Cu电极保护膜层氧化铝的原子层沉积工艺研究

介绍了硅功率器件Cu电极保护钝化膜层氧化铝的制备方法。采用热法ALD工艺和等离子增强ALD工艺在铜上沉积氧化铝薄膜,研究了不同ALD工艺、氧化剂种类、沉积温度和载气对氧化铝膜层质量及铜抗氧化保护效果的影响。结果表明：氧化剂对原子层沉积氧化铝薄膜的质量和铜电极的保护性能起着决定性作用;以臭氧(O₃)作为氧化剂,氧化铝薄膜极易脱落,与铜表面的结合力很差;以氧等离子体(O-)作为氧化剂,铜表面被氧化形成了氧化铜(CuO_x)层;而以水蒸气(H₂O)作为氧化剂,在低温100℃下,得到的Al₂O₃薄膜致密,无明显缺陷,且与铜金属层的结合力较优,对铜抗氧化保护效果良好;当沉积温度高于200℃时,原子层沉积氧化铝薄膜的缺陷明显增多;等离子增强ALD工艺中,当载气为Ar时,所得氧化铝膜厚度不均匀,铜电极发生强烈氧化。     

多层难熔金属的刻蚀工艺技术研究

分析了用反应离子刻蚀(RIE)系统刻蚀多层难熔金属的可行性.研究了用下电极表层为阳极氧化铝的RIE完整刻蚀Au/Pt/TiW/Ti四层金属时氧化铝在Ar/SF6和Ar/CF4等离子体中对聚合作用的影响.通过实验发现,下电极表面的氧化铝经氩离子溅射会参与化学反应并加剧SF6等离子体中的聚合作用,形成大量聚合物.而在CF4等离子体中,下电极氧化铝的影响较小,聚合作用较弱,有利于多层难熔金属的刻蚀.提出了用Ar/CF4/CF4 O2完整刻蚀Au/Pt/TiW/Ti四层金属的三步刻蚀工艺技术.应用三步刻蚀工艺技术刻蚀具有微细图形、多层难熔金属的器件芯片,获得了良好的刻蚀效果.     

铜纳米线阵列显微结构的表征和控制

采用多孔氧化铝(AAO)模板脉冲电沉积法制备了强辐射源用铜纳米线阵列材料,并用扫描电子显微镜(SEM)、能谱(EDS)和X射线衍射(XRD)对其进行了结构袁征.结果表明电沉积的峰值电流强度和辅助阴极可以影响铜纳米线的表面质量、长度分布均匀性和微区长度起伏.减小峰值电流强度,可以明显改善单根铜纳米线的表面质量,但是对铜纳...     

铜纳米线阵列的模板组装

采用电解法溶解多孔阳极氧化铝(PAA)模板的阻挡层,用直流电沉积的方法在模板中组装了铜纳米线阵列.分别用扫描电镜和X射线衍射表征铜纳米线阵列的形貌和晶体结构,用电化学法表征了铜纳米线阵列的电催化性能.结果表明,PAA去阻挡层后,伏安图上出现一个阳极氧化峰.恒电位沉积的铜纳米线直径为22nm,沿(111)晶面择优取向.铜纳米线阵列电极能催化亚硝酸根的还原,其催化电流比本体铜电极上大2倍,峰电位正移80mV.纳米铜阵列电极可用于亚硝酸盐的电化学检测.     

醇盐水解法制备纳米α-Al2O3粉体

以AlCl3为原料,用金属醇盐水解法制备纳米α-Al2O3粉体.采用TEM、X-射线衍射技术分别对所得产品性能进行表征.实验结果表明,所得到的氧化铝为纳米级粉体.X-射线衍射实验证明,产品为α相,用透射电子显微镜(TEM)测得粉体粒径为10～35nm,平均粒度为25nm,颗粒形状呈球形,粒子分散均匀.     

铜基和钢基上无氰仿金镀工艺

一、前处埋1.铜基体的前处理铜制件经过抛光清洗后需作以下处理①化学去油金属清洗剂可选用YB-5(本溪产品)、"817C"去油能(四川自贡产品)等.清     

模板法制备CuO分叉纳米线

通过3次阳极氧化制备具有分叉结构的氧化铝模板,在氧化铝模板的纳米孔洞中,用电化学方法沉积铜纳米线,经过500℃、30h氧化处理,成功制备出具有分叉结构的CuO纳米线.分别用扫描电子显微镜(SEM)、透射电子显微镜(TEM)和X射线衍射仪(XRD)对样品的形貌和晶体结构进行了表征测试.SEM观察结果氧化铝模板的纳米孔洞相互平行、分布均匀,枝干的孔心距约为120nm,枝叉的孔心距约为70nm.TEM观察显示纳米线各部分粗细均匀.样品的XRD分析表明分叉纳米线阵列的晶体结构为CuO.     

