微机电系统姿态估计系统算法与仿真

结合陀螺仪、加速度计误差模型,实现了以微机电系统(MEMS)陀螺仪与MEMS加速度计为基础的姿态估计硬件仿真系统,可用于模拟任意噪声强度和安装偏差下三轴捷联惯导系统(INS),即按照给定运动曲线仿真输出陀螺仪与加速度计数据,为设计姿态估计算法提供仿真验证平台.同时,以姿态四元数为状态变量,载体俯仰角与横滚角为观测值设计了基于扩展卡尔曼滤波器(EKF)的姿态估计算法,俯仰角估计误差小于0.04°,横滚角估计误差小于0.05.,偏航角漂移速度0.01(°)/s.     

单天线GPS/陀螺仪组合测姿方法研究

针对低成本惯性测量系统的精度容易受引擎震动、陀螺仪漂移的影响,提出了一种适用于活塞引擎的小型UAV姿态测量方法;此方法整合陀螺仪与单天线GPS进行姿态测量,采用以四元数为基础的扩展卡尔曼滤波(EKF)来进行传感器信息融合;利用陀螺仪测得的角速度更新四元数,使用GPS信息所计算的伪姿态来更新滤波器的测量值;仿真结果表明所提出的方法即使在陀螺仪漂移和伪姿态包含噪声的情况下,也拥有较好的长期和短期精度,提升了姿态测量的精度与可靠度。     

Transition interface for improving the temperature characteristics of micromachined gyroscopes

This paper reports a method for improving the temperature performance of micromachined gyroscopes by using a transition interface between the sensitive structure and the vacuumed package. We analyzed the effect of transition interface on the thermal stress of the micromachined gyroscopes. The temperature dependence of the static capacitance, resonant frequency and zero output were experimentally studied over the range ?40 to 60 °C. A micromachined gyroscope suspended by a slanted beam was adopted in the experiment. In order to identify how the factors affect the temperature performance of the micromachined gyroscope, two types of the introduced gyroscopes were characterized. One was the original gyroscope having no transition interface, and the other was using 2 mm silicon as the transition interface. In contrast to the original gyroscope having no transition interface, the static capacitance and resonant frequency of the gyroscope adopting transition interface had a smaller temperature coefficient, especially for the static capacitance which has more than an order of magnitude improvement. As a result, the bias instability of the gyroscope improved to a higher level over temperature variations. It would provide a convenient and practical method for improving the temperature performance of micromachined gyroscopes.     

Binocular mobile augmented reality based on stereo camera tracking

Mobile augmented reality (AR) applications have become feasible with the evolution of mobile hardware. For example, the advent of the smartphone allowed implementing real-time mobile AR, which triggered the release of various applications. Recently, rapid development of display technology, especially for stereoscopic displays, has encouraged researches to implement more immersive and realistic AR. In this paper, we present a framework of binocular augmented reality based on stereo camera tracking. Our framework was implemented on a smartphone and supports autostereoscopic display and video see-through display in which a smartphone can be docked. We modified edge-based 3-D object tracking in order to estimate poses of left and right cameras jointly; this guarantees consistent registration across left and right views. Then, virtual contents were overlaid onto camera images using estimated poses, and the augmented stereo images were distorted to be shown through a video see-through display. The feasibility of the proposed framework is shown by experiments and demonstrations.     

Design,fabrication and characterization of a low-noise Z-axis micromachined gyroscope

This paper presents the design, fabrication and characterization of a low-noise Z-axis micromachined gyroscope. A triple-mass scheme is adopted to obtain a decoupled mode and matched vibration structure. The gyroscope was fabricated based on a 30-μm silicon on insulator wafer. A DRIE, lag-effect-based, dicing-free process was used to easily and rapidly create the gyroscope devices without requiring normal dicing. The fabricated gyroscopes were vacuum packaged (pressure of approximately 2,000 Pa) and tested. The measured power spectral density of the noises is as low as 17.5 μV/√Hz, and the resolution of the fabricated gyroscope is 7.1 × 10–4°/s/√Hz (2.52°/h/√Hz).     

