Laser induced photo-detachment of in DC discharge

Determination of the negative ion number density of O2-and O-in a DC discharge of oxygen plasma was made employing Langmuir probe in conjunction with eclipse laser photodetachment technique.The temporal evolution of the extra electrons resulting from the photodetachment of O2-and O-were used to evaluate the negative ion number density.The ratio of O2-number density to O varied from 0.03 to 0.22.Number density of both O2-and O increased with increasing power and decreased as the pressure was increased.Electron number density was evaluated from the electron energy distribution function (EEDF) using the Ⅰ-Ⅴ recorded characteristic curves.Electron temperature between 2 and 2.7 eV were obtained.Influence of the O2(a1△g) metastable state is discussed.     

Comparative Study of Plasma Parameters in Magnetic Pole Enhanced Inductively Coupled Argon Plasmas

Langmuir probe measurements of radio frequency (RF) magnetic pole enhanced inductively coupled (MaPE-ICP) argon plasma were accomplished to obtain the electron number densities and electron temperatures. The measurements were carried out with a fixed RF frequency of 13.56 MHz in a pressure range of 7.5 mTorr to 75 mTorr at an applied RF power of 10 W and 100 W. These results are compared with a global (volume average) model. The results show good agreement between theoretical and experimental measurements. The electron number density shows an increasing trend with both RF power and pressure while the electron temperature shows decreasing trend as the pressure increases. The difference in the plasma potential and floating potential as a function of electron temperature measured from the electrical probe and that obtained theoretically shows a linear relation with a small difference in the coefficient of proportionality. The intensity of the emission line at 750.4 nm due to 2p 1 → 1s 2 (Paschen’s notation) transition closely follows the variation of n e with RF power and filling gas pressure. Measured electron energy probability function (EEPF) shows that electron occupation changes mostly in the high-energy tail, which highlights close similarity of 750.4 nm argon line to n e .     

A novel technique for the measurement of plasma displacement in IR-T1 tokamak

In this paper we present a novel technique based on poloidal magnetic flux for determination of plasma displacement in IR-T1 tokamak. This instrument consists of a two semicircle wires which installed toroidally on inner and outer sides of tokamak chamber and connected with each other. In order to receive the poloidal flux on Last Closed Flux Surface (LCFS); this instrument installed on polar coordinate so as projection of it on midplane lie on LCFS. Really, this instrument receives the difference between poloidal flux on inner and outer sides of LCFS, which we needed in calculating of the Shafranov shift. Main benefits of our proposed instrument are that it is a simple, solid, and also its output is directly related to the Shafranov shift. Based on this technique we determined the plasma position and to compare the result obtained using this method, multipole moments method is also experimented on IR-T1. Results of the two techniques are in good agreement with each other.     

Correlation of Ⅲ/Ⅴ semiconductor etch results with physical parameters of high-density reactive plasmas excited by electron cyclotron resonance

Reactive ion etching is the interaction of reactive plasmas with surfaces. To obtain a detailed understanding of this process, significant properties of reactive composite low-pressure plasmas driven by electron cyclotron resonance(ECR) were investigated and compared with the radial uniformity of the etch rate. The determination of the electronic properties of chlorine-and hydrogen-containing plasmas enabled the understanding of the pressure-dependent behavior of the plasma density and provided better insights into the electronic parameters of reactive etch gases. From the electrical evaluation of I(V) characteristics obtained using a Langmuir probe,plasmas of different compositions were investigated. The standard method of Druyvesteyn to derive the electron energy distribution functions by the second derivative of the I(V)characteristics was replaced by a mathematical model which has been evolved to be more robust against noise, mainly, because the first derivative of the I(V) characteristics is used. Special attention was given to the power of the energy dependence in the exponent. In particular, for plasmas that are generated by ECR with EM modes, the existence of Maxwellian distribution functions is not to be taken as a self-evident fact, but the bi-Maxwellian distribution was proven for Ar-and Kr-stabilized plasmas. In addition to the electron temperature, the global uniform discharge model has been shown to be useful for calculating the neutral gas temperature. To what extent the invasive method of using a Langmuir probe could be replaced with the noninvasive optical method of emission spectroscopy, particularly actinometry, was investigated,and the resulting data exhibited the same relative behavior as the Langmuir data. The correlation with etchrate data reveals the large chemical part of the removal process—most striking when the data is compared with etching in pure argon. Although the relative amount of the radial variation of plasma density and etch rate is approximately ?5%, the etch rate shows a slightly concave shape in contrast to the plasma density.     

