索  
相似文献
 共查询到20条相似文献,搜索用时 78 毫秒
1.
在不同温度衬底上射频磁控溅射沉积ZrO2-12wt%Y2O3薄膜进行了不同方式的退火后处理。其一为1000℃大气气氛下的热退火处理,其二为高真空渗氧条件下的电子束退火处理。退火前后的相结构和显微形貌的研究表明,退火前的沉积膜相组成与沉积过程中衬底温度有关,退火后的沉积膜相组成与退火方式有关,其形貌特征经不同形式退火显示出明显的差别。  相似文献   

2.
用射频磁控溅射Ga2O3陶瓷靶材和直流磁控溅射ITO靶材在石英玻璃衬底制备Ga2O3/ITO周期多层膜。样品在300~800℃真空退火1小时,研究退火温度对薄膜光学和电学性能的影响。400℃退火的Ga2O3/ITO周期多层膜面电阻和电阻率低至68.76Ω/□和3.47×10-3Ω·cm,载流子浓度和霍尔迁移率高达1.30×1020cm-3和14.02cm2 V-1s-1。退火温度超过500℃后,Ga2O3膜层和ITO膜层之间开始相互扩散,薄膜结晶质量和导电性变差。所有退火薄膜在紫外-可见光范围的平均光学透过率高于83%,光学带边吸收随退火温度增加发生蓝移,光学带隙从4.59eV增加到4.78eV。  相似文献   

3.
采用电子束蒸镀在ITO上沉积Hf O2,研究了不同退火工艺对其电学性能的影响。当450℃时O2退火,Hf O2的漏电迅速增加,通过X射线衍射发现Hf O2有单斜相等结晶生成。450℃下N2退火,Hf O2结构则没有明显晶体和晶界结构,且N2气氛退火的Hf O2漏电约为O2气氛退火的1/10。  相似文献   

4.
铟锡氧化物陶瓷靶的制备   总被引:1,自引:0,他引:1  
研究了铟锡氧化物(ITO)粉末退火后的组织和结构,比较了不同状态的粉末和制备工艺对ITO靶材的影响.结果表明,纳米ITO粉末在800℃以下具有体心立方In2O3结构,1100℃退火后由In2O3和SnO2两相组成;ITO粉末经过喷雾造粒后,形成了实心球形颗粒并具有合理的颗粒级配,通过气氛烧结可以制备出高密度优良的ITO...  相似文献   

5.
采用共沉淀法合成了高质量的ITO纳米颗粒,研究了H_2退火对ITO结构及能带的影响。通过扫描电子显微镜对ITO颗粒的形貌进行分析,发现其颗粒尺寸均匀;采用傅里叶变换红外光谱分析退火前后ITO中化学键的类型,发现退火之后In-O键的振动峰减弱,这是ITO颗粒表面氧溢出并形成In-Sn合金所致;同时X射线衍射曲线在退火前后并未发生变化,表明ITO纳米颗粒主体的晶体结构并没有发生改变;通过H_2气氛下退火后样品的吸收光谱可以看出,随着退火温度的升高,ITO的带隙逐渐增大,这是由表面的In-Sn合金所引起的。  相似文献   

6.
RF磁控溅射法制备ZnO薄膜的XRD分析   总被引:10,自引:0,他引:10  
采用RF磁控溅射法,在玻璃村底上制备多晶ZnO薄膜,并对所制备的ZnO薄膜在空气气氛中进行了不同温度(350~600℃)的退火处理和600℃时N2气氛中的退火处理。利用X射线衍射分析了溅射参数如溅射功率、溅射氧分压、衬底温度以及退火处理对ZnO薄膜结晶性能的影响。结果表明,合适的衬底温度和退火处理能够提高ZnO薄膜的结晶质量。  相似文献   