基于陀螺仪的炮塔角速度测量装置的设计

针对国内炮控系统性能参数测试中对角速度测量的成本较高、操作复杂、时间较长等问题,设计了一种基于MEMS陀螺仪的炮塔角速度高精度测量装置,通过中值滤波、均值滤波以及加权平均融合的方法,抑制了测量噪声等因素对炮塔角速度值的影响.通过在转台和坦克上对该装置进行标定和测试,分析了滤波和融合前后的实验结果,其对炮塔角速度的测量精度可达0.02°/s.该装置操作简单、灵敏度高、成本较低、实用性强,能有效地提高测试精度,节省了人力物力,缩短了测量时间,满足实际应用的需求,具有很高的实用价值.     

Human Arm Motion Tracking by Inertial/Magnetic Sensors Using Unscented Kalman Filter and Relative Motion Constraint

Human motion tracking has many applications in biomedical and industrial services. Low-cost inertial/magnetic sensors are widely used in human motion capture systems to obtain the orientation of the human body segments. In this paper, we have presented a quaternion-based unscented Kalman filter algorithm to fuse inertial/magnetic sensors measurements for tracking human arm movements. In order to have a better estimation of the orientation of the forearm and the upper arm, a constraint equation was developed based on the relative velocity of the elbow joint with respect to the inertial sensors attached to the forearm and the upper arm. Also to compensate for fast body motions, we adapted the measurement covariance matrix in such a way that the filter implements gyroscopes when large accelerations are involved. The proposed algorithm was evaluated experimentally by an optical tracking system as the ground truth reference. The results showed the effectiveness and good performance of the proposed algorithm.     

A liquid rate gyroscope using electro-conjugate fluid

We propose a novel liquid rate gyroscope using an electro-conjugate fluid (ECF). The electro-conjugate fluid is a dielectric fluid that works as a smart fluid, generating a powerful jet flow (ECF jet) when subjected to a high DC voltage. In this study, we introduce this functional fluid into gyroscopes. Although the sensing principle for angular rate is based on that of a conventional gas rate sensor, the proposed gyroscope has a much higher sensitivity because the density of the liquid is generally higher than that of a gas. In addition, the gyroscope is small in size because the ECF jet is generated only with a pair of tiny electrodes. In other words, the pumping part of the proposed gyroscope does not need mechanical moving parts, resulting in an ECF gyroscope more suitable for micro-applications than a gas rate sensor, which requires a pumping mechanism inside. We fabricated a prototype of the liquid rate gyroscope (40 mm × 60 mm × t7 mm) and confirmed its characteristics by experiments. The experimental results confirm the effectiveness of the proposed liquid rate gyroscope. The prototype has a scale factor of ?29 mV/(°/s) with an applied voltage of 4.5 kV, which is 2.2 times more sensitive than the conventional gas rate gyroscope.     

Model and experiment of scale factor acceleration sensitivity of MEMS gyroscope in high acceleration environment

With the development of MEMS gyroscope, acceleration sensitivity is becoming an important factor in application. The acceleration sensitivity would produce an obvious output error, and researchers mainly focus on bias acceleration sensitivity. Yet, in environment of high acceleration and angular rate, it is the scale factor acceleration sensitivity that influences the output most, and there is little research on it. In this paper, scale factor acceleration sensitivity of MEMS gyroscope in high acceleration environment is investigated with our established theoretical model and experimental measurement. Based on our proposed method of measuring the acceleration sensitivity in environment of high acceleration and angular rate, the MEMS tuning fork gyroscope is used for the measurement. The results show that the output error caused by acceleration can be up to − 30.1°/s and the scale factor acceleration sensitivity contributes the most. The coefficient of scale factor acceleration sensitivity is 35 ppm/g under 50g acceleration, and this coefficient increases linearly with acceleration that coincides with theoretical model. Lastly, some suggestions of decreasing scale factor acceleration sensitivity are given. This work is useful for the researchers to improve the performance of acceleration sensitivity of MEMS gyroscope.

