用InO3薄膜制成的高感度半导体O3传感器

用& ? ( ??% 。作敏感膜研制出小型固态高感度?? ) ? ? ) +, +?+. / % ?? ?? 义?? 一0 一? 又?? 一1 % ? ! 传感 器 研究了膜厚、气体湿度和工作温度等对传感器敏感特性的影响, 发现2 3 4 ?? 2 5 )6 7 8. +6 ? 39 9? : . 4 7; ? ) +). 67 % 型? ! 传感器具有灵敏的响应特性 并分析了薄膜表面的化学吸附及其对 薄膜电导的影响, 以及2 3 4 作用对? ! 非常敏感的物理机制 关键词< = 传感器高感度& ? ( < ! 薄膜化学吸附德拜长     

WO_3/Si-NPA复合薄膜的电容湿度传感性能研究

制备了基于硅纳米孔柱阵列(Si-NPA)的WO3/Si-NPA复合薄膜,并对其表面形貌进行了表征,研究了其电容湿度传感性能和基点电容的温度漂移。研究表明:WO3/Si-NPA继承了衬底Si-NPA规则的阵列结构的表面形貌特征,WO3的沉积形成了连续的WO3薄膜,WO3/Si-NPA是一种典型的纳米复合薄膜。室温下,WO3/Si-NPA的电容值随测试频率的增加而单调减小,但其灵敏度则在100 Hz时达到最大值。在此测试频率下,当环境的相对湿度从11%RH增加到95%RH时,元件的电容增量高达16 000%,显示WO3/Si-NPA对环境湿度有较高的灵敏度。同时,电容的湿度响应曲线显示出很好的线性。对其基点电容的温度稳定性研究表明:WO3/Si-NPA用作湿度传感的最佳工作温度区为15~50℃。     

基于复合微凝胶薄膜的柔性电容式湿度传感器研究

近年来，柔性电子技术的快速发展使得湿度传感器广泛应用于人体健康监测、电子皮肤和非接触控制等新兴应用领域。不同于传统的刚性湿度传感器，柔性湿度传感器因具有舒适的可穿戴性、成本低和制作工艺简单等特点备受研究者的关注。然而，探索一种理想的传感材料来改善柔性湿度传感器的性能仍然是目前存在的挑战。开发了一种简单、低成本且可扩展的制造方法，构建了基于聚(N-异丙基丙烯酰胺-共-丙烯酸)/聚二甲基二烯丙基氯化铵(P(NIPAm-co-AAc)/PDADMAC)复合微凝胶薄膜的柔性电容式湿度传感器。实验证明，该湿度传感器具有较宽的湿度检测范围(20%～90%RH)、高灵敏度(5.06%/%RH)、快速的响应/恢复时间(3.5 s/2.5 s)、良好的重复性以及长期稳定性。其出色的湿度传感性能和高度柔韧性在用于人体健康监测的柔性可穿戴设备中具有很大前景。     

基于光纤布拉格光栅湿度传感器的研究

文章基于光纤布拉格光栅对温度、湿度等敏感的基础上,分析了以聚酰亚胺（PI）薄膜为湿敏涂层,当湿度变化时,由于涂层的膨胀,导致光纤布拉格光栅产生应变,从而对湿度传感。理论分析与实验证明,光纤布拉格光栅湿度传感器是一种性能良好的湿度传感器。     

多孔硅相对湿度传感器的设计

基于对三明治型与平铺型两种多孔硅湿度传感器结构的灵敏度分析与比较,结合两种结构的优点,设计出新的传感器的结构。通过对该结构湿度传感器的性能测试,得出该传感器的灵敏度为1.1 pF/RH%,响应时间为73 s,温度湿度系数为0.5%RH/℃,该湿度传感器适用于在中低湿环境中测量,在每隔20 d的时间对传感器跟踪测试,证明该传感具有较好的稳定性。此外为了传感器可以自解吸附,该传感器采用多晶硅为传感器加热除湿,在金属电极上溅射一层钝化层以防止电极被水汽腐蚀。     

基于QCM的湿度传感器等效电路模型研究

基于石英晶体微天平(QCM)的湿度传感器是一种以石英晶体为核心元件的新型高灵敏度传感器.根据气相中晶体振荡电路的起振和稳定条件,对晶体表面敏感薄膜吸附水分时等效电路参数的变化进行建模,得到了一种新型的基于QCM的湿度传感器等效电路模型.通过电路仿真软件PSPICE对模型进行仿真,并搭建QCM湿度传感器实验测量平台,结果验证了基于QCM的湿度传感器等效电路模型的有效性和正确性,对QCM湿度传感器的振荡电路的进一步设计和优化具有指导意义.     

