A differential interferometric heterodyne encoder with 30 picometer periodic nonlinearity and sub-nanometer stability

A differential interferometric heterodyne encoder with spatially separated input beams was developed to minimize periodic nonlinearities resulting from polarization mixing. The laser beams with different frequencies were delivered by two polarization-maintaining fibers to the encoder head. Under laboratory conditions this encoder demonstrated a system stability of 38 pm (standard deviation) and 100 pm over 30 s and 1 h respectively. In a comparison measurement with a differential heterodyne interferometer, this encoder showed periodic nonlinearities of less than 30pm without any additional correction.     

A new vacuum interferometric comparator for calibrating the fine linear encoders and scales

A new one-dimensional laser interferometric comparator has been developed for the calibration of the fine linear encoders and scales up to 1600 mm. In the comparator, the interferometer is fully arranged in vacuum and the calibration objects are mounted under atmospheric conditions. The Abbe’s principle on the alignment of workpiece with the measuring beam is satisfied in the structure of a long measuring range. A travelling slide table, on which the calibration objects are mounted, is supported on guide rails by the air bearing and is driven through a recirculating ballscrew. The exhaust of the air bearing is guided to the exterior of the booth in which the comparator is placed. The travel of the table is measured by a reference interferometer with a beam path in vacuum shielded by an evacuated metal bellow, so that the effect of refractive index is eliminated. The laser beam is led by a polarization plane maintaining glass fiber from a self-designed stabilised He–Ne laser, which is placed in an adjacency room, to the beam inlet of the main unit. The measurement system can input the interferometer signal by the encoder signal or the scale signal, and input the encoder or scale data by the interferometer signal. The system resolution is approximately 0.8 nm and maximum travelling measurement speed is 20 mm/s at continuous measurement. The uncertainly (k=2) of measurement is approximately 30 nm in linear encoders of 500 mm length and, approximately 40 nm in scales of 500 mm, although it depends on the length and the characteristics of encoders and scales. It is successful such a high accuracy that the uncertainty of measurement system is smaller than 40 nm in encoders of 1 m length.     

Application of blue laser direct-writing equipment for manufacturing of periodic and aperiodic nanostructure patterns

This study presents the novel development of low cost, highly efficient blue laser direct-writing equipment for using mask-less laser lithography to manufacture periodic and aperiodic nanostructure patterns. The system includes a long-stroke linear motor precision stage (X, Y), a piezoelectric nano-precision stage (Y, θz), a 3-DOF (degrees of freedom) laser interferometer measurement system, and a blue laser direct-writing optical system. The 3-DOF laser interferometer measurement system gives the control system feedback for displacement (X, Y, θz) of the equipment. The laser processing equipment consists of a blue laser direct-writing optical head, a field-programmable gate array (FPGA) alignment interface, and an optical head servo controller. The optical head operates at a wavelength of 405 nm. Processing the nanostructures on thermo-reaction inorganic resists with precise control of the laser intensity, taking advantage of the threshold effect to exceed the limitations of optical diffraction, and reduces the nanostructure hole size. The equipment can be used to fabricate various periodic nanostructure patterns, aperiodic nanostructure patterns, and two-dimensional patterns. The equipment positioning accuracy is within 50 nm at a speed of 50 mm/s, and the minimum critical dimension can be achieved about 100 nm or so.     

Application of the continuous wavelet transform in periodic error compensation

This paper introduces a new discrete time continuous wavelet transform (DTCWT)-based algorithm, which can be implemented in real time to quantify and compensate periodic error for constant and non-constant velocity motion in heterodyne displacement measuring interferometry. It identifies the periodic error by measuring the phase and amplitude information at different orders (the periodic error is modeled as a summation of pure sine signals), reconstructs the periodic error by combining the magnitudes for all orders, and compensates the periodic error by subtracting the reconstructed error from the displacement signal measured by the interferometer. The algorithm is validated by comparing the compensated results with a traditional frequency domain approach for constant velocity motion. The algorithm demonstrates successful reduction of the first order periodic error amplitude from 4 nm to 0.24 nm (a 94% decrease) and a reduction of the second order periodic error from 2.5 nm to 0.3 nm (an 88% decrease). The algorithm also reduces periodic errors for non-constant velocity motion overcoming limitations of existing methods.     

