PMMA疏水性表面的飞秒激光制备研究

利用飞秒激光加工系统对PMMA表面制备微结构,调节激光的加工次数和微结构的尺寸参数,研究PMMA表面的润湿性机理.激光制备出光栅结构和方柱结构,采用超景深三维显微镜和接触角测量仪对微结构表面形貌和润湿性进行测量分析.研究了不同的激光加工次数和微结构尺寸对表面润湿性的影响,结果表明:PMMA表面微结构的接触角随光栅结构间...     

微结构表面制造技术新进展

法国Biotray公司R＆D小组研发出了用于微结构表面生产的专项设备——MS10—100^TMv2在非无尘环境中可完成微结构制作所需的6种设备的工作。该产品全自动可编程。微结构表面制作包括以下基本工艺：表面制备、光致抗蚀剂涂覆、软性烘烤、紫外曝光、显影、硬性烘烤、湿蚀刻以及光致抗蚀剂的清除，为优化芯片生产所有参量均可编程。该技术可模块化，适于几乎所有常用的材料和多种规格、形状、厚度的衬底。     

大直径硅（111）抛光片表面微结构研究

大直径硅（１１１）抛光片表面微结构研究＊＊国家自然科学基金资助项目贝红斌刘鸿飞（北京有色金属研究总院，北京１０００８８）本文利用自行研制成功的电化学扫描隧道显微镜（ＥＣ－ＳＴＭ）和扫描隧道谱（ＳＴＳ）对不同掺杂浓度大直径ｎ型硅（１１１）抛光片表面微缺...     

飞秒激光制备PMMA表面微结构的作用机理和润湿性研究

采用飞秒激光微加工技术对聚甲基丙烯酸甲酯(PMMA)表面进行微加工,研究PMMA表面不同微结构的润湿性。首先对飞秒激光去除透明聚合物材料的机理进行研究并建立了材料去除模型,制备出PMMA表面光栅结构和方柱结构;采用超景深三维显微镜和接触角测量仪对微结构表面形貌和润湿性进行测量分析。结果表明:飞秒激光加工PMMA表面微结构可以将PMMA润湿性从亲水向疏水状态转变,微结构间距过小会导致激光加工时飞溅的熔融物堆积在结构通道。     

飞秒激光微结构硅表面处理在光电子领域的新应用

具有特色的价廉硅广泛地用于半导体微电子的基质。从电脑芯片到光探删仪。硅开拓了许多商业应用．然而,常见的硅受到与光电子相关的某些限制．例如,因为它透射用于通信的近红外辐时波长     

原子力显微镜在金刚石表面微结构分析中的应用

本文报告用原子力显微镜（AFM）测量金刚石精密加工表面的微观结构,获得了用机械抛光法与热化学抛光法得到的表面纳米级形貌。前者呈直线纹理,反映出金刚石磨料的刮削机理,后者表面较平滑,无明显加工纹理,但在磨削方向出现一些蚀坑,反映出碳原子扩散的化学磨削机理。     

提高抗激光烧蚀能力的表面尖形微结构器件

讨论了光刻热熔成形工艺灰度掩模技术结合离子束蚀刻制作面阵尖形微结构器件的问题,分析了几种凸尖及凹尖结构抗烧蚀的能力强于平面端面同质器件的原因,所作的若干分析结果可用于这类器件的实际制作的应用。     

湿法腐蚀后硅表面形态微结构的研究

随着半导体工艺集成度的不断提高及微纳米技术的发展,半导体硅材料的湿法腐蚀及腐蚀后硅表面的平整度及洁净度对半导体器件的影响越来越重要,有关此方面的研究也日益受到重视。本文利用扫描隧道显微镜(STM)技术,研究了Si(111)在几种不同比例的NH_4F-HCl溶液中腐蚀后的表面形态及洁净度。表面的STM图像分析,表明在较高pH值的NH_4F-HCl溶液中腐蚀的Si(111)表面粗糙度较小。     

磁控溅射不同厚度铝薄膜的微结构及其表面形貌

用直流磁控溅射法在室温的Si(100)基底上制备了21～55 nm范围内不同厚度的铝膜,并用X射线衍射和扫描电镜对薄膜的结构和表面形貌进行了表征.分析结果表明:制备的铝薄膜呈多晶状态,晶粒择优取向为(111),随着膜厚的增加,Al(100)衍射峰宽变窄,薄膜的平均晶粒尺寸逐渐增大,晶面间距逐渐减小,薄膜中的残余应力减小.膜厚为55 nm时,Al膜均匀致密.     

