高反射膜抗激光损伤的研究进展

介绍了高反射膜的研究现状和意义,重点综述了高反射膜的制备方法,损伤阈值测定,抗激光损伤性能的研究,以及研究热点,最后对其前景进行了展望.     

氧化铝陶瓷表面连续导电金膜的制备工艺及性能

以Al2 O3陶瓷作为基底,采用磁控溅射和丝网印刷两种工艺在其表面制备导电Au膜,并通过控制变量法制备不同参数下不同厚度的Au膜,对两种制备工艺进行了系统性的深入研究.通过高精度电阻测量仪、扫描电子显微镜(SEM)、能谱仪(EDS)分析热处理前后Au膜的导电性能及微观形貌,采用激光共聚焦显微镜(CLSM)表征Au膜表面的粗糙度.结果表明:磁控溅射制备的纳米Au膜的导电膜厚阈值为30 nm,膜层对基底面粗糙度改变较小.对纳米Au膜进行600℃热处理后,Au发生固态润湿,导致电阻值急剧增大,导电性能下降.借助丝网印刷工艺,采用40％(质量分数)的金浆和200目丝网即可印刷得到导电性良好的Au膜,该工艺能够有效节约成本和金浆.     

中频双靶反应磁控溅射制备TiO2膜的一些探索

具有高折射率的TiO2膜在反射型液晶显示器的关键部件高反射率背板膜系的制备中起重要作用，本文使用国内首家在线中频双靶反应磁控溅射设备进行了制备TiO2膜的探索，完成了相应的膜层测试与分析。实验结果表明双靶磁控反射溅射可以制备高折射率的TiO2膜，实验还从折射率的角度证明中频双靶反应溅射与直流反应溅射的效果一致,为进一步提高膜层沉积速率以适应工业生产需求需要引入更有效的溅射过程控制手段。     

不同技术制备DLC膜的激光损伤特性研究

随着高能量大功率激光器的发展和激光元件的广泛应用,用于红外窗口表面增透保护的类金刚石薄膜(DLC)的抗激光损伤特性成为评价薄膜质量优劣的一个重要指标。然而,不同的制备方法和技术沉积的DLC薄膜具有各异的微观结构,从而具有不同的抗激光损伤特性。本文采用脉冲真空电弧(PVAD)和非平衡磁控溅射(UBMS)技术沉积了DLC膜,对两种DLC膜抗激光损伤特性进行了研究,测试结果表明,两种技术沉积的DLC薄膜激光损伤阈值分别0.6 J/cm2和0.3 J/cm2,PVAD技术比UBMS技术沉积的DLC薄膜具有更高的抗激光损伤阈值。基于实验研究了薄膜光学常数和表面形态,分析了两种技术制备DLC膜激光损伤特性差异的主要原因。结果表明,采用UBMS技术沉积的DLC膜具有较小的折射率和较大的消光系数,薄膜表面存在较多的疵病和缺陷,这些是其激光损伤阈值较低的主要原因。     

超导Nb膜表面减反膜技术研究

针对单光子探测芯片中超导Nb膜减反的问题,研究了磁控溅射Nb膜折射率光谱特性随Nb膜厚度变化的规律,同时研究了化学气相沉积法制备的SiO₂和SiN_x介质膜的折射率光谱特性。为降低超导Nb膜对633 nm光的反射比,在Nb膜表面设计和制备了SiO₂和SiN_x减反膜。测试结果表明:SiO₂和SiN_x使反射比明显减小,计算结果验证了这一趋势。     

电子束蒸发与磁控溅射制备Al/PI复合薄膜的性能研究

利用磁控溅射法和电子束蒸发法在聚酰亚胺(PI)薄膜基底上沉积了铝功能膜.测试了两种方法薄膜的膜厚、附着力、反射率、折射率和电导率.结果表明,磁控溅射法制备的铝膜的综合性能较电子束蒸制备的铝膜的性能优越.     

