与标准集成电路工艺兼容的硅基光学器件研究

着重介绍了与标准集成电路工艺兼容的硅基光学器件的最新研究进展,包括硅基光发射器、硅基光波导和调制器件、硅基光电探测器和接收机以及硅基光电子集成回路的工作原理、制作工艺和集成技术.与标准集成电路工艺兼容的硅基光电子集成回路能有效地解决电互连芯片内部串扰、带宽和能耗等问题,并能够充分利用现有成熟的集成电路工艺,实现大规模生产,具有广阔的实用前景.     

无源光纤探针在爆轰实验中的应用

利用熔石英在冲击作用下发光的特性开发了一种测量冲击到达时间的无源光纤探针技术。当冲击波阵面到达光纤探针端面时会产生一个瞬时光信号,这个光信号经光纤传输到光电探测器,变换为电信号后由示波器记录,通过判读就可以知道冲击波阵面到达光纤探针的时刻。该探针无需外加信号源,响应时间可达亚纳秒,抗电磁干扰,可对非金属材料进行直接测量。目前,该探针在爆轰实验测试中得到了大量的应用,本文给出了利用光纤探针测量LY12样品中的冲击波速度、电炮加载的Mylar膜飞片的平面性以及GI-920炸药的爆轰波形的实验方法和结果。     

细胞阻抗谱检测芯片的设计及实验

通过一类细胞电阻抗谱微芯片的设计制作及相应观察和测试系统的搭建。提出了一种微量细胞样品活性的新型电学检测方法．一系列的HeLa细胞实验表明,通过细胞悬浮液微滴的电阻抗谱信息不仅能够分辨不同性质的细胞溶液,还能够间接地反映被测细胞当前的生理活性状态．根据电化学和生物系统的特点,建立了一个基于阻抗谱微芯片的等效电路模型,并能够较好地描述实验结果．作为生化传感器,细胞电阻抗谱芯片具有快速、易用等优点,能够广泛地应用于胞内电生理分析、药物筛选等领域．     

大面阵红外探测器冷平台仿真设计与试验

随着线列红外探测器面阵规模越来越大,传统的制冷机与红外探测器单点连接的耦合方式已经无法满足红外探测器芯片温度均匀性的要求.本文对某型号大面阵红外探测器冷平台及其辅助支撑、柔性冷链进行了相关的结构设计、仿真分析与试验验证,设计的冷平台在正弦和随机振动时变形量小,温度均匀性不大于0.919 K,可以满足大面阵红外探测器的工...     

In0.53Ga0.47As PIN光电探测器的温度特性分析

从理论和实验上分析了双异质结In0.53Ga0.47As PIN光电探测器在不同的反向偏置电压下暗电流在甚宽温度范围内的温度特性。结果表明：在反向偏置低压与高压段,产生一复合电流与隧道电流(缺陷隧道电流与带带间隧道电流)分别占主导地位,并呈现出相应的温度特性。还从理论与实验两方面探讨了噪声对探测器R0A的影响,结果表明：在低温段,产生一复合噪声起主要作用,在高温段,俄歇复合噪声起主要作用。     

非对称面电极硅基锗金属-半导体-金属光电探测器的设计

针对金属-半导体-金属(MSM)光电探测器暗电流抑制的机理,本文提出了一种具有非对称面电极结构的硅基锗MSM光电探测器的设计方法,利用ATLAS仿真软件分析了电极结构参数对暗电流的影响,并通过实验得出样品器件的暗电流降低至微安量级。实验结果表明,采用非对称面电极结构设计可以有效抑制硅基锗MSM光电探测器的暗电流,提高器件性能。     

基于聚酰亚胺的神经微电极的制备及特性研究

提出了一种基于非光敏型聚酰亚胺PI-5J的柔性薄膜神经微电极的制作方法,利用常规光刻技术设计和制作出了适合植入的柔性神经刺激微电极阵列,并通过离体实验对其进行了微电极的老化测试和电学特性测试,通过在体实验进行了微电极的生物相容性测试.测试结果显示,制作出的微电极不容易老化,而且具有很好的生物相容性和电学性能,此实验结果...     