ICP刻蚀p-GaN表面微结构GaN基蓝光LED

采用基于Cl2/Ar/BCl3气体的感应耦合等离子体(ICP)刻蚀技术制作了p-GaN表面具有直径3 μm、周期6 μm的二维圆孔微结构GaN基蓝光LED,研究了刻蚀深度对光荧光(PL)和发光二极管(LED)光电特性的影响.结果表明,刻蚀深度为25 nm的表面微结构,与传统平面结构相比,其PL增强了42.8%;而采用ITO作为透明电极的LED,在20 mA注入电流下,正面出光增强了38%、背面出光增强了10.6%,同时前向电压降低了0.6 V,反向漏电流基本不变.     

Surface modification of silicon by laser surface treatment: Improvement of adhesion and copper deposition

We have studied the use of lasers for modifying the surface properties of silicon to improve its wettability and adhesion characteristics. Using a 4th harmonic Nd:YAG (λ = 266 nm, pulse) laser, the wettability and adhesion characteristics of the silicon surfaces have been enhanced by laser irradiation. It was found that laser surface treatment of silicon modified the surface energy. By the contact angle measurement, using distilled water, the wetting characteristics of silicon after the laser irradiation show a decrease in the contact angle and a change in the surface chemical composition. In the case of the laser-treated silicon surface, laser direct writing of copper lines has been achieved through pyrolytic decomposition of copper formate by using a focused Ar⁺ laser beam (λ = 514.5 nm, continuous wave (CW)) on the silicon substrates. The deposited lines and surface chemical compositions were measured by energy dispersive x-ray (EDX), scanning electron microscopy (SEM), x-ray photoelectron spectroscopy (XPS), and surface profiler (Alpha Step 500, San Jose, CA) to examine the cross section of deposited copper lines.     

Surface Wettability of Nanostructured Zinc Oxide Films

Zinc oxide (ZnO) nanograin and nanorod films were prepared by magnetron sputter deposition and an aqueous solution growth method. Their surface wettability was studied in relation to their surface morphologies. While the surfaces of both films were hydrophobic, the nanorod films exhibited higher surface hydrophobicity. A superhydrophobic surface was obtained on a ZnO nanorod film with a water contact angle of 151 deg. Results have shown that their surface wettability was influenced by the morphology of ZnO nanostructures, including the grain size, the length, and density of nanorods. Both types of ZnO films showed switchable wettability under ultraviolet irradiation and dark storage.     

Regulating Ag Wettability via Modulating Surface Stoichiometry of ZnO Substrates for Flexible Electronics

A novel and highly efficient methodology to regulate (enhance or suppress) the Volmer–Weber 3D growth mode of ultra-thin (<10 nm) Ag layers by modulating the surface stoichiometry of ZnO substrates prior to Ag deposition is presented. Relative to pristine ZnO layers, oxygen-deficient surface states formed by preferential removal of surface oxygen atoms remarkably improve Ag layer wettability, whereas oxygen-excessive surface states formed by oxygen atom incorporation strongly facilitate Ag agglomeration. The dissimilar nucleation and coalescence dynamics are elucidated via combined molecular dynamics and force-bias Monte Carlo simulations. The improved wettability results in significantly lower sheet resistance in the ultra-thin (6–10 nm) Ag layers, for example, 6.03 Ωsq⁻¹ at 8 nm, than the previously reported values from numerous other approaches in the equal thickness range. When this unique methodology is applied to ZnO/Ag/ZnO transparent electrodes, simultaneous improvement in electrical conductivity and visible transparency is realized, with a resultant Haacke figure of merit value of 0.139 Ω⁻¹ that is >50% higher than the best reported value for an identically structured electrode. We select transparent heating devices as a model system to confirm that the superior optoelectronic properties are highly sustainable under simultaneous and severe electrical, mechanical, and thermal stresses.     