Wave Propagation in a Coaxial Glow Discharge

The propagation of electromagnetic radiation from 500 to 4200 Mc in a coaxial cage transmission line passing through a cylindrical discharge chamber is investigated experimentally. Measurements were conducted in argon, helium, and nitrogen gas at pressures between 0.09 mm Hg and 2 mm Hg for a discharge-electromagnetic radiation interaction length of 30.48 cm. The results are compared with theory using a Lorentzian model to describe the electron motion in the presence of the RF field. A graphical method for determining the plasma frequency and electron momentum transfer collision frequency from measurements of the power transmission coefficient at two different radio frequencies is discussed. A comparison is made between the plasma frequency determined by this method and that obtained by the use of a cylindrical Langmuir probe. The electron momentum transfer collision probability is calculated from the RF and probe data.     

Estimation of Neutral Density in Edge Plasma with Double Null Configuration in EAST

In this work, population coefficients of hydrogen’s n=3 excited state from the hydrogen collisional-radiative (CR) model, from the data file of DEGAS 2, are used to calculate the photon emissivity coefficients (PECs) of hydrogen Balmer-α (n=3→2) (Hα). The results are compared with the PECs from Atomic Data and Analysis Structure (ADAS) database, and a good agreement is found. A magnetic surface-averaged neutral density profile of typical double-null (DN) plasma in EAST is obtained by using FRANTIC, the 1.5-D fluid transport code. It is found that the sum of integral Dα and Hα emission intensity calculated via the neutral density agrees with the measured results obtained by using the absolutely calibrated multi-channel poloidal photodiode array systems viewing the lower divertor at the last closed flux surface (LCFS). It is revealed that the typical magnetic surface-averaged neutral density at LCFS is about 3.5×1016m-3.     

Effects of discharge parameters on the micro-hollow cathode sustained glow discharge

The effects of parameters such as pressure, first anode radius, and the cavity diameter on the micro-hollow cathode sustained glow discharge are investigated by using a two-dimensional self-consistent fluid model in pure argon. The results indicate that the three parameters influence the discharge in the regions inside and outside of the cavity. Under a fixed voltage on each electrode, a larger volume of high density plasma can be produced in the region between the first and the second anodes by selecting the appropriate pressure, the higher first anode, and the appropriate cavity diameter. As the pressure increases, the electron density inside the hollow cathode, the high density plasma volume between the first anode and second anodes, and the radial electric field in the cathode cavity initially increase and subsequently decrease. As the cavity diameter increases, the high-density plasma volume between the first and second anodes initially increases and subsequently decreases; whereas the electron density inside the hollow cathode decreases. As the first anode radius increases, the electron density increases both inside and outside of the cavity. Moreover, the increase of the electron density is more obvious in the microcathode sustained region than in the micro cavity region. The results reveal that the discharge inside the cavity interacts with that outside the cavity. The strong hollow cathode effect and the high-density plasma inside the cavity favor the formation of a sustained discharge between the first anode and the second anodes. Results also show that the radial boundary conditions exert a considerably weaker influence on the discharge except for a little change in the region close to the radial boundary.     

