InGaAs-InP metamorphic DHBTs grown on GaAs with lattice-matched device performance and f/sub /spl tau//, f/sub max/>268 GHz

InP-In/sub 0.53/Ga/sub 0.47/As-InP double heterojunction bipolar transistors (DHBTs) were grown on a GaAs substrate using a metamorphic buffer layer and then fabricated. The metamorphic buffer layer is InP - employed because of its high thermal conductivity to minimize device heating. An f/sub /spl tau// and f/sub max/ of 268 and 339 GHz were measured, respectively - both records for metamorphic DHBTs. A 70-nm SiO/sub 2/ dielectric sidewall was deposited on the emitter contact to permit a longer InP emitter wet etch for increased device yield and reduced base leakage current. The dc current gain /spl beta/ is /spl ap/35 and V/sub BR,CEO/=5.7 V. The collector leakage current I/sub cbo/ is 90 pA at V/sub cb/=0.3 V. These values of f/sub /spl tau//, f/sub max/, I/sub cbo/, and /spl beta/ are consistent with InP based DHBTs of the same layer structure grown on a lattice-matched InP substrate.     

15-nm base type-II InP/GaAsSb/InP DHBTs with F/sub T/=384 GHz and a 6-V BV/sub CEO/

Type-II InP/GaAsSb/InP double heterojunction bipolar transistors (DHBTs) with a 15-nm base were fabricated by contact lithography: 0.73/spl times/11 /spl mu/m/sup 2/ emitter devices feature f/sub T/=384GHz (f/sub MAX/=262GHz) and BV/sub CEO/=6V. This is the highest f/sub T/ ever reported for InP/GaAsSb DHBTs, and an "all-technology" record f/sub T//spl times/BV/sub CEO/ product of 2304 GHz/spl middot/V. This result is credited to the favorable scaling of InP/GaAsSb/InP DHBT breakdown voltages (BV/sub CEO/) in thin collector structures.     

10-GHz power performance of a type II InP/GaAsSb DHBT

Type-II InP/GaAsSb double heterojunction bipolar transistors (DHBTs) were fabricated and microwave power performance was measured. For an InP collector thickness of 150 nm, the DHBTs show a current gain of 24, low offset voltages, and a BV/sub CEO/>6V. The 1.2/spl times/16 /spl mu/m/sup 2/ devices show f/sub T/=205GHz and f/sub MAX/=106GHz at J/sub C/=304 kA/cm/sup 2/. These devices delivered 12.6 dBm to the load at P/sub AVS/=3.3 dBm operating at 10 GHz, yielding a power-added efficiency of 41% and G/sub T/=9.3 dB.     

InGaAs-InP mesa DHBTs with simultaneously high f/sub /spl tau// and f/sub max/ and low C/sub cb//I/sub c/ ratio

We report an InP-InGaAs-InP double heterojunction bipolar transistor (DHBT), fabricated using a conventional triple mesa structure, exhibiting a 370-GHz f/sub /spl tau// and 459-GHz f/sub max/, which is to our knowledge the highest f/sub /spl tau// reported for a mesa InP DHBT-as well as the highest simultaneous f/sub /spl tau// and f/sub max/ for any mesa HBT. The collector semiconductor was undercut to reduce the base-collector capacitance, producing a C/sub cb//I/sub c/ ratio of 0.28 ps/V at V/sub cb/=0.5 V. The V/sub BR,CEO/ is 5.6 V and the devices fail thermally only at >18 mW//spl mu/m/sup 2/, allowing dc bias from J/sub e/=4.8 mA//spl mu/m/sup 2/ at V/sub ce/=3.9 V to J/sub e/=12.5 mA//spl mu/m/sup 2/ at V/sub ce/=1.5 V. The device employs a 30 nm carbon-doped InGaAs base with graded base doping, and an InGaAs-InAlAs superlattice grade in the base-collector junction that contributes to a total depleted collector thickness of 150 nm.     