7.
退火对有序孔洞氧化铝膜荧光性能的影响   总被引:1,自引:0,他引:1  
用阳极氧化法在草酸溶液或硫酸溶液中制备了有序阵列孔洞的氧化铝膜.研究了在不同温度下、不同气氛中退火对多孔氧化铝膜荧光性能的影响.结果表明,随着退火温度的升高,发光带的强度也随之增强;与此同时,发光带的峰位出现蓝移.当退火温度T=500℃时,在草酸中制备的氧化铝膜的发光强度最强;而在硫酸中制备的膜,其发光最强的退火温度为400℃.当 T≤400℃时,氧化铝膜的发光强度基本上与退火气氛无关;当 T=500℃时,在草酸中制备的膜在空气中退火后的发光强度高于在真空中退火后的发光强度.在草酸中制备的氧化铝膜的发光带明显比在硫酸中制备的膜强得多.电子自旋共振的实验结果表明,蓝光发光带来自多孔氧化铝膜中的F心.我们还对多孔氧化铝膜发光特性的机制进行探讨.  相似文献   

8.
采用磁控溅射法在Si(111)衬底上直接淀积GaN薄膜。通过X射线衍射谱(XRD)、X光电子能谱(XPS)和扫描电子显微镜(SEM)研究GaN薄膜由非晶态向多晶态的转化过程。实验结果表明:(1)在900℃氮气气氛中退火,非晶态GaN保持不变;(2)在900℃氨气气氛中退火,虽然非晶态GaN转化为多晶态GaN,但却出现中间相金属Ga;(3)在非晶态GaN向多晶态GaN转化过程中,GaN晶粒将逐渐增大。  相似文献   

9.
退火气氛与扩散阻挡层对Cu膜表面完整性的影响   总被引:1,自引:0,他引:1  
用反应磁控溅射和离子束辅助沉积(IBAD)方法分别在(111)单晶硅基体上沉积了Cu/ZrSiN与Cu/ZrN膜系,制得的试样在800℃下分别在真空和N2、H2混合气体两种气氛中退火lh。结果表明,在真空中退火的Cu/ZrSiN膜由于ZrSiN膜裂纹导致Cu膜裂纹的产生:ZrSiN和ZrN扩散阻挡层上的Cu膜还有很多由晶界迁移导致的孔洞。在氮氢混合气体中退火时ZrSiN扩散阻挡层上的Cu膜由于具有高的应力而发生断裂,ZrN扩散阻挡层上的Cu膜则没有这一现象。在N2、H2混合气体中退火时Cu由于还原性气氛抑制了晶界迁移而使Cu膜的孔洞变小、减小。  相似文献   

10.
许效红  王民  侯云  王栋  王弘  王卓 《功能材料》2002,33(3):312-314
采用低压MOCVD法沉积生长了TiO2薄膜,研究了Si衬底取向,退火温度,退火时间,退火气氛对其结构和电性能的影响,结果表明,500℃下沉积生长于Si(111)和Si(100)上的TiO2薄膜为锐钛矿相多晶膜,经过600℃以上退火处理后,均可转变为纯金红石相结构。其中,Si(111)上的TiO2薄膜更容易转变为金红石相结构,而Si(100)上的TiO2薄膜,需要更高的退火温度和更长的退火时间才能转变为金红石结构。结果还表明,退火气氛中氧分压的大小对TiO2薄膜的结构无明显的影响。  相似文献   

11.
In this paper, we present a new method for inserting several triangulated surfaces into an existing tetrahedral mesh generated by the meccano method. The result is a conformal mesh where each inserted surface is approximated by a set of faces of the final tetrahedral mesh. First, the tetrahedral mesh is refined around the inserted surfaces to capture their geometric features. Second, each immersed surface is approximated by a set of faces from the tetrahedral mesh. Third, following a novel approach, the nodes of the approximated surfaces are mapped to the corresponding immersed surface. Fourth, we untangle and smooth the mesh by optimizing a regularized shape distortion measure for tetrahedral elements in which we move all the nodes of the mesh, restricting the movement of the edge and surface nodes along the corresponding entity they belong to. The refining process allows approximating the immersed surface for any initial meccano tetrahedral mesh. Moreover, the proposed projection method avoids computational expensive geometric projections. Finally, the applied simultaneous untangling and smoothing process delivers a high‐quality mesh and ensures that the immersed surfaces are interpolated. Several examples are presented to assess the properties of the proposed method.  相似文献   

12.
13.
Standards are the basis for production enterprises to organize production, ex-factory inspection, trade (delivery) and technical exchanges, product certification, quality arbitration and supervision.……  相似文献   