Ion source plasma parameters measurement based on Langmuir probe with commercial frequency sweep

Langmuir probe is one of the main diagnostic tools to measure the plasma parameters in the ion source. In this article, the commercial frequency power, which is sine wave of 50 Hz, was supplied on the Langmuir probe to measure the plasma parameters. The best feature of this probe sweep voltage is that it does not need extra design. The probe I-V characteristic curve can be got in less than 5 ms and the plasma parameters, the electron temperature and the electron density, varying with the time can be got in one plasma discharge of 400 ms.     

Automated electron temperature fitting of Langmuir probe I-V trace in plasmas with multiple Maxwellian EEDFs

An algorithm for automated fitting of the effective electron temperature from a planar Langmuir probe I–V trace taken in a plasma with multiple Maxwellian electron populations is developed through MATLAB coding. The code automatically finds a fitting range suitable for analyzing the temperatures of each of the electron populations. The algorithm is used to analyze I–V traces from both the Institute of Plasma Physics Chinese Academy of Sciences’s Diagnostic Test Source device and a similar multi-dipole chamber at the University of Wisconsin–Madison. I–V traces reconstructed from the parameters fitted by the algorithm not only agree with the measured I–V trace but also reveal physical properties consistent with those found in previous studies. Cylindrical probe traces are also analyzed with the algorithm and it is shown that the major source of error in such attempts is the disruption of the inflection point due to both decreased signal-to-noise ratio and greater sheath expansion. It is thus recommended to use planar probes with radii much greater than the plasma Debye length when signal-to-noise ratio is poor.     

Effect of Internal Antenna Coil Power on the Plasma Parameters in13.56 MHz/60 MHz Dual-Frequency Sputtering

The plasma property of a hybrid ICP/sputtering discharge driven by 13.56 MHz/60 MHz power sources was investigated by Langmuir probe measurement. For the pure sputtering discharge, the low electron density and ion flux, the rise of floating potential and plasma potential with increasing power, as well as the bi-Maxwellian distribution of electron en- ergy distributions （EEDFs） were obtained. The assistance of ICP discharge led to the effective increases of electron density and ion flux, the suppression of rise of floating potential and plasma potential, as well as the change of EEDFs from bi-Maxwellian distribution into Maxwellian dis- tribution. The increase of electron density and ion flux, and the EEDFs evolution were related to the effective electron heating by the induced electric field.     

Influence of heating effect in Thomson scattering diagnosis of laser-produced plasmas in air

A state diagnosis of laser-produced plasma in air generated by a 1064 nm pulse laser was investigated by the Thomson scattering(TS) method. The evolutions of the electron temperature and electron density were obtained as a function of the time delay which ranged from300–3200 ns. The heating effect produced by the 532 nm probe beam with different energies on the air plasma at different interaction times was further studied using a time-resolved optical emission spectroscopy technique. The influence of the probe beam on the electron density was found to be negligible, whereas its influence on electron temperature is evident. In addition, the heating effect of the probe beam on the plasma strongly depends on the energy of the probe beam, and gradually weakens with increasing time delay. Our results are helpful for further understanding the TS method and its application in plasma diagnostics.     

Investigations on the time evolution of the plasma density in argon electron-beam plasma at intermediate pressure

The time evolution of the argon electron-beam plasma at intermediate pressure and low electron beam intensity was presented.By applying the amplitude modulation with the frequency of 20 Hz on the stable beam current,the plasma evolution was studied.A Faraday cup was used for the measurement of the electron beam current and a single electrostatic probe was used for the measurement of the ion current.Experimental results indicated that the ion current was in phase with the electron beam current in the pressure range from 200 Pa to 3000 Pa and in the beam current range lower than 20 mA,the residual density increased approximately linearly with the maximum density in the log-log plot and the fitting coefficient was irrelative to the pressure.And then three kinds of kinetic models were developed and the simulated results given by the kinetic model,without the consideration of the excited atoms,mostly approached to the experimental results.This indicated that the effect of the excited atoms on the plasma density can be ignored at intermediate pressure and low electron beam current intensity,which can greatly simplify the kinetic model.In the end,the decrease of the plasma density when the beam current was suddenly off was studied based on the simplified model and it was found that the decease characteristic at intermediate pressure was approximate to the one at high pressure at low electron beam intensity,which was in good accordance with the experimental results.     

