基于MEMS工艺的半导体电阻式气敏元件的研究

介绍了半导体电阻式气敏元件工作原理,设计了一种基于MEMS工艺的薄膜气敏元件结构,此结构以Si3N4/SiO2/Si3N4复合薄膜作为支撑隔热层,蜿蜒状多晶硅作为加热层,梳状Ag电极作为气敏薄膜信号电极,SiO2作为加热层与Ag电极的绝缘层,并在SiO2绝缘层上刻蚀通孔形成加热层与金属互连。该结构具有通用性,对不同气敏特性的材料均适用,且易于改进为组合结构或阵列结构。最后,对其工艺进行了阐述。     

半导体气敏元件的结构及制作工艺

本文对不同类型气敏元件的结构和制作工艺进行了分析对比。并总结归纳出各自的性能特点。实验证明。气敏元件的制作工艺是影响元件性能的至关重要的因素。对元件结构和制作工艺的深入探讨。有助于我们开发性能更加优良的气敏元件。     

RPCVD SnO_2薄膜气敏元件初探

本文介绍用等离子体激活化学气相淀积(RPCVD)方法在平板陶瓷基片上淀积纯SnO_2,得到稳定性好,工作温度低及灵敏度高的薄膜气敏元件。研究了该元件对H_2、C_2H_5OH,LPG 及CO 等气体的气敏效应,以及元件的稳定性和湿敏特性。提出了采用分子筛选膜的多层结构来改善选择性的设想。与烧结型元件相比,肯定了薄膜型元件是一种很有希望的气敏元件。     

室温气敏型Fe2O3纳米膜的制备及表征

针对传统Fe2O3气敏元件工作温度高、响应时间长等缺点,采用分析纯FeCl3·6H2O和乙醇为主要原料,以AI2O3陶瓷片为基底,利用溶胶凝胶法制备了Fe2O3纳米膜及气敏元件.利用XRD(X射线衍射)、AFM(原子力显微镜)对纳米膜的结构及形貌进行了表征,结合Fe2O3纳米膜的形成机理,主要讨论了镀膜次数对薄膜结构、性能的影响;研究了薄膜元件的阻温特性及室温气敏性能.结果表明:镀膜20次后,Fe2O3颗粒粒径约为20～30 mn,镀膜30次后,纳米膜平整、均匀、无裂纹;室温下薄膜元件便对H2CH4有一定的气敏效应,响应时间小于3s,灵敏度随气体浓度变化呈线性关系.     

一种检测乙醇浓度的气敏传感器的制作

在汽车电子行业，乙醇气敏传感器可用来检测司机的酒精含量，避免事故的发生。因为二氧化锡（SnO2）具有较高的灵敏度、且最高灵敏度对应的工作温度较低、电路简单、造价低廉、使用方便等特点。基于薄膜工艺开发了硅基二氧化锡薄膜为感应薄膜的乙醇气敏传感器，介绍了乙醇气敏传感器的工作原理，在比较两种薄膜结构的基础上，深入探讨硅基二氧化锡薄膜制作工艺，并对薄膜性能进行了定量分析，为乙醇气敏传感器制作提供了一种好的思路。     

低功耗烧结气敏元件制备和气敏特性研究

未经掺杂的金属氧化物半导体气敏传感器通常灵敏度很高，但选择性较差。为提高选择性和一致性，设计了一种特殊结构的低功耗SnO2烧结气敏元件的制备方法，测试了SnO2烧结气敏元件的气敏特性。制备的SnO2烧结气敏元件在40mW的加热功率条件下，100ppm的CO气氛中灵敏度达到3，响应时间仅为4s；在180mW的加热功率条件下，对氢和碳氢化合物（如CH4和LPG）敏感。这类低功耗烧结气敏元件选择性和一致性好，有望用于室内煤气泄漏检测等场合。     

基于ARM的高阻气敏传感器测试电路

将ARM7应用到气敏传感器中,利用其强大的数据计算处理能力及控制能力,结合气敏薄膜材料的高阻值特点,设计出了显示气敏元件阻值及其所处气体浓度的测试电路。该电路以LPC2131实时监测电源电压,自动调整占空比,实现对温度的准确控制,并测量气敏薄膜的电阻。经气体浓度和元件阻值的校准后,电路可显示被测气体浓度,同时提供一个友好的用户界面,并具备报警功能,实现了智能气敏传感器的测量电路。完全满足气敏测试需要,电阻的测量精度达到±0.2%。     

