Development and control of a micro artificial muscle cell using electro-conjugate fluid

As a man–machine interaction increases its importance in the robotic and mechatronic fields, a soft robot, which is inspired from natural systems, becomes one of the most important research trends. There are several research topics related to soft robots such as soft structures or artificial skins, compliance control, soft actuators or artificial muscles, and so on. For the natural muscle potentially has great flexibility, the authors believe that the artificial muscle actuator must be a promising technology for soft robots. Hence in this study, we develop a new type of micro artificial muscle cell, which is an element of an integrated artificial muscle, using electro-conjugate fluid (ECF) and measure its driving performances. In addition, position control characteristics are also clarified by experiments. Experimental results show the micro artificial muscle cell using electro-conjugate fluid has a quite good control performance.     

A rate gyroscope based on interaction of sonic waves

A new form of rate gyroscope based on interaction between standing sonic waves in solid media is described. One form of the device, using a solid, ring-shaped medium, is analyzed in order to establish the relationship between the modes of the two waves that must exist to produce sensitivity to angular rate. In addition, the analysis establishes estimates for the angular-rate sensitivity in terms of the basic instrument parameters. The theoretical feasibility of the proposed instrument has been confirmed by experiments conducted on a simple laboratory model. The results indicate that strain-induced and mass unbalance cross-coupling between the driving and sensing waves can produce uncertainty in the instrument output signal. These unwanted cross-coupling effects are the practical limitation on the instrument performance at the present time. Methods for their reduction and cancellation are discussed for the ring-shaped transducer. The problem of unwanted cross-coupling seems to be present in sonic gyroscopes, in general, and is not unique to solid media alone. In particular, some preliminary experiments with fluid devices show them to have similar cross-coupling problems. In conclusion, the major advantages over conventional rate gyroscopes of instruments based on interaction of sonic waves appear to be: low power consumption, long life, (potentially) high reliability, ruggedness, and low cost. These advantages must be weighed against the primary disadvantage of the lower precision that is available at the present state of the development.     

液浮速率陀螺仪的研究和改进

论述了液浮速率陀螺仪的工作原理,针对某型液浮速率陀螺仪产品存在的问题,分析了液浮速率陀螺仪的误差,对产品进行了技术改进。     

基于MEMS陀螺仪的微惯性测量系统的实现

微机电(MEMS)惯性传感器应用日益广泛,本文给出了一种基于新型MEMS陀螺仪的微惯性测量系统的实现.系统采用了ANALOG DIVICES公司的AIDS16255陀螺仪,其精度较高,并增加了校准功能,能够在内部对敏感度和偏差因子进行补偿.系统具有体积小、重量轻、可扩展性好等特点.本文给出了系统的原理图和软件流程的关键内容.     

参数辨识在陀螺仪性能分析中的应用

基于挠性陀螺仪动力学模型, 研究参数辨识在陀螺仪性能分析中的应用方法。在论述挠性陀螺仪性能指标和力学模型的基础上, 利用伪随机多谐波信号作为激励信号, 通过零阶保持器将离散模型转换为连续模型进行参数辨识。实验结果显示, 模型预测输出与实际测量数据的拟合度达到95. 3%, 残差在合理的公差带以内。因此, 参数辨识是陀螺仪性能分析中的一个有效性方法, 可为陀螺仪故障分析和控制回路设计提供一种技术手段和理论依据。     

A novel technique for measuring pico-scale flow rate of a liquid solution using a microchannel

As micrototal analysis system (μ-TAS) becoming more extensively used, techniques for fabricating microchannels, microactuators, and measuring systems are becoming increasingly important. This study describes a novel method for fabricating a closed microchannel that can be used to measure the pico-scale flow rate of a liquid solution with an accuracy of better than 1 pL/s. The flow rate of 9 pL/s is calculated from the measurements. Without any high temperature or high-voltage processing, the microchannel can be integrated in the complementary metal–oxide–semiconductor (CMOS) microfluidic system and the fabricating process involves only some standard CMOS processes and common materials. The batch fabrication of a single integrated circuit (IC) chip is essential to reaching the goal of a system in one chip.     