A signal interpolation method for Fabry–Perot interferometer utilized in mechanical vibration measurement

In this investigation, a self-developed signal processing method for Fabry–Perot interferometer is proposed which can be utilized for high-speed dynamic displacement measurements, e.g. mechanical vibration measurements. The lookup table (LUT) integrated with the interference intensity equation has been employed for the interpolation processing of interference signals. With the aid of this method, the interpolation error has been reduced by 40% in comparison with that resulting from the commercial sinusoidal signal processing module. By operations of Fast Fourier Transform (FFT), the displacement measurement distribution can be converted into the frequency spectrum diagram. The interpolation resolution of the proposed interferometric displacement measurement system is about 0.1 nm. Experimental results demonstrate that this interferometer system is available for measuring frequencies till 2 kHz where its corresponding amplitude is 0.15 μm.     

International comparison of volume measurement for a 1 kg silicon sphere between KRISS and NMIJ

1 kg single-crystal silicon spheres are presently used as primary density standards in many countries. The absolute density of the spheres is determined from the measurements of their mass and volume in conformity with the definitions of the SI base units. Since the mass of the spheres is almost 1 kg, a mass comparison with the prototype of the kilogram can be performed with very low uncertainty. Absolute volume measurements for the spheres therefore have a crucial role in realizing a reliable density traceability system. To confirm the reliability of the volume measurement, the volume of a silicon sphere was measured independently using optical interferometers at the Korea Research Institute of Standards and Science (KRISS, Korea) and the National Metrology Institute of Japan (NMIJ, Japan). An optical interferometer with an etalon scanning system was used at KRISS. On the other hand, an optical interferometer with an optical frequency scanning system was used at NMIJ. The volume was measured at 20 °C and 0 Pa, and the results are in agreement with each other within their uncertainties. Details of the two interferometers and the comparison results are described.     

Linear encoder based low frequency inertial sensor

In this article, we present a novel concept of inertial sensor, based on a linear encoder. Compared to other interferometric sensors, the encoder is much more easy to mount, and the calibration more stable. A prototype has been built and validated experimentally by comparison with a commercial seismometer. It has a resolution of about 10?pm/√Hz. In order to further improve the resolution, two concepts of mechanical amplifiers have been studied and compared. One of them is shown to be extremely promising, provided that the amplifier does not stiffen the sensor.     

Calibration of linear encoders with sub-nanometer uncertainty using an optical-zooming laser interferometer

The nonlinear errors of high-precision linear encoders were calibrated by using a nanometer-length calibrator that was based on the optical-zooming laser interferometer with an optical frequency comb. A transmission-type linear encoder and a reflection-type linear encoder were calibrated, and the cyclic nonlinear errors were evident. The magnitudes of the observed cyclic errors were 0.1 nm and 0.2 nm, respectively, and the best calibration uncertainties were 0.55 nm (k = 2). A traceable calibration service for linear encoders with the best calibration uncertainty in the sub-nanometer range has started based on this work.     

Improvement and validity of shock measurements using heterodyne laser interferometer

The improvement and validity of shock measurements using only the laser head (heterodyne laser interferometer) of a commercial laser Doppler vibrometer was investigated by comparing acceleration waveforms measured by a homodyne laser interferometer with those measured by a heterodyne laser interferometer. The acceleration waveforms were generated from the displacement waveforms obtained with a reference quadrature homodyne laser interferometer by applying a numeric differentiation process twice. The differences between the two acceleration waveforms were found to be small with the measurement uncertainty in case of high acceleration level. In a further investigation, the accuracy of the shock measurements taken by the homodyne and heterodyne laser interferometers were compared in computational simulation. The results indicated that the accuracy of the heterodyne laser interferometer was superior to that of the homodyne laser interferometer.     

