Fabrication and characterization of a thermal switch

The development of a thermal switch based on arrays of liquid–metal micro-droplets is presented. Prototype thermal switches are assembled from a silicon substrate on which is deposited an array of 1600 30-μm liquid–metal micro-droplets. The liquid–metal micro-droplet array makes and breaks contact with a second bare silicon substrate. A gap between the two silicon substrates is filled with either air at 760 Torr, air at of 0.5 Torr or xenon at 760 Torr. Heat transfer and thermal resistance across the thermal switches are measured for “on” (make contact) and “off” (break contact) conditions using guard-heated calorimetry. The figure of merit for a thermal switch, the ratio of “off” state thermal resistance over “on” state thermal resistance, R_off/R_on, is 129 ± 43 for a xenon-filled thermal switch that opens 100 μm and 60 ± 17 for an 0.5 Torr air-filled thermal switch that opens 25 μm. These thermal resistance ratios are shown to be markedly higher than values of R_off/R_on for a thermal switch based on contact between polished silicon surfaces. Transient temperature measurements for the liquid–metal micro-droplet switches indicate thermal switching times of less than 100 ms. Switch lifetimes are found to exceed one-million cycles.     

Design,simulation and validation of a novel uncooled infrared focal plane array

This paper describes a novel single-layer bi-material cantilever microstructure without silicon (Si) substrate for focal plane array (FPA) application in uncooled optomechanical infrared imaging system (UOIIS). The UOIIS, responding to the radiate infrared (IR) source with spectral range from 8 to 14 μm, may receive an IR image through visible optical readout method. The temperature distribution of the IR source could be obtained by measuring the thermal–mechanical rotation angle distribution of every pixel in the cantilever array, which is consisted of two materials with mismatching thermal expansion coefficients. In order to obtain a high detection to the IR object, gold (Au) film is coated alternately on silicon nitride (SiN_x) film in the flection beams of the cantilevers. And a thermal–mechanical model for such cantilever microstructure is proposed. The thermal and thermal–mechanical coupling field characteristics of the cantilever array structure are optimized through numerical analysis method and simulated by using the finite element simulation method. The thermal–mechanical rotation angle simulated and thermal–mechanical sensitivity tested in the experiment are 2.459 × 10⁻³ and 3.322 × 10⁻⁴ rad/K, respectively, generally in good agreement with what the thermal–mechanical model and numerical analysis forecast, which offers an effective reference for FPA structure parameters design in UOIIS.     

An uncooled optically readable infrared imaging detector

This paper presents a design and fabrication of bi-material micro-cantilever array (focal plane array, FPA) made of silicon nitride (SiN_x) and gold (Au) for uncooled optical readout infrared (IR) imaging system, in which silicon (Si) substrate is removed. Compared with the conventional thermal imaging detectors where the FPA must be put in high vacuum, IR thermal images can be obtained even though the cantilever array is placed in the atmosphere. The reason is the elimination of air gap (∼2 μm) between the cantilever beam and substrate, which introduces the air conduction of high temperature gradient. The preliminary experimental results with the micro-cantilever array of 140 × 98 elements and a 12-bit charge-coupled device (CCD) indicate that objects at temperature of higher than 120 °C can be detected and the noise-equivalent temperature difference (NETD) is ∼7 K. Also, the experimental results are well accordant with the thermomechanical analysis of designed micro-cantilever array.     

Electrostatically actuated dip pen nanolithography probe arrays

Dip pen nanolithography (DPN) is a method of creating nanoscale chemical patterns on surfaces using an atomic force microscope (AFM) probe. Until now, efforts to increase the process throughput have focused on passive multi-probe arrays and active arrays based on thermal bimetallic actuation. This paper describes the first use of electrostatic actuation to create an active DPN probe array. Electrostatic actuation offers the benefit of actuation without the probe heating required for thermal bimetallic actuation. Actuator cross talk between neighboring probes is also reduced, permitting more densely spaced probe arrays. The array presented here consists of 10 cantilever probes, where each is 120 μm long and 20 μm wide. Each cantilever probe is actuated by the electrostatic force between the probe and a built-in counter electrode with a 20–25 μm gap. The tip-to-tip probe spacing, also called the array pitch, is 30 μm. Patterns of 1-octadecanethiol were created on gold surfaces to demonstrate single-probe actuation, simultaneous multi-probe actuation, and overlap of patterns from adjacent probes. The minimum line width was 25 nm with an average line width of 30–40 nm.     