一种简单的光学薄膜厚度测量方法

使用紫外可见分光光度计测最光学薄膜,获得透过率图谱或者反射、吸收谱,利用薄膜上下表面光的于涉原理,通过简单计算,就可以方便快捷地估算出薄膜厚度.用磁控溅射法制备了ITO薄膜,使用该干涉法和台阶仪分别测最了膜厚,将结果进行了对比.结果表明,干涉法测量光学薄膜简单、快捷,设备要求不高,实用性强,方法可行.     

非平衡磁控溅射无氢DLC增透膜的研制

非平衡磁控溅射(UBMS)技术近年来得到了广泛地应用.采用该技术制备的类金刚石薄膜(DLC)具有许多独特的性质.本文利用正交实验方法,对非平衡磁控溅射技术制备无氢DLC膜增透膜进行了研究,得到了影响薄膜光学性能的主要因素和最佳的制备工艺.结果表明,非平衡磁控溅射制备的无氢DLC膜具有较宽的光谱透明区,锗基底单面沉积DLC膜,其峰值透射率达到61.4%,接近理论值.     

热反射玻璃镀膜工艺的研究

本文采用直流磁控溅射方法，对氧化不锈钢膜、金属Ｔｉ膜、ＴｉＮ膜和ＴｉＯｘＮｙ膜在不同工艺和不同组合条件下形成的两层膜系热反射镀膜玻璃的光学性能及有关组份进行了测试分析，阐明了该种方法及该种系列工艺条件下镀制热反射玻璃镀膜的性质，提出了此工艺条件镀制两层膜系热反射玻璃镀膜的最佳组合工艺。对有关工业生产中实施工艺技术所存在的问题进行了探讨     

多层介质膜脉冲压缩光栅激光损伤特性研究进展

本文结合国内外研究情况,概括性介绍了用于啁啾脉冲放大系统中的多层介质膜脉冲压缩光栅的激光损伤特性研究进展,包括多层介质膜的损伤、表面浮雕结构的损伤,以及介质膜光栅损伤的影响因素。在关于介质膜光栅激光损伤的影响因素中又分别介绍了槽型结构、制备工艺、激光参数、脉冲数量、热应力和杂质缺陷对其抗激光损伤阈值的影响。最后,从结构设计、制备工艺以及后期处理等方面,介绍了提高多层介质膜光栅抗激光损伤阈值的常用方法。     

氧化锌镓薄膜的制备技术和研究现状

介绍了制备GZO薄膜的各种方法,如磁控溅射法、化学气相沉积法、溶胶-凝胶法、脉冲激光沉积法、喷雾热解法;阐述了这些方法的镀膜原理,并比较了各种工艺的优缺点。综述了GZO薄膜在单层膜领域、复合多层膜领域有机物基底上镀膜领域和薄膜后续退火处理领域的研究现状。提出了产业化过程中需要解决的问题:①制备高密度、高溅射稳定性和导电性优良的靶材;②完善现有镀膜工艺条件;③制备符合不同生产要求的薄膜。     

Optical coatings for deuterium fluoride chemical laser systems

The high-power laser system has brought an interesting challenge to the development of optical coatings. A wide variety of coating specifications that are often contradictory have to be fulfilled. The choices of deposition process as well as coating materials are critical to coating loss, damage threshold, long-term stability, and other optical properties. A number of optical coatings being newly applied to deuterium fluoride laser systems are presented. The 3.8-mum laser reflection coatings with high damage threshold, multichromatic beam splitters, antireflection coatings with widely separated dual-wavelength bands, and 0.55-14-mum wide-band reflective coatings have been developed on substrates such as Si, Mo, fused silica, chemical vapor deposition ZnSe. Superior results have been obtained with ion-assisted deposition and electron-beam evaporation. Approaches to coating design and practical aspects of coating development are also discussed.     

金属表面Sol-gel法制备耐腐蚀陶瓷涂层的研究进展

综述了溶胶－凝胶涂层的成膜原理，制备工艺，比较了溶胶－凝胶法与其它金属陶瓷涂层的制备工艺，讨论了溶胶－凝胶涂层对金属耐磨腐蚀性能，耐磨性能的改进及在腐蚀防护领域中的应用，还对溶胶－凝胶涂层技术的发展的提出了看法。     

Flat-topped broadband rugate filters

A method of creating rugate interference filters that have flat-topped reflectance across an extended spectral region is presented. The method applies known relations from the classical coupled wave theory to develop a set of equations that gives the spatial frequency distribution of rugate cycles to achieve constant reflectance across a given spectral region. Two examples of the application of this method are discussed: a highly reflective coating for eye protection against harmful laser radiation incident from normal to 45 degrees , and a spectral beam splitter for efficient solar power conversion.     