An abrupt InP-GaInAs-InP DHBT

We report on the performance of abrupt InP-GaInAs-InP double heterojunction bipolar transistors (DHBTs) with a thin heavily doped n-type InP layer at the base-collector interface. The energy barrier between the base and the collector was fully eliminated by a 4-nm-thick silicon doped layer with N/sub D/=3/spl times/10/sup 19/ cm/sup -3/. The obtained f/sub T/ and f/sub MAX/ values at a current density of 1 mA//spl mu/m/sup 2/ are comparable to the values reported for DHBTs with a grade layer between the base and the collector.     

Self-heating of submicrometer InP-InGaAs DHBTs

We studied the thermal properties of submicron InP-InGaAs-InP double heterojunction bipolar transistors (DHBTs) with emitter dimensions of A = 0.25 /spl times/ 4 /spl mu/m/sup 2/. From the temperature dependence of V/sub bc/, we measured a thermal resistance of R/sub th/ = 3.3 /spl deg/C/mW for DHBTs with ion-implanted n+-InP subcollector at room temperature, compared to a high R/sub th/ = 7.5 /spl deg/C/mW from DHBTs with conventional grown InGaAs subcollector. Two-dimensional device simulations confirm the measured results.     

Graded base type-II InP/GaAsSb DHBT with f/sub T/=475 GHz

The first demonstration of a type-II InP/GaAsSb double heterojunction bipolar transistor (DHBT) with a compositionally graded InGaAsSb to GaAsSb base layer is presented. A device with a 0.4/spl times/6 /spl mu/m/sup 2/ emitter dimensions achieves peak f/sub T/ of 475 GHz (f/sub MAX/=265 GHz) with current density at peak f/sub T/ exceeding 12 mA//spl mu/m/sup 2/. The structure consists of a 25-nm InGaAsSb/GaAsSb graded base layer and 65-nm InP collector grown by MBE with breakdown voltage /spl sim/4 V which demonstrates the vertical scaling versus breakdown advantage over type-I DHBTs.     

A submicrometer 252 GHz f/sub T/ and 283 GHz f/sub MAX/ InP DHBT with reduced C/sub BC/ using selectively implanted buried subcollector (SIBS)

The selectively implanted buried subcollector (SIBS) is a method to decouple the intrinsic and extrinsic C/sub BC/ of InP-based double-heterojunction bipolar transistors (DHBTs). Similar to the selectively implanted collector (SIC) used in Si-based bipolar junction transistors (BJTs) and HBTs, ion implantation is used to create a N+ region in the collector directly under the emitter. By moving the subcollector boundary closer to the BC junction, SIBS allows the intrinsic collector to be thin, reducing /spl tau//sub C/, while simultaneously allowing the extrinsic collector to be thick, reducing C/sub BC/. For a 0.35 /spl times/ 6 /spl mu/m/sup 2/ emitter InP-based DHBT with a SIBS, 6 fF total C/sub BC/ and >6 V BV/sub CBO/ were obtained with a 110-nm intrinsic collector thickness. A maximum f/sub T/ of 252 GHz and f/sub MAX/ of 283 GHz were obtained at a V/sub CE/ of 1.6 V and I/sub C/ of 7.52 mA. Despite ion implantation and materials regrowth during device fabrication, a base and collector current ideality factor of /spl sim/2.0 and /spl sim/1.4, respectively, at an I/sub C/ of 100 /spl mu/A, and a peak dc /spl beta/ of 36 were measured.     

Extraction of the average collector velocity in high-speed "Type-II" InP-GaAsSb-InP DHBTs

In "type-II" NpN InP-GaAsSb-InP double heterostructure bipolar transistors DHBTs), the p/sup +/ GaAsSb base conduction band edge lies /spl Delta/E/sub C/ above the InP collector conduction band: a small ballistic injection energy /spl Delta/E/sub C/ is thus imparted to electrons as they are launched into the collector. The resulting high initial velocity should in principle reduce the collector signal delay time in comparison to the case where thermal electrons are accelerated by the collector electric field alone. We extract the bias dependence of the average collector electron velocity in high-speed InP-GaAs/sub 0.62/Sb/sub 0.38/-InP DHBTs, and find a maximum average velocity reaching 4/spl times/10/sup 7/ cm/s across a 2000 /spl Aring/ InP collector. This finding provides evidence of the performance advantage afforded by abrupt type-II base/collector (B/C) junctions for collector transport when compared to other B/C junctions.     

