多介质工艺X射线光刻制作T形栅

半导体器件日益向高频、高速方向发展，赝质结高电子迁移率晶体管以其高频、高速、低噪声受到人们重视而发展迅速。在PHEMT的制作工艺中，栅线条的制作是至关重要而又极为困难的。采用X射线多介质工艺制作T形栅，其形貌清晰，线条基本可控，为MMIC制作提供了可靠的工艺。     

Hf基高K栅介质材料研究进展

随着微电子技术的不断发展,MOSFET的特征尺寸已缩小至100nm以下,SiO2作为栅介质材料已不能满足技术发展的需求,因此必须寻求一种新型高K的介质材料来取代SiO2.当今普遍认为Hf基栅介质材料是最有希望取代SiO2而成为下一代MOSFET的栅介质材料.综述了高K栅介质材料的意义、Hf基高K栅介质材料的最新研究进展和Hf基高K栅介质材料在克服自身缺陷时使用的一些技术;介绍了一款由Hf基高K介质材料作为栅绝缘层制作的MOSFET.     

新型前栅场发射器件的研究

采用刻蚀型介质制作前栅场发射器件。该器件中阴栅结构的形成是利用刻蚀工艺刻蚀介质层,一次性实现栅孔和阴极电极的连通,最后利用电泳沉积工艺转移碳纳米管制备成阴极发射点阵。该工艺避免了对准或套印,使前栅场发射器件制作工艺更简单,降低了成本,更容易实现大面积制作。场发射测试表明当阳压在1500和2000 V时,栅压都能够有效地控制阴极的电子发射。     

凹球面网栅光刻控制算法零点误差分析

为分析并避免参考零点误差对凹球面光刻恒定曝光量控制算法的影响,建立了零点误差与扫描线速度、扫描弧长关系的数学模型并给出了关系曲线.分析得出:参考零点俯仰定位误差会造成部分线条宽于理想值,其余线条窄于理想值,且线宽呈单调变化;参考零点水平定位误差会造成实际扫描弧长短于或长于所需值,造成凹球面部分边缘无线条以致网栅缺失.凹球面网栅光刻设备俯仰轴和方位轴采用光电轴角编码器作为反馈元件,采取速度、位置双闭环控制,实现了参考零点的精确定位,确保了恒定的扫描线速度和精确的扫描弧长,制作出了合格的凹球面网栅.     

高温光栅质量控制因素研究

本文对光刻腐蚀法、光刻镀(涂)层法、镀层腐蚀法、双镀层法等多种高温栅制作工艺进行了详细的讨论,对它们的适用范围及所制光栅的质量控制因素进行了分析,首次提出了多介质镀层法制作高温光栅的新工艺,并成功地制作出可耐1000℃的多介质镀层高温栅,高温氧化实验结果表明,多介质高温栅具有较好的抗氧化能力。     

高速POC型干式煤气柜侧板制作工艺及质量控制要点

POC型干式煤气柜作为储存、平衡工业与民用煤气的大型容器设备,具有直径大、高度高、制作安装精度要求高、现场组装安装工程量大等特点,其侧板是煤气柜重要组成构件,制作工艺直接影响煤气柜现场组装安装的整体精度、质量及气柜正常运行。本文结合工程实例,详细介绍了高速POC型干式煤气柜侧板的制作工艺及质量控制要点。     

聚合物弹性印章的制作工艺

为了解决软光亥4技术中核心元件弹性印章的制备技术,对SU-8胶印模和聚合物弹性印章进行了工艺研究．通过多次实验和测量,获得了制作SU-8胶印模和聚合物弹性印章的稳定工艺参数,得到了表面形貌好、线条控制精确的SU-8胶印模和聚合物弹性印章样品,弹性印章特征线条尺寸在长宽高方向上为70mm×50μm×42μm,完全可满足软光刻技术要求,这为软刻蚀技术的进一步开发打下了良好的基础．     

时代印记椅

正时代印记椅:柔美婉转的线条一气呵成,如同行云流水般的草书;古以文书史,今以物为纪;其制作科技含量高,无愧为大工业时代发展的见证。     

基于微孔SiO2栅介质的透明氧化物薄膜晶体管

采用等离子增强化学气相沉积(PECVD)法制备微孔SiO2薄膜并将其作为栅介质,制作了基于微孔SiO2栅介质层的透明氧化物薄膜晶体管。利用场发射扫描电镜、阻抗分析仪以及半导体分析仪对样品进行表征。结果表明,微孔SiO2栅介质具有双电层效应,这种微孔SiO2栅介质透明氧化物薄膜晶体管器件具有工作电压低,开关电流比大,透光性高,稳定性强等良好性能。     

基于SIM卡卡基不同制作工艺的研究

论述了国内外现行的SIM卡卡基制作工艺:层压工艺和注塑工艺,其共同特点是设备投入费用高,而产能受到生产设备的制约.详细介绍了国内最新的研究成果"SIM卡卡基制作新工艺".新工艺使得SIM卡卡基制作设备投入费用少而国产化程度高,生产能力不受生产设备制约而大幅提高,便于在SIM卡制造行业推广.     

