回音壁模式光学微腔传感研究进展

简要回顾了近几年回音壁模式光学微腔在传感研究中的应用，其涉及领域包括位移传感、力传感、加速度传感、质量传感、纳米粒子传感、温度传感、角速度传感和奇异点增强传感。对回音壁模式光学微腔在不同领域的传感机理进行了简单介绍，并且对重要的实验工作进行了介绍，指出了提高传感精度的重要因素，为之后的理论和实验研究提供了一定的参考。     

多孔硅层孔隙率对其热绝缘性能的影响

研究了多孔硅层孔隙率对其热绝缘性能的影响机制.以P 型硅片为基底,通过双槽电化学腐蚀法制备多孔硅.采用微拉曼光谱法对多孔硅的热导系数进行了测量,结果表明,多孔硅的热导系数随其孔隙率的增大而明显下降,实验中热导系数最低可达到0.624W/(m·K),从而通过降低热导系数使多孔硅的绝热性能得到了增强.     

多孔硅传感器的研究进展

综述了几种常见的多孔硅传感器的制备方法与敏感特性,并着重对气敏、湿敏、生物敏多孔硅传感器的传感机理做了详细的介绍,论述了多孔硅传感器研究的新动向,展望了它的未来发展.     

图案化厚膜多孔硅制备与表征

图案化多孔硅是微电子、微机械、光电子器件的重要组成部分.实验以含Si3N4保护层的光刻单晶硅片为基底,采用电化学阳极氧化法制备图案化厚膜多孔硅,分析阳极氧化前后Si3N4保护层表面形貌变化特征和光刻尺寸对图案化多孔硅宽度、膜层厚度的影响规律,表征图案化多孔硅的结构、组成与发光性能.结果表明,氧化前Si3N4保护层局部区域出现枝晶,阳极氧化后形成不均匀孔状结构;制备的图案化多孔硅膜厚62～83μm,其横向扩展程度和膜层厚度均随光刻尺寸增大呈减小趋势;图案化多孔硅微结构含大量不规则裂纹和硅柱,新鲜制备的表面含Si-Hx键,其光致发光峰值波长650nm.     

多孔硅的电化学制备与研究

以电化学方法制备了多孔硅材料并通过表面轮廓测试仪、原子力显微镜、显微拉曼光谱仪等设备对制备多孔硅的孔隙率、厚度、表面形貌、以及热导率进行了表征.结果发现,本实验制备的多孔硅属于介孔硅(15～20nm),其孔隙率随腐蚀时间和腐蚀电流的变化有先增大后减小的趋势.增加多孔硅的厚度和孔隙率,可以使得多孔硅的热导率显著降低(最低可低至0.62W/m·K).     

多孔硅在高温退火过程中结构变化的研究

采用电化学腐蚀的方法制备了不同孔径的多孔硅薄膜样品,并在1050℃高温下进行了退火。采用扫描电镜和拉曼光谱对多孔硅退火前后结构的变化进行了观察,根据晶体形核理论分析了孔径变化的机理,并从热力学角度对其微观机制进行了讨论。实验和理论分析的结果均表明,多孔硅的初始孔径存在一个临界值,初始孔径小于此临界值时,孔在高温退火中有收缩的趋势;反之,初始孔径大于此临界值时,孔有变大的趋势。     

基于热绝缘的多孔硅技术及其在微传感器中的应用

介绍了多孔硅的热导率特性以及孔径、孔隙率、热处理等因素对其影响.分析了目前基于热绝缘的多孔硅制备技术发展现状,着重对阶梯电流法和脉冲电流法进行了介绍和比较, 认为脉冲电流法因为其特殊的优势,将在以后的发展中得到更广泛的应用.多孔硅由于其热绝缘特性以及技术优势,已经在微传感器领域得到广泛的应用.     

多孔硅/多孔氧化铝与DBO-PPV复合光致发光特性研究

通过旋涂法,实现了阳极氧化多孔硅和多孔氧化铝与有机发光材料DBO-PPV的复合.发光特性的测试表明,多孔硅与DBO-PPV复合后发光光谱中出现了在多孔硅和DBO-PPV的光致发光谱中都没有的发光峰,被认为是DBO-PPV向多孔硅发生了载流子的转移.而多孔氧化铝/DBO-PPV复合体系的发光特性兼具有多孔氧化铝和DBO-PPV的特征,PL谱呈现多峰的结构(四峰).多孔氧化铝的纳米孔有效地吸附了DBO-PPV分子,抑制了DBO-PPV分子的聚集,使它的禁带宽度变宽,从而使DBO-PPV的发光峰蓝移,蓝移量为90nm.     