A new discrete circuit for readout of resistive sensor arrays

In this paper, we present a method that simplifies the interconnect complexity of N × M resistive sensor arrays from N × M to N + M. In this method, we propose to use two sets of interconnection lines in row–column fashion with all the sensor elements having one of their ends connected to a row line and other end to a column line. This interconnection overloading results in crosstalk among all the elements. This crosstalk causes the spreading of information over the whole array. The proposed circuit in this method takes care of this effect by minimizing the crosstalk. The circuit makes use of the concept of virtual same potential at the inputs of an operational amplifier in negative feedback to obtain a sufficient isolation among various elements. We theoretically present the suitability of the method for small/moderate sized sensor arrays and experimentally verify the predicted behavior by lock-in-amplifier based measurements on a light dependent resistor (LDR) in a 4 × 4 resistor array. Finally, we present a successful implementation of this method on a 16 × 16 imaging array of LDR.     

Low-cost microelectrode array with integrated heater for extracellular recording of cardiomyocyte cultures using commercial flexible printed circuit technology

This article reports the use of commercial, flexible printed circuit technology for the fabrication of low-cost microelectrode arrays (MEAs) for recording extracellular electrical signals from cardiomyocyte cultures. A 36-electrode array has been designed and manufactured using standard, two-layer, polyimide-based flexible circuit technology, with electrode diameters of 75 and 100 μm. Copper structures defined on the backside of the array have been used for low-power thermal regulation of the culture. Electrical characterization of the gold-plated electrodes showed impedances below 250 kΩ at 1 kHz. Functional testing was conducted using HL-1 cardiac myocytes. The arrays proved biocompatible, and supported the formation of functional syncytia, as demonstrated by electrical recordings of depolarization waves across the array. A comparison with conventional, glass-based MEAs is presented, which reveals differences in signal strength (smaller for larger electrode) and variability (less for larger electrodes), but no effect of the substrate types on culture parameters such as beat rate or conduction velocity. The performance of the on-chip heating was evaluated, with typical temperature settling times (to ±0.1 °C) below 10 s, for a power consumption around 1 W (at 37 °C). Accuracy and stability are discussed. HL-1 cell responses to various temperature profiles enabled by the on-chip heating are presented, showing a remarkable correlation between temperature and beat rate.     

On the Practical Solution of Genus Zero Diophantine Equations

Let f(X, Y) be an absolutely irreducible polynomial with integer coefficients such that the curve defined by the equation f(X, Y)  =  0 is of genus 0 having at least three infinite valuations. This paper describes a practical general method for the explicit determination of all integer solutions of the diophantine equation f(X, Y)  =  0. Some elaborated examples are given.     

Solving Genus Zero Diophantine Equations with at Most Two Infinite Valuations

Let f(X, Y) be an absolutely irreducible polynomial with integer coefficients such that the curve defined by the equation f(X, Y)  =  0 is of genus 0 having at most two infinite valuations. This paper describes a practical general method for the explicit determination of all integer solutions of the diophantine equation f(X, Y)  =  0. Several elaborated examples are given. Furthermore, a necessary and sufficient condition for a curve of genus 0 to have infinitely many integer points is obtained.     