Insertion of triangulated surfaces into a meccano tetrahedral discretization by means of mesh refinement and optimization procedures

In this paper, we present a new method for inserting several triangulated surfaces into an existing tetrahedral mesh generated by the meccano method. The result is a conformal mesh where each inserted surface is approximated by a set of faces of the final tetrahedral mesh. First, the tetrahedral mesh is refined around the inserted surfaces to capture their geometric features. Second, each immersed surface is approximated by a set of faces from the tetrahedral mesh. Third, following a novel approach, the nodes of the approximated surfaces are mapped to the corresponding immersed surface. Fourth, we untangle and smooth the mesh by optimizing a regularized shape distortion measure for tetrahedral elements in which we move all the nodes of the mesh, restricting the movement of the edge and surface nodes along the corresponding entity they belong to. The refining process allows approximating the immersed surface for any initial meccano tetrahedral mesh. Moreover, the proposed projection method avoids computational expensive geometric projections. Finally, the applied simultaneous untangling and smoothing process delivers a high‐quality mesh and ensures that the immersed surfaces are interpolated. Several examples are presented to assess the properties of the proposed method.     

Certification Institutions Expected to Update and Transfer Information on Present Standards

Standards are the basis for production enterprises to organize production, ex-factory inspection, trade (delivery) and technical exchanges, product certification, quality arbitration and supervision.……     

Flow calorimeter for enthalpy increment measurements on condensed gases

A flow calorimeter for enthalpy increment measurements on condensed gases is presented. A better knowledge of the properties of the liquefied natural gas is needed, and therefore a liquid loop has been designed for our flow calorimeter. The fluid loop in the calorimeter is designed in order to avoid the two-phase region, since two phases would give compositional disturbances in the measurements. The avoidance of the two-phase region is made possible by increasing the pressure of the test fluid after the measurement section, then heating the fluid at super-critical pressure past the critical point. Finally, the fluid is throttled to the low-pressure gas state at the inlet condition of the compressor that circulates the fluid. To perform the pressure increase, a new cryogenic pump has been designed. To evaluate the new equipment, measurements were taken on liquid ethane over the temperature range 146–256 K at pressure between 0.9 and 5.1 MPa.     

Refrigerators Enter a New Era of Health Preservation Frestech initiates the establishment of China's first standard for household sterilization refrigerators

On November 30, 2007, the China Association for Standardization (CAS) held a press conference at Beijing Diaoyutai State Guest House. Leaders from the China Household Electric Appliance Research Institute, the China Household Electric Appliance Association, and the China Consumers' Association attended and made speeches.……     

Optimum-Simulation von Ernteprozessen

Zusammenfassung Bei der Gestaltung von Ernteprozessen — beispielsweise des Prozesses Mähdrusch, Körnertransport und -abnahme — als transportverbundene Fließarbeitsverfahren mit mindestens zwei verschiedenen Arbeitsmitteln gibt es einen großen Optimierungsspielraum. Solche Prozesse sind mehrstufige Bedienungsprozesse mit gemischter Anordnung der Bedienungseinrichtungen. Außerdem besitzen sie stark ausgeprägte räumliche Aspekte. Es wird vor allem gezeigt, welche Merkmale solcher Prozesse in Simulationsmodellen abgebildet sein müssen, welche Zielgrößen in Abhängigkeit von welchen Einflußgrößen unter Berücksichtigung welcher Prozeßbedingungen ermittelt werden sollten und wie der Bewertungsprozeß zur Ermittlung der gewünschten Informationen gestaltet werden muß.     

A study of centrifugal cast high boron high speed steel

In the present study a high‐boron high speed steel (HSS) roll material was designed. Many expensive alloy elements have been substituted by cheap boron alloy, and high‐boron high speed steel roll has been manufactured by centrifugal casting method. The microstructures, mechanical properties and wear resistance of centrifugal casting high‐boron high speed steel roll have been investigated by optical microscopy (OM), scanning electron microscopy (SEM), and X‐ray diffraction (XRD) analysis, hardness test, impact test and wear test. The results indicated that the solidification microstructures of high‐boron high speed steel roll consisted of M₂(B,C), (W,Mo)₂(B,C), M₃(B,C), M₂₃(B,C)₆ type borocarbides and martensite, a small amount of retained austenite. Borocarbides were continuously distributed over the grain boundary. After quenching from 1050 °C, local broken network appeared in partial borocarbides, and fine secondary borocarbide precipitated from the matrix. After tempering from 525 °C, the amount of precipitated borocarbide increased significantly. After heat treatment, the hardness of high‐boron high speed steel roll excelled 60 HRC, and its impact toughness excelled 8.0 J/cm². The single groove steel rolling amount of high‐boron high speed steel rolls increases by 500% than that of bainite cast iron roll, when the rolls are used in K₁ mill housing of bar mill.     

Thixotropy of Systems with Shear Thinning and Plastic Flow Behavior

The definition of the thixotropy is a decrease in viscosity with time in shear and a subsequent recovery of viscosity after the shear deformation is removed.We ...     

Brainstorming for ISO Strategy 2016-2020

正Responding to ISO’s appeal for survey for the to-be-developed ISO Strategy Plan for 2016-2020,SAC hosted a special workshop over the needs and comments of various fi elds on June 8 in Beijing.The workshop was attended by ISO President-elect and Ansteel General Manager Zhang Xiaogang,SAC Vice-Administrator Yu Xinli,and 30 experts from     

CNAS Passes APLAC's PTP Review

正The review group of Asia Pacific Laboratory Accreditation Cooperation(APLAC)carried out a 4-day peer review of the proficiency testing provider(PTP)for China National Accreditation Service for Conformity Assessment(CNAS)from July 28 to 31,2014.CNAS passed the PTP review with excellent performance.Two senior peer reviewers of APLAC made a comprehensive,rigorous and detailed review of CNAS’s PTP accreditation activities,and made the on-spot inspection of the review groups in Shanghai and Shenzhen respectively.