2.5Gb/s混合集成光发射OEIC

研制了适用于光纤通信系统的具有完全自主知识产权的混合集成光发射芯片。采用光刻制版技术将采用0．35μm硅CMOS工艺实现的激光驱动器芯片与采用湿法腐蚀、聚合物平坦和lift off等技术实现的激光器芯片制作在一块陶瓷衬底上形成“光电一体”芯片。该芯片工作速率2．5Gb／s,波长1550nm,输出光功率0dBm,消光比5．6dB。     

集成光栅干涉微位移测量方法

介绍了一种新型集成光栅干涉微位移测量方法,设计加工了微位移敏感芯片,并进行了初步的性能测试．敏感芯片利用硅-玻璃键合体硅工艺制作而成,在玻璃上制有金属光栅,光栅上方有由铝梁支撑的可动结构．实验系统由敏感芯片、半导体激光器、光电二极管以及相应的驱动、检测电路组成入射激光照射到光栅上产生衍射光斑,衍射光的光强随可动结构与光栅之间的距离变化,通过测量衍射光强的变化可以得到位移．测试实验结果表明,所制作的集成光栅干涉微位移敏感芯片可实现位移检测,最小可检测的位移约0．2nm．     

视网膜假体的研究进展

根据视觉假体(visual prosthesis)在视觉通路上刺激部位的不同,概括地介绍了以植入微电子芯片为主要手段的视皮层假体、视神经假体和视网膜假体的视觉修复方法,分析比较了这三种视觉假体的利弊和技术难点.重点论述了研究的热点--视网膜假体研究,介绍了从事该热点研究的两大子方向--视网膜下假体(subretinal prosthesis)和视网膜表层假体(epiretinal prosthesis)研究的主要团队的系统研制和植入实验的进展.最后讨论了视觉假体研究所面临的一些如能量供给、神经网络的模拟、器件集成、电极修饰及生物相容性封装等共性问题,充分肯定了视觉假体研究已取得的成绩并展望了其光明的研究前景.     

带有力反馈控制的三明治式微机械干涉加速度计

设计了一种静电力反馈控制的三明治式微机械干涉加速度计,加速度计由敏感芯片、半导体激光器、光电二极管以及相应的驱动电路和反馈控制电路组成.敏感芯片为玻璃-硅-玻璃3层结构,通过硅-玻璃键合体硅工艺制成.硅质量块由铝梁支撑,底部玻璃基片上有金属光栅和电极,通过在质量块和底部玻璃基片上的电极之间施加电压可以调节质量块与玻璃基片间的间隙.入射激光照射到敏感芯片上的光栅上,产生衍射光束,其光强随质量块与下玻璃的间距而变化.反馈控制电路通过测量衍射光强的变化来改变质量块与底电极之间的电压,使得质量块与底部玻璃基片的距离保持为入射光波长1/8的奇数倍,从而提高输出线性度,改善灵敏度,增大量程.     

Characterization of native and adsorbed thin films on silicon detector surfaces: static and kinetic applications

The photoelectric response of a windowless reflective silicon photodetector for obliquely incident polarized monochromatic light is used to characterize the native passivation dielectric thin film at the detector surface. In the presence of adsorption, the generated photoelectric signal becomes a function of the thickness and refractive index of the adsorbed layer. Higher sensitivity is achieved with s-polarized light and at incidence angles> 60 °. Furthermore, the passivation layer can be optimized for a specific adsorption experiment. A sensor of this kind is used to study the adsorption kinetics of H₂O at the detector surface and the results are interpreted by Bruggeman's effective medium theory. If a second detector is introduced to intercept the light reflected by the first detector, and the polarization of the incident light is modulated, analysis of output signals of this two-detector system determines the responsivity, absolute reflectances, and ellipsometric parameters of the first detector surface.     

High-performance photo detector for correlative feeble lighting using pixel-parallel sensing

We have developed a high-performance photo detector, which can detect a feeble projected light with pulse modulation in strong ambient light from other light sources. It is useful to expand the application field of the three-dimensional measurement system using a light-section method. A correlation circuit and a current-mode suppression circuit of constant illumination allow high sensitivity, high selectivity, and adaptive suppression of background illumination. A logarithmic-response circuit is employed to avoid saturation for wide dynamic ranges. The photo detector can quickly detect the modulated light by pixel-parallel sensing. It has advantages for some applications which require availability in various background illuminations and safe light projection for human eyes. The photo detectors have been developed and successfully tested. The high sensitivity under -18-dB signal-to-background ratio (SBR) is realized over the 47.2-dB dynamic range. The minimum SBR is -22.8 dB and the potential frame rate is 2000 fps. In addition, the photo detector shows high selectivity in a multiple-lighting system due to the suppression of orthogonally modulated light.     