Development of SAW based gyroscope with high shock and thermal stability

A novel surface acoustic wave (SAW)-based gyroscope with an 80 MHz central frequency was developed on a 128° YX LiNbO₃ piezoelectric substrate. The developed sensor was composed of a SAW resonator, metallic dots, and two SAW delay lines. A SAW resonator was employed to generate a stable standing wave with a large amplitude, metallic dots were used to induce a Coriolis force and to form a secondary SAW, and two delay lines were formed to extract the Coriolis effect by comparing the resonance frequencies between these two delay lines. Coupling of modes (COM) modeling was conducted to determine the optimal device parameters prior to fabrication. According to the simulation results, the device was fabricated and then measured on a rate table. When the device was subjected to an angular rotation, resonant frequency differences between the two oscillators were observed because of the secondary wave, generated by the Coriolis force, perturbed the propagation of the SAW in the sense element. Depending on the angular velocity, the difference of the resonance frequency was linearly modulated. The obtained sensitivity was approximately 172 Hz deg^?1 s^?1 at an angular rate range of 0–500 deg/s. Device performances depending on different mass weights and temperatures were also characterized. Good thermal and shock stabilities were observed during the evaluation process.     

Development of a novel micromirror based on surface micromaching technology

A novel 3 × 3 micromirror array is designed and successfully fabricated with multi-layer silicon surface micromaching technology. It is composed of bottom electrode, support part and mirror plate, in which a T type beam structure is used to support the mirror plate. It can provide mirror with the vertical movement and the rotation about two horizontal axes, thus enabling phase modulation and amplitude modulation for the incident light. The test results show that the maximum deflection length along the vertical direction of the mirror plate is 2 μm, while the rotation angle about X- and Y-axis are ±2.3° and ±1.45°, respectively.     

Comparing a 10 MHz thickness–shear mode quartz resonator with a commercial process viscometer in monitoring resol manufacture process

This study deals with the applicability of a 10 MHz piezoelectric thickness–shear mode (TSM) quartz resonator in monitoring of an industrial resol manufacture process. The quartz resonator is compared with a commercial process viscometer. Thirteen process batches were monitored concurrently with the two on-line instruments. At the isothermal phase of the manufacturing process, prior to process cut-off, signals from both measuring devices show measurable change in reaction rate. Correlation between the signals of the two instruments was 0.776. In all batch measurements, but one the resonator’s signal was more linear and/or less disturbed than the viscometer’s signal.     

A 5 GHz LC-VCO frequency synthesizer for unlicensed band of WiMAX

This paper presents a low power and low phase noise CMOS integer-N frequency synthesizer based on the charge-pump Phase Locked Loop (PLL) topology. The frequency synthesizer can be used for IEEE 802.16 unlicensed band of WiMAX (World Interoperability for Microwave Access). The operation frequency of the proposed design is ranged from 5.13 to 5.22 GHz. The proposed Voltage-Controlled Oscillator (VCO) achieves low power consumption and low phase noise. The high speed divider is implemented by an optimal extended true single phase clock (E-TSPC) prescaler. It can achieve higher operating frequency and lower power consumption. A new frequency divider is also proposed to eliminate the hardware overhead of the S counter in the conventional programmable divider. The proposed frequency synthesizer consists of a phase-frequency detector (PFD), a charge pump, a low-pass loop filter, a VCO, and a frequency divider. The simulated phase noise of the proposed VCO is −121.6 dBc/Hz at 1 MHz offset from the carrier frequency. The proposed frequency synthesizer consumes 13.1 mW. The chip with an area of 1.048 × 1.076 mm² is fabricated in a TSMC 0.18 μm CMOS 1P6M technology process.     