集成加热功能高分子电容式湿度传感器研究

针对高空气象探测领域中温湿度骤变产生水分凝结而影响测量精度问题，开展了集成加热功能的湿度传感器研究，通过仿真手段，优化了加热器结构；通过对感湿膜成膜工艺进行研究，提高了传感器灵敏度、降低了湿滞和响应时间；通过将MEMS工艺与有机薄膜成膜工艺相结合，实现了湿度传感器制作。按照湿度传感器测试方法进行了性能测试，结果表明，该湿度传感器灵敏度> 0.40 pF/%RH、湿滞<1.5%RH、非线性<1.5%、响应时间<2 s；对加热器除湿能力进行了试验，结果表明，启动加热2 s即可有效去除湿度传感器表面的液态水滴。     

聚苯胺/TiO2修饰的QCM气敏传感器及湿度影响研究

用气敏传感器检测三甲胺在食品检验和环境监测等领域具有广泛意义,而湿度影响在这些实际应用中通常无法避免,如何补偿和校正湿度干扰是传感器设计和使用中的重要课题.考察了一种以聚苯胺/TiO2复合材料为敏感膜的QCM气敏传感器在干燥和不同湿度气氛中对三甲胺气体的响应特性,结果表明均呈现出良好的线性敏感性.发现了在湿度干扰下的传...     

基于丝网印刷的柔性湿度传感器研究

柔性是可穿戴类设备的基本属性,柔性湿度传感器可以用于检测皮肤湿度、呼吸频率等与人体健康密切相关的生理参数。为了满足丝网印刷的工艺需求,提出了一种银导电墨水的制备方案,分析了加热板、回流焊、马弗炉以及真空管式炉四种不同退火方式对银导电薄膜生长的影响,发现了加热板烧结后的银导线导电率高且成品阻值方差小。使用导电墨水制备电极,聚苯乙烯磺酸钠作为湿敏材料,在柔性衬底聚酰亚胺上印刷制备了平板式电容湿度传感器。该传感器在10%RH～90%RH湿度范围内可实现16.27 pF/%RH的灵敏度和1.65%RH的湿滞,具有良好的稳定性(最大误差0.22%)。通过对导电墨水的制备和烧结方式的研究,利用丝网印刷工艺制备了电容式柔性湿度传感器,为柔性湿度传感领域提供了参考。     

电化学适体传感器研究进展

核酸适体作为一种新型的分子识别元件,由于其相对于抗体的诸多优势,已被广泛地应用于生物传感、药物分析及临床诊断等方面。电化学适体传感器同时结合了核酸适体与电化学分析方法的优势,成为了近年来生物传感领域的一个非常令人关注的研究热点。该文主要根据传感器信号变化方式将电化学适体传感器分为signalon型和signal-off型,着重对近年来这两类传感器的新型传感设计方案进行分析和综述,并对未来电化学适体传感器的发展方向进行了展望。     

Fabrication and liquefied petroleum gas (LPG) sensing performance of p-polyaniline/n-PbS heterojunction at room temperature

In the present work, we report the fabrication and liquefied petroleum gas (LPG) sensing performance of p-polyaniline/n-PbS heterojunction at room. The p-polyaniline/n-PbS heterojunction was fabricated by electrodepositing polyaniline on predeposited PbS thin film by chemical bath deposition. The PbS and polyaniline films were characterized for their structural as well as surface morphological analyses. The XRD analyses revealed that PbS thin film is polycrystalline whereas polyaniline exhibited amorphous nature. The scanning electron micrographs of PbS film showed the formation of compact and well covered nanograins whereas, polyaniline has interconnected fuzzy nanofibrous architecture. Room temperature LPG response of heterojunction in forward biased condition showed the maximum response up to 70% at 0.06 vol.% of LPG.     

