基于高压静电纺丝法制备P(VDF-TrFE)/ZnO/GR复合膜压电性能的研究

提出了一种利用高压静电纺丝法制备P(VDF-TrFE)/ZnO/Graphene(以下简称GR)复合纳米纤维薄膜的方法，并对其压电性能进行了研究。首先，利用扫描电镜（SEM）观测复合薄膜的表面形貌并分析其X射线衍射（XRD）图谱。其次，将薄膜封装为三明治结构的压电纳米发电机(PNG)并研究了其压电性能。结果表明，含10%ZnO、0.1%GR的P(VDF-TrFE)/ZnO/GR复合薄膜压电纳米发电机开路输出电压和短路输出电流峰值为12.6V、7.88μA，约是纯P(VDF-TrFE)薄膜的2.7倍、3.1倍。在激振力大小3.5N，频率为5HZ的条件下P(VDF-TrFE)/ZnO/GR压电纳米发电机的最大瞬时输出功率为33.85μW，持续激振21分钟后，LTC3588-1毫微功率能量收集电源可以稳定输出3.3V电压1.5s。P(VDF-TrFE)/ZnO/GR压电纳米发电机具有良好的压电性能，具有成为自供电设备的潜力。     

高压静电纺丝工艺制备PVDF-ZnO/GR共聚物膜的压电性能研究

提出了一种利用高压静电纺丝工艺制备PVDF/ZnO及PVDF/Graphene(以下简称GR)共聚物膜的方法并对其压电性能进行了研究。通过在传统的PVDF溶液中混入氧化锌和石墨烯,制备得到PVDF共聚物膜,对PVDF,PVDF/ZnO,PVDF/GR三种膜进行电镜扫描以表征其表面结构。对三种压电薄膜进行了压电响应对比实验,PVDF,PVDF/ZnO,PVDF/GR三种薄膜的压电响应峰值分别达到16.8 V,29.6 V,21.7 V。PVDF/ZnO压电薄膜对比PVDF压电薄膜的电压峰值提高12.8 V。PVDF/GR压电薄膜对比PVDF压电薄膜的电压峰峰值提高了4.9 V。对三种压电薄膜进行了能量收集实验,PVDF,PVDF/ZnO,PVDF/GR三种薄膜分别令LED灯点亮11.3 s,17 s,14.6 s,输出功率密度为6.79μW/cm^2,19.28μW/cm^2,15.11μW/cm^2。PVDF共聚物膜对比PVDF膜在压电性上有显著提高,可应用于压电能量收集或可穿戴传感器等应用领域。     

基于柔性基底的压电能量收集器的设计

以PDMS为柔性基底设计的PVDF压电薄膜新型压电能量收集器压电性能良好,柔韧性强,可适应复杂的振动环境,具有广阔的应用前景.首先设计了具有柔性基底的压电能量收集器的结构;其次,用PVDF颗粒采用静电纺丝法制备了PVDF压电薄膜;最后,实验表明设计的压电能量收集器在振动频率为25 Hz,振动幅度为2 mm的激励下,开路输出峰值电压为8.38 V,输出功率密度为6.32 μW/cm2;经Ansys有限元分析,发现增大激励源的振动幅度,可以提高压电能量收集器的开路输出电压和输出功率.     

基于BTO／CNTs复合压电薄膜制备

介绍了一种新型的钛酸钡／碳纳米管（BTO／CNTs）压电薄膜的制备方法及其特性研究,利用BTO纳米颗粒、CNTs和聚二甲基硅氧烷（PDMS）作为原材料,采用改进的sol—gel法制备出厚度均匀的复合薄膜,使用油浴极化法在一定条件下对复合薄膜极化。并利用SEM表征制备复合薄膜的掺杂效果,发现CNTs的加入加快了电子的转移速率。在周期性的外力作用下,发现其电压输出波形符合阻尼振荡模型,并测试不同配比下复合薄膜的压电电压输出,得出最佳BTO／CNTs质量比为10：l时,薄膜的输出电压最高可达4V。     