Development of wireless compressive/relaxation-stress measurement system integrated with pressure-sensitive carbon black-filled silicone rubber-based sensors

In order to detect the installation compressive stress and monitor the stress relaxation between two bending surfaces on a defensive furnishment, a wireless compressive-stress/relaxation-stress measurement system based on pressure-sensitive sensors is developed. The flexible pressure-sensitive stress sensor array is fabricated by using carbon black-filled silicone rubber-based composite. The wireless stress measurement system integrated with this sensor array is tested with compressive stress in the range from 0 MPa to 3 MPa for performance evaluation. Experimental results indicate that the fractional change in electrical resistance of the pressure-sensitive stress sensor changes linearly and reversibly with the compressive stress, and its fractional change goes up to 355% under uniaxial compression; the change rate of the electrical resistance can track the relaxation stress and give out a credible measurement in the process of stress relaxation. The relationship between input (compressive stress) and output (the fractional change in electrical resistance) of the pressure-sensitive sensor is ΔR/R₀ = σ × 1.2 MPa^?1. The wireless compressive stress measurement system can be used to achieve sensitivity of 1.33 V/MPa to the stress at stress resolution of 920.3 Pa. The newly developed wireless stress measurement system integrated with pressure-sensitive carbon black-filled silicone rubber-based sensors has advantages such as high sensitivity to stress, high stress resolution, simple circuit and low energy consumption.     

Simulation of solid thermal explosion and liquid thermal explosion of dicumyl peroxide using calorimetric technique

Dicumyl peroxide (DCPO), is produced by cumene hydroperoxide (CHP) process, is utilized as an initiator for polymerization, a prevailing source of free radicals, a hardener, and a linking agent. DCPO has caused several thermal explosion and runaway reaction accidents in reaction and storage zone in Taiwan because of its unstable reactive property. Differential scanning calorimetry (DSC) was used to determine thermokinetic parameters including 700 J g^–1 of heat of decomposition (ΔH_d), 110 °C of exothermic onset temperature (T₀), 130 kJ mol^–1 of activation energy (E_a), etc., and to analyze the runaway behavior of DCPO in a reaction and storage zone. To evaluate thermal explosion of DCPO with storage equipment, solid thermal explosion (STE) and liquid thermal explosion (LTE) of thermal safety software (TSS) were applied to simulate storage tank under various environmental temperatures (T_e). T_e exceeding the T₀ of DCPO can be discovered as a liquid thermal explosion situation. DCPO was stored under room temperature without sunshine and was prohibited exceeding 67 °C of self-accelerating decomposition temperature (SADT) for a tank (radius = 1 m and height = 2 m). SADT of DCPO in a box (width, length and height = 1 m, respectively) was determined to be 60 °C. The TSS was employed to simulate the fundamental thermal explosion behavior in a large tank or a drum. Results from curve fitting demonstrated that, even at the earlier stage of the reaction in the experiments, ambient temperature could elicit exothermic reactions of DCPO. To curtail the extent of the risk, relevant hazard information is quite significant and must be provided in the manufacturing process.     

Design,fabrication, and testing of MEMS solid propellant thruster array chip on glass wafer

This paper presents the internal ballistic design, fabrication procedure, and performance evaluation of a micro-electro mechanical systems (MEMS) solid propellant thruster array chip. The internal ballistic design was carried out to predict the performance of the thruster. Two different ignition models were used. The numerical results gave a maximum thrust of 3840 mN, and a total impulse of 0.42 mNs at the local ignition model. A photosensitive glass wafer only was used as the bare material for the thruster. The stability of the micro-igniter was improved by using a glass membrane with a thickness of tens of microns. The average thickness of the membrane was 35 μm. The proposed micro-igniter had a level of power consumption appropriate to ignite the solid propellant. The thermal, electrical, and mechanical characteristics of the fabricated micro-igniter were measured. The solid propellant was loaded into the propellant chamber without resort to a special technique due to the high structural stability of the glass membrane. An MEMS solid propellant thruster (MSPT) array was fabricated through anisotropic etching of photosensitive glass. An ignition control system was developed to control the ignition sequence. Ignition and combustion tests of the fully assembly MEMS thruster were performed successfully. The minimum ignition delay was 27.5 ms with an ignition energy of 19.3 mJ. The average of the measured maximum thrust and total impulse were 3619 mN and 0.381 mNs, respectively.     