A nitric oxide gas sensor based on Rayleigh surface acoustic wave resonator for room temperature operation

A Rayleigh surface acoustic wave (RSAW) resonator with polyaniline/tungsten oxide nanocomposite thin film is investigated as a gas sensor for detecting the presence of nitric oxide (NO) in air. The sensor developed in this work was sensitive to NO gas at room temperature. It is shown that the sensor had a frequency shift of 1.2 ppm when it was exposed to 138 ppb NO. The negative frequency response increased with NO concentration increasing. The response and recovery times of the NO sensor in this work were about 20-80 s. In addition, this RSAW sensor also exhibited reversibility and repeatability to the presence of NO gas. Especially, the presented sensor showed high selectivity with NO gas to separate from NO₂ and CO₂ gases.     

High-performance liquefied petroleum gas sensing based on nanostructures of zinc oxide and zinc stannate

Toxic and combustible gas detection plays a major role in environmental air quality monitoring. Real-time monitoring of hazardous gases and signal of accidental leakages is of great importance owing to the concern for safety requirements in industries and household applications. A simple and economical method for the fabrication of highly sensitive zinc oxide (ZnO) nanorods based gas sensors for detecting low concentrations of Liquefied Petroleum Gas (LPG) was studied in this work. Platinum (Pt) nanoparticles were deposited on the sensing medium which acts as catalysts to improve the sensor performance. The change in electrical resistance of the metal oxide semiconductor for varying concentrations of LPG was measured. Maximum response of 59% was achieved for 9000 ppm LPG at 250 °C. Further to improve the sensing performance of the sensor towards LPG, surface modification of ZnO nanorods using zinc stannate (Zn₂SnO₄) microcubes was performed. High response of 63% was observed for 3000 ppm LPG at 250 °C. Significant improvement in response of the sensor with Zn₂SnO₄ microcubes on ZnO nanorods was observed when compared to sensor with ZnO nanorods.     

LPG sensing properties of ZnO films prepared by spray pyrolysis method: Effect of molarity of precursor solution

Nanocrystalline ZnO films were deposited onto glass substrates by spray pyrolysis of zinc nitrate solutions and used as a liquid petroleum gas (LPG) sensor. The dependence of the LPG sensing properties on the molar concentration of zinc nitrate solutions was investigated. The ZnO films were oriented along (0 0 2) with the hexagonal crystal structure. The grain size and grain density increased with an increase in molar concentration of zinc nitrate solutions. The gas sensing properties for LPG of the ZnO films for LPG with different grain sizes were measured at different temperatures. The maximum sensitivity of 43% at the operation temperature of 673 K was found for the ZnO film prepared by spraying a 0.1 M solution. The ZnO thin films exhibited good sensitivity and rapid response–recovery characteristics to LPG. Further, it has been shown the gas sensitivity of the ZnO gas sensor depends upon its grain size.     

WO_3气敏薄膜的膜厚对气体响应时间的影响

用简单的模型分析了薄膜气体传感器敏感材料的膜厚对气体响应时间的影响,该模型适用于分析WO3薄膜气体传感器的敏感特性。薄膜气体传感器的敏感特性依赖于气体原子在薄膜内的扩散和与气敏材料的响应;而气体原子在薄膜内的扩散是由薄膜厚度决定的。经过推导得出理论上WO3薄膜对NH3的敏感特性,并将其与实验所得的数据进行比较。最后,给出了WO3薄膜气体传感器的气敏特性与气体在其膜内扩散和膜厚的关系。     

Light-addressable suspended-gate gas sensor

A light-addressable potentiometric sensing (LAPS) system has been applied to construct an oxygen sensor using a suspended-gate electrode. The sensor principally consists of an MIS structure, i.e., suspended gate/air gap/LaF₃/SiO₂/Si. The use of the suspended gate makes it possible to realize a contactless sensing system, which provides a flexible structure to integrate multiple sensing elements on a single-chip semiconductor surface. The sensor shows a stable response at room temperature to oxygen partial-pressure changes in the range 0.25-1.0 atm. The fabrication conditions of the LaF₂ film are also discussed.     