累积辐射剂量实时精密检测方法

为了实现射线累积剂量的实时精密测量。本文从探测器输出的电流特性出发，理论上分析了基于闪烁体光电二极管探测器的限时积分法测量射线剂量的可行性。在实际应用中，光电二极管工作在光伏模式（零偏置状态）下，使用有源积分器，在单片机控制下，调节积分时间，达到了射线累积剂量的实时高精度测量。使用限时积分法可以达到实时测量射线累积剂量的目的，其测量误差可控制在。     

A monolithic optical phase-shift detector on silicon

A novel monolithically integrated device used as an optical phase-shift detector is presented. It consists of a diffraction grating etched at the surface of a p-n photodiode fabricated by a process compatible with a standard silicon CMOS technology. When two coherent light beams are collimated toward the surface of the device, the detected optical power generates a current depending on the relative phase between the two incident beams. The operating principle of this detector and the results obtained by finite-difference time-domain modeling are presented. The fabrication process of the first devices is described and the experimental validation of the concept is demonstrated.     

位置敏感探测器统一结构模型的分析

基于统一的二阶RC传输线模型结构,推导出一维和二维PSD光生电势的解析解,并进行了仿真分析。仿真结果表明,一维PSD的光生等势线在没有电极的两边界垂直分布,并能够真实探测到光入射位置;而二维PSD的光生电势分布以光源照射位置为中心向四个电极递减,垂直方向互相影响,在给定参数下光的入射位置与真实值相比有60%的误差。PSD统一结构模型的分析方法和仿真结果对计算激励脉冲响应、短脉冲激励的位置精度分析、光生电势分析提供了一个理论指导。     

Performance of a radiation hard 128 channel analogue front-end chip for the readout of a silicon-based hybrid photon detector

The performance is described of a front-end chip, the SCT128A-LC chip, originally developed for the readout of a silicon based Hybrid Photon Detector (HPD), which is part of an RICH detector to be run in an LHC experimental environment. The relatively low signal charge from single photoelectrons, impinging on the silicon pad sensor, put very stringent requirements on the noise performance of the front-end chip. An absolute noise calibration using X-ray sources and a ²⁴¹Am γ source was performed. It is demonstrated that sufficiently good signal over noise ratio can be obtained to use this chip for the read-out of an HPD in LHC experiments.     

低镜面反射硅镀膜玻璃的微结构调制

通过反射率、透射率参量测试和高分辨电镜分析 ,研究了硅薄膜中微晶粒数量、尺寸和分布对镀膜玻璃镜面反射效果的影响。发现通过一定的热处理工艺可以调整硅膜中的晶粒状况 ,得到硅微晶粒数量众多、分布弥散且晶粒大小在数十至数百纳米的硅 /非晶硅复合薄膜 ,使入射光产生漫散射进而有效降低镜面反射所造成的光污染。     

Phase-modulation fluorometer using a dynode-voltage burst-modulated photomultiplier tube

We propose a new scheme for a phase-modulation fluorometer (PMF) in which a photomultiplier tube (PMT) is used as a photo detector whose gain is modulated sinusoidally with a burst signal of period T and duty ratio 0.5. The carrier wave of the burst modulation signal is synchronized with an incident fluorescence signal. In order to modulate the gain of the PMT, one of the dynodes in the PMT was deeply biased and the burst signal was superimposed. Because the fluorescence signal is converted to a direct current (dc) signal by the PMT internal modulation, we can make the value of the load resistance of the PMT relatively large under the condition tau < or = T/2, where tau is a time constant of a low-pass filter attached to the output of the PMT. The proposed scheme brings about advantages in sensitivity and noise immunity in detecting weak fluorescence in comparison with those of the conventional PMF. The combined technique of the burst modulation of the gain of the PMT and the alternating current (ac) signal detection alleviates the influence of the background light.     

空芯光纤硅太阳能电池制备及光捕获研究

本文提出一种空芯光纤结构硅基太阳能电池,并探讨其制备方法和光捕获性能.依据平面电池受光原理和空芯波导的限光机制提出了空芯光纤硅基太阳能电池结构,采用卷曲柔性平面非晶硅薄膜电池制备出圆筒形空芯光纤硅电池.通过对比研究入射光量一定的条件下平面电池和空芯光纤电池的光生电流和电压值,评估空芯光纤电池的光捕获效果.通过测量不同光入射角度和光照强度下空芯光纤电池的光生电流和电压值,揭示光入射角度和光照强度对空芯光纤电池光捕获性能的影响关系.研究表明,空芯光纤硅基电池能将入射光线限制在波导结构内反复吸收和反射,从而在光捕获性能方面较平面电池有所提升(~19.8%).光线入射角度对空芯光纤电池的光捕获性能有较大影响,在30°~50°入射时可以获得较大的光生电压和电流值.在0~100 000 lux的光照强度范围内,光生电压先随光照度增加而增大,而后逐渐趋于恒定值.通过卷曲柔性平面硅电池获得光捕获效率较高的空芯光纤硅电池是可行的,采用结构简单、光线单次入射吸收较低的单节薄膜电池制备空芯光纤电池有望获得更好的光捕获效率提升效果.