Algorithms for acoustic localization based on microphone array in service robotics

This paper deals with the development of acoustic source localization algorithms for service robots working in real conditions. One of the main utilizations of these algorithms in a mobile robot is that the robot can localize a human operator and eventually interact with him/herself by means of verbal commands. The location of a speaking operator is detected with a microphone array based algorithm; localization information is passed to a navigation module which sets up a navigation mission using knowledge of the environment map. In fact, the system we have developed aims at integrating acoustic, odometric and collision sensors with the mobile robot control architecture. Good performance with real acoustic data have been obtained using neural network approach with spectral subtraction and a noise robust voice activity detector. The experiments show that the average absolute localization error is about 40 cm at 0 dB and about 10 cm at 10 dB of SNR for the named localization. Experimental results describing mobile robot performance in a talker following task are reported.     

Photonic crystal slabs with hexagonal air holes fabricated by selective area metal organic vapor phase epitaxy

It is shown that the photonic crystal slab (PCS) with hexagonal air holes has band gaps in the guided mode spectrum, which can be compared to that of the PCS with circular air holes, thus it is also a good candidate to be used for the PC devices. The PC with hexagonal air holes and a = 0.5 μm and r = 0.15 μm was fabricated successfully by selective area metal organic vapor phase epitaxy (SA-MOVPE). The vertical and smooth sidewalls are formed and the uniformity is very good. The same process was also used to fabricate a hexagonal air hole array with the width of 0.1 μm successfully. The air-bridge PCS with hexagonal air holes and a = 0.3 μm and r = 0.09 μm was also fabricated successfully by SA-MOVPE. Further optimization of the growth conditions for the sacrificial layer and the selective etching of the GaAs cap layer is also needed. Our experimental results indicate that SA-MOVPE is a promising method for fabricating PC devices and photonic nanostructures.     

An architecture of a high-speed digital hologram generator based on FPGA

In this paper, a hardware architecture to generate a computer-generated hologram (CGH) in a real-time is proposed and implemented in FPGAs. The algorithm that generates digital hologram is reinterpreted and rearranged for higher operation speed. In order to optimize the hardware architecture and performance, the precision is analyzed using fixed-point simulation. The bit-width inside the hardware is obtained by numerical and visual precision analysis. The structure of the basic calculational unit (CGH Cell), an arrangement of these cells (CGH Kernel) to calculate a row of a hologram, and a processor (CGH Processor) with the kernels to perform the modified CGH algorithm are proposed.The proposed processor was implemented with Xilinx XC2VP70 FPGAs. A 1408 × 1050 sized hologram for a 3D object consisting of 10,000 light sources can be generated in 0.0093 [s] at the operating frequency of 285 MHz. Our architecture showed 37.32% and 87.32% higher speed than the best previous work when 1408 cells and 5632 cells are used, respectively.     

Thick film sensors based on laccases from different sources immobilized in polyaniline matrix

Thick film electrode based biosensors containing Trametes versicolor (TvL) and Aspergillus niger (AnL) laccases and Agaricus bisporus tissues (AbT) were developed for the determination of phenolic compounds and the measurement was based on oxygen consumption in relation to analyte oxidation. The electrodeposited organic polymer; polyaniline was used as a matrix for the immobilization in the preparation of thick film sensors. The systems were calibrated for different phenolic substances. A linearity was obtained in concentration range between 0.4 and 6.0 μM phenol, 0.2 and 1.0 μM catechol, 2.0 and 20.0 μM l-DOPA for TvL based biosensor; for AnL based enzyme electrode 0.4 and 4.0 μM phenol, 0.4 and 15 μM catechol, 0.4 and 6.0 μM l-DOPA; for AbT electrode 1.0 and 10 μM phenol, 0.4 and 1.6 μM catechol, 1.0 and 10 μM l-DOPA, respectively, in the response time of 300 s. Furthermore, as well as sample application and accuracy, optimum pH, temperature and thermal stabilities of the proposed systems were also detected.