Polyaniline–TiO2 nano-composite-based trimethylamine QCM sensor and its thermal behavior studies

Inorganic/organic composites are very attractive due to synergetic behavior and a wide range of potential use. A polyaniline–TiO₂ nano-composite, obtained by combination of chemical polymerization and a sol–gel method, was deposited on the electrode of quartz crystal to implement a quartz crystal microbalance (QCM) chemical sensor. The morphology of the composite film was studied by scanning electron microscopy (SEM) measurements. The coated quartz crystal and a non-coated quartz crystal were mounted in a sealed chamber, and their frequency difference was monitored. When analyte vapor was injected into the chamber, gas absorption decreased the frequency of the coated quartz crystal and thereby caused an increase of the frequency difference between the two crystals. The frequency difference change response towards trimethylamine was evident and could be recovered by N₂ purgation easily. The calibration curve towards trimethylamine, its long-term stability and selectivity were investigated. The thermal behavior of the sensing characteristics was compared with that of a polyaniline QCM sensor. Fourier transform infrared (FTIR) spectra of polyaniline and polyaniline–TiO₂ nano-composite and QCM data under various conditions were used to study the effect of thermal treatment.     

基于Si-NPA的BaTiO3薄膜的电容湿敏性能研究

采用溶胶-凝胶和旋涂技术制备了基于Si-NPA的BaTiO3薄膜(BaTiO3/Si-NPA).场发射扫描电镜和X射线衍射实验表明,钙钛矿结构BaTiO3薄膜很好地覆盖了Si-NPA表面.通过蒸镀双面梳状电极,制作了电容型BaTiO3/Si-NPA湿敏元件并对其湿敏性能进行了测试.结果表明,室温下湿敏元件在11%～95%RH范围内具有很高的灵敏度和较快的响应速度,且电容值的对数对湿度呈现出很好的线性.虽然该薄膜湿敏元件在不同湿度下均存在温度漂移,但分析表明这种漂移有可能通过电极设计或信号补偿加以解决.     

固体电解质硫化氢气体传感器的特性研究

采用溶胶-凝胶法制备NASICON(钠离子导体)固体电解质及镍/钛复合氧化物材料。并以NASICON为离子导电层,镍/钛复合氧化物为敏感电极制作固体电解质硫化氢气体传感器。在260-380℃温度范围内,以镍/钛复合氧化物为敏感电极制作的器件对1.10-6～100.10-6硫化氢具有良好的敏感特性。在320℃时器件的灵敏度(斜率)为-72.4mV/decade。并且器件具有良好的选择性、抗湿性及响应恢复特性。器件对5.10-6,50.10-6硫化氢的响应时间为10s,4s和20s,40s。最后对器件的敏感机理做了分析。     

Nano- and microsized metal oxide thin film gas sensors

Functional micro- and nanosized metal oxide thin film structures are very promising candidate for future gas-sensors. Their reduced size offers an increased surface to volume ratio thus improving sensitivity and sensor performance. Whilst most experimental nanostructures are produced using a bottom-up approach, a top-down sputtering technique for structuring nano-sized gas sensitive metal oxide areas is presented in this letter. Oxidised silicon wafers were used as substrates. The silicon dioxide film of 1 μm thickness was prepared by thermal oxidation in order to insulate the gas sensing elements from the substrate. The sensor chips had an overall size of (1.5 × 1.5) mm² onto which a Ta/Pt film (20/200 nm thickness) was deposited and patterned to act as electrodes, heater and temperature sensor. In a second step micro-scaled tin dioxide layers (60 nm thick, 5 μm width) were deposited by sputtering techniques and photolithographical patterning between the platinum micro-electrodes (4 μm gap). Finally, the width of the stripes was reduced using focused ion beam technology to obtain the desired size and structure. This enables the control of the dimensions of the structures down to the resolution limit of the FIB-system which is about 10 nm. The structural and electrical characterisation of the sensors and their responses during exposure to several test gases including O₂, CO, NO₂ and H₂O are presented as well.