共查询到17条相似文献,搜索用时 62 毫秒
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用于侵入性及非侵入性患者监视的固态集成传感器已逐渐可行并令人瞩目,因为这种传感器尺寸缩小,更可靠并结合了单片信号处理.对于许多生物和生理研究程序及一些临床应用,患者的侵入性监视已成为重要的焦点.这些应用包括很广的领域,从物理和化学生物事件的简单测量,如记录单个神经细胞内电化学产生生物势的放电,到增强或恢复障碍功能的全 相似文献
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The fabrication of a micro field effect transistor (FET) pressure sensor using the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process and a post-process has been investigated. The pressure sensor is composed of 16 sensing cells in parallel, and each sensing cell includes a suspended membrane and an NMOS. The suspended membrane is the movable gate of the NMOS. The pressure sensor needs a post-process to obtain the suspended membrane after the CMOS process. The post-process employs etchants to etch the sacrificial layers to release the suspended membrane, and then a low-pressure chemical vapor deposition (LPCVD) parylene is used to seal the etching holes in the pressure sensor. The pressure sensor produces a change in current when applying a pressure to the sensing cells. Experimental results show that the pressure sensor has a sensitivity of 0.022 μA/kPa in the pressure range of 0–500 kPa. 相似文献
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本文提出一种MEMS传感器,单片集成温度和气压的检测单元。该传感器采用SOI硅片的上层硅作为压阻薄膜,因此各管芯的薄膜厚度有良好的一致性。传统的背面体硅腐蚀方法未被采用,因为碱性溶液腐蚀体硅会在<111>面自停止,形成57.4°的斜坡,从而增大管芯面积,取而代之的是ICP深硅刻蚀。片上集成两个PN结,结区面积呈比例,可以实现温度检测功能。测试表明在-40-100℃之间都有良好的线性度,PN结的离子注入工艺与压阻注入工艺完全兼容,减少了工艺成本。 相似文献
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This paper proposes a novel miniature dual-functional sensor integrating both pressure and temperature sensitive units on a single chip.The device wafer of SOI is used as a pizeoresistive diaphragm which features excellent consistency in thickness.The conventional anisotropic wet etching has been abandoned,while ICP etching has been employed to etch out the reference cave to minimize the area of individual device in the way that the 57.4°slope has been eliminated.As a result,the average cost of the singl... 相似文献