一种基于高压静电纺丝工艺制备的P(VDF-TrFE)/PZT压电传感器及其在睡眠监测中的应用

针对日常睡眠监测的需求,提出一种基于高压静电纺丝工艺制备的P(VDF-TrFE)/锆钛酸铅(PZT)压电传感器并对其性能进行了研究。首先,介绍了P(VDF-TrFE)/PZT压电传感器的制作及封装流程。其次对其灵敏度,频率响应特性,瞬时响应和稳定性等进行了测试。结果表明,该传感器不仅具有良好的微观外貌形态,且相比于纯P(VDF-TrFE)压电传感器0.73 V/N的灵敏度,制备的含30%PZT的P(VDF-TrFE)/PZT压电传感器灵敏度是纯P(VDF-TrFE)压电传感器的2.5倍,达到了1.78 V/N。此外在低频下能够保持稳定压电输出且具备2 ms较快的响应时间。最后采用自制的P(VDF-TrFE)/PZT压电传感器测量人体心冲击信号,并通过支持向量机(SVM)训练睡眠分期模型实现了对睡眠质量的监测,四分类模型平均准确率达到72.5%,为可穿戴睡眠监测传感器的选择提供了参考。     

压电驱动器的电致振动特性研究

旨在分析压电驱动器的电激励振动特性。以双晶压电悬臂梁为对象,基于能量法和热力学平衡方程推导了压电悬臂梁在电压激励下的强迫振动微分方程。利用自行搭建的电激励振动试验系统,测试了不同幅值交流电压激励下压电梁的谐响应和瞬态响应。通过试验验证了理论分析的合理性,讨论了激励电压和阻尼对谐响应和瞬态响应的影响。结果表明：压电悬臂梁的谐响应呈非线性,具有弹簧渐软特性;压电梁的共振频率随激励电压幅值的增大而减小,在6V、9V、12V交流电压激励下,压电梁的共振频率分别为55.6Hz、54.8Hz、54.4Hz;当激励电压频率等于压电梁的固有频率时,其横向振幅达到峰值;当激励电压频率逐渐远离压电梁的固有频率时,其振幅则迅速降低;激励电压频率接近共振频率时梁会发生“拍振”现象;阻尼对压电梁的共振抑振作用最为明显。     

柔性复合压电薄膜的制备及其电导率研究

将具有优异导电性能的碳纳米管(CNT)与压电材料钛酸钡(BTO)复合于高分子有机材料聚二甲基硅氧烷(PDMS)中,制备出了具有低内阻的柔性复合压电薄膜,研究了制备的薄膜在不同极化条件下的开路电压以及不同体积配比的BTO/CNT压电薄膜的电导率。实验结果表明,在电场为3.6 kV/mm、温度是90℃、时间为60 min的极化条件下,当BTO与CNT的体积比N为2∶3以及BTO与CNT混合颗粒占PDMS基体的总体积比V为8%时,能得到具有最佳电导率的复合压电薄膜。     

供能于无线传感器网络的微型振动发电机结构性能研究

应用微机电加工技术制造的振动发电机可以无限、持续地为无线传感器网络提供能源。为了提高发电能力,通过有限元仿真与实验分析了单压电片型式、双压电片并联型式和双压电片串联型式振动发电机的结构参数对发电能力的影响规律。结果表明,厚度比小的双压电片串联型式发电机输出开路电压较高;存在某一最优负载,在给定的激励频率下,使得输出功率最大;相同材料、结构参数下,双压电片串联和双压电片并联型式发电机的输出功率基本相同且高于单压电片型式发电机。     

基于高压应力的氮化铝MEMS压电微扬声器北大核心CSCD

基于微电子和微机械加工工艺制备了一类氮化铝AlN(Aluminum Nitride)压电微扬声器。研究了器件薄膜残余应力对器件性能的影响,采用带有高残余压应力的高c-轴取向氮化铝薄膜分别作为器件压电层和支撑层增大微扬声器的输出声压,同时利用工艺手段控制整体薄膜残余应力进一步增大器件输出声压。该微扬声器的悬膜直径仅为1.35 mm,厚度为0.95μm。在开放空间内,采用声压级检测仪对该微扬声器的输出声压级SPL(Sound Pressure Level)进行扫频测试(频率范围:0.5kHz～20 kHz)。测得单个微扬声器在距离为10 mm处,20 Vpp驱动电压下最大输出声压级约为75 dB。测试结果显示该氮化铝压电微扬声器在耳机、智能手机和可穿戴设备等方面都具有潜在的应用前景。     