High bandwidth and low-leakage current InP-In/sub 0.53/Ga/sub 0.47/As-InP DBHTs on GaAs substrates

InP-In/sub 0.53/Ga/sub 0.47/As-InP double heterojunction bipolar transistors (DHBTs) were grown on GaAs substrates. A 284-GHz power-gain cutoff frequency f/sub max/ and a 216-GHz current-gain cutoff frequency f/sub /spl tau// were obtained, presently the highest reported values for metamorphic HBTs. The breakdown voltage BV/sub CEO/ was >5 V while the dc current gain /spl beta/ was 21. High thermal conductivity InP metamorphic buffer layers were employed in order to minimize the device thermal resistance.     

InGaAs-InP DHBTs for increased digital IC bandwidth having a 391-GHz f/sub /spl tau// and 505-GHz f/sub max/

InP-In/sub 0.53/Ga/sub 0.47/As-InP double heterojunction bipolar transistors (DHBT) have been designed for use in high bandwidth digital and analog circuits, and fabricated using a conventional mesa structure. These devices exhibit a maximum 391-GHz f/sub /spl tau// and 505-GHz f/sub max/, which is the highest f/sub /spl tau// reported for an InP DHBT-as well as the highest simultaneous f/sub /spl tau// and f/sub max/ for any mesa HBT. The devices have been aggressively scaled laterally for reduced base-collector capacitance C/sub cb/. In addition, the base sheet resistance /spl rho//sub s/ along with the base and emitter contact resistivities /spl rho//sub c/ have been lowered. The dc current gain /spl beta/ is /spl ap/36 and V/sub BR,CEO/=5.1 V. The devices reported here employ a 30-nm highly doped InGaAs base, and a 150-nm collector containing an InGaAs-InAlAs superlattice grade at the base-collector junction. From this device design we also report a 142-GHz static frequency divider (a digital figure of merit for a device technology) fabricated on the same wafer. The divider operation is fully static, operating from f/sub clk/=3 to 142.0 GHz while dissipating /spl ap/800 mW of power in the circuit core. The circuit employs single-buffered emitter coupled logic (ECL) and inductive peaking. A microstrip wiring environment is employed for high interconnect density, and to minimize loss and impedance mismatch at frequencies >100 GHz.     

A comparison of low-frequency noise characteristics and noise sources in NPN and PNP InP-based heterojunction bipolar transistors

Low-frequency noise characteristics of NPN and PNP InP-based heterojunction bipolar transistors (HBTs) were investigated. NPN HBTs showed a lower base noise current level (3.85 /spl times/ 10/sup -17/ A/sup 2//Hz) than PNP HBTs (3.10 /spl times/ 10/sup -16/ A/sup 2//Hz), but higher collector noise current level (7.16 /spl times/ 10/sup -16/ A/sup 2//Hz) than PNP HBTs (1.48 /spl times/ 10/sup -16/ A/sup 2//Hz) at 10 Hz under I/sub C/=1 mA, V/sub C/=1 V. The NPN devices showed a weak dependence I/sub C//sup 0.77/ of the collector noise current, and a dependence I/sub B//sup 1.18/ of the base noise current, while the PNP devices showed dependences I/sub C//sup 1.92/ and I/sub B//sup 1.54/, respectively. The dominant noise sources and relative intrinsic noise strength were found in both NPN and PNP InP-based HBTs by comparing the noise spectral density with and without the emitter feedback resistor. Equivalent circuit models were employed and intrinsic noise sources were extracted. The high base noise current of PNP HBTs could be attributed to the exposed emitter periphery and higher electron surface recombination velocity in P-type InP materials, while the relatively high collector noise current of NPN HBTs may be due to the noise source originating from generation-recombination process in the bulk material between the emitter and the collector.     