三种高Sn无铅钎料的表面张力和润湿性能研究

采用悬滴法测量了3种无铅钎料合金(Sn-3.0Ag-0.5Cu、Sn-0.7Cu与Sn-9.0Zn)在260℃时的表面张力,分别为525.5,534.8和595.4 mN/m;同时采用座滴法测量了其在260℃熔融状态下与Cu基板的接触角,分别为24.5°、28.0°和102.5°,并且与传统Sn-37.0Pb钎料进行了比较研究。结果表明,无铅钎料合金的表面张力与接触角均大于Sn-37.0Pb钎料。结合Young-Dupre公式讨论了钎料合金表面张力与其润湿性能的相关性,认为Sn基钎料合金在Cu基板上的润湿性能主要取决于其表面张力。     

测量表面张力和接触角的简单方法和装置

利用激光束在液体柱面弯月面上的反射推导了计算表面张力和接触角的公式，并用简单的实验装置测量了水的表面张力系数和接触角。     

Laser-Tuned Surface Wettability Modification and Incorporation of Aluminum Nitride (AlN) Ceramics in Thermal Management Devices

Aluminum nitride (AlN), a versatile ceramic with high thermal conductivity, high electrical resistivity, and a coefficient of thermal expansion compatible with silicon, is well-suited for direct-to-chip cooling applications of electronics, implementation in wide bandgap semiconductors, and for high-temperature heat exchangers. Despite multiple advantages, AlN's implementation in liquid-cooling applications is often hindered by surface-degrading effects of working-fluid-induced hydrolysis. Herein, a scalable -but highly tunable- wettability engineering approach is introduced, that allows effective implementation of bulk AlN substrates in enhanced two-phase cooling of electronics. The approach prevents hydrolysis of AlN by aqueous media and establishes control over surface roughness, all the while maintaining bulk integrity and material properties of the underlying substrate. Demonstration of the new approach is presented in spontaneous, pumpless, surface liquid transport, a necessity if such ceramics are to play an integral role as components of sealed, phase-change, wickless thermal-management devices (e.g., vapor chambers or heat pipes) that require rapid working-fluid transport in their multi-phase interior. The novelty of this work lies in establishing a scalable methodology for utilizing and further enhancing the properties of this non-oxide ceramic material for phase-change heat-transfer hermetic devices, thereby paving the way toward the implementation of this intriguing material in next-generation heat spreaders.     

氧等离子体处理改善ITO电极表面湿润性

采用氧等离子体处理对有机发光器件ITO电极进行表面改性,基于接触角的测量,利用几何平均法计算了ITO的表面能和极性度,研究了氧等离子体处理对ITO电极表面湿润性的影响.实验数据和计算结果表明:氧等离子体处理后,ITO表面极性度增加,表面能增大,接触角减小,其表面湿润性得到很大改善.同时,进一步研究了氧等离子体处理对有机发光器件性能的影响,结果显示:ITO电极表面湿润性的改善,提高了发光亮度和效率,降低了启亮电压和驱动电压,有效地改善了器件的光电性能.     

Electrode Protection and Electrolyte Optimization via Surface Modification Strategy for High-Performance Lithium Batteries

Lithium batteries have become one of the best choices for energy storage due to their long lifespan, high operating voltage-platform and energy density without any memory effect. However, the ever-increased demands of high-performance lithium batteries indeed place a stricter request to the electrodes and electrolytes materials, and electrode-electrolyte interface. Various strategies are developed to enhance the overall performances of current lithium batteries, and among them, artificial modification of battery components is regarded as one of the most effective. However, systematic summery surrounding surface modifications is rare. In this review, the structural instability of the bare electrodes and the main defects of unmodified separator/solid electrolytes are briefly presented. Then diverse and advanced surface-engineering strategies for both the cathode and anode materials, as well as the separator/solid electrolytes are carefully summarized. More importantly, the prospects of surface modification and challenges of current methods for constructing high-performance lithium batteries are pointed out.     

不同表面预处理对有机电致发光显示器性能的影响

从生产角度研究了基板表面的预处理工艺对OLED性能的影响,分别用UVOzone、氧Plasma以及两者相结合的方式对基板进行表面处理,并按照生产工艺制作器件,从接触角、方阻以及光电特性等测试结果对各种表面处理的样品进行比较。结果表明以上处理都改善了器件性能,不同程度提高了器件的清洁度、亮度和发光效率,其中UVOzone和氧Plasma结合的方式处理效果最为显著,器件在10V时亮度达到79920cd/m2,比其他两种处理方式亮度提高约25%。     

工艺因素对玻璃与可伐合金浸润性的影响

测定了在不同工艺条件下ＤＭ－３０５及ＢＨ－Ｇ／Ｋ两种玻璃与可伐合金之间的浸润角大小。对浸润角受气氛和金属表面氧化膜成分的影响进行了研究。为合理选择该种玻璃与可伐合金的封接工艺提供了理论依据。关键词