单轴系陀螺仪组测量系统

由ARM Cortex-M3单片机通过USB-HID接口和计算机(笔记本电脑)构成的上下位机模式的陀螺仪测试系统,实现了单轴系陀螺仪组的各种静态参数和动态参数测试.由上位计算机通过USB-HID端口发出各种控制状态,操纵下位机使得陀螺仪组模拟出实际的工作状态,完成了单轴系陀螺仪组的动态响应测试.     

基于角速率陀螺仪的无线鼠标的设计与实现

提出了一种基于角速率陀螺仪的无线鼠标的设计方案.该方案以MEMS角速率陀螺ADIS16100作为信号检测元件,并采用处理器PIC24FJ32CA00X和超低功耗RF芯片nRF24API进行信号处理与无线传输.按该方案设计的鼠标灵敏度高、功耗低、使用灵活,具有较大的应用前景和推广价值.     

铂热敏电阻器在液浮陀螺仪温控系统中的应用

建立了液浮陀螺仪温控模型,深入分析了其结构组成和工作原理。针对所建立的数学模型对各个结构参数进行了分析研究。对满足条件的热敏线圈和铂热敏电阻器的温控系统进行了实验验证,实验结果表明:改进后温控系统的静态性能和动态性能得到加强,控制精度较之前未受影响,铂热敏电阻器的使用未影响液浮陀螺仪的各项性能指标,为液浮陀螺仪选择更可靠的温控元件提供了有力的依据。     

A HARPSS polysilicon vibrating ring gyroscope

This paper presents the design, fabrication, and testing of an 80-μm-thick, 1.1 mm in diameter high aspect-ratio (20:1) polysilicon ring gyroscope (PRG). The vibrating ring gyroscope was fabricated through the high aspect-ratio combined poly and single-crystal silicon MEMS technology (HARPSS). This all-silicon single-wafer technology is capable of producing electrically isolated vertical electrodes as tall as the main body structure (50 to 100's (μm tall)) with various size air-gaps ranging from submicron to tens of microns. A detailed analysis has been performed to determine the overall sensitivity of the vibrating ring gyroscope and identify its scaling limits. An open-loop sensitivity of 200 μV/deg/s in a dynamic range of ±250 deg/s was measured under low vacuum level for a prototype device tested in hybrid format. The resolution for a PRG with a quality factor (Q) of 1200, drive amplitude of 0.15 μm, and sense node parasitic capacitances of 2 pF was measured to be less than 1 deg/s in 1 Hz bandwidth, limited by the noise from the circuitry. Elimination of the parasitic capacitances and improvement in the quality factor of the ring structure are expected to reduce the resolution to 0.01 deg/s/(Hz)^0.5     

MEMS gyroscope control system using a band-pass continuous-time sigma-delta modulator

This paper presents a MEMS gyroscope control system of using a high-order band-pass continuoustime sigma-delta modulator.Compared with a low-pass discrete-time sigma-delta modulator based solution,the band-pass modulator can considerably decrease the sampling frequency;moreover,the continuous-time architecture has an obvious advantage on PCB prototyping and shorter lead time of the implementation in hardware.System level simulations using MATLAB/Simulink show the proposed sixth order sigma-delta modulator can achieve a high SNR of 100 dB for an angular rate input with an amplitude of 200/s and a frequency of32 Hz.A PCB circuit implementation is simulated using Orcad/PSpice to analyze the stability,and implemented in hardware.Measurement of the power spectral density of the output bitstream reveals a noise floor of90 dBV/Hz1/2.The prototype is tested on a rate table with an angular rate input,verifying that the principle of the approach of using an electro-mechanical band-pass sigma-delta modulator control system for a MEMS gyroscope.     