图案化金属铜纳米线阵列的制备与表征

采用紫外线光刻技术与电化学沉积相结合的方法,成功制备了不同图案的铜纳米线阵列:一种是圆形图案;另一种是QDU图案.首先利用紫外线光刻技术在多孔阳极氧化铝模板(AAO)生成预设图案,以此作为"二次模板";再利用电化学方法将铜纳米线沉积到"二次模板"的开孔中.扫描电镜(SEM)测试结果表明,大面积、高规整的铜纳米线图案阵列各自独立地立在基底上, 同时,用电子能谱(EDS)分析了铜纳米线的化学成分.透射电镜(TEM)也探测到了铜纳米线的微结构.     

海外文献速递

电　镀2 0 0 1110 1　用电化学方法制备氧化铝 金属复合层Ⅳ实验结果的解释———ＴｏｍａｓｓｉＰ .ＩｎｚｙｎｉｅｒｉａＰｏｗｉｅｒｚｃｈｎｉ,2 0 0 0 (1) :4 0 (波兰文 )解释了前 3部分 (1～ 3)的实验结果 ,分析了形成氧化铝 金属复合层的反应条件 ,提出了化学和电化学反应的可能机理以及伴随的物理过程。阴极过程中发生了沉积金属的电解还原反应 ,并有Ｈ+ 产生 ,阻挡层的电阻降低 ;阳极过程中具有较低电阻的局部区域被重新钝化。这一过程不会降低氧化膜的防护性能 ,讨论了氧化铝 金属复合层的应用前景。2 0 0 1110 2　ＬＹ12铝合…     

氧化铝陶瓷局部活化及选择性化学镀铜的研究

为解决陶瓷表面局部化学镀存在的问题,研制了一种针对氧化铝陶瓷局部化学镀铜前处理用的活化胶,其由具有活化能力的银盐(或钯盐)和粘稠的复合物有机载体组成.将活化胶印于氧化铝陶瓷表面,经500℃高温烧结形成局部活化层后,可直接置于化学镀液中进行镀铜处理,得到与印刷图形一致的局部镀铜层.利用电化学工作站测定样品在化学镀铜溶液中电位随时间的变化情况,考察不同活化条件对Cu2+还原的催化活性,利用SEM/EDS进行表面形貌及成分分析,确定了活化胶中银盐和钯盐的适宜浓度.结果表明,该两种活化胶应用于氧化铝陶瓷表面化学镀铜的活化工艺,可实现敏化活化的一步化,使陶瓷表面局部化学镀工艺流程简化,成本降低,具有较高的实用价值.     

Insertion of triangulated surfaces into a meccano tetrahedral discretization by means of mesh refinement and optimization procedures

In this paper, we present a new method for inserting several triangulated surfaces into an existing tetrahedral mesh generated by the meccano method. The result is a conformal mesh where each inserted surface is approximated by a set of faces of the final tetrahedral mesh. First, the tetrahedral mesh is refined around the inserted surfaces to capture their geometric features. Second, each immersed surface is approximated by a set of faces from the tetrahedral mesh. Third, following a novel approach, the nodes of the approximated surfaces are mapped to the corresponding immersed surface. Fourth, we untangle and smooth the mesh by optimizing a regularized shape distortion measure for tetrahedral elements in which we move all the nodes of the mesh, restricting the movement of the edge and surface nodes along the corresponding entity they belong to. The refining process allows approximating the immersed surface for any initial meccano tetrahedral mesh. Moreover, the proposed projection method avoids computational expensive geometric projections. Finally, the applied simultaneous untangling and smoothing process delivers a high‐quality mesh and ensures that the immersed surfaces are interpolated. Several examples are presented to assess the properties of the proposed method.     

Certification Institutions Expected to Update and Transfer Information on Present Standards

Standards are the basis for production enterprises to organize production, ex-factory inspection, trade (delivery) and technical exchanges, product certification, quality arbitration and supervision.……     

From Industry 4.0 to Research 4.0. Development of High Performance Fibers in the Light of Digitization

We associate a variety of innovations with the term ＂Industry 4.0＂. The pioneer of many 4.0 modifications forms the basisfor the trend towards the integrated di...     