14.
A flow calorimeter for enthalpy increment measurements on condensed gases is presented. A better knowledge of the properties of the liquefied natural gas is needed, and therefore a liquid loop has been designed for our flow calorimeter. The fluid loop in the calorimeter is designed in order to avoid the two-phase region, since two phases would give compositional disturbances in the measurements. The avoidance of the two-phase region is made possible by increasing the pressure of the test fluid after the measurement section, then heating the fluid at super-critical pressure past the critical point. Finally, the fluid is throttled to the low-pressure gas state at the inlet condition of the compressor that circulates the fluid. To perform the pressure increase, a new cryogenic pump has been designed. To evaluate the new equipment, measurements were taken on liquid ethane over the temperature range 146–256 K at pressure between 0.9 and 5.1 MPa.  相似文献   

15.
On November 30, 2007, the China Association for Standardization (CAS) held a press conference at Beijing Diaoyutai State Guest House. Leaders from the China Household Electric Appliance Research Institute, the China Household Electric Appliance Association, and the China Consumers' Association attended and made speeches.……  相似文献   

16.
Zusammenfassung Bei der Gestaltung von Ernteprozessen — beispielsweise des Prozesses Mähdrusch, Körnertransport und -abnahme — als transportverbundene Fließarbeitsverfahren mit mindestens zwei verschiedenen Arbeitsmitteln gibt es einen großen Optimierungsspielraum. Solche Prozesse sind mehrstufige Bedienungsprozesse mit gemischter Anordnung der Bedienungseinrichtungen. Außerdem besitzen sie stark ausgeprägte räumliche Aspekte. Es wird vor allem gezeigt, welche Merkmale solcher Prozesse in Simulationsmodellen abgebildet sein müssen, welche Zielgrößen in Abhängigkeit von welchen Einflußgrößen unter Berücksichtigung welcher Prozeßbedingungen ermittelt werden sollten und wie der Bewertungsprozeß zur Ermittlung der gewünschten Informationen gestaltet werden muß.  相似文献   

17.
In the present study a high‐boron high speed steel (HSS) roll material was designed. Many expensive alloy elements have been substituted by cheap boron alloy, and high‐boron high speed steel roll has been manufactured by centrifugal casting method. The microstructures, mechanical properties and wear resistance of centrifugal casting high‐boron high speed steel roll have been investigated by optical microscopy (OM), scanning electron microscopy (SEM), and X‐ray diffraction (XRD) analysis, hardness test, impact test and wear test. The results indicated that the solidification microstructures of high‐boron high speed steel roll consisted of M2(B,C), (W,Mo)2(B,C), M3(B,C), M23(B,C)6 type borocarbides and martensite, a small amount of retained austenite. Borocarbides were continuously distributed over the grain boundary. After quenching from 1050 °C, local broken network appeared in partial borocarbides, and fine secondary borocarbide precipitated from the matrix. After tempering from 525 °C, the amount of precipitated borocarbide increased significantly. After heat treatment, the hardness of high‐boron high speed steel roll excelled 60 HRC, and its impact toughness excelled 8.0 J/cm2. The single groove steel rolling amount of high‐boron high speed steel rolls increases by 500% than that of bainite cast iron roll, when the rolls are used in K1 mill housing of bar mill.  相似文献   

18.
The definition of the thixotropy is a decrease in viscosity with time in shear and a subsequent recovery of viscosity after the shear deformation is removed.We ...  相似文献   

19.
正Responding to ISO’s appeal for survey for the to-be-developed ISO Strategy Plan for 2016-2020,SAC hosted a special workshop over the needs and comments of various fi elds on June 8 in Beijing.The workshop was attended by ISO President-elect and Ansteel General Manager Zhang Xiaogang,SAC Vice-Administrator Yu Xinli,and 30 experts from  相似文献   

20.
正The review group of Asia Pacific Laboratory Accreditation Cooperation(APLAC)carried out a 4-day peer review of the proficiency testing provider(PTP)for China National Accreditation Service for Conformity Assessment(CNAS)from July 28 to 31,2014.CNAS passed the PTP review with excellent performance.Two senior peer reviewers of APLAC made a comprehensive,rigorous and detailed review of CNAS’s PTP accreditation activities,and made the on-spot inspection of the review groups in Shanghai and Shenzhen respectively.  相似文献   

设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号