A comparison of emissive and cold floating probe techniques for electric potential measurements in rf inductive discharge

A cold floating probe method was compared with the emissive floating probe method in terms of a low-pressure radio-frequency inductive discharge. The dependences of difference between the plasma potential and the floating potential on the electron temperature 1–8 eV, plasma density 10⁹ –10¹² cm⁻³ and magnetic field 100–650 G were obtained. It was demonstrated that the difference between the potentials that obtained by these two methods can differ significantly from the expected value of 5.2 kT_e/e for argon.     

Steady and oscillatory plasma properties in the near-field plume of a hollow cathode

Hollow cathodes serve as electron sources in Hall thrusters,ion thrusters and other electric propulsion systems.One of the vital problems in their application is the cathode erosion.However,the basic erosion mechanism and the source of high-energy ions cause of erosion are not fully understood.In this paper,both potential measurements and simulation analyses were performed to explain the formation of high-energy ions.A high-speed camera,a single Langmuir probe and a floating emissive probe were used to determine the steady and oscillatory plasma properties in the near-field plume of a hollow cathode.The temporal structure,electron temperature,electron density,and both static and oscillation of plasma potentials of the plume have been obtained by the diagnostics mentioned above.The experimental results show that there exists a potential hill (about 30 V) and also severe potential oscillations in the near-plume region.Moreover,a simple 2D particle-in-cell model was used to analyze the energy transition between the potential hill and/or its oscillations and the ions.The simulation results show that the energy of ions gained from the static potential background is about 20 eV,but it could reach to 60 eV when the plasma oscillates.     

Calculating the electron temperature in the lightning channel by continuous spectrum

Based on the theory of plasma continuous radiation,the relationship between the emission intensity of bremsstrahlung and recombination radiation and the plasma electron temperature is obtained.During the development process of a return stroke of ground flash,the intensity of continuous radiation spectrum is separated on the basis of the spectrums with obviously different luminous intensity at two moments.The electron temperature of the lightning discharge channel is obtained through the curve fitting of the continuous spectrum intensity.It is found that electron temperature increases with the increase of wavelength and begins to reduce after the peak.The peak temperature of the two spectra is close to 25 000 K.To be compared with the result of discrete spectrum,the electron temperature is fitted by the O I line and N II line of the spectrum respectively.The comparison shows that the high temperature value is in good agreement with the temperature of the lightning core current channel obtained from the ion line information,and the low temperature at the high band closes to the calculation result of the atomic line,at a low band is lower than the calculation of the atomic line,which reflects the temperature of the luminous channel of the outer corona.     

Microwave method based on curve fitting method for high-precision collision frequency diagnosis

In this work, the results of plasma microwave transmission diagnosis were analyzed. According to the attenuation and phase shift of the electromagnetic wave propagating in the plasma, the electron density and collision frequency of the plasma can be diagnosed. Since part of the electromagnetic wave is reflected or diffracted when propagating in the plasma, and is not absorbed by the plasma, and this part of the attenuation is still included in the measured attenuation, the attenuation is distorted. Therefore, a curve fitting method is proposed to remove the attenuation caused by the plasma reflection, thereby improving the accuracy of the diagnosis of the collision frequency. The calibration effect of this method on plasmas with different electron densities and collision frequencies is analyzed, and a diagnostic frequency band with good calibration results is given. The curve fitting method is verified by experiment and simulation. After adopting the newly proposed method, the diagnosis accuracy of collision frequency can be increased by 30%. This method can be widely used in various types of plasma diagnosis and provides a new idea for plasma diagnosis.     