多孔硅制备及在太阳能电池中的应用研究进展

多孔硅是通过对单晶硅片进行电化学腐蚀或适当的化学腐蚀而形成的一种纳米结构半导体材料。多孔硅纳米材料因其巨大的表面积、可调谐的光学性质和良好的相容性，被广泛应用于电子器件、生物传感、化学传感、药物传递、生物芯片等诸多领域。当前研究的挑战主要在于开发更简单高效的多孔硅纳米材料合成方法以及提高其在实际应用中的表现。综述了多孔硅纳米材料的制备方法及其光致发光在太阳能电池领域中的应用。     

硅基PZT压电薄膜微开关的设计和制作

对硅基锆钛酸铅（PZT）压电薄膜微开关进行了结构和版图设计，根据MEMS加工工艺和标准硅基IC工艺的特点，获得了硅基PZT压电薄膜微悬臂梁结构系统工艺流程中的关键工艺技术和典型工艺条件，对多孔硅的选择性生长进行了较为详细的实验研究，最后成功的制备出硅基PZT压电薄膜微开关样品，这对集成化芯片系统的进一步发展打下了必要的良好的实验基础。     

Optical sensing of flammable substances using porous silicon microcavities

A porous silicon multilayer, constituted by a Fabry–Pèrot cavity between two distributed Bragg reflectors, is exposed to vapor of several organic species. Different resonant peak shifts in the reflectivity spectra, ascribed to capillary condensation of the vapor in the silicon pores, have been observed. Starting from experimental data, the layer liquid volume fractions condensed in the sensing stack have been numerically estimated. Values ranging between 0.27 (for ethanol) and 0.33 (for iso-propanol) have been found. Time-resolved measurements show that the solvent identification occurs in less then 10 s.     

Smart optical sensors for chemical substances based on porous silicon technology

A simple geometry optical sensor based on porous silicon technology is theoretically and experimentally studied. We expose some porous silicon optical microcavities with different porous structures to several substances of environmental interest: Very large red shifts in the single transmission peak in the reflectivity spectrum due to changes in the average refractive index are observed. The phenomenon can be ascribed to capillary condensation of vapor phases in the silicon pores. We numerically compute the peak shifts as a function of the liquid volume fraction condensed into the stack by using the Bruggeman theory. The results presented are promising for vapor and liquid detection and identification.     

Effect of ultraviolet illumination and ambient gases on the photoluminescence and electrical properties of nanoporous silicon layer for organic vapor sensor

The purpose of this research, the nanoporous silicon layer were fabricated and investigated the physical properties such as photoluminescence and the electrical properties in order to develop organic vapor sensor by using nanoporous silicon. The Changes in the photoluminescence intensity of nanoporous silicon samples are studied during ultraviolet illumination in various ambient gases such as nitrogen, oxigen and vacuum. In this paper, the nanoporous silicon layer was used as organic vapor adsorption and sensing element. The advantage of this device are simple process compatible in silicon technology and usable in room temperature. The structure of this device consists of nanoporous silicon layer which is formed by anodization of silicon wafer in hydrofluoric acid solution and aluminum electrode which deposited on the top of nanoporous silicon layer by evaporator. The nanoporous silicon sensors were placed in a gas chamber with various organic vapor such as ethanol, methanol and isopropyl alcohol. From studying on electrical characteristics of this device, it is found that the nanoporous silicon layer can detect the different organic vapor. Therefore, the nanoporous silicon is important material for organic vapor sensor and it can develop to other applications about gas sensors in the future.     

A micro-system based on glass-nanoporous silicon for optical sensing of organic solvent vapor

We present a recent experimental study on the application of nanoporous silicon (np-Si) to an optical vapor sensor. We fabricated the micro-system based on a glass-nanoporous silicon layer on a p(+)-type silicon wafer. To check the selectivity and sensitivity of the np-Si layer to organic vapors, we prepared three types of np-Si layer samples--a single layer, distributed Bragg reflector (DBR) layer, and microcavity layer--and investigated its reflectance spectra upon exposure to different concentrations of various organic vapors. When the np-Si layer samples were exposed to the organic vapors, a red-shift occurred in the reflectance spectrum, and we determined that this red-shift can be attributed to the changes in the refractive index induced by the capillary condensation of the organic vapor within the pores of the np-Si layer. The np-Si layer samples showed excellent sensing ability to different types and concentrations of organic vapors. After removing the organic vapors, the reflectance spectrum immediately returned to its original state.     