气敏元件温漂特性的电路补偿技术

介绍了一种气敏元件温漂特性的电路补偿原理及补偿技术。该技术可以对常见气敏元件的温漂特性进行有效地补偿，从而使整机获得较高的热稳定性     

新型半导体n—n结构高选择性乙醇气敏元件

】报道了一种基于气敏元件互补反馈和互补增强原理的新型半导体ｎ－ｎ结构高选择性乙醇气敏元件,该新型气敏元件具有高的选择性,同时还有好的热稳定性、高的灵敏度和抗湿度干扰能力。     

硅微热板气体传感器应力调节系统设计与仿真

将微热板与静电梳齿执行器结合,设计出一种恒温加热状态下调节气敏薄膜(SnO_2)应力的系统结构。采用有限元软件(COMSOL Multiphysics)仿真分析了不同温度下器件的形变、气敏薄膜中的应力分布及其调节范围。仿真结果表明,气敏薄膜中的应力随着静电梳齿执行器驱动电压的升高而下降,成功实现对气敏薄膜中应力分布的调节,该结构可用于应力对薄膜气敏特性影响的研究。     

Minimal Realization of Linear Graph Models for Multi-physics Systems

An engineering system may consist of several different types of components,belonging to such physical"domains"as mechanical,electrical,fluid,and thermal.It is t...     

INTEGRAL EQUATION METHOD＇S APPLICATION IN HOLE-EDGE STRESS OF COMPOSITE MATERIAL PLATE WITH DIFFERENT SHAPED HOLES

The strength of composite plate with different hole-shapes is always one of the most important but complicated issues in the application of the composite material. The holes will lead to mutations and discontinuity to the structure. So the hole-edge stress concentration is always a serious phenomenon. And the phenomenon makes the structure strength decrease very quickly to form dangerous weak points. Most partial damage begins from these weak points. According to the complex variable functions theory, the accurate boundary condition of composite plate with different hole-shapes is founded by conformal mapping method to settle the boundary condition problem of complex hole-shapes. Composite plate with commonly hole-shapes in engineering is studied by several complex variable stress fimction. The boundary integral equations are founded based on exact boundary conditions. Then the exact hole-edge stress analytic solution of composite plate with rectangle holes and wing manholes is resolved. Both of offset axis loadings and its influences on the stress concentration coefficient of the hole-edge are discussed. And comparisons of different loads along various offset axis on the hole-edge stress distribution of orthotropic plate with rectangle hole or wing manhole are made. It can be concluded that hole-edge with continuous variable curvatures might help to decrease the stress concentration coefficient; and smaller angle of outer load and fiber can decrease the stress peak value.     

Short-Term Relay Quality Prediction Algorithm Based on Long and Short-Term Memory

The fraction defective of semi-finished products is predicted to optimize the process of relay production lines, by which production quality and productivity ar...     

End-to-End Multiview Gesture Recognition for Autonomous Car Parking System

The use of hand gestures can be the most intuitive human-machine interaction medium.The early approaches for hand gesture recognition used device-based methods....     

Non-monotonic material contrast in scanning ion and scanning electron images

30 keV Ga⁺ focused ion beam induced secondary electron (iSE) imaging was used to determine the relative contrast between several materials. The iSE signal compared from C, Si, Al, Ti, Cr, Ni, Cu, Mo, Ag, and W metal layers does not decrease with an increase in target atomic number Z₂, and shows a non-monotonic relationship between contrast and Z₂. The non-monotonic relationship is attributed to periodic fluctuations of the stopping power and sputter yield inherent to the ion–solid interactions. In addition, material contrast from electron-induced secondary electron (eSE) and backscattered electron (BSE) images using scanning electron microscopy (SEM) also shows non-monotonic contrast as a function of Z₂, following the periodic behavior of the stopping power for electron–solid interactions. A comparison of the iSE and eSE results shows similar relative contrast between the metal layers, and not complementary contrast as conventionally understood. These similarities in the contrast behavior can be attributed to similarities in the periodic and non-monotonic function defined by incident particle–solid interaction theory.     