InGaAs/InP DHBTs with 120-nm collector having simultaneously high f/sub /spl tau//, f/sub max//spl ges/450 GHz

InP/In/sub 0.53/Ga/sub 0.47/As/InP double heterojunction bipolar transistors (DHBT) have been designed for increased bandwidth digital and analog circuits, and fabricated using a conventional mesa structure. These devices exhibit a maximum 450 GHz f/sub /spl tau// and 490 GHz f/sub max/, which is the highest simultaneous f/sub /spl tau// and f/sub max/ for any HBT. The devices have been scaled vertically for reduced electron collector transit time and aggressively scaled laterally to minimize the base-collector capacitance associated with thinner collectors. The dc current gain /spl beta/ is /spl ap/ 40 and V/sub BR,CEO/=3.9 V. The devices operate up to 25 mW//spl mu/m/sup 2/ dissipation (failing at J/sub e/=10 mA//spl mu/m/sup 2/, V/sub ce/=2.5 V, /spl Delta/T/sub failure/=301 K) and there is no evidence of current blocking up to J/sub e//spl ges/12 mA//spl mu/m/sup 2/ at V/sub ce/=2.0 V from the base-collector grade. The devices reported here employ a 30-nm highly doped InGaAs base, and a 120-nm collector containing an InGaAs/InAlAs superlattice grade at the base-collector junction.     

Vertical scaling of 0.25-/spl mu/m emitter InP/InGaAs single heterojunction bipolar transistors with f/sub T/ of 452 GHz

Vertical scaling of the epitaxial structure has allowed submicron InP/InGaAs-based single heterojunction bipolar transistors (SHBTs) to achieve record high-frequency performance. The 0.25/spl times/16 /spl mu/m/sup 2/ transistors, featuring a 25-nm base and a 100-nm collector, display current gain cut-off frequencies f/sub T/ of 452 GHz. The devices operate at current densities above 1000 kA/cm/sup 2/ and have BV/sub CEO/ breakdowns of 2.1 V. A detailed analysis of device radio frequency (RF) parameters, and delay components with respect to scaling of the collector thickness is presented.     

A new trench bipolar transistor for RF applications

A new vertical trench SiGe heterojunction bipolar transistor (HBT) is proposed that improves the tradeoff between the cutoff frequency (f/sub T/) and the off-state collector-base breakdown voltage (BV/sub cbo/). Extensive device simulations show that a record f/sub T//spl middot/BV/sub cbo/ product of about 2375 GHz/spl middot/V can be obtained for an HBT having a trench field plate connected to the emitter and a linearly graded doping profile in the collector drift region, while about 700 GHz/spl middot/V can be obtained for a standard optimized HBT. This large improvement is explained mainly by the suppression of the base-widening effect.     

Transistor and circuit design for 100-200-GHz ICs

Compared to SiGe, InP HBTs offer superior electron transport properties but inferior scaling and parasitic reduction. Figures of merit for mixed-signal ICs are developed and HBT scaling laws introduced. Device and circuit results are summarized, including a simultaneous 450 GHz f/sub /spl tau// and 490 GHz f/sub max/ DHBT, 172-GHz amplifiers with 8.3-dBm output power and 4.5-dB associated power gain, and 150-GHz static frequency dividers (a digital circuit figure-of-merit for a device technology). To compete with advanced 100-nm SiGe processes, InP HBTs must be similarly scaled and high process yields are imperative. Described are several process modules in development: these include an emitter-base dielectric sidewall spacer for increased yield, a collector pedestal implant for reduced extrinsic C/sub cb/, and emitter junction regrowth for reduced base and emitter resistances.     

BV/sub CEO/--BV/sub CBO/ separation and sharpness of breakdown in high-speed bipolar transistors

The effect of secondary impact ionization by the noninitiating carrier on the near avalanche behavior of high-speed n-p-n bipolar transistors is studied. We show that secondary collector ionization by generated holes traveling back toward the base layer significantly reduces BV/sub CBO/ if the hole ionization coefficient is higher than that of electrons [/spl beta//sub p/(E)>/spl alpha//sub n/(E)]: positive feedback associated with a strong secondary ionization sharpens the breakdown characteristic by speeding up carrier multiplication and decreases separation between the open-base collector-emitter (BV/sub CEO/) and the open-emitter base-collector (BV/sub CBO/) breakdown voltages. The effect of secondary ionization on the BV/sub CEO/-BV/sub CBO/ separation has not previously been described. Multiplication coefficient comparisons for representative InP, GaAs, and Si collectors indicate all structures can sustain low-current above BV/sub CEO/ operation from a transport (nonthermal) point of view, although the different degrees of secondary ionization in various semiconductors lead to fundamental differences when InP is compared to GaAs and Si since for the latter materials /spl beta//sub p/(E)相似文献   