Optical sensors for vapors, liquids, and biological molecules based on porous silicon technology

The sensing of chemicals and biochemical molecules using several porous silicon optical microsensors, based both on single-layer interferometers and resonant-cavity-enhanced microstructures, is reported. The operation of both families of sensors is based on the variation of the average refractive index of the porous silicon region, due to the interaction with chemical substances either in vapor or liquid state, which results in marked shifts of the device reflectivity spectra. The well established single-layer configuration has been used to test a new chemical approach based on Si-C bonds for covalent immobilization of biological molecules, as probe, in a stable way on the porous silicon surface. Preliminary results on complementary oligonucleotide recognition, based on this technique, are also presented and discussed. Porous silicon optical microcavities, based on multilayered resonating structures, have been used to detect chemical substances and, in particular, flammable and toxic organic solvents, and some hydrocarbons. The results put in evidence the high sensitivity, the reusability, and the low response time of the resonant-cavity-enhanced sensing technique. The possibility of operating at room temperature, of remote interrogation, and the absence of electrical contacts are further advantages characterizing the sensing technique.     

Ionic liquids: a new class of sensing materials for detection of organic vapors based on the use of a quartz crystal microbalance

A QCM device employing ionic liquids as the sensing materials for organic vapors has been developed and evaluated. The sensing mechanism is based on the fact that the viscosity of the ionic liquid membrane decreases rapidly due to solubilization of analytes in the ionic liquids. This change in viscosity, which varies with the chemical species of the vapors and the types of ionic liquids, results in a frequency shift of the corresponding quartz crystal. The QCM sensor demonstrated a rapid response (average response time of less than 2 s) to organic vapors with an excellent reversibility because of the fast diffusion of analytes in ionic liquids. Furthermore, the ionic liquids, with zero vapor pressure and stable chemical properties, ensure a long-term shelf life for the sensor.     

Design, fabrication and optical characterization of cerium oxide-magnesium fluoride double layer antireflection coatings on monocrystalline silicon substrates

Theoretical and experimental studies of a double layer antireflection coating deposited onto silicon wafers have been carried out. Magnesium oxide and cerium oxide fabricated by physical vapor deposition method have been applied as low- and high-refractive index materials. MgF₂–CeO₂–Si structures exhibited the reflectivity below 3% in the wavelength window from 0.5 μm to 1.2 μm. Theoretical simulations of spectral characteristics of the reflectivity of these coatings have been performed. A good correlation between experimental data and theoretical curves has been observed with the assumption that a thin SiO₂ layer of a thickness of 16 nm is formed onto Si substrates.     

Ordered‐Assembly Conductive Nanowires Array with Tunable Polymeric Structure for Specific Organic Vapor Detection

An artificial organic vapor sensor based on a finite number of 1D nanowires arrays can provide a strategy to allow classification and identification of different analytes with high efficiency, but fabricating a 1D nanowires array is challenging. Here, a coaxial Ag/polymer nanowires array is prepared as an organic vapor sensor with specific recognition, using a strategy combining superwettability‐based nanofabrication and polymeric swelling‐induced resistance change. Such organic vapor sensor containing commercial polymers can successfully classify and identify various organic vapors with good separation efficiency. An Ag/polymer nanowires array with synthetic polyethersulfone polymers is also fabricated, through molecular structure modification of the polymers, to distinguish the similar organic vapors of methanol and ethanol. Theoretical simulation results demonstrate introduction of specific molecular interaction between the designed polymers and organic vapors can improve the specific recognition performance of the sensors.     

Development and Applications of Continuous-Wave Cavity Ring-Down Spectroscopy

Continuous-wave cavity ring-down spectroscopy (CW-CRDS) (using continuous-wave lasers) is now in widespread use for the sensitive detection of a range of different trace-gas species, including water vapor as a very important trace contaminant in many gases. It has also now been applied to monitor trace water vapor in a range of matrix gases, including those that are corrosive and have the potential for spectral interference with the target water-vapor species. The developments that have been carried out to achieve this will be discussed, and some of the applications, covering single sensors and multi-head sensors, will be presented. One limitation of the current sensor technology is that it uses mirrors that are highly reflective over a very restricted spectral range, and this limits a given sensor to the measurement of one or two gaseous species. Measurements of other species require the mirrors to be changed, as it is not currently practical to obtain mirrors with the required high reflectivity that also cover a large spectral range. The development of a new type of ring-down cavity that uses uncoated reflective optics, and which can be used from the ultraviolet to the infrared spectral regions, is presented. Examples of industrial and scientific applications are also presented.     

化学气相沉积金刚石薄膜生长的原位反射率测量

报道了化学气相沉积金刚石薄膜生长的原位反射率测量,提出了监控金刚石薄膜生长的激光反射多光束干涉的数学模型。通过原位反射率的测量,精确监控了金刚石薄膜的生长厚度,成功地制备了红外增透增,这种方法的测量装置简单、紧凑而且可靠。