Analysis of optical damage mechanisms in hollow-core waveguides delivering nanosecond pulses from a Q-switched Nd:YAG laser

Hollow-core waveguides consisting of a glass capillary tube with an internal reflective coating are capable of delivering pulse energies of tens of millijoules with improved focusability compared to step index fibers of similar core diameter. We demonstrate the capability of these fibers to deliver high-power Q-switched pulses at the fundamental (1064 nm), second (532 nm), and third (355 nm) harmonics of a Nd:YAG laser, both in terms of peak power and beam quality delivered. In terms of peak power delivery, the primary limitation is the occurrence of bend-induced optical damage to the reflective coating. The damage mechanism and the influential factors are analyzed, in particular, the dependence upon the number of guided modes, core diameter, coating thicknesses, and input polarization alignment.     

哈特曼装置上均方根湍流速度的测量及研究

对哈特曼装置上的粉尘粒子速度及均方根（ｒｏｏｔ－ｍｅａｎ－ｓｑｕａｒｅ,ＲＭＳ）湍流速度进行了测量及研究,获得了哈特曼装置上不同位置粉尘粒子速度、ＲＭＳ湍流速度随时间的变化曲线。粉尘粒子速度采用激光多谱勒测速仪进行测量。文中还对激光测速法及数据处理中ＲＭＳ计算窗口的选取进行了讨论。     

车削铝镜红外高反射膜镀制

在红外光谱系统中使用的车削铝镜上镀制高反射膜时,由于铝镜镜面较柔软,用常规擦拭 清洗的方法易划伤镜面,可以在镀制前利用有机物熏蒸的方法清洗车削铝镜,既溶解清洗了表面附着的油污和灰尘,又保护了铝镜镜面。用该方法清洗后镀制的金膜反射率在近红外波段达到98%以上,膜层牢固,使用效果较好。     

外延薄膜生长的实时监测分析研究

利用反射式高能电子衍射(RHEED)在超高真空中对SrTiO3(100)、LaAlO3(100)、Si(100)单晶基片进行分析,讨论了衍射花样与晶体表面结构的对应关系,计算出表面的晶体学参数,同时采用激光分子束外延技术同质外延生长SrTiO3薄膜，根据RHEED衍射图样及强度振荡曲线实时监控薄膜的生长。     

ITO coated quartz fibers for heat radiative applications

Radiation heat transfer through fibrous materials is very strong at high temperatures (up to 1000 °C). Indium tin oxide (ITO) thin films were sol-gel deposited onto the surfaces of fibers to reduce the radiation heat transfer as radiation reflective coatings. SEM, XRD and FT-IR techniques were used to characterize the microstructure and performance of films. Results show that ITO thin film is uniformly deposited on fibers with a thickness of about 200 nm and can be used to apply a radiative reflective coating. Moreover, the efficiency of radiation reflective properties of films is improved as the annealing temperature increases. Results prove that ITO film is an excellent candidate to reduce the radiation heat transfer as radiation reflective coatings on fibrous materials.     

Optical-gradient antireflective coatings for 157-nm optical lithography applications

We demonstrate an optical-gradient bottom antireflective coating (BARC) film, which can be easily prepared by treating a silicon nitride film with oxygen plasma. The oxygen composition is gradually decreased inside the silicon nitride film. The optical constants of the silicon nitride film are also changed gradually. A reflectance of less than 1% for various highly reflective substrates with high thickness-controlled tolerance has been achieved. The optical-gradient film is also shown to have high thermal stability during the postexposure bake procedure. Results indicate that the optical-gradient-type BARC is suitable in both ArF and F2 excimer lasers for sub-70-nm lithography applications.