Low-frequency noise characteristics of p-n-p InAlAs/InGaAs HBTs

The low-frequency noise characteristics of p-n-p InAlAs/InGaAs heterojunction bipolar transistors (HBTs) were investigated. Devices with various geometries were measured under different bias conditions. The base noise current spectral density (3.11 /spl times/ 10/sup -16/ A/sup 2//Hz) was found to be higher than the collector noise current spectral density (1.48 /spl times/ 10/sup -16/ A/sup 2//Hz) at 10 Hz under low bias condition (I/sub C/=1 mA, V/sub EC/=1 V), while the base noise current spectral density (2.04 /spl times/ 10/sup -15/ A/sup 2//Hz) is lower than the collector noise current spectral density (7.87 /spl times/ 10/sup -15/ A/sup 2//Hz) under high bias condition (I/sub C/=10 mA, V/sub EC/=2 V). The low-frequency noise sources were identified using the emitter-feedback technique. The results suggest that the low-frequency noise is a surface-related process. In addition, the dominant noise sources varied with bias levels.     

A 183 GHz f/sub T/ and 165 GHz f/sub max/ regrown-emitter DHBT with abrupt InP emitter

Small-area regrown emitter-base junction InP/In-GaAs/InP double heterojunction bipolar transistors (DHBT) using an abrupt InP emitter are presented for the first time. In a device with emitter-base junction area of 0.7 /spl times/ 8 /spl mu/m/sup 2/, a maximum 183 GHz f/sub T/ and 165 GHz f/sub max/ are exhibited. To our knowledge, this is the highest reported bandwidth for a III-V bipolar transistor utilizing emitter regrowth. The emitter current density is 6/spl times/10/sup 5/ A/cm/sup 2/ at V/sub CE,sat/ = 1.5 V. The small-signal current gain h/sub 21/ = 17, while collector breakdown voltage is near 6 V for the 1500-/spl Aring/-thick collector. The emitter structure, created by nonselective molecular beam epitaxy regrowth, combines a small-area emitter-base junction and a larger-area extrinsic emitter contact, and is similar in structure to that of a SiGe HBT. The higher f/sub T/ and f/sub max/ compared to previously reported devices are achieved by simplified regrowth using an InP emitter and by improvements to the regrowth surface preparation process.     

A novel InGaP/Al/sub x/Ga/sub 1-x/As/GaAs CEHBT

A new and interesting InGaP/Al/sub x/Ga/sub 1-x/As/GaAs composite-emitter heterojunction bipolar transistor (CEHBT) is fabricated and studied. Based on the insertion of a compositionally linear graded Al/sub x/Ga/sub 1-x/As layer, a near-continuous conduction band structure between the InGaP emitter and the GaAs base is developed. Simulation results reveal that a potential spike at the emitter/base heterointerface is completely eliminated. Experimental results show that the CEHBT exhibits good dc performances with dc current gain of 280 and greater than unity at collector current densities of J/sub C/=21kA/cm/sup 2/ and 2.70/spl times/10/sup -5/ A/cm/sup 2/, respectively. A small collector/emitter offset voltage /spl Delta/V/sub CE/ of 80 meV is also obtained. The studied CEHBT exhibits transistor action under an extremely low collector current density (2.7/spl times/10/sup -5/ A/cm/sup 2/) and useful current gains over nine decades of magnitude of collector current density. In microwave characteristics, the unity current gain cutoff frequency f/sub T/=43.2GHz and the maximum oscillation frequency f/sub max/=35.1GHz are achieved for a 3/spl times/20 /spl mu/m/sup 2/ device. Consequently, the studied device shows promise for low supply voltage and low-power circuit applications.