Fast radial scanning probe system on KTX

A fast radial scanning probe system was constructed for the Keda Torus eXperiment(KTX) to measure the profiles of boundary plasma parameters such as floating potential, electron density,temperature, transport fluxes, etc. The scanning probe system is driven by slow and fast motion mechanisms, corresponding to the stand-by movement of a stepping motor and the fast scanning movement of a high-torque servo-motor, respectively. In fast scanning, the scanner drives the probe radially up to 20 cm at a maximum velocity of 4.0 m s~(-1). A noncontact magnetic grating ruler with a high spatial resolution of 5 μm is used for the displacement measurement. New scanning probe can reach the center of plasmas rapidly. The comparison of plasma floating potential profiles obtained by a fixed radial rake probe and the single scanning probe suggests that the high-speed scanning probe system is reliable for measuring edge plasma parameter profiles on the KTX device.     

Machine learning combined with Langmuir probe measurements for diagnosis of dusty plasma of a positive column

This paper reports the use of machine learning to enhance the diagnosis of a dusty plasma. Dust in a plasma has a large impact on the properties of the plasma. According to a probe diagnostic experiment on a dust-free plasma combined with machine learning, an experiment on a dusty plasma is designed and carried out. Using a specific experimental device, dusty plasma with a stable and controllable dust particle density is generated. A Langmuir probe is used to measure the electron density and electron temperature under different pressures, discharge currents, and dust particle densities. The diagnostic result is processed through a machine learning algorithm,and the error of the predicted results under different pressures and discharge currents is analyzed,from which the law of the machine learning results changing with the pressure and discharge current is obtained. Finally, the results are compared with theoretical simulations to further analyze the properties of the electron density and temperature of the dusty plasma.     

Electrical Characteristics,Electrode Sheath and Contamination Layer Behavior of a Meso-Scale Premixed Methane-Air Flame Under AC/DC Electric Fields

Electrical characteristics of a nozzle-attached meso-scale premixed methane-air flame under low-frequency AC(0-4300 V,0-500 Hz) and DC(0-3300 V) electric fields were studied.I-V curves were measured under different experimental conditions to estimate the magnitude of the total current 10~0-10~2 μA,the electron density 10~(15)-10~(16) m~(-3) and further the power dissipation 0.7 W in the reaction zone.At the same time,the meso-scale premixed flame conductivity10~(-4)-10~(-3) Ω~(-1)·m~(-1) asa function of voltage and frequency was experimentally obtained and was believed to represent a useful order-of magnitude estimate.Moreover,the influence of the collision sheath relating to Debye length(31-98 μm) and the contamination layer of an active electrode on measurements was discussed,based on the combination of simulation and theoretical analysis.As a result,the electrode sheath dimension was evaluated to less than 0.5 mm,which indicated a complex effect of the collision sheath on the current measurements.The surface contamination effect of an active electrode was further analyzed using the SEM imaging method,which showed elements immigration during the contamination layer formation process.     

Breakdown Voltage Research of Penning Gas Mixture in Plasma Display Panel

Paschen law and equations, which ignore the influence of the Penning ionization on the electron ionization coefficient （α）, are always used as the approximation of the breakdown voltage criterion of the Penning gas mixture in current researches of discharge characteristics of the plasma display panel （PDP）. It is doubtful that whether their results match the facts. Based on the Townsend gas self-sustaining discharge condition and the chemical kinetics analysis of the Penning gas mixture discharging in PDP, the empirical equation to describe the breakdown of the Penning gas mixture is given. It is used to calculate the breakdown voltage curves of Ne-Xe/MgO and Ne-Ar/MgO in a testing macroscopic discharge cell of AC-PDP. The effective secondary electron emission coefficients （γeff） of the MgO protective layers are derived by comparing the breakdown voltage curves obtained from the empirical equation with the experimental data of breakdown voltages. In comparison with the results calculated by the Paschen law and the equation which ignore the influence of the Penning ionization on α , the results calculated by the empirical equation have better conformity with experimental data. The empirical equation characterizes the breakdown of the Penning gas mixture in PDP effectively, and gives a convenient way to study its breakdown characteristics and the secondary electron emission behaviors.