小型编码器动态精度检测的安装误差控制

研究了小型编码器动态检测过程中由编码器与基准编码器轴系中心线不完全重合产生的偏角导入的安装误差,以便提高编码器检测装置的准确性和可靠性。分析了安装误差对被检编码器检测精度的影响,推导出了存在安装偏角时引入的安装误差公式及其控制范围公式。为了使编码器的动态检测能准确地反映编码器的实际精度,给出了最大偏角值α_(max)及高度差D_(max)的允许范围。使用现有21位检测装置对15位被检编码器进行了检测实验,分别对安装良好、小偏角和大偏角情况下的测量结果和安装误差曲线进行了比较和分析。结果表明:检测15位编码器时,将安装偏角值控制在0.36°以下可满足动态精度检测要求。本文提出的误差公式及控制方法可以运用在不同类型、不同精度的编码器检测过程中,对提高小型光电编码器动态检测的精度和可靠性很有意义。     

An evaluation of a modulated laser encoder

This paper introduces a new method of interpolation for sub-nanometer-resolution linear encoders. This method, called SPPE (scanning position probe encoder), uses high-order harmonics information obtained by a sinusoidal scanning pickup located on a periodic grating surface. The proposed encoder uses a current-modulated laser diode with diffractive grating optics. Since the electrical current changes the laser-diode wavelength, the interference light intensity is modulated as a sinusoidal scanning pickup on the scale grating. Phase-detection circuits can decode the position information in the pickup signal by using phase-locked loop techniques. The decoder achieves an interpolation rate of over 1/40,000 with interpolation errors of less than ±1 nm. A new interpolation-error measuring system was developed for the encoder. Finally, the evaluation results reveal that the presented encoder shows both high resolution and strong robustness.     

High-accuracy displacement metrology and control using a dual Fabry-Perot cavity with an optical frequency comb generator

A displacement metrology and control system using an optical frequency comb generator and a dual Fabry-Perot cavity is developed with sub-nm accuracy. The optical frequency comb generator has expanded the displacement measurement range and the dual cavity system has suppressed the environmental fluctuation. We evaluated the absolute uncertainty of the developed displacement measurement system to be approximately 190 pm for the displacement of 14 μm and the accurate displacement control using a phase-locked loop was demonstrated with a resolution of approximately 24 pm.     

Validation of a single fibre-fed heterodyne laser interferometer with nanometre uncertainty

In this paper the validation of a fiber-fed heterodyne laser interferometer with nanometre uncertainty is presented. The achievable displacement measurement uncertainty is investigated for different polarisation maintaining fibres used in these interferometers. Measurement results are shown for both a range of m as well as a range of 300 mm. It is shown that a (selected) PM-fibre with an extinction ratio of 1:1650 and the use of an external reference allows realising a fibre-fed laser interferometer able to measure displacements with the same uncertainty as a laser interferometer system without fibre. Tests were performed with fibres ranging in length up to 50 m.     

Intersatellite laser ranging with homodyne optical phase locking for Space Advanced Gravity Measurements mission

In this paper, we present the scheme and the preliminary results of an intersatellite laser ranging system that is designed for the Earth's gravity recovery mission proposed in China, called Space Advanced Gravity Measurements (SAGM). The proposed intersatellite distance is about 100 km and the precision of inter-satellite range monitoring is 10 nm/Hz(1/2) at 0.1 Hz. To meet the needs, we designed a transponder-type intersatellite laser ranging system by using a homodyne optical phase locking technique, which is different from the heterodyne optical phase-locked loop used in GRACE follow-on mission. Since an ultrastable oscillator is unnecessary in the homodyne phase-locked loop, the measurement error caused by the frequency instability of the ultrastable oscillator need not be taken into account. In the preliminary study, a heterodyne interferometer with 10-m baseline (measurement arm-length) was built up to demonstrate the validity of the measurement scheme. The measurement results show that a resolution of displacement measurement of about 3.2 nm had been achieved.     

一种新型光学编码器

光学编码器是长度和角度测量最常用的传感器,两种传统光学编码器:绝对式和增量式光学编码器的光学图案、位置编码原理和信号处理电路各具特色,随着科学技术的发展,一种新型光学编码器方案:准绝对式编码器,继承了二者的优点,根据其串行位置编码原理,借助计算机辅助设计,获得了全周100个位置的编码方案,设计了相应的准绝对式编码器;通过与两种传统编码器特点的比较,突出了准绝对式光学编码器的显著特点,指明了其未来良好的应用和发展前景.     