基于高压应力的氮化铝MEMS压电微扬声器

基于微电子和微机械加工工艺制备了一类氮化铝AlN(Aluminum Nitride)压电微扬声器.研究了器件薄膜残余应力对器件性能的影响,采用带有高残余压应力的高c-轴取向氮化铝薄膜分别作为器件压电层和支撑层增大微扬声器的输出声压,同时利用工艺手段控制整体薄膜残余应力进一步增大器件输出声压.该微扬声器的悬膜直径仅为1.35 mm,厚度为0.95μm.在开放空间内,采用声压级检测仪对该微扬声器的输出声压级SPL(Sound Pressure Level)进行扫频测试(频率范围:0.5 kHz～20 kHz).测得单个微扬声器在距离为10 mm处,20 Vpp驱动电压下最大输出声压级约为75 dB.测试结果显示该氮化铝压电微扬声器在耳机、智能手机和可穿戴设备等方面都具有潜在的应用前景.     

基于ANSYS的声表面波氢气传感器压电分析

设计了声表面波氢气传感器的结构,利用ANSYS软件建立了声表面波传感器的有限元模型,并对SAW氢气传感器进行了仿真,最后用数据处理软件Origin分析了敏感薄膜的材料参数对传感器输出的影响.传感器通人1 000× 10-6的氢气后,钯膜的厚度、密度、弹性模量等发生了相应改变,进而导致输出电压、频率等发生改变.分析表明:...     

MEMS压电-磁电复合式振动驱动微能源的设计

在单一效应的MEMS振动驱动微能源的基础上,提出了一种MEMS压电-磁电复合振动驱动微能源器件。该微能源由八悬臂梁-中心质量块结构和永磁铁两部分组成,环境振动使中心质量块振动,PZT压电敏感单元由于压电效应产生电势差;同时中心质量块上集成的高密度线圈切割磁感线产生感应电动势,将压电转换与磁电转换相结合把振动能转换为电能。建立了该结构的数学模型并用有限分析软件Ansys12.0对该器件进行力学特性分析,最后对加工出的微能源进行性能测试。测试结果表明,该微能源谐振频率为8 Hz,易与环境发生共振;在共振条件下,施加1 gn 的加速度,器件压电发电开路输出电压峰峰值达154 mV,磁电发电开路输出电压峰-峰值达8 mV,有望为无线传感网络节点提供稳定的能源。     

铁磁合金/压电材料复合磁电效应研究

利用高机械品质因数的FeNi基弹性合金,构造了不等长的FeNi基弹性合金/压电叠层磁电复合材料。采用等效电路法分析了复合结构的磁电电压系数、谐振频率、机械品质因数和最大输出功率与磁致伸缩—压电层长度比之间的关系。结果表明:磁电电压系数、机械品质因数及最大输出功率随着FeNi基弹性合金长度的增加而增大并趋于常数,谐振频率随着FeNi基弹性合金长度的增加而减小。     

Design, simulation and fabrication of piezoelectric micro generators for aero acoustic applications

Energy harvesters based on acoustic vibration sources can generate electrical power through piezoelectric transduction. Significant miniaturization of electro mechanical devices using MEMS fabrication technology has encouraged the creation of portable, miniature energy harvesters. A niche application is aero acoustics, where wasted, high dB and high frequency sound generated by aircrafts are transformed into useful energy. Having self-powered, miniature acoustic sensors allows noise detection monitoring systems to be self-sustaining. This paper illustrates an Aluminium doped Zinc Oxide (AZO) cantilever beam on stainless steel substrate with a top copper electrode. Design and finite element modelling of the design was conducted using Coventorware™. The AZO piezoelectric thin film was RF-sputtered on the stainless steel substrate. Characterizations were performed using X-ray diffraction (XRD) and scanning electron microscopy (SEM) to evaluate the piezoelectric qualities and surface morphology, respectively. Experimental measurements indicate approximately 345.4 mV AC output voltage (open circuit voltage) is produced at vibration frequencies of 30 kHz. This is in accordance with the Coventorware™ simulation results. This measured power level is sufficient to power a miniature wireless acoustic sensor nodes to monitor noise generated by aircrafts.     