     

Research of a novel stereoscopic symmetrical quadruple hair gyroscope

This paper presents a novel stereoscopic symmetrical quadruple hair gyroscope (SSQHG) which is distinguished from the conventional flat structures to achieve better angular rate measurement performance. A symmetrical device architecture is designed to realize the differential detection of Coriolis force, thereby effectively eliminate the common mode interference. Four stereoscopic hair posts are adopted to increase the quality of the lumped inertia masses, so as to enhance the measurement sensitivity. A simplified mass-spring-damper model of idealized SSQHG is established and verified by a modal simulation to synthetic analysis the motion modal. A set of finite element method simulations including modal distribution simulation and harmonic response simulation are implemented to acquire accurate vibration information and to identify the structure parameters quantitatively. A micromachining procedure based on the standard deep dry silicon on glass is adopted to fabricate the proposed micro-gyroscope. The frequency response experiments indicate that the vacuum packaged prototype has a drive mode frequency of 536.2 Hz with a quality factor of 1319.7 and a sense mode frequency of 535.7 Hz with a quality factor of 1334.5. An analog closed-loop driving circuit is designed to realize the self-excited oscillation of SSQHG and an open-loop sensing circuit is designed to extract the Coriolis force signal. The preliminary experimental results demonstrate that the fabricated SSQHG prototype exhibits an angular rate sensitivity of 16.03 mV/°/s and a bias instability of 16.26°/h at room temperature.

     

一种基于电磁感应原理的角位移参数测量方法

针对目前常规弹药弹体研究领域角位移参数大动态和高精度的测量需求,提出了一种基于电磁感应原理的角位移参数测量方法,并设计了相应的角位移传感器.采用感应线圈获取弹体大转速动态范围内切割地磁场的信息,通过边沿检测和脉冲计数相结合的自适应闭环频率跟踪测量算法测量弹体旋转过程中的实时角位移参数信息,并采用周期清零的方式,消除累积误差.半实物和实物仿真试验结果表明:该角位移传感器不仅能够测量大动态范围内的角位移,拓宽测量范围从600°/s~36000°/s,而且完全消除了测量过程中的累积误差.测量误差小于0.220%,累加误差最大只有0.2°/s,实现了对弹药弹体角位移参数的实时、高精度测量,在姿态测量和地磁导航等应用领域具有一定的工程应用价值.     

陀螺仪角速度的检测与处理

对陀螺仪测量自动导航小车的角速度进行了理论分析,并对其角速度的采集作出了说明。针对陀螺仪采集自动导航小车瞬时角速度值时噪声信号往往淹没真实的角速度,对提取自动导航小车的真实角速度提出了几种方案,并通过实验证明其可行性。对小车角速度为45°/s时做了2种滤波,实验证明:2种算法有效地滤去噪声信号,大大降低了淹没角速度的范围。     

Design of micromirror actuator by ionic polymer metal composites

Microactuators for micromirror system have found many applications in various areas including projection displays, optical switches, RF switches and so on. In this paper we demonstrated micromirror actuator using ionic polymer metal composites (IPMC) that is a suitable candidate, since it has many attractive qualities such as durability, aquatic, miniature and light-weighted. Specially, IPMC has extraordinary advantages which are simple bending motion for low driving voltage (1–2 V), low power consumption, and simple structure. The IPMC actuator is made of Nafion NE-1110 (Dupont Co, Ltd., 260 µm thick) layer and electrode (platinum) layers and driven by 1–4 V. The displacement measured vertically is 0.25 mm and tilting angle is 11.3°. The angular motion, which is more than 10°, is a good advantage in the field of display module. This paper shows that the IPMC actuator has enough possibility for other applications.     

虚拟陀螺技术研究

提出了一种基于阵列数据融合的虚拟陀螺技术来提高微机械陀螺的精度.其将多个同类型的陀螺组合形成阵列.采用Allan方差方法提取微机械陀螺的速率随机游走、角度随机游走等噪声,并利用阵列陀螺间同类噪声的相关性建立卡尔曼滤波器的系统噪声方差阵及量测噪声方差阵,设计实现了静态和动态两种最优滤波器对陀螺的输出进行最优估计.实验结果显示:三个偏置稳定性为35 deg/hr的微陀螺经静态、动态滤波后,所形成的虚拟陀螺偏置稳定性分别降至0.15 deg/hr和20deg/hr,表明该虚拟陀螺技术可有效提高微机械陀螺的精度.     

互补滤波算法在四旋翼飞行器姿态解算中的应用

针对四旋翼飞行器飞行过程中的姿态最优估计问题,本着准确、快速的原则,选择了基于陀螺仪、加速度计和电子罗盘的捷联式惯性测量系统.由于这些传感器存在温度漂移和噪声干扰等问题,采用互补滤波算法,通过融合IMU多传感器的数据信号,对测得的姿态数据进行补偿修正,解算出高精度的姿态角.为了验证互补滤波算法的有效性和实用性,通过实际的四旋翼飞行器角度测量系统对互补滤波算法展开研究.结果表明姿态角解算中采用互补滤波算法能够快速、稳定的输出高精度姿态数据,姿态角最大跟踪误差控制在±2°以内,满足四旋翼飞行器飞行控制的要求,成功完成了姿态的最优估计.     