Flow calorimeter for enthalpy increment measurements on condensed gases

A flow calorimeter for enthalpy increment measurements on condensed gases is presented. A better knowledge of the properties of the liquefied natural gas is needed, and therefore a liquid loop has been designed for our flow calorimeter. The fluid loop in the calorimeter is designed in order to avoid the two-phase region, since two phases would give compositional disturbances in the measurements. The avoidance of the two-phase region is made possible by increasing the pressure of the test fluid after the measurement section, then heating the fluid at super-critical pressure past the critical point. Finally, the fluid is throttled to the low-pressure gas state at the inlet condition of the compressor that circulates the fluid. To perform the pressure increase, a new cryogenic pump has been designed. To evaluate the new equipment, measurements were taken on liquid ethane over the temperature range 146–256 K at pressure between 0.9 and 5.1 MPa.     

Refrigerators Enter a New Era of Health Preservation Frestech initiates the establishment of China's first standard for household sterilization refrigerators

On November 30, 2007, the China Association for Standardization (CAS) held a press conference at Beijing Diaoyutai State Guest House. Leaders from the China Household Electric Appliance Research Institute, the China Household Electric Appliance Association, and the China Consumers' Association attended and made speeches.……     

Roman iron and steel: A review

ABSTRACT

The production of ferrous metal increased during the Roman Late Republican period, Principate and Empire. The direct bloomery process was used to extract the metal from its ores using slag-tapping and slag-pit furnaces. The fuel was charcoal and an air blast was introduced by bellows-operated tuyères. Iron formed as a bloom, often as a spongy mass of metal, which contained impurities from the smelting process, including unreacted ore, fuel, slag and fragments from the furnace walls, while the metal was often inhomogeneous with varied carbon contents. Blooms were either smithed directly into bars or ingots or they were broken up, which also allowed the removal of gross impurities and a selection of pieces with similar properties to be made. These could then be forge-welded together and formed into characteristically shaped ingots. Making steel in the furnace seems to have been achieved: it depended on the ore and the furnace and conditions within it. Surface carburization was also carried out. Iron and steel were used extensively in construction and for tools and weapons. Fire welding was often used to add pieces of steel to make the edges of tools and weapons, which could be heat-treated by quenching to harden them.     

Optimum-Simulation von Ernteprozessen

Zusammenfassung Bei der Gestaltung von Ernteprozessen — beispielsweise des Prozesses Mähdrusch, Körnertransport und -abnahme — als transportverbundene Fließarbeitsverfahren mit mindestens zwei verschiedenen Arbeitsmitteln gibt es einen großen Optimierungsspielraum. Solche Prozesse sind mehrstufige Bedienungsprozesse mit gemischter Anordnung der Bedienungseinrichtungen. Außerdem besitzen sie stark ausgeprägte räumliche Aspekte. Es wird vor allem gezeigt, welche Merkmale solcher Prozesse in Simulationsmodellen abgebildet sein müssen, welche Zielgrößen in Abhängigkeit von welchen Einflußgrößen unter Berücksichtigung welcher Prozeßbedingungen ermittelt werden sollten und wie der Bewertungsprozeß zur Ermittlung der gewünschten Informationen gestaltet werden muß.     

A study of centrifugal cast high boron high speed steel

In the present study a high‐boron high speed steel (HSS) roll material was designed. Many expensive alloy elements have been substituted by cheap boron alloy, and high‐boron high speed steel roll has been manufactured by centrifugal casting method. The microstructures, mechanical properties and wear resistance of centrifugal casting high‐boron high speed steel roll have been investigated by optical microscopy (OM), scanning electron microscopy (SEM), and X‐ray diffraction (XRD) analysis, hardness test, impact test and wear test. The results indicated that the solidification microstructures of high‐boron high speed steel roll consisted of M₂(B,C), (W,Mo)₂(B,C), M₃(B,C), M₂₃(B,C)₆ type borocarbides and martensite, a small amount of retained austenite. Borocarbides were continuously distributed over the grain boundary. After quenching from 1050 °C, local broken network appeared in partial borocarbides, and fine secondary borocarbide precipitated from the matrix. After tempering from 525 °C, the amount of precipitated borocarbide increased significantly. After heat treatment, the hardness of high‐boron high speed steel roll excelled 60 HRC, and its impact toughness excelled 8.0 J/cm². The single groove steel rolling amount of high‐boron high speed steel rolls increases by 500% than that of bainite cast iron roll, when the rolls are used in K₁ mill housing of bar mill.     

Thixotropy of Systems with Shear Thinning and Plastic Flow Behavior

The definition of the thixotropy is a decrease in viscosity with time in shear and a subsequent recovery of viscosity after the shear deformation is removed.We ...