Closed loop driving and detect circuit of piezoelectric solid-state micro gyroscope

Piezoelectric solid-state micro gyroscope is a novel kind of rotating rate sensor, which is based on the special thickness-shear vibrating mode of a piezoelectric body. Compared with the general vibratory micro gyroscope, it has no evident mass-spring component in its structure, so it has larger stiffness and robust resistance to shake and strike. Therefore, piezoelectric solid-state micro gyroscope can be used in the high-g environment. In this paper, piezoelectric solid-state micro gyroscope working principle is described. The closed loop driving and detect circuit of piezoelectric solid-state micro gyroscope is proposed in order to track the resonance frequency drift, stabilize the driving voltage value and detect the gyroscope output. The closed loop driving circuit (CLDC) mainly contains phase lock loop circuit, automatic gain circuit. Detect circuit mainly contains de-modulator, difference amplifier, Phase shift circuit and low pass filter. Experimental results show that the frequency of CLDC fluctuates within ±15 Hz with the resonance frequency of 357.9 kHz when get its stable status and the fluctuation of reference voltage is within ±7 mv, while the fluctuation of reference voltage in open loop driving circuit is ±23 mv. In the experiment, the sensitivity of the gyroscope with 740 mv/rad/s is observed. The work in the paper provides the theoretical and experimental foundation for realizing for this kind of gyroscope.     

弹光调制压电晶体驱动控制器的设计

针对弹光调制器需要高压、小电流双向正弦电源的工作特点,设计了一种压电晶体驱动控制器,主要由功率放大电路、充放电回路、LC谐振电路等部分组成。它能提供正负输出,并能对压电晶体进行快速充放电。输出正弦电压频率为50.018 kHz,峰-峰值电压可达1 500 V,ZnSe晶体的最大振动位移可以达到4.5μm。实验结果表明,该驱动控制器可满足压电晶体的驱动要求。     

Fabrication of aluminium doped zinc oxide piezoelectric thin film on a silicon substrate for piezoelectric MEMS energy harvesters

Thin film piezoelectric materials play an essential role in micro electro mechanical system (MEMS) energy harvesting due to its low power requirement and high available energy densities. Non-ferroelectric piezoelectric materials such as ZnO and AlN are highly silicon compatible making it suitable for MEMS energy harvesters in self-powered microsystems. This work primarily describe the design, simulation and fabrication of aluminium doped zinc oxide (AZO) cantilever beam deposited on <100> silicon substrate. AZO was chosen due its high piezoelectric coupling coefficient, ease of deposition and excellent bonding with silicon substrate. Doping of ZnO with Al has improved the electrical properties, conductivity and thermal stability. The proposed design operates in transversal mode (d ₃₁ mode) which was structured as a parallel plated capacitor using Si/Al/AZO/Al layers. The highlight of this work is the successful design and fabrication of Al/AZO/Al on <100> silicon as the substrate to make the device CMOS compatible for electronic functionality integration. Design and finite element modeling was conducted using COMSOL? software to estimate the resonance frequency. RF Magnetron sputtering was chosen as the deposition method for aluminium and AZO. Material characterization was performed using X-ray diffraction and field emission scanning electron microscopy to evaluate the piezoelectric qualities, surface morphology and the cross section. The fabricated energy harvester generated 1.61?V open circuit output voltage at 7.77?MHz resonance frequency. The experimental results agreed with the simulation results. The measured output voltage is sufficient for low power wireless sensor nodes as an alternative power sources to traditional chemical batteries.     

一种多输出直流稳压电源的设计

本文提出了一种多输出线性直流稳压电源的设计.该直流供电电源设计以固定式和可调式集成稳压器件为核心,可以提供多个固定的直流电压输出,和一个电压连续可调的直流电压输出.该电源采用了双重过载保护电路和抗干扰技术.经对电源样机的实验测试,该电源性能好、工作可靠,可以满足用于压电传感器的电荷放大器对多种直流电的需要.