原子陀螺研究进展及展望

原子陀螺是基于量子物理原理和量子技术的新型高性能惯性传感器,在国防、军用以及民用等领域均具有广阔的应用前景,已成为国内外惯性技术领域的研究热点。目前原子陀螺主要分为核磁共振陀螺、无自旋交换弛豫陀螺和原子干涉陀螺,分别对它们的研究历程和现状进行了详细介绍,并对原子陀螺的未来发展趋势方向进行了展望,最后针对国内原子陀螺技术研究提出了一些思考。     

Optimization and analysis of novel piezoelectric solid micro-gyroscope with high resistance to shock

In this paper, a novel piezoelectric solid micro-gyroscope with high resistance to shock is optimized and researched. The operation principle of our novel gyroscope is given and the effect of driving method on reference vibration is analyzed. In addition, performances of the optimal reference vibration (ORV) with different driving methods are compared and the most effective one is obtained for improving the sensitivity. We also propose several novel structures of single-axis and double-axis gyroscopes and the optimized ones are selected which improve the sensitivity further. Moreover, the effective movement ratio is discussed and taken as a standard for choosing the optimized structure. The ORV of the optimized structure is monitored that is crucial for compensating errors. The detecting system is designed and modulation/demodulation method is studied. The simulation results of sensing angular velocity for single-axis and double-axis gyroscopes are 4.530875 and 0.927817 mv/(deg s), respectively.     

基于小波变换的无驱动结构微机械陀螺信号自旋频率的提取

针对一种新型陀螺,它能敏感旋转载体的俯仰、偏航和滚转角速度,敏感信号是一种调幅波信号,载波频率是自旋频率,包络是横向角速度。实际应用中,需要精确提取自旋频率。基于此,提出了一种提取载波频率的新的方法——小波变换构造解析函数法,对自旋频率解算算法进行了理论推导,并通过MATLAB软件对噪声比为30 dB的模拟陀螺调幅波信号进行了自旋频率的提取和误差分析,其中Hilbert变换相对误差为0.033 6,小波变换相对误差为0.017 8。对三轴精密转台实时测试的横向角速度为180°/s的陀螺信号进行了自旋频率的提取和误差分析,其中Hilbert变换相对误差为0.035 9,均方差MSE为7.915 9;小波变换相对误差为0.001 8,均方差MSE为0.293 7。小波变换较Hilbert变换求解自旋频率精度提高二十倍,降噪性能和频率稳定性更好。     

基于六轴MEMS器件姿态测量系统

为了解决噪声和漂移等原因造成的误差不断累积的问题,针对陀螺仪的静态性能以及加速度计的动态性能,提出了一种利用六轴MEMS器件对照相机三脚架的稳定测量系统,介绍了MEMS器件的工作原理,介绍硬件系统和软件系统,完成了基于ADXR450陀螺仪和ADXL355加速度计的检测硬件系统设计,通过传感器获取角速度加速度信息,采用不同的滤波方式对输出结果进行了分析,比较卡尔曼滤波和一阶RC数字滤波;经比较,卡尔曼滤波实时性更好,一阶RC滤波动态响应更好;实验证明,系统静态下更适用于一阶滤波,计算出姿态测量角度误差在0.104°以内,得到理想的姿态信息,能有效地提高检测目标姿态的精度。     

微机械陀螺的仿真与优化

微机械陀螺依靠振动模态频率来测量旋转角速度,通常微机械结构的振动模态相当复杂。虽然已有很多文章研究了如何调节驱动模态和敏感模态以获得最大的敏感度,却很少有人分析微机械陀螺的振动模态。振动模态与陀螺结构的设计参数有极大的关系,这些参数包括陀螺检测质量的尺寸、支撑系统的类型和尺寸,以及用以制造陀螺主体的多晶硅的残余应力。研究了一个静电驱动、电容检测、敏感垂直轴角速度的陀螺(也称平面陀螺)。同时,用有限元法分析法对微机械陀螺的结构进行了分析。