Exhaustive fluid vacation model with positive fluid rate during service

Using an elegant transform domain iterative operator approach exhaustive fluid vacation models with strictly negative fluid rate during service have been analyzed, recently. Unfortunately, the potential presence of positive fluid rate during service (when the fluid input rate is larger than the fluid service rate) inhibits the use of all previously applied methodologies and makes the extension of the analysis approaches of discrete vacation and polling models towards fluid vacation and polling models rather difficult.Based on the level crossing analysis of Markov fluid models the paper introduces an analysis approach which is applicable for the stationary analysis of the fluid level distribution and its moments. In the course of the analysis compact new matrix exponential expressions are obtained for the distribution of fluid level during a busy period starting from a given positive fluid level and by exploiting the relations of upward and downward measures of fluid processes several matrix transformations are applied to avoid Kronecker expansion matrix multiplications.Finally, the obtained fluid level distribution is related with previous results of fluid vacation models.     

A new hybrid robust control of MEMS gyroscope

To control microelectromechanical systems (MEMS) gyroscope axis, we propose and investigate a new robust sliding mode controller (NRSMC). The sliding surface in the phase space converges to the equilibrium point within a finite period from any initial state. However, the main drawback of this control system is the chattering phenomenon, which is undesirable for the MEMS system. To solve this problem, we suggest a novel hybrid control system which improves trajectory tracking and eliminates the chattering. The dynamic stability of NRSMC against external disturbances is proved by applying the Lyapunov theory. The effectiveness of the proposed control method is verified by numerical simulation with a random noise applied to demonstrate the robustness of the proposed control system.

     

CMOS-MEMS体硅陀螺的系统仿真

体硅MEMS和CMOS电路的单片集成技术是提高传感器性能的有效途径,但是集成技术会对陀螺的设计和CMOS电路的设计提出更高的要求。本文通过建立CMOS-MEMS体硅陀螺的等效电学模型,实现了对CMOS-MEMS体硅陀螺的系统级仿真。通过系统仿真,陀螺的结构部分、电路部分、集成产生的寄生效应以及工艺误差得到了有效的分析,从而能够了解它们相互之间的影响,更好的指导CMOS-MEMS体硅集成器件的设计。     

一种新的陀螺振子及工作方式的研究

本文提出了一种新形式的陀螺振子结构,介绍了其工作原理。当陀螺振子在驱动模态谐振时,检测与驱动正交振动位置的振动情况,推导出了两模态振动公式。利用有限元软件建模,对新振子能否满足驱动与检测模态频率相等的灵敏度要求进行仿真验证。     

A MEMS piezoelectric solid disk gyroscope with improved sensitivity

Microsystem Technologies - This paper introduces a MEMS piezoelectric solid disk gyroscope. The gyroscope operates in an in-plane elliptic bulk acoustic wave mode with a frequency of...     

基于加速度计的陀螺三轴角速率提取算法研究

旋转弹载免驱动三轴MEMS陀螺的输出信号是横滚、偏航、俯仰3个角速度耦合在一起的特殊信号,如何解出弹体的3个角速度是研究的重点和难点.为解决这一问题,从旋转弹载免驱动三轴MEMS陀螺结构原理出发,分析了其输出信号.针对信号的特殊性,提出通过用重力加速度计的输出信号和陀螺的输出信号进行对比的方法来实现陀螺的三轴角速度的提...     

Efficient dynamic time warping for 3D handwriting recognition using gyroscope equipped smartphones

Handwriting character recognition from three-dimensional (3D) accelerometer data has emerged as a popular technique for natural human computer interaction. In this paper, we propose a 3D gyroscope-based handwriting recognition system that uses stepwise lower-bounded dynamic time warping, instead of conventional 3D accelerometer data. The results of experiments conducted indicate that our proposed method is more effective and efficient than conventional methods for user-independent recognition of the 26 lowercase letters in the English alphabet.