Compact and inexpensive iodine-stabilized diode laser system with an output at 531 nm for gauge block interferometers

A compact and inexpensive iodine-stabilized diode laser system with an output at 531 nm has been applied to long gauge block measurements. Although the optical frequency of the output beam was widely modulated (modulation width of ∼22 MHz), the coherence length and interference phase stability are sufficiently long and high, respectively, for the interferometric measurement of long gauge blocks of up to 1000 mm in length. The effective uncertainty of laser frequency in the interferometric measurement was theoretically and experimentally confirmed to be less than 10⁻⁹.     

A motorized 5 m tape comparator for traceable measurements of tapes and rules

A motorized 5 m tape comparator was constructed in TUBITAK UME for calibration of tapes and rules up to 5 m length in one set-up and further lengths in multiple set-ups. The system is a practical development and provides a cost effective solution for calibration of tapes in which the highest grade’s accuracy requirement in OIML R35-1 e.g. is 600 μm for 5 m length and 1100 μm for 10 m length. It is mainly composed of 6 m rail system, mechanical parts, optical units and an integrated 6 m incremental linear encoder as a reference measurement axis for traceable measurements. The rails are kinematically located on a heavy marble construction and a motorized carriage, which employs a camera for probing of the scales on the tapes, is moved along the rails during the measurement. The image of the scale taken by the camera is viewed on the monitor screen together with the running software. The operator can perform the probing process by simply moving the carriage over the measured scales (tapes or rules) using a joystick. The carriage movement is measured by the incremental linear encoder previously calibrated by a laser interferometer and the software automatically takes the measurement results from the incremental linear encoder, applies correction values previously defined and determines the length of the tapes and rules as well as deviations from nominal lengths. The estimated expanded uncertainty of the steel tape measurement is U = 54 μm in one set-up (for 5 m length) and U = 77 μm in two set-ups (for 10 m length) at the confidence level of approximately 95%. Uncertainty budget for calibration of the device itself and for calibration of the test tapes are explained in detail. The results of extensive experimental work and analysis are provided by demonstrating application of science and technology of measurement and instrumentation. Investigations for long term stability of the system are given with the reported test results for the years of 2003-2011 and participated intercomparison results to validate the device scientifically are illustrated.     

Verification of the positioning accuracy of industrial coordinate measuring machine using optical-comb pulsed interferometer with a rough metal ball target

An optical-comb pulsed interferometer was developed for the positioning measurements of the industrial coordinate measuring machine (CMM); a rough metal ball was used as the target of the single-mode optical fiber interferometer. The measurement system is connected through a single-mode fiber more than 100 m long. It is used to connect a laser source from the 10th floor of a building to the proposed measuring system inside a CMM room in the basement of the building. The repetition frequency of a general optical comb is transferred to 1 GHz by an optical fiber-type Fabry–Pérot etalon. Then, a compact absolute position-measuring system is realized for practical non-contact use with a high accuracy of measurement. The measurement uncertainty is approximately 0.6 μm with a confidence level of 95%.     

Development of a measuring method for several types of programmed tool paths for NC machine tools using a laser displacement interferometer and a rotary encoder

Many circular motion measuring methods for NC machine tools have been proposed, however, the drawback common to many of these methods is the restriction on the radius size due to the short measuring range of the displacement transducers used. Moreover, most of these measurement tools are specialized, and can only perform circular test path measurements. A circularity test method using a laser displacement interferometer and a rotary encoder has been developed. The measuring method features a much longer range of motion than ordinal circular test methods such as the double ball bar (DBB) method and, therefore, the radius restriction on these measurements is greatly reduced. Moreover, this measuring system can also be used for the evaluation of positioning accuracy and other more complex test paths.

The proposed device consists primarily of a laser displacement interferometer and a rotary encoder. The holders for the interferometer head and the retroreflector are connected with a stainless steel rod. The retroreflector holder has a synthetic resin linear bearing allowing it to move relative to the interferometer head so that both optical components are always facing each other. The laser interferometer measures the change in distance between the interferometer head and the retroreflector, and the rotary encoder measures the rotation angle of the stainless steel rod.

In this paper, the background, measuring principle and apparatus structure are briefly described. The experimental setup is also presented. The apparatus was employed in several measuring experiments, including circularity tests for a vertical machining center. The results from these experiments support the validity of this measurement apparatus.