Application of Feature Extraction through Convolution Neural Networks and SVM Classifier for Robust Grading of Apples

This paper proposes a novel grading method of apples,in an automated grading device that uses convolutional neural networks to extract the size,color,texture,an...     

分布动态载荷识别的抗噪处理

针对正交多项式频域法在用多种响应对矩形薄板进行载荷识别中抗噪性较差的问题,综合运用平均法、矩阵预处理和奇异值截断法等方法对之进行改善,并引入空间映射的思想,将该方法的应用范围拓展为复杂的模型.利用仿真算例,证实了该方法具有较好的抗噪性.     

基于MELTAC-N平台的核电厂安全级DCS环网研究与测试

针对工程实践中环网通讯相关问题的处理缺乏理论基础及国产化安全级DCS平台的开发缺乏成熟经验借鉴问题,对基于MELTAC-N平台核电厂安全级DCS环网的软硬件实现进行了研究。提出了安全级DCS环网双环网冗余设计、光切换开关设计等硬件设计方法,以及以RPR协议为基础,采用全数据收发策略的软件设计方法。在CPR1000安全级DCS平台上对安全级DCS环网的可靠性及实时性进行了评价,并进行了容错能力、响应时间及响应时间稳定性测试验证实验。结果表明,基于MELTAC-N平台安全级DCS环网软硬件设计具有较好的容错能力及响应时间稳定性。     

The laboratory simulation of abrasive wear

Abrasive wear has long been recognised as one of the most potentially serious tribological problems facing the operators of many types of plant and machinery; several industrial surveys have indicated that wear by abrasion can be responsible for more than 50% of unscheduled machine and plant stoppages. Locating the operating point of a tribological contact in an appropriate operational ‚map’︁ can provide a useful guide to the likely nature and origins of the surface degradation experienced in use, though care must be exercised in choosing the most suitable parameters for the axes of the plot. Laboratory testing of materials and simulations of machine contacts are carried out for a number of purposes; at one level for the very practical aims of ranking candidate materials or surface hardening treatments in order of their wear resistance, or in an attempt to predict wear lives under field conditions. More fundamentally, tests may be aimed at elucidating the essential physical mechanisms of surface damage and loss, with the longer term aim of building an analytical and predictive model of the wear process itself. In many cases, component surface damage is brought about by the ingress of hard, particulate matter into machine bearing or sealing clearances. These may be running dry although, more usually, a lubricant or service fluid is present at the interface. A number of standardised wear test geometries and procedures have been established for both two- and three-body wear situations, and these are briefly described. Although abrasive wear is often modelled as following an ‚Archard’︁ equation (i.e. a linear increase in material loss with both load and time, and an inverse dependence on specimen hardness) both industrial experience and laboratory tests of particularly lubricated contacts show that this is not always the case: increasing the hardness differential in an abrasively contaminated lubricated pair may not always reduce the rate of damage to the harder surface.     

ANGULAR DISTORTION ALLOWABLE VALUE AND ASSESS METHOD OF WELD ON COKE TOWER

A graph as the new engineering method for estimate the safety of bulging deformation of coke tower is proposed. Through stresses analysis of circumferential weld of coke tower and comparing the stresses produced by pressure with heat stress of steady state, residual stress, bending stress produced by both itself weight and wind loads, it showed that the stresses produced by pressure on the angle distortion are the main factor of equivalent stress of the combined stress. After comparing four kinds of stress controlling conditions, the relation to stress with depth of angular distortion, grade of curvature of angular distortion and half of region of angular distortion has been inferred. Graph of deformation allowable value of coke tower for different condition by angular distortion and half of region of angular distortion has been plotted. The five steps for its engineering use have been explained. The lighter the grade of curvature is, the larger of bulge allowance, may be, and the bigger of depth of angular distortion may pose too. For the coke tower with a popular structure of Dg 5 400 mm×28 mm, the result by graph is nearly more than the result of two formulas formed by other research, the error is less than 7.0%. But, the graph can